CN103074594A - 一种应用于平板pecvd设备的石英管及其安装方法 - Google Patents
一种应用于平板pecvd设备的石英管及其安装方法 Download PDFInfo
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110938863A (zh) * | 2018-09-21 | 2020-03-31 | 有研半导体材料有限公司 | 一种高温状态下更换lpcvd炉体内部弥散管的方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09139351A (ja) * | 1995-07-05 | 1997-05-27 | Heraeus Kulzer Gmbh | 半導体製造用の透明石英ガラス製チューブ状構成部材 |
CN1516750A (zh) * | 2001-06-14 | 2004-07-28 | ��ʽ�������Ƹ��� | 等离子cvd装置 |
CN101037768A (zh) * | 2007-04-10 | 2007-09-19 | 武汉工程大学 | 在石英圆管内或外壁镀(类)金刚石薄膜的方法及装置 |
CN101394705A (zh) * | 2008-10-23 | 2009-03-25 | 武汉工程大学 | 一种产生大气压微波辉光等离子体的装置 |
CN201230400Y (zh) * | 2008-04-24 | 2009-04-29 | 大连海事大学 | 一种大气压微波等离子体发生装置 |
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- 2011-10-25 CN CN2011103270954A patent/CN103074594A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09139351A (ja) * | 1995-07-05 | 1997-05-27 | Heraeus Kulzer Gmbh | 半導体製造用の透明石英ガラス製チューブ状構成部材 |
CN1516750A (zh) * | 2001-06-14 | 2004-07-28 | ��ʽ�������Ƹ��� | 等离子cvd装置 |
CN101037768A (zh) * | 2007-04-10 | 2007-09-19 | 武汉工程大学 | 在石英圆管内或外壁镀(类)金刚石薄膜的方法及装置 |
CN201230400Y (zh) * | 2008-04-24 | 2009-04-29 | 大连海事大学 | 一种大气压微波等离子体发生装置 |
CN101394705A (zh) * | 2008-10-23 | 2009-03-25 | 武汉工程大学 | 一种产生大气压微波辉光等离子体的装置 |
Non-Patent Citations (4)
Title |
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葛成林: "石英管PECVD安装操作规程", 《百度文库》 * |
蒋国民: "《气雾剂理论与技术》", 30 September 2010, 北京:化学工业出版社 * |
贾润礼等: "《塑料成型加工新技术》", 31 October 2006, 国防工业出版社 * |
黄文润: "《硅烷偶联剂及硅树脂》", 31 August 2010, 成都:四川科学技术出版社 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110938863A (zh) * | 2018-09-21 | 2020-03-31 | 有研半导体材料有限公司 | 一种高温状态下更换lpcvd炉体内部弥散管的方法 |
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Address after: Shen Gang Town Cheng Road Jiangyin city Jiangsu Province, Wuxi City, No. 1011, 214443 Applicant after: China National Building Materials Group Corporation Jetion Solar (China) Co., Ltd. Address before: Shen Gang Town Cheng Road Jiangyin city Jiangsu Province, Wuxi City, No. 1011, 214443 Applicant before: Jetion Solar(China) Co., Ltd. |
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Application publication date: 20130501 |