CN103047514B - Air floatation vibration isolation platform on basis of air floatation zero-position reference and laser auto-collimation measurement - Google Patents
Air floatation vibration isolation platform on basis of air floatation zero-position reference and laser auto-collimation measurement Download PDFInfo
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Abstract
The invention discloses an air floatation vibration isolation platform on the basis of air floatation zero-position reference and laser auto-collimation measurement, and belongs to ultra-precision measurement and ultra-precision processing equipment. The air floatation vibration isolation platform is provided with three or more vibration isolators, beam splitter prisms and photoelectric detectors. An air floatation vibration isolation platform body and a load thereof are supported by the vibration isolators which are of static-pressure air floatation structures, six-degree-of-freedom postures of the platform are monitored by the beam splitter prisms and the photoelectric detectors, and three-degree-of-freedom postures of the platform body are adjusted by horizontal displacement actuators arranged among the vibration isolators and the platform body. Influence of vibration of the ground to detection for reference beams is effectively isolated by a zero-position reference device supported by air floatation dampers in the air floatation vibration isolation platform, so that the laser beam zero-position reference stability is improved. Besides, horizontal drifting and angular drifting of the reference beams are detected by the photoelectric detectors and are adjusted by a pair of wedge prisms in real time, and the distance and angles of relative positions of the wedge prisms can be adjusted, so that the reference beams can be collimated, and the vibration isolation performance of the platform can be obviously improved.
Description
Technical field
The invention belongs to ultra precise measurement and Ultra-precision Turning is equipped, relate generally to a kind of air flotation vibration isolation measured based on air supporting zero reference and laser auto-collimation.
Background technique
In ultraprecise metrology and measurement and Ultra-precision Turning field, the platform with high quality level attitude is the basic guarantee carrying out precision measuremnt and large-scale integrated circuit (LSI) manufacture.The application of high quality level attitude air flotation vibration isolation is very extensive.In the factory that bioscience, electron optics, precision optical machinery processing, Physicochemical test and research thereof are relevant, the horizontal attitude control of platform can have influence on the experiments of measuring result of machinery equipment and the usability of instrument apparatus, and directly can affect the rejection of air flotation vibration isolation to vibration.Along with the raising of the grade of accuracy of ultra precise measurement instrument and Ultra-precision Turning manufacturing equipment, the impact of ambient vibration on instrument and equipment is increasing.Air flotation vibration isolation as emerging device for vibration insutation also along with the manufacturing development of precision type instrument.The horizontal attitude of air flotation vibration isolation then directly to have influence on above it put the precision of instrument and equipment, being therefore stabilized in precision type instrument manufacture and scientific research of air flotation vibration isolation attitude seems especially important.Particularly for R&D institution of China and enterprise, along with the manufacturing high speed development of vlsi circuit and improving constantly of requiring measuring accuracy and Measurement sensibility, based on the stability of vibration-isolating platform also receive acid test more.
Along with ultraprecise instrument and system are to the improve of operating environment requirements, traditional passive vibration isolation mode restricts by factors such as vibration isolator material behavior, structural rigidity, cannot meet the vibration isolation requirement to low frequency signal.For this problem, active Vibration Isolation combines with passive vibration isolation device by researcher, reaches the object (Vibration Isolation Apparatus For Stage. U.S. Patent Publication No. US006327024B1) promoting low frequency vibration isolation performance.One or more vibration damper is arranged between worktable and pedestal by the method, and damping device has an electric actuator, and the signal of final controlling element to a position transducer responds, and plays active vibration isolation effect, improves its low frequency vibration isolation performance.The method Problems existing is: 1) worktable does not possess pose adjustment function; 2) position sensor feedback signal is relative quantity, does not have absolute zero position benchmark, accurately cannot locate operating position.
In order to realize vibration isolation table stage body pose adjustment function, the China Measures Institute proposes the pneumatic pose adjustment scheme of a kind of vibration-isolating platform (vibrating isolation foundation precise leveling system.Patent publication No.: CN 101353897A).The program adopts two grad vibration isolation platform, and precision optics vibration-isolating platform is positioned on vibrating isolation foundation, by measuring the angle of vibration-isolating platform and horizontal plane, carries out inflation/deflation control to pneumatic spring, reaches the object of adjustment vibration-isolating platform attitude.Program Problems existing is: 1) in public technology scheme, vibration-isolating platform cannot realize accurate location; 2) by adjusting vibration-isolating platform attitude to pneumatic spring inflation/deflation, system response time is slow.
China Watercraft The Ninth Design & Research Institute Engineering Co., Ltd. proposes a kind of every (the microvibration-preventing basis of multiple stage precision type instrument centralized arrangement, micro-basis that shakes.Patent publication No.: CN 200920078087.9).The program devises two-layer independently vibration isolation table up and down, and upper strata adopts T-shaped cross section vibration isolation base, and vibration isolation base is supported on lower floor's concrete beam by vibration isolation element, and this structure can reduce vibrating isolation system barycenter, improves vibration isolation efficiency.The problem of the program is, only adopts passive vibration isolation mode, cannot isolate low-frequency vibration signal.
Chongqing Normal University proposes a kind of precise vibration isolation device (a kind of precise vibration isolation device.Publication number: CN200920207338.9).The program adopts two-layer vibration insulation structure, first layer passive vibration isolation device is formed by pneumatic spring is in parallel with magnetic rheological body, second layer vibration isolator is formed by pneumatic spring is in parallel with micro actuator, double-layer structure tandem arrangement, and the program improves the anti-vibration performance of isolation mounting to low frequency signal.The problem of the program is, vibration-isolating platform does not possess pose adjustment function.
The common problem that existing patent of invention exists:
1. the measurement of pair vibration-isolating platform is relative position, does not have absolute zero position benchmark, therefore accurately cannot locate vibration-isolating platform position;
2., not to the attitude highi degree of accuracy control program of vibration-isolating platform, therefore vibration-isolating platform cannot obtain high-level anti-vibration performance.
The detection scheme of air flotation vibration isolation stage body horizontal attitude has multiple, and pinpoint method mainly carrys out detection level attitude by setting up rectangular coordinate system, measures stage body separately by degree change in displacement.The displacement measurement of air flotation vibration isolation stage body need adopt optical non-contact method of measurement, otherwise sensor will give vibrating isolation system additional stiffness and damping, destroys air flotation vibration isolation natural frequency, reduces anti-vibration performance.The method kind of conventional contactless optical measurement displacement has and detects based on ccd image, based on the frequency discrimination of laser and amplitude discrimination measurement etc.Due to the change in displacement that platform stage body is on six-freedom degree, mutually interfere between each degrees of freedom, the method for measurement based on image cannot realize; And be difficult to realize high-precision measurement based on the impact that the method Stimulated Light self of laser detection is drifted about.But what require air flotation vibration isolation anti-vibration performance improves constantly, require to reach micron dimension to the control accuracy of stage body attitude displacement, and platform is all large or in super large stage body situation.So have that Bit andits control precision is high, anti-vibration performance is excellent, reach the large-scale of more than VC-F rank or super sized type air flotation vibration isolation be ultra precise measurement both at home and abroad at present and the active demand of manufacturing equipment every/dampening apparatus.
Summary of the invention
Object of the present invention is exactly for above-mentioned prior art Problems existing, in conjunction with actual demand, design provides a kind of air flotation vibration isolation measured based on air supporting zero reference and laser auto-collimation, reaches the stability improving laser beam zero reference, the object realizing Reference beam calibration, improve platform anti-vibration performance.
Technical solution of the present invention is:
Based on the air flotation vibration isolation that air supporting zero reference and laser auto-collimation are measured, described air flotation vibration isolation stage body is configured on more than 3 or 3 equally distributed vibration isolators, vibration isolator is configured on pedestal, described vibration isolator is by vibration isolator pedestal, vibration isolator support and vibration isolator worktable are formed, vibration isolator worktable is arranged in vibration isolator pedestal, vibration isolator support is configured on vibration isolator pedestal lateral part, configuration level displacement actuator between each vibration isolator and air flotation vibration isolation stage body, described Horizontal displacement final controlling element adopts the straight line type voice coil motor of horizontal positioned, straight line type voice coil motor mover and the air flotation vibration isolation stage body of Horizontal displacement final controlling element are connected, the straight line type voice coil motor stator arrangement of Horizontal displacement final controlling element is on vibration isolator support, measure the laser position optical path of air flotation vibration isolation stage body six-degree-of-freedom posture by He-Ne laser, laser collimation system, zero reference device, stage body attitude photoelectric detector, stage body attitude dispersion prism is formed, wherein stage body attitude photoelectric detector, stage body attitude dispersion prism is packed on air flotation vibration isolation stage body lower side, described stage body attitude dispersion prism comprises the first dispersion prism, second dispersion prism, 3rd dispersion prism and the 4th dispersion prism, and the first dispersion prism is positioned in the rear side transmission laser light path of laser collimation system, second dispersion prism and the 3rd dispersion prism lay respectively in the transmittance and reflectance light path of the first dispersion prism, 4th dispersion prism is positioned on the reflected light path of the 3rd dispersion prism, described stage body attitude photoelectric detector comprises the first photoelectric detector, the second photoelectric detector, the 3rd photoelectric detector and the 4th photoelectric detector, wherein the first photoelectric detector and the second photoelectric detector lay respectively in the transmittance and reflectance light path of the second dispersion prism, and the 3rd photoelectric detector and the 4th photoelectric detector lay respectively in the transmittance and reflectance light path of the 4th dispersion prism, described laser collimation system float with angle by laser bundle-enlarging collimation system, convex lens, flat drift and detects photoelectric detector, light beam regulating mechanism, puts down and to float and angle is floated and detected dispersion prism and form, wherein light beam regulating mechanism floats in the drift of laser bundle-enlarging collimation system peace and angle and detects between dispersion prism, convex lens float in flat drift and angle and detect dispersion prism peace and to float and angle is floated and detected between photoelectric detector, and light beam regulating mechanism comprises angle of wedge prism, the angle of wedge prism of adjustable relative position spacing and angle, described zero reference device comprises zero reference photoelectric detector mountion plate and the natural frequency passive damper lower than 0.5Hz, zero reference photoelectric detector mountion plate is arranged on pedestal by passive damper, and is positioned in the downside refractive light paths of laser collimation system, float flat drift that photoelectric detector forms and angle by flat drift photoelectric detector and angle to float and detect photoelectric detector and be packed on zero reference device zero reference photoelectric detector mountion plate, its initial position, each flat drift, angle drift photoelectric detector receiving plane are vertical with respective moving direction respectively, and receiving plane center overlaps with corresponding beam center.
The drift of described stage body attitude photoelectric detector peace and angle are floated and are detected photoelectric detector and comprise position sensitive detector PSD, CCD, four-quadrant detector QPD and silicon photocell.
Described passive damper adopts air floating structure, and passive damper is zero stiffness vibration damper.
The good result of technological innovation of the present invention and generation is:
1) this device zero reference device adopts passive damper to support, passive damper natural frequency is lower than 0.5Hz, the impact that the vibration effectively can isolating ground detects Reference beam, substantially increases the stability of laser beam zero reference, and this is one of innovative point of the present invention and outstanding advantages.
2) the present invention adopts two photoelectric detectors to detect the flat drift of Reference beam and angle drift respectively, and cuts down flat drift and the angle drift of Reference beam in real time with the angle of wedge prism of a pair adjustable relative position spacing and angle, realizes Reference beam and calibrates; Adopt photoelectric detector and the monitoring of dispersion prism implementation platform six-degree-of-freedom posture, and realized controlling every/vibration reduction platform horizontal motion highi degree of accuracy by Horizontal displacement final controlling element, improve platform anti-vibration performance, this is innovative point of the present invention and outstanding advantages two.
Accompanying drawing illustrates:
Fig. 1 is the air flotation vibration isolation three-dimensional structure schematic diagram measured based on air supporting zero reference and laser auto-collimation;
Fig. 2 is the structural representation of the air flotation vibration isolation measured based on air supporting zero reference and laser auto-collimation;
Fig. 3 is the plan view of Fig. 2;
Fig. 4 is laser collimation system structural representation;
Fig. 5 is zero reference apparatus structure schematic diagram;
Fig. 6 is light beam regulating mechanism two schemes structural representation;
Fig. 7 is that the flat drift of laser beam floats Cleaning Principle schematic diagram with angle;
Fig. 8 is vibration isolator and Horizontal displacement final controlling element assembly structure schematic diagram.
Piece number in figure: 1-He-Ne laser; 2-laser collimation system; 3-zero reference device; 3a-zero reference photoelectric detector mountion plate; 3b-passive damper; 4-vibration isolator; 4a-vibration isolator pedestal; 4b-vibration isolator support; 4c-vibration isolator worktable; 5-pedestal; 6-air flotation vibration isolation stage body; 7-stage body attitude photoelectric detector; 7a-first photoelectric detector; 7b-second photoelectric detector; 7c-the 3rd photoelectric detector; 7d-the 4th photoelectric detector; 8-Horizontal displacement final controlling element; 8a-straight line type voice coil motor mover; 8b-straight line type voice coil motor stator; The flat drift of 9-is floated with angle and is detected dispersion prism; 10-stage body attitude dispersion prism; 10a-first dispersion prism; 10b-second dispersion prism; 10c-the 3rd dispersion prism; 10d-the 4th dispersion prism; 11-laser bundle-enlarging collimation system; 12-convex lens; The flat drift of 13-is floated with angle and is detected photoelectric detector; 13a-flat drift photoelectric detector; 13b-angle drift photoelectric detector; 14-light beam regulating mechanism; 14a-angle of wedge prism A; 14b-angle of wedge prism B.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:
Based on the air flotation vibration isolation that air supporting zero reference and laser auto-collimation are measured, described air flotation vibration isolation stage body 6 is configured on more than 3 or 3 equally distributed vibration isolators 4, vibration isolator 4 is configured on pedestal 5, described vibration isolator 4 is by vibration isolator pedestal 4a, vibration isolator support 4b and vibration isolator worktable 4c is formed, vibration isolator worktable 4c is arranged in vibration isolator pedestal 4a, vibration isolator support 4b is configured on vibration isolator pedestal 4a lateral part, configuration level displacement actuator 8 between each vibration isolator 4 and air flotation vibration isolation stage body 6, described Horizontal displacement final controlling element 8 adopts the straight line type voice coil motor of horizontal positioned, the straight line type voice coil motor mover 8a of Horizontal displacement final controlling element 8 and air flotation vibration isolation stage body 6 are connected, the straight line type voice coil motor stator 8b of Horizontal displacement final controlling element 8 is configured on vibration isolator support 4b, measure the laser position optical path of air flotation vibration isolation stage body 6 six-degree-of-freedom posture by He-Ne laser 1, laser collimation system 2, zero reference device 3, stage body attitude photoelectric detector 7, stage body attitude dispersion prism 10 is formed, wherein stage body attitude photoelectric detector 7, stage body attitude dispersion prism 10 is packed on air flotation vibration isolation stage body 6 lower side, described stage body attitude dispersion prism 10 comprises the first dispersion prism 10a, second dispersion prism 10b, 3rd dispersion prism 10c and the 4th dispersion prism 10d, and the first dispersion prism 10a is positioned in the rear side transmission laser light path of laser collimation system 2, second dispersion prism 10b and the 3rd dispersion prism 10c lays respectively in the transmittance and reflectance light path of the first dispersion prism 10a, 4th dispersion prism 10d is positioned on the reflected light path of the 3rd dispersion prism 10c, described stage body attitude photoelectric detector 7 comprises the first photoelectric detector 7a, the second photoelectric detector 7b, the 3rd photoelectric detector 7c and the 4th photoelectric detector 7d, wherein the first photoelectric detector 7a and the second photoelectric detector 7b lays respectively in the transmittance and reflectance light path of the second dispersion prism 10b, and the 3rd photoelectric detector 7c and the 4th photoelectric detector 7d lays respectively in the transmittance and reflectance light path of the 4th dispersion prism 10d, described laser collimation system 2 float with angle by laser bundle-enlarging collimation system 11, convex lens 12, flat drift and detects photoelectric detector 13, light beam regulating mechanism 14, puts down and to float and angle is floated and detected dispersion prism 9 and form, wherein light beam regulating mechanism 14 floats in the drift of laser bundle-enlarging collimation system 11 peace and angle and detects between dispersion prism 9, convex lens 12 float in flat drift and angle and detect dispersion prism 9 peace and to float and angle is floated and detected between photoelectric detector 13, and light beam regulating mechanism 14 comprises angle of wedge prism A14a, the angle of wedge prism B14b of adjustable relative position spacing and angle, described zero reference device 3 comprises zero reference photoelectric detector mountion plate 3a and the natural frequency passive damper 3b lower than 0.5Hz, zero reference photoelectric detector mountion plate 3a is arranged on pedestal 5 by passive damper 3b, and is positioned in the downside refractive light paths of laser collimation system 2, float flat drift that photoelectric detector 13b forms and angle by flat drift photoelectric detector 13a and angle to float and detect photoelectric detector 13 and be packed on the zero reference photoelectric detector mountion plate 3a of zero reference device 3, its initial position, it is vertical with respective moving direction respectively that photoelectric detector 13a, 13b receiving plane is floated in each flat drift, angle, and receiving plane center overlaps with corresponding beam center.
The drift of described stage body attitude photoelectric detector 7 peace and angle are floated and are detected photoelectric detector 13 and comprise position sensitive detector PSD, CCD, four-quadrant detector QPD and silicon photocell.
Described passive damper 3b adopts air floating structure, and passive damper 3b is zero stiffness vibration damper.
Workflow of the present invention is as follows:
Stage body attitude is measured by laser position optical path, a branch of source laser that laser 1 sends is first by laser collimation system 2, floated by flat drift and angle and detect dispersion prism 9 and separate two bundle Reference beams, float photoelectric detector 13b by flat drift photoelectric detector 13a and angle respectively to receive, detect flat drift value and the angle drift value of Reference beam self, finally by its flat drift of light beam regulating mechanism 14 adjustment in real time and angle drift.Flat drift and angle floats and are detected photoelectric detector 13 and effectively isolate the impact that the vibration that is greater than 0.5Hz detects Reference beam, realize zero reference device 3 and stage body and greatly isolate, as the position absolute zero position benchmark of air flotation vibration isolation stage body 6 six-freedom degree.Light beam separates four road light beams through stage body attitude dispersion prism 10 again, finally received by stage body attitude photoelectric detector 7, realize the position probing of the six-freedom degree of stage body attitude thus, after resolving, realize stage body attitude Three Degree Of Freedom by Horizontal displacement final controlling element 8 again adjust control in real time.
Because laser beam has flat drift and angle drift, therefore reference path has certain deviation, so need all the time all to adjust, to ensure the accuracy of Reference beam.Ensure that the level of Reference beam is the basis ensureing plateau levels attitude.The flat drift of Reference beam and angle are floated to be floated by the flat drift be fixed on zero reference device 3 and angle and are detected photoelectric detector 13 and measure.The flat drift of light beam is detected by photoelectric detector 13a, and angle drift of laser is detected by the photoelectric detector 13b with convex lens 12, and suppresses by light beam regulating mechanism 14.Light beam regulating mechanism 14 passes through angle and the relative position spacing of adjustment two angle of wedge prisms, suppresses the angle drift peace drift of light beam.After determining Reference beam, the flat drift of record demarcation floats with angle the output value detecting photoelectric detector 13 is initial value, makes output value approach to the initial value demarcated during calibration.
During work, Reference beam is by real time calibration, photoelectric detector real-time sampling, adopt 12 values at every turn and remove a maximum value and a minimum value, and 10 remaining values are averaged make comparisons with respective initial value respectively, just can obtain the attitudes vibration of air flotation vibration isolation stage body 6 under ground vibration affects through process.Control system, according to this measured value level of control displacement actuator 8 Three Degree Of Freedom adjustment stage body attitude error, makes air flotation vibration isolation stage body be in metastable state, thus makes air flotation vibration isolation have less vibration transmissibility, realizes every/vibration damping.
Claims (3)
1. based on the air flotation vibration isolation that air supporting zero reference and laser auto-collimation are measured, it is characterized in that air flotation vibration isolation stage body (6) is configured on more than 3 or 3 equally distributed vibration isolators (4), vibration isolator (4) is configured on pedestal (5), described vibration isolator (4) is by vibration isolator pedestal (4a), vibration isolator support (4b) and vibration isolator worktable (4c) are formed, vibration isolator worktable (4c) is arranged in vibration isolator pedestal (4a), vibration isolator support (4b) is configured on vibration isolator pedestal (4a) lateral part, configuration level displacement actuator (8) between each vibration isolator (4) and air flotation vibration isolation stage body (6), described Horizontal displacement final controlling element (8) adopts the straight line type voice coil motor of horizontal positioned, straight line type voice coil motor mover (8a) and the air flotation vibration isolation stage body (6) of Horizontal displacement final controlling element (8) are connected, the straight line type voice coil motor stator (8b) of Horizontal displacement final controlling element (8) is configured on vibration isolator support (4b), measure the laser position optical path of air flotation vibration isolation stage body (6) six-degree-of-freedom posture by He-Ne laser (1), laser collimation system (2), zero reference device (3), stage body attitude photoelectric detector (7), stage body attitude dispersion prism (10) is formed, wherein stage body attitude photoelectric detector (7), stage body attitude dispersion prism (10) is packed on air flotation vibration isolation stage body (6) lower side, described stage body attitude dispersion prism (10) comprises the first dispersion prism (10a), second dispersion prism (10b), 3rd dispersion prism (10c) and the 4th dispersion prism (10d), and the first dispersion prism (10a) is positioned in the rear side transmission laser light path of laser collimation system (2), second dispersion prism (10b) and the 3rd dispersion prism (10c) lay respectively in the transmittance and reflectance light path of the first dispersion prism (10a), 4th dispersion prism (10d) is positioned on the reflected light path of the 3rd dispersion prism (10c), described stage body attitude photoelectric detector (7) comprises the first photoelectric detector (7a), the second photoelectric detector (7b), the 3rd photoelectric detector (7c) and the 4th photoelectric detector (7d), wherein the first photoelectric detector (7a) and the second photoelectric detector (7b) lay respectively in the transmittance and reflectance light path of the second dispersion prism (10b), and the 3rd photoelectric detector (7c) and the 4th photoelectric detector (7d) lay respectively in the transmittance and reflectance light path of the 4th dispersion prism (10d), described laser collimation system (2) is by laser bundle-enlarging collimation system (11), convex lens (12), flat drift is floated with angle and is detected photoelectric detector (13), light beam regulating mechanism (14), flat drift and angle are floated and are detected dispersion prism (9) and form, wherein light beam regulating mechanism (14) is positioned at the drift of laser bundle-enlarging collimation system (11) peace and angle is floated and detected between dispersion prism (9), convex lens (12) are positioned at flat drift and angle and float and detect that dispersion prism (9) is peaceful to be floated and angle is floated and detected between photoelectric detector (13), light beam regulating mechanism (14) comprises the angle of wedge prism A (14a) of adjustable relative position spacing and angle, angle of wedge prism B (14b), described zero reference device (3) comprises zero reference photoelectric detector mountion plate (3a) and the natural frequency passive damper (3b) lower than 0.5Hz, zero reference photoelectric detector mountion plate (3a) is arranged on pedestal (5) by passive damper (3b), and is positioned in the downside refractive light paths of laser collimation system (2), float flat drift that photoelectric detector (13b) forms and angle by flat drift photoelectric detector (13a) and angle to float and detect photoelectric detector (13) and be packed on the zero reference photoelectric detector mountion plate (3a) of zero reference device (3), its initial position, each flat drift, angle drift photoelectric detector (13a, 13b) receiving plane respectively with respective moving direction level, and receiving plane center overlaps with corresponding beam center.
2. the air flotation vibration isolation measured based on air supporting zero reference and laser auto-collimation according to claim 1, is characterized in that described stage body attitude photoelectric detector (7) peace drift and angle are floated and detects photoelectric detector (13) and comprise position sensitive detector PSD, CCD, four-quadrant detector QPD and silicon photocell.
3. the air flotation vibration isolation measured based on air supporting zero reference and laser auto-collimation according to claim 1, it is characterized in that described passive damper (3b) adopts air floating structure, and passive damper (3b) is zero stiffness vibration damper.
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| CN103309355B (en) * | 2013-05-20 | 2015-07-22 | 哈尔滨工业大学 | Measurement and monitoring method for centroid skewing permitted interference of multi-axis support air floating platform |
| CN103277644B (en) * | 2013-05-20 | 2015-11-18 | 哈尔滨工业大学 | Multi-shaft support air floatation platform |
| CN109048028A (en) * | 2018-08-07 | 2018-12-21 | 航天恒星科技有限公司 | wire bonding method and system |
| CN109625193B (en) * | 2018-12-27 | 2020-08-28 | 自然资源部第一海洋研究所 | Scientific research ship with buoyant raft vibration reduction system |
| CN113884004B (en) * | 2021-09-08 | 2024-06-07 | 长江存储科技有限责任公司 | Air floatation system of scanning electron microscope for feature size measurement and scanning electron microscope |
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| JP2000274482A (en) * | 1999-01-18 | 2000-10-03 | Canon Inc | Active vibration resistant device, exposure device and method, and manufacture of device |
| JP2002364702A (en) * | 2001-06-12 | 2002-12-18 | Canon Inc | Vibration removing device and semiconductor manufacturing device having the same |
| JP2003202051A (en) * | 2002-01-04 | 2003-07-18 | Canon Inc | Vibration-proofing device |
| CN1318775C (en) * | 2005-01-18 | 2007-05-30 | 哈尔滨工业大学 | Air spring vibration isolation foundation with electromechanical damper |
| CN1644954A (en) * | 2005-01-18 | 2005-07-27 | 哈尔滨工业大学 | Displacement controllable air spring vibrating insulative basement |
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