CN109746803A - A kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar - Google Patents

A kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar Download PDF

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Publication number
CN109746803A
CN109746803A CN201910236177.4A CN201910236177A CN109746803A CN 109746803 A CN109746803 A CN 109746803A CN 201910236177 A CN201910236177 A CN 201910236177A CN 109746803 A CN109746803 A CN 109746803A
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grinding
crystal bar
main shaft
semiconductor crystal
high efficient
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CN201910236177.4A
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CN109746803B (en
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戴鑫辉
徐公志
解培玉
郭世峰
乔石
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Qingdao Gaoce Technology Co Ltd
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Qingdao Gaoce Technology Co Ltd
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Abstract

The invention discloses a kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar, the grinding mechanism includes the identical grinding and feeding component of two structures, two grinding and feeding components are in same plane opposite but asymmetric setting, grinding and feeding component includes vertical motion assemblies, main shaft rotary components and traverse feed component, main shaft rotary components include main shaft rotating motor, transmission shaft, bearing housing and transfer panel, one end of transmission shaft and the output end of main shaft rotating motor are connected by shaft coupling, the other end is connect with transfer panel, grinding wheel is installed on transfer panel, main shaft rotary components, which can slide up and down, to be installed in vertical motion assemblies, vertical motion assemblies can be installed on traverse feed component along what two opposite directions of grinding and feeding component slidably reciprocated.The grinding mechanism can control grinding wheel and move in the horizontal direction and the vertical direction, realize that the rolling grinding to different-diameter crystal bar, the face OF are ground.

Description

A kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar
Technical field
The present invention relates to semiconductor crystal bar processing technique fields, more particularly to a kind of double bistrique high efficient mills of semiconductor crystal bar Cut mechanism.
Background technique
Semiconductor crystal bar needs to carry out crystal bar rolling grinding, the face OF grinding (or the grinding of V slot) before slice, and is ground Accuracy tolerance is required in 0.04mm or less.The wheel grinding position that semiconductor crystal bar is used when carrying out rolling grinding and the face OF is ground Difference is set, uses edge on grinding wheel when carrying out rolling grinding to crystal bar, uses center position of grinding wheel when carrying out the grinding of the face OF to crystal bar, Grinding wheel is required to can be realized the motion control of two extreme positions of vertical direction at this time;When being ground the crystal bar of different-diameter, It is required that grinding wheel can realize front and back traverse feed, to meet the grinding demand of different-diameter crystal bar;The working space of crystal bar grinding fills Full water mist it requires and keep good leakproofness between bistrique and entire grinding and feeding mechanism, guarantee outside cylinder, motor, The components such as guide rail and grinding working space isolation.Currently, the existing equipment for grinding bistrique arrangement grinding efficiency of industry is low, cannot play Equipment maximum utility value, while laterally and vertically feed accuracy is lower for grinding, is not able to satisfy grinding high-precision requirement, and cost It is expensive.
In view of the above-mentioned problems, the present invention is specifically proposed.
Summary of the invention
The object of the present invention is to provide a kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar, which can be controlled Grinding wheel moves in the horizontal direction and the vertical direction, realizes that the rolling grinding to different-diameter crystal bar, the face OF are ground.
To achieve the above object, the invention provides the following technical scheme:
A kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar, including the identical grinding and feeding component of two structures, two Grinding and feeding component is in same plane opposite but asymmetric setting, and grinding and feeding component includes vertical motion assemblies, main shaft Rotary components and traverse feed component, main shaft rotary components include main shaft rotating motor, transmission shaft, bearing housing and transfer panel, are passed One end of moving axis and the output end of main shaft rotating motor are connected by shaft coupling, and the other end connect with transfer panel, covers on transmission shaft Equipped with bearing, transmission shaft and bearing are installed in bearing housing, and grinding wheel is equipped on transfer panel, and main shaft rotary components can slide up and down Be installed in vertical motion assemblies, the peace that vertical motion assemblies can slidably reciprocate along two opposite directions of grinding and feeding component Loaded on traverse feed component.
Preferably, main shaft rotary components further include sliding support and motor mount, and bearing housing is installed in sliding support, Main shaft rotating motor is installed on motor mount.
Preferably, traverse feed component includes feeding body shell, slide plate and traverse feed motor, feeds body shell upper surface along it The two sides of length direction are provided with the first guide rail, and lead screw is provided between two the first guide rails, and slide plate is connected to by sliding block It on one guide rail, is connected on lead screw by feed screw nut seat, the output end and lead screw of traverse feed motor are far from the one of transfer panel End connection, vertical motion assemblies are installed on slide plate.
Preferably, it is provided with locating shaft on the upper surface of slide plate, is provided with and positions on the lower end surface of vertical motion assemblies The location hole that axis matches.
Preferably, vertical motion assemblies include that locking cylinder, push mill and two the second guide rails, locking cylinder are set to The upper end of push mill, the upper surface that the front end of locking cylinder piston rod passes through push mill are fixedly connected on the upper of sliding support On end face, two the second guide rails are vertically arranged to the two sides of push mill vertical end face, and sliding support is connected to by sliding block On second guide rail.
Preferably, main shaft rotary components further include cylinder connecting flange and cylinder connector sleeve, before locking cylinder piston rod End is connect with cylinder connector sleeve, and cylinder connector sleeve is fixed on the upper surface of sliding support by cylinder connecting flange.
Preferably, two the second guide rails are vertically arranged to push mill close to the two sides of the vertical end face of transfer panel, sliding Support is connect with the second guide rail by sliding block close to the end face of transfer panel.
Preferably, motor mount is respectively arranged with Limit screw on two end faces up and down of transfer panel one end, into Caging bolt corresponding with two Limit screw positions above and below motor mount is respectively arranged with to the upper and lower ends of base.
Preferably, further include circular organ cover and for by grinding and feeding component and grinding working space it is mutually isolated Baffle assembly, baffle assembly includes partition, pressing plate and sliding panel, rectangular opening is offered on the vertical direction of diaphragm internal, press Plate is set as U-typed structure, and straight up or downwards, the both ends of pressing plate horizontal direction are connected to rectangular opening to the opening of pressing plate On the partition of horizontal direction two sides, sliding panel, which can slide up and down, to be placed between pressing plate and partition, and pressing plate and sliding panel cooperation will Rectangular opening covers all, and round hole is offered on sliding panel, and bearing housing passes through round hole, organ cover close to one end of transfer panel It is sheathed on the bearing housing between baffle assembly and transfer panel, organ cover is connect close to one end of transfer panel with bearing housing, organ The other end of cover is connect with sliding panel.
Preferably, sealing strip is provided between pressing plate and partition.
Preferably, the end of the opposite end of pressing plate open end at a distance from pressing plate U-typed open bottom end be greater than sliding panel to The distance of upper sliding.
Compared with prior art, beneficial effects of the present invention are as follows:
The present invention provides a kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar, two grinding and feedings of the grinding mechanism Component is opposite but asymmetry setting, such grinding method can double grinding efficiency compared with original unilateral grinding method, And it can guarantee that crystal bar steps into and exit grinding status, guarantee the stability and reliability of grinding process;The grinding mechanism Can traverse feed position to grinding wheel realize accurate control, realize the grinding to different-diameter crystal bar, and the grinding Mechanism can be realized the motion control in vertical direction to two extreme positions of grinding wheel, so that grinding and feeding component can either be to crystalline substance Stick carries out rolling grinding, also can carry out the grinding of the face OF to crystal bar;The grinding mechanism is provided with organ cover and partition, can incite somebody to action It is ground working space and grinding and feeding component is mutually isolated.
Detailed description of the invention
In order to illustrate more clearly of the utility model embodiment or technical solution in the prior art, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, drawings discussed below is only this hair Bright some embodiments for those of ordinary skill in the art without creative efforts, can be with root Other attached drawings are obtained according to these attached drawings.
Fig. 1 is the main view of the double bistrique high efficient grinding mechanisms of semiconductor crystal bar of the present invention.
Fig. 2 is the top view of the double bistrique high efficient grinding mechanisms of semiconductor crystal bar of the present invention.
Fig. 3 is the structural schematic diagram of grinding and feeding component of the present invention.
Fig. 4 is the structural schematic diagram of traverse feed component of the present invention.
Fig. 5 is the structural schematic diagram of main shaft rotary components of the present invention.
Fig. 6 is the structural schematic diagram of vertical motion assemblies of the present invention.
Fig. 7 is the structural schematic diagram of baffle assembly of the present invention.
In figure: 1-vertical motion assemblies, 2-main shaft rotary components, 3-traverse feed components, 4-feeding body shells, 5- First guide rail, 6-locating shafts, 7-slide plates, 8-feed screw nut seats, 9-traverse feed motors, 10-organ covers, 11-cylinders Connector sleeve, 12-Limit screws, 13-main shaft rotating motors, 14-transfer panels, 15-bearing housings, 16-cylinder connecting flanges, 17-sliding supports, 18-motor fixing seats, 19-locking cylinders, 20-push mills, the 21-the second guide rail, 22-positioning Hole, 23-caging bolts, 24-partitions, 25-pressing plates, 26-sliding panels, 27-round holes.
Specific embodiment
Core of the invention is to provide a kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar, which can control Grinding wheel processed moves in the horizontal direction and the vertical direction, realizes that the rolling grinding to different-diameter crystal bar, the face OF are ground.
It is right below with reference to attached drawing of the invention in order to make those skilled in the art more fully understand technical solution of the present invention Technical solution of the present invention carries out clear, complete description.Based on the embodiment in the application, those of ordinary skill in the art exist Other similar embodiments obtained under the premise of creative work are not made, shall fall within the protection scope of the present application.
As shown in Figure 1,2 and 3, the double bistrique high efficient grinding mechanisms of the semiconductor crystal bar provided in this specific embodiment, the mill Cutting mechanism includes the identical grinding and feeding component of two structures, and two grinding and feeding components are in same plane opposite but not right Claim setting, so that crystal bar is when carrying out rolling grinding, two sides abrasive grinding wheel can be simultaneously ground crystal bar, can be by for such setting Grinding efficiency doubles, meanwhile, two sides asymmetric arrangement form can guarantee that bar steps into and exit grinding status, guarantee The stability and reliability of grinding process.Grinding and feeding component include vertical motion assemblies 1, main shaft rotary components 2 and laterally into To component 3.
As shown in figure 4, traverse feed component 3 includes feeding body shell 4, slide plate 7 and traverse feed motor 9, feed in body shell 4 The two sides of end face along its length are provided with the first guide rail 5, are provided with lead screw between two the first guide rails 5, slide plate 7 passes through cunning Block is connected on the first guide rail 5, is connected on lead screw by feed screw nut seat 8, and the output end of traverse feed motor 9 is remote with lead screw One end connection from transfer panel 14, traverse feed motor 9 are set to the outside of feeding body shell 4, and slide plate 7 is in traverse feed motor 9 Under the driving of lead screw, slidably reciprocate along the first guide rail 5.
As shown in figure 5, main shaft rotary components 2 include main shaft rotating motor 13, transmission shaft, transfer panel 14, sliding support 17, One end of bearing housing 15 and motor mount 18, transmission shaft is connect with the output end of main shaft rotating motor 13 by shaft coupling, separately One end is connect with transfer panel 14, and grinding wheel is equipped on transfer panel 14, and bearing is arranged on transmission shaft, and bearing housing 15 is installed on sliding In support 17, transmission shaft and bearing are installed in bearing housing 15, and main shaft rotating motor 13 is installed on motor mount 18, main shaft Rotating electric machine 13 drives the grinding wheel being mounted on transfer panel 14 rotation, main shaft rotating motor 13 by the transmission shaft in bearing housing 15 The revolving speed of controllable abrasive grinding wheel.
As shown in fig. 6, vertical motion assemblies 1 include locking cylinder 19, push mill 20 and two the second guide rails 21, locking Cylinder 19 is set to the upper end of push mill 20, and main shaft rotary components 2 further include cylinder connecting flange 16 and cylinder connector sleeve 11, The upper surface that the front end of 19 piston rod of locking cylinder passes through push mill 20 is connect with cylinder connector sleeve 11, and cylinder connector sleeve 11 is logical Cylinder connecting flange 16 is crossed to be fixed on the upper surface of sliding support 17.Two the second guide rails 21 are vertically arranged to push mill 20 Close to the two sides of the vertical end face of transfer panel 14, sliding support 17 passes through sliding block close to the end face of transfer panel 14 and the second guide rail 21 Connection, main shaft rotary components 2 are slided up and down in the second guide rail of driving lower edge 21 of locking cylinder 19.
Motor mount 18 is respectively arranged with Limit screw 12 on two end faces up and down of 14 one end of transfer panel, feeding The upper and lower ends of base 20 are respectively arranged with limit spiral shell corresponding with about 18 two 12 positions of Limit screw of motor mount Bolt 23, Limit screw 12 and caging bolt 23 cooperate, and play a limit work to sliding up and down for main shaft rotary components 2 With.Since the wheel grinding position used when carrying out rolling grinding and the grinding of the face OF to crystal bar is different, when use grinding wheel top edge When carrying out rolling grinding to crystal bar, the piston rod of locking cylinder 19 is protruding, so that main shaft rotary components 2 be driven to lead along second Rail 21 moves downward, until the Limit screw 12 of 18 lower end of motor mount connects with the caging bolt 23 of 20 lower end of push mill Touching, main shaft rotary components 2 reach lower limit position, and then realize and carry out rolling grinding to crystal bar using grinding wheel top edge.When making When carrying out the grinding of the face OF to crystal bar with center position of grinding wheel, the piston rod of locking cylinder 19 contracts to recycling, so that main shaft be driven to revolve Turn component 2 to move upwards along the second guide rail 21, until the Limit screw 12 on 18 top of motor mount and 20 upper end of push mill Caging bolt 23 be in contact, main shaft rotary components 2 reach upper limit position, and then realize using center position of grinding wheel to crystal bar Carry out the grinding of the face OF.
It is provided with locating shaft 6 on the upper surface of slide plate 7, is under push mill 20 on the lower end surface of vertical motion assemblies 1 The location hole 22 matched with locating shaft 6 is provided on end face, vertical motion assemblies 1 are installed on slide plate 7, and slide plate 7 is in transverse direction Under the driving for feeding motor 9 and lead screw, slidably reciprocate along the first guide rail 5, and then vertical motion assemblies 1 and main shaft rotary components 2 It can be laterally moved under the drive of slide plate 7, so that the lateral position of grinding wheel is adjusted, to be ground the crystal bar of different-diameter, Traverse feed motor 9 accurately controls the position of traverse feed.
In actual production, crystal bar be current scour effect under be ground, this just need be ground working space with Grinding and feeding component is mutually isolated, and the double bistrique high efficient grinding mechanisms of semiconductor crystal bar of the invention further include circular organ cover 10 And for the baffle assembly that grinding and feeding component and grinding working space is mutually isolated, baffle assembly can be completely by grinding Feeder assembly and grinding working space keep apart, prevent water mist to grinding each component of feeder assembly influence, extend be ground into To the service life of component.As shown in fig. 7, baffle assembly includes partition 24, pressing plate 25 and sliding panel 26, erecting inside partition 24 Histogram offers rectangular opening upwards, and pressing plate 25 is set as U-typed structure, the opening of pressing plate 25 straight up or downwards, in this tool In body embodiment, the opening of pressing plate 25 is arranged vertically upwards, and the both ends of 25 horizontal direction of pressing plate are connected to rectangle hole horizontal On the partition 24 of direction two sides, the lower end of 25 vertical direction of pressing plate is connected on the partition 24 on the downside of rectangular opening vertical direction, pressure The end of 25 vertical direction lower end of plate is greater than the distance of 26 upward sliding of sliding panel at a distance from 25 U-typed open bottom end of pressing plate, Sliding panel 26, which can slide up and down, to be placed between pressing plate 25 and partition 24, sliding panel 26 with main shaft rotary components 2 fortune up and down It moves and slides up and down, sealing strip is provided between pressing plate 25 and partition 24, pressing plate 25 and sliding panel 26 cooperate rectangular opening is complete It covers, thereby ensures that the isolation effect of baffle assembly.Round hole 27 is offered on sliding panel 26, bearing housing 15 is close to switching One end of disk 14 passes through round hole 27, and organ cover 10 is sheathed on the bearing housing 15 between baffle assembly and transfer panel 14, organ Cover 10 is connect close to one end of transfer panel 14 with bearing housing 15, and the other end of organ cover 10 is connect with sliding panel 26, is so guaranteed Grinding working space and grinding and feeding component are kept apart.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art The other embodiments being understood that.

Claims (10)

1. a kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar, which is characterized in that including the identical grinding and feeding of two structures Component, two grinding and feeding components are in same plane opposite but asymmetric setting, and grinding and feeding component includes vertical movement Component (1), main shaft rotary components (2) and traverse feed component (3), main shaft rotary components (2) include main shaft rotating motor (13), One end of transmission shaft, bearing housing (15) and transfer panel (14), transmission shaft is connect with the output end of main shaft rotating motor (13), another End is connect with transfer panel (14), and bearing is arranged on transmission shaft, and transmission shaft and bearing are installed in bearing housing (15), transfer panel (14) grinding wheel is installed, main shaft rotary components (2), which can slide up and down, to be installed on vertical motion assemblies (1), vertical movement on Component (1) can be installed on traverse feed component (3) along what two opposite directions of grinding and feeding component slidably reciprocated.
2. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 1, which is characterized in that main shaft rotary components It (2) further include sliding support (17) and motor mount (18), bearing housing (15) is installed in sliding support (17), main shaft rotation Motor (13) is installed on motor mount (18).
3. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 2, which is characterized in that traverse feed component (3) include feeding body shell (4), slide plate (7) and traverse feed motor (9), feed two of body shell (4) upper surface along its length Side is provided with the first guide rail (5), and lead screw is provided between two the first guide rails (5), and slide plate (7) is connected to first by sliding block and leads It on rail (5), is connected on lead screw by feed screw nut seat (8), the output end and lead screw of traverse feed motor (9) are far from transfer panel (14) one end connection, vertical motion assemblies (1) are installed on slide plate (7).
4. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 3, which is characterized in that slide plate (7) it is upper It is provided on end face locating shaft (6), the positioning matched with locating shaft (6) is provided on the lower end surface of vertical motion assemblies (1) Hole (22).
5. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 3 or 4, which is characterized in that vertical movement Component (1) includes that locking cylinder (19), push mill (20) and two the second guide rails (21), locking cylinder (19) are set to feeding The upper end of base (20), the upper surface that the front end of locking cylinder (19) piston rod passes through push mill (20) are fixedly connected on sliding On the upper surface of support (17), two the second guide rails (21) are vertically arranged to the two sides of push mill (20) vertical end face, sliding Dynamic support (17) are connected on the second guide rail (21) by sliding block.
6. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 5, which is characterized in that main shaft rotary components It (2) further include cylinder connecting flange (16) and cylinder connector sleeve (11), the front end of locking cylinder (19) piston rod is connect with cylinder (11) connection is covered, cylinder connector sleeve (11) is fixed on the upper surface of sliding support (17) by cylinder connecting flange (16).
7. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 6, which is characterized in that two the second guide rails (21) push mill (20) are vertically arranged to close to the two sides of the vertical end face of transfer panel (14), sliding support (17) is close to switching The end face of disk (14) is connect with the second guide rail (21) by sliding block.
8. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 6 or 7, which is characterized in that motor installation Seat (18) is respectively arranged with Limit screw (12) on two end faces up and down of transfer panel (14) one end, push mill (20) Upper and lower ends are respectively arranged with and motor mount (18) the corresponding caging bolt in two Limit screw (12) positions up and down (23)。
9. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 8, which is characterized in that further include circular Organ cover (10) and for by grinding and feeding component and the mutually isolated baffle assembly of grinding working space, baffle assembly includes Partition (24), pressing plate (25) and sliding panel (26) offer rectangular opening on the internal vertical direction of partition (24), and pressing plate (25) is set It is set to U-typed structure, straight up or downwards, the both ends of pressing plate (25) horizontal direction are connected to square to the opening of pressing plate (25) On the partition (24) of shape hole horizontal direction two sides, sliding panel (26) can slide up and down be placed in pressing plate (25) and partition (24) it Between, pressing plate (25) cooperates with sliding panel (26) covers all rectangular opening, and round hole (27), axis are offered on sliding panel (26) It holds case (15) and passes through round hole (27) close to the one end of transfer panel (14), organ cover (10) is sheathed on baffle assembly and transfer panel (14) on the bearing housing (15) between, organ cover (10) is connect close to the one end of transfer panel (14) with bearing housing (15), organ cover (10) the other end is connect with sliding panel (26).
10. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 9, which is characterized in that pressing plate (25) with Partition is provided with sealing strip between (24).
CN201910236177.4A 2019-03-27 2019-03-27 High-efficient grinding mechanism of two bistrique of semiconductor crystal bar Active CN109746803B (en)

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CN110434725A (en) * 2019-09-12 2019-11-12 黄石华旦机械制造有限公司 A kind of crankcase stator foot grinding attachment
CN110434725B (en) * 2019-09-12 2024-05-03 黄石华旦机械制造有限公司 Crankcase stator foot grinding device
CN115229599A (en) * 2022-08-09 2022-10-25 首钢智新迁安电磁材料有限公司 Grinding machine and rolling production line

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