CN109746803A - A kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar - Google Patents
A kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar Download PDFInfo
- Publication number
- CN109746803A CN109746803A CN201910236177.4A CN201910236177A CN109746803A CN 109746803 A CN109746803 A CN 109746803A CN 201910236177 A CN201910236177 A CN 201910236177A CN 109746803 A CN109746803 A CN 109746803A
- Authority
- CN
- China
- Prior art keywords
- grinding
- crystal bar
- main shaft
- semiconductor crystal
- high efficient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 46
- 230000007246 mechanism Effects 0.000 title claims abstract description 30
- 239000004065 semiconductor Substances 0.000 title claims abstract description 25
- 230000033001 locomotion Effects 0.000 claims abstract description 24
- 230000000712 assembly Effects 0.000 claims abstract description 19
- 238000000429 assembly Methods 0.000 claims abstract description 19
- 230000005540 biological transmission Effects 0.000 claims abstract description 14
- 238000003825 pressing Methods 0.000 claims description 26
- 238000005192 partition Methods 0.000 claims description 17
- 210000000056 organ Anatomy 0.000 claims description 13
- 238000007789 sealing Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims 1
- 238000005096 rolling process Methods 0.000 abstract description 11
- 230000008878 coupling Effects 0.000 abstract description 3
- 238000010168 coupling process Methods 0.000 abstract description 3
- 238000005859 coupling reaction Methods 0.000 abstract description 3
- 230000035611 feeding Effects 0.000 description 21
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
The invention discloses a kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar, the grinding mechanism includes the identical grinding and feeding component of two structures, two grinding and feeding components are in same plane opposite but asymmetric setting, grinding and feeding component includes vertical motion assemblies, main shaft rotary components and traverse feed component, main shaft rotary components include main shaft rotating motor, transmission shaft, bearing housing and transfer panel, one end of transmission shaft and the output end of main shaft rotating motor are connected by shaft coupling, the other end is connect with transfer panel, grinding wheel is installed on transfer panel, main shaft rotary components, which can slide up and down, to be installed in vertical motion assemblies, vertical motion assemblies can be installed on traverse feed component along what two opposite directions of grinding and feeding component slidably reciprocated.The grinding mechanism can control grinding wheel and move in the horizontal direction and the vertical direction, realize that the rolling grinding to different-diameter crystal bar, the face OF are ground.
Description
Technical field
The present invention relates to semiconductor crystal bar processing technique fields, more particularly to a kind of double bistrique high efficient mills of semiconductor crystal bar
Cut mechanism.
Background technique
Semiconductor crystal bar needs to carry out crystal bar rolling grinding, the face OF grinding (or the grinding of V slot) before slice, and is ground
Accuracy tolerance is required in 0.04mm or less.The wheel grinding position that semiconductor crystal bar is used when carrying out rolling grinding and the face OF is ground
Difference is set, uses edge on grinding wheel when carrying out rolling grinding to crystal bar, uses center position of grinding wheel when carrying out the grinding of the face OF to crystal bar,
Grinding wheel is required to can be realized the motion control of two extreme positions of vertical direction at this time;When being ground the crystal bar of different-diameter,
It is required that grinding wheel can realize front and back traverse feed, to meet the grinding demand of different-diameter crystal bar;The working space of crystal bar grinding fills
Full water mist it requires and keep good leakproofness between bistrique and entire grinding and feeding mechanism, guarantee outside cylinder, motor,
The components such as guide rail and grinding working space isolation.Currently, the existing equipment for grinding bistrique arrangement grinding efficiency of industry is low, cannot play
Equipment maximum utility value, while laterally and vertically feed accuracy is lower for grinding, is not able to satisfy grinding high-precision requirement, and cost
It is expensive.
In view of the above-mentioned problems, the present invention is specifically proposed.
Summary of the invention
The object of the present invention is to provide a kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar, which can be controlled
Grinding wheel moves in the horizontal direction and the vertical direction, realizes that the rolling grinding to different-diameter crystal bar, the face OF are ground.
To achieve the above object, the invention provides the following technical scheme:
A kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar, including the identical grinding and feeding component of two structures, two
Grinding and feeding component is in same plane opposite but asymmetric setting, and grinding and feeding component includes vertical motion assemblies, main shaft
Rotary components and traverse feed component, main shaft rotary components include main shaft rotating motor, transmission shaft, bearing housing and transfer panel, are passed
One end of moving axis and the output end of main shaft rotating motor are connected by shaft coupling, and the other end connect with transfer panel, covers on transmission shaft
Equipped with bearing, transmission shaft and bearing are installed in bearing housing, and grinding wheel is equipped on transfer panel, and main shaft rotary components can slide up and down
Be installed in vertical motion assemblies, the peace that vertical motion assemblies can slidably reciprocate along two opposite directions of grinding and feeding component
Loaded on traverse feed component.
Preferably, main shaft rotary components further include sliding support and motor mount, and bearing housing is installed in sliding support,
Main shaft rotating motor is installed on motor mount.
Preferably, traverse feed component includes feeding body shell, slide plate and traverse feed motor, feeds body shell upper surface along it
The two sides of length direction are provided with the first guide rail, and lead screw is provided between two the first guide rails, and slide plate is connected to by sliding block
It on one guide rail, is connected on lead screw by feed screw nut seat, the output end and lead screw of traverse feed motor are far from the one of transfer panel
End connection, vertical motion assemblies are installed on slide plate.
Preferably, it is provided with locating shaft on the upper surface of slide plate, is provided with and positions on the lower end surface of vertical motion assemblies
The location hole that axis matches.
Preferably, vertical motion assemblies include that locking cylinder, push mill and two the second guide rails, locking cylinder are set to
The upper end of push mill, the upper surface that the front end of locking cylinder piston rod passes through push mill are fixedly connected on the upper of sliding support
On end face, two the second guide rails are vertically arranged to the two sides of push mill vertical end face, and sliding support is connected to by sliding block
On second guide rail.
Preferably, main shaft rotary components further include cylinder connecting flange and cylinder connector sleeve, before locking cylinder piston rod
End is connect with cylinder connector sleeve, and cylinder connector sleeve is fixed on the upper surface of sliding support by cylinder connecting flange.
Preferably, two the second guide rails are vertically arranged to push mill close to the two sides of the vertical end face of transfer panel, sliding
Support is connect with the second guide rail by sliding block close to the end face of transfer panel.
Preferably, motor mount is respectively arranged with Limit screw on two end faces up and down of transfer panel one end, into
Caging bolt corresponding with two Limit screw positions above and below motor mount is respectively arranged with to the upper and lower ends of base.
Preferably, further include circular organ cover and for by grinding and feeding component and grinding working space it is mutually isolated
Baffle assembly, baffle assembly includes partition, pressing plate and sliding panel, rectangular opening is offered on the vertical direction of diaphragm internal, press
Plate is set as U-typed structure, and straight up or downwards, the both ends of pressing plate horizontal direction are connected to rectangular opening to the opening of pressing plate
On the partition of horizontal direction two sides, sliding panel, which can slide up and down, to be placed between pressing plate and partition, and pressing plate and sliding panel cooperation will
Rectangular opening covers all, and round hole is offered on sliding panel, and bearing housing passes through round hole, organ cover close to one end of transfer panel
It is sheathed on the bearing housing between baffle assembly and transfer panel, organ cover is connect close to one end of transfer panel with bearing housing, organ
The other end of cover is connect with sliding panel.
Preferably, sealing strip is provided between pressing plate and partition.
Preferably, the end of the opposite end of pressing plate open end at a distance from pressing plate U-typed open bottom end be greater than sliding panel to
The distance of upper sliding.
Compared with prior art, beneficial effects of the present invention are as follows:
The present invention provides a kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar, two grinding and feedings of the grinding mechanism
Component is opposite but asymmetry setting, such grinding method can double grinding efficiency compared with original unilateral grinding method,
And it can guarantee that crystal bar steps into and exit grinding status, guarantee the stability and reliability of grinding process;The grinding mechanism
Can traverse feed position to grinding wheel realize accurate control, realize the grinding to different-diameter crystal bar, and the grinding
Mechanism can be realized the motion control in vertical direction to two extreme positions of grinding wheel, so that grinding and feeding component can either be to crystalline substance
Stick carries out rolling grinding, also can carry out the grinding of the face OF to crystal bar;The grinding mechanism is provided with organ cover and partition, can incite somebody to action
It is ground working space and grinding and feeding component is mutually isolated.
Detailed description of the invention
In order to illustrate more clearly of the utility model embodiment or technical solution in the prior art, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, drawings discussed below is only this hair
Bright some embodiments for those of ordinary skill in the art without creative efforts, can be with root
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is the main view of the double bistrique high efficient grinding mechanisms of semiconductor crystal bar of the present invention.
Fig. 2 is the top view of the double bistrique high efficient grinding mechanisms of semiconductor crystal bar of the present invention.
Fig. 3 is the structural schematic diagram of grinding and feeding component of the present invention.
Fig. 4 is the structural schematic diagram of traverse feed component of the present invention.
Fig. 5 is the structural schematic diagram of main shaft rotary components of the present invention.
Fig. 6 is the structural schematic diagram of vertical motion assemblies of the present invention.
Fig. 7 is the structural schematic diagram of baffle assembly of the present invention.
In figure: 1-vertical motion assemblies, 2-main shaft rotary components, 3-traverse feed components, 4-feeding body shells, 5-
First guide rail, 6-locating shafts, 7-slide plates, 8-feed screw nut seats, 9-traverse feed motors, 10-organ covers, 11-cylinders
Connector sleeve, 12-Limit screws, 13-main shaft rotating motors, 14-transfer panels, 15-bearing housings, 16-cylinder connecting flanges,
17-sliding supports, 18-motor fixing seats, 19-locking cylinders, 20-push mills, the 21-the second guide rail, 22-positioning
Hole, 23-caging bolts, 24-partitions, 25-pressing plates, 26-sliding panels, 27-round holes.
Specific embodiment
Core of the invention is to provide a kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar, which can control
Grinding wheel processed moves in the horizontal direction and the vertical direction, realizes that the rolling grinding to different-diameter crystal bar, the face OF are ground.
It is right below with reference to attached drawing of the invention in order to make those skilled in the art more fully understand technical solution of the present invention
Technical solution of the present invention carries out clear, complete description.Based on the embodiment in the application, those of ordinary skill in the art exist
Other similar embodiments obtained under the premise of creative work are not made, shall fall within the protection scope of the present application.
As shown in Figure 1,2 and 3, the double bistrique high efficient grinding mechanisms of the semiconductor crystal bar provided in this specific embodiment, the mill
Cutting mechanism includes the identical grinding and feeding component of two structures, and two grinding and feeding components are in same plane opposite but not right
Claim setting, so that crystal bar is when carrying out rolling grinding, two sides abrasive grinding wheel can be simultaneously ground crystal bar, can be by for such setting
Grinding efficiency doubles, meanwhile, two sides asymmetric arrangement form can guarantee that bar steps into and exit grinding status, guarantee
The stability and reliability of grinding process.Grinding and feeding component include vertical motion assemblies 1, main shaft rotary components 2 and laterally into
To component 3.
As shown in figure 4, traverse feed component 3 includes feeding body shell 4, slide plate 7 and traverse feed motor 9, feed in body shell 4
The two sides of end face along its length are provided with the first guide rail 5, are provided with lead screw between two the first guide rails 5, slide plate 7 passes through cunning
Block is connected on the first guide rail 5, is connected on lead screw by feed screw nut seat 8, and the output end of traverse feed motor 9 is remote with lead screw
One end connection from transfer panel 14, traverse feed motor 9 are set to the outside of feeding body shell 4, and slide plate 7 is in traverse feed motor 9
Under the driving of lead screw, slidably reciprocate along the first guide rail 5.
As shown in figure 5, main shaft rotary components 2 include main shaft rotating motor 13, transmission shaft, transfer panel 14, sliding support 17,
One end of bearing housing 15 and motor mount 18, transmission shaft is connect with the output end of main shaft rotating motor 13 by shaft coupling, separately
One end is connect with transfer panel 14, and grinding wheel is equipped on transfer panel 14, and bearing is arranged on transmission shaft, and bearing housing 15 is installed on sliding
In support 17, transmission shaft and bearing are installed in bearing housing 15, and main shaft rotating motor 13 is installed on motor mount 18, main shaft
Rotating electric machine 13 drives the grinding wheel being mounted on transfer panel 14 rotation, main shaft rotating motor 13 by the transmission shaft in bearing housing 15
The revolving speed of controllable abrasive grinding wheel.
As shown in fig. 6, vertical motion assemblies 1 include locking cylinder 19, push mill 20 and two the second guide rails 21, locking
Cylinder 19 is set to the upper end of push mill 20, and main shaft rotary components 2 further include cylinder connecting flange 16 and cylinder connector sleeve 11,
The upper surface that the front end of 19 piston rod of locking cylinder passes through push mill 20 is connect with cylinder connector sleeve 11, and cylinder connector sleeve 11 is logical
Cylinder connecting flange 16 is crossed to be fixed on the upper surface of sliding support 17.Two the second guide rails 21 are vertically arranged to push mill 20
Close to the two sides of the vertical end face of transfer panel 14, sliding support 17 passes through sliding block close to the end face of transfer panel 14 and the second guide rail 21
Connection, main shaft rotary components 2 are slided up and down in the second guide rail of driving lower edge 21 of locking cylinder 19.
Motor mount 18 is respectively arranged with Limit screw 12 on two end faces up and down of 14 one end of transfer panel, feeding
The upper and lower ends of base 20 are respectively arranged with limit spiral shell corresponding with about 18 two 12 positions of Limit screw of motor mount
Bolt 23, Limit screw 12 and caging bolt 23 cooperate, and play a limit work to sliding up and down for main shaft rotary components 2
With.Since the wheel grinding position used when carrying out rolling grinding and the grinding of the face OF to crystal bar is different, when use grinding wheel top edge
When carrying out rolling grinding to crystal bar, the piston rod of locking cylinder 19 is protruding, so that main shaft rotary components 2 be driven to lead along second
Rail 21 moves downward, until the Limit screw 12 of 18 lower end of motor mount connects with the caging bolt 23 of 20 lower end of push mill
Touching, main shaft rotary components 2 reach lower limit position, and then realize and carry out rolling grinding to crystal bar using grinding wheel top edge.When making
When carrying out the grinding of the face OF to crystal bar with center position of grinding wheel, the piston rod of locking cylinder 19 contracts to recycling, so that main shaft be driven to revolve
Turn component 2 to move upwards along the second guide rail 21, until the Limit screw 12 on 18 top of motor mount and 20 upper end of push mill
Caging bolt 23 be in contact, main shaft rotary components 2 reach upper limit position, and then realize using center position of grinding wheel to crystal bar
Carry out the grinding of the face OF.
It is provided with locating shaft 6 on the upper surface of slide plate 7, is under push mill 20 on the lower end surface of vertical motion assemblies 1
The location hole 22 matched with locating shaft 6 is provided on end face, vertical motion assemblies 1 are installed on slide plate 7, and slide plate 7 is in transverse direction
Under the driving for feeding motor 9 and lead screw, slidably reciprocate along the first guide rail 5, and then vertical motion assemblies 1 and main shaft rotary components 2
It can be laterally moved under the drive of slide plate 7, so that the lateral position of grinding wheel is adjusted, to be ground the crystal bar of different-diameter,
Traverse feed motor 9 accurately controls the position of traverse feed.
In actual production, crystal bar be current scour effect under be ground, this just need be ground working space with
Grinding and feeding component is mutually isolated, and the double bistrique high efficient grinding mechanisms of semiconductor crystal bar of the invention further include circular organ cover 10
And for the baffle assembly that grinding and feeding component and grinding working space is mutually isolated, baffle assembly can be completely by grinding
Feeder assembly and grinding working space keep apart, prevent water mist to grinding each component of feeder assembly influence, extend be ground into
To the service life of component.As shown in fig. 7, baffle assembly includes partition 24, pressing plate 25 and sliding panel 26, erecting inside partition 24
Histogram offers rectangular opening upwards, and pressing plate 25 is set as U-typed structure, the opening of pressing plate 25 straight up or downwards, in this tool
In body embodiment, the opening of pressing plate 25 is arranged vertically upwards, and the both ends of 25 horizontal direction of pressing plate are connected to rectangle hole horizontal
On the partition 24 of direction two sides, the lower end of 25 vertical direction of pressing plate is connected on the partition 24 on the downside of rectangular opening vertical direction, pressure
The end of 25 vertical direction lower end of plate is greater than the distance of 26 upward sliding of sliding panel at a distance from 25 U-typed open bottom end of pressing plate,
Sliding panel 26, which can slide up and down, to be placed between pressing plate 25 and partition 24, sliding panel 26 with main shaft rotary components 2 fortune up and down
It moves and slides up and down, sealing strip is provided between pressing plate 25 and partition 24, pressing plate 25 and sliding panel 26 cooperate rectangular opening is complete
It covers, thereby ensures that the isolation effect of baffle assembly.Round hole 27 is offered on sliding panel 26, bearing housing 15 is close to switching
One end of disk 14 passes through round hole 27, and organ cover 10 is sheathed on the bearing housing 15 between baffle assembly and transfer panel 14, organ
Cover 10 is connect close to one end of transfer panel 14 with bearing housing 15, and the other end of organ cover 10 is connect with sliding panel 26, is so guaranteed
Grinding working space and grinding and feeding component are kept apart.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims
Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (10)
1. a kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar, which is characterized in that including the identical grinding and feeding of two structures
Component, two grinding and feeding components are in same plane opposite but asymmetric setting, and grinding and feeding component includes vertical movement
Component (1), main shaft rotary components (2) and traverse feed component (3), main shaft rotary components (2) include main shaft rotating motor (13),
One end of transmission shaft, bearing housing (15) and transfer panel (14), transmission shaft is connect with the output end of main shaft rotating motor (13), another
End is connect with transfer panel (14), and bearing is arranged on transmission shaft, and transmission shaft and bearing are installed in bearing housing (15), transfer panel
(14) grinding wheel is installed, main shaft rotary components (2), which can slide up and down, to be installed on vertical motion assemblies (1), vertical movement on
Component (1) can be installed on traverse feed component (3) along what two opposite directions of grinding and feeding component slidably reciprocated.
2. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 1, which is characterized in that main shaft rotary components
It (2) further include sliding support (17) and motor mount (18), bearing housing (15) is installed in sliding support (17), main shaft rotation
Motor (13) is installed on motor mount (18).
3. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 2, which is characterized in that traverse feed component
(3) include feeding body shell (4), slide plate (7) and traverse feed motor (9), feed two of body shell (4) upper surface along its length
Side is provided with the first guide rail (5), and lead screw is provided between two the first guide rails (5), and slide plate (7) is connected to first by sliding block and leads
It on rail (5), is connected on lead screw by feed screw nut seat (8), the output end and lead screw of traverse feed motor (9) are far from transfer panel
(14) one end connection, vertical motion assemblies (1) are installed on slide plate (7).
4. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 3, which is characterized in that slide plate (7) it is upper
It is provided on end face locating shaft (6), the positioning matched with locating shaft (6) is provided on the lower end surface of vertical motion assemblies (1)
Hole (22).
5. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 3 or 4, which is characterized in that vertical movement
Component (1) includes that locking cylinder (19), push mill (20) and two the second guide rails (21), locking cylinder (19) are set to feeding
The upper end of base (20), the upper surface that the front end of locking cylinder (19) piston rod passes through push mill (20) are fixedly connected on sliding
On the upper surface of support (17), two the second guide rails (21) are vertically arranged to the two sides of push mill (20) vertical end face, sliding
Dynamic support (17) are connected on the second guide rail (21) by sliding block.
6. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 5, which is characterized in that main shaft rotary components
It (2) further include cylinder connecting flange (16) and cylinder connector sleeve (11), the front end of locking cylinder (19) piston rod is connect with cylinder
(11) connection is covered, cylinder connector sleeve (11) is fixed on the upper surface of sliding support (17) by cylinder connecting flange (16).
7. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 6, which is characterized in that two the second guide rails
(21) push mill (20) are vertically arranged to close to the two sides of the vertical end face of transfer panel (14), sliding support (17) is close to switching
The end face of disk (14) is connect with the second guide rail (21) by sliding block.
8. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 6 or 7, which is characterized in that motor installation
Seat (18) is respectively arranged with Limit screw (12) on two end faces up and down of transfer panel (14) one end, push mill (20)
Upper and lower ends are respectively arranged with and motor mount (18) the corresponding caging bolt in two Limit screw (12) positions up and down
(23)。
9. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 8, which is characterized in that further include circular
Organ cover (10) and for by grinding and feeding component and the mutually isolated baffle assembly of grinding working space, baffle assembly includes
Partition (24), pressing plate (25) and sliding panel (26) offer rectangular opening on the internal vertical direction of partition (24), and pressing plate (25) is set
It is set to U-typed structure, straight up or downwards, the both ends of pressing plate (25) horizontal direction are connected to square to the opening of pressing plate (25)
On the partition (24) of shape hole horizontal direction two sides, sliding panel (26) can slide up and down be placed in pressing plate (25) and partition (24) it
Between, pressing plate (25) cooperates with sliding panel (26) covers all rectangular opening, and round hole (27), axis are offered on sliding panel (26)
It holds case (15) and passes through round hole (27) close to the one end of transfer panel (14), organ cover (10) is sheathed on baffle assembly and transfer panel
(14) on the bearing housing (15) between, organ cover (10) is connect close to the one end of transfer panel (14) with bearing housing (15), organ cover
(10) the other end is connect with sliding panel (26).
10. the double bistrique high efficient grinding mechanisms of semiconductor crystal bar according to claim 9, which is characterized in that pressing plate (25) with
Partition is provided with sealing strip between (24).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910236177.4A CN109746803B (en) | 2019-03-27 | 2019-03-27 | High-efficient grinding mechanism of two bistrique of semiconductor crystal bar |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910236177.4A CN109746803B (en) | 2019-03-27 | 2019-03-27 | High-efficient grinding mechanism of two bistrique of semiconductor crystal bar |
Publications (2)
Publication Number | Publication Date |
---|---|
CN109746803A true CN109746803A (en) | 2019-05-14 |
CN109746803B CN109746803B (en) | 2024-05-31 |
Family
ID=66409281
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910236177.4A Active CN109746803B (en) | 2019-03-27 | 2019-03-27 | High-efficient grinding mechanism of two bistrique of semiconductor crystal bar |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN109746803B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110434725A (en) * | 2019-09-12 | 2019-11-12 | 黄石华旦机械制造有限公司 | A kind of crankcase stator foot grinding attachment |
CN115229599A (en) * | 2022-08-09 | 2022-10-25 | 首钢智新迁安电磁材料有限公司 | Grinding machine and rolling production line |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100574998B1 (en) * | 2004-12-03 | 2006-05-02 | 삼성전자주식회사 | Manufacturing apparatus of semiconductor device for semiconductor wafer back grinding and method of fastening grinding plate for back grinding |
CN101612715A (en) * | 2009-06-03 | 2009-12-30 | 北一精机(北京)设计有限公司 | Grinding double sides of disc type rotary work piece method, system and be provided with the vertical double-sided grinding machine of numerical control synchronous double-side bistrique |
CN102259304A (en) * | 2010-12-30 | 2011-11-30 | 洛阳金诺机械工程有限公司 | Grinding head device for grinding crystalline material |
CN102275120A (en) * | 2010-12-30 | 2011-12-14 | 洛阳金诺机械工程有限公司 | Grinding machine used for grinding crystalline material |
CN103084944A (en) * | 2013-01-22 | 2013-05-08 | 大连连城数控机器股份有限公司 | Polycrystalline silicon numerically controlled grinder |
CN202934444U (en) * | 2012-10-17 | 2013-05-15 | 宁夏日晶新能源装备股份有限公司 | Grinding head feeding mechanism of numerical control polycrystal double end face grinding machine |
CN203171371U (en) * | 2013-01-22 | 2013-09-04 | 大连连城数控机器股份有限公司 | Polycrystalline silicon block numerical control grinder |
CN206277264U (en) * | 2016-11-25 | 2017-06-27 | 浙江晶盛机电股份有限公司 | A kind of Multi-function grinding power head device for silicon single crystal rod drum sanding equipment |
CN207448182U (en) * | 2017-10-17 | 2018-06-05 | 浙江晶鸿精密机械制造有限公司 | A kind of multifunction dynamic bistrique for silicon single crystal rod drum sanding equipment |
CN108637801A (en) * | 2018-08-01 | 2018-10-12 | 中北大学 | A kind of ultrasonic vibration aided grinding device and its application |
CN208556901U (en) * | 2018-08-01 | 2019-03-01 | 中北大学 | A kind of ultrasonic vibration aided grinding device |
CN208614476U (en) * | 2018-07-05 | 2019-03-19 | 青岛高测科技股份有限公司 | A kind of grinding mechanism for grinding machine |
CN209737283U (en) * | 2019-03-27 | 2019-12-06 | 青岛高测科技股份有限公司 | High-efficient grinding mechanism of two bistriques of semiconductor crystal bar |
-
2019
- 2019-03-27 CN CN201910236177.4A patent/CN109746803B/en active Active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100574998B1 (en) * | 2004-12-03 | 2006-05-02 | 삼성전자주식회사 | Manufacturing apparatus of semiconductor device for semiconductor wafer back grinding and method of fastening grinding plate for back grinding |
CN101612715A (en) * | 2009-06-03 | 2009-12-30 | 北一精机(北京)设计有限公司 | Grinding double sides of disc type rotary work piece method, system and be provided with the vertical double-sided grinding machine of numerical control synchronous double-side bistrique |
CN102259304A (en) * | 2010-12-30 | 2011-11-30 | 洛阳金诺机械工程有限公司 | Grinding head device for grinding crystalline material |
CN102275120A (en) * | 2010-12-30 | 2011-12-14 | 洛阳金诺机械工程有限公司 | Grinding machine used for grinding crystalline material |
CN202934444U (en) * | 2012-10-17 | 2013-05-15 | 宁夏日晶新能源装备股份有限公司 | Grinding head feeding mechanism of numerical control polycrystal double end face grinding machine |
CN203171371U (en) * | 2013-01-22 | 2013-09-04 | 大连连城数控机器股份有限公司 | Polycrystalline silicon block numerical control grinder |
CN103084944A (en) * | 2013-01-22 | 2013-05-08 | 大连连城数控机器股份有限公司 | Polycrystalline silicon numerically controlled grinder |
CN206277264U (en) * | 2016-11-25 | 2017-06-27 | 浙江晶盛机电股份有限公司 | A kind of Multi-function grinding power head device for silicon single crystal rod drum sanding equipment |
CN207448182U (en) * | 2017-10-17 | 2018-06-05 | 浙江晶鸿精密机械制造有限公司 | A kind of multifunction dynamic bistrique for silicon single crystal rod drum sanding equipment |
CN208614476U (en) * | 2018-07-05 | 2019-03-19 | 青岛高测科技股份有限公司 | A kind of grinding mechanism for grinding machine |
CN108637801A (en) * | 2018-08-01 | 2018-10-12 | 中北大学 | A kind of ultrasonic vibration aided grinding device and its application |
CN208556901U (en) * | 2018-08-01 | 2019-03-01 | 中北大学 | A kind of ultrasonic vibration aided grinding device |
CN209737283U (en) * | 2019-03-27 | 2019-12-06 | 青岛高测科技股份有限公司 | High-efficient grinding mechanism of two bistriques of semiconductor crystal bar |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110434725A (en) * | 2019-09-12 | 2019-11-12 | 黄石华旦机械制造有限公司 | A kind of crankcase stator foot grinding attachment |
CN110434725B (en) * | 2019-09-12 | 2024-05-03 | 黄石华旦机械制造有限公司 | Crankcase stator foot grinding device |
CN115229599A (en) * | 2022-08-09 | 2022-10-25 | 首钢智新迁安电磁材料有限公司 | Grinding machine and rolling production line |
Also Published As
Publication number | Publication date |
---|---|
CN109746803B (en) | 2024-05-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103567799B (en) | Feed arrangement and apply the lathe of this feed arrangement | |
CN109746803A (en) | A kind of double bistrique high efficient grinding mechanisms of semiconductor crystal bar | |
CN103878588B (en) | Metalwork processing method | |
CN208728705U (en) | A kind of perforating device for hardware products processing | |
CN204885122U (en) | Thimble drive arrangement , thimble mechanism and automatic solid brilliant machine thereof | |
CN205497827U (en) | Single crystal silicon rod buddha's warrior attendant line cutter feeding device | |
CN108747623B (en) | Motion mechanism of knife sharpening grinding wheel power assembly | |
CN207710247U (en) | A kind of locking apparatus | |
CN209737283U (en) | High-efficient grinding mechanism of two bistriques of semiconductor crystal bar | |
CN208163806U (en) | The automatic film-taking in means of polaroid die-cutting machine | |
CN207710044U (en) | A kind of bent axle Automatic-clamping cutter device | |
CN203304610U (en) | Plane hole position machining machine | |
CN106981944B (en) | Linear drive apparatus | |
CN213168707U (en) | Center-separation propulsion mechanism | |
CN104690553A (en) | Drilling and milling integrated machine for short section of spring hook | |
CN210790003U (en) | Double-spindle stand column assembly and machining center | |
CN210327323U (en) | Automatic winding machine for winding of motor coil | |
CN209169164U (en) | Battery strings double-manipulator grasping system for solar battery string high speed type-setting machine | |
CN213340073U (en) | Flying fork winding machine with adjustable winding former | |
CN204430774U (en) | A kind of spring pipe nipple bores milling all-in-one | |
CN108994730B (en) | Super-large stroke cutter feeding mechanism | |
CN208199724U (en) | A kind of loading and unloading manipulator | |
CN110181079A (en) | A kind of dedicated disconnecting device of numerically controlled lathe bearing | |
CN218776262U (en) | Cylindrical roller end face grinding and feeding device | |
CN218015964U (en) | Full-automatic punching equipment for metal plates |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |