CN103075616B - Gas floating vibration isolation platform based on air spring zero reference and laser self-collimating measurement - Google Patents

Gas floating vibration isolation platform based on air spring zero reference and laser self-collimating measurement Download PDF

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Publication number
CN103075616B
CN103075616B CN201210571940.7A CN201210571940A CN103075616B CN 103075616 B CN103075616 B CN 103075616B CN 201210571940 A CN201210571940 A CN 201210571940A CN 103075616 B CN103075616 B CN 103075616B
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photoelectric detector
vibration
dispersion prism
angle
laser
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CN103075616A (en
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赵勃
谭久彬
王雷
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Harbin Institute of Technology
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Harbin Institute of Technology
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Abstract

The invention discloses a gas floating vibration isolation platform based on air spring zero reference and laser self-collimating measurement, and the platform belongs to the field of ultraprecision measuring and ultraprecision processing equipment; according to the device, three or more vibration isolators of static gas floating structures are adopted to support a gas floating vibration isolation platform body and a load thereof; the posture of the platform with six degrees of freedom is monitored by a dispersion prism and a photoelectric detector, and an actuator is displaced between the vibration isolator and the platform body horizontally, so that the posture of the platform body with three degrees of freedom is adjusted; in the device, a zero reference device which is supported by an air spring-type vibration absorber effectively isolates the impact of ground vibration on the detection of a reference light beam, so that the stability in the zero reference of the laser beam is improved; the photoelectric detector is used for detecting the displacement drift and the angle drift of the reference light beam, the displacement drift and the angle drift of the reference light beam are adjusted by a pair of wedge angle prisms with the spacing and the angles of relative positions being adjustable in real time, so that the calibration of the reference light beam is realized, and the vibration isolation performance of the platform can be significantly improved.

Description

Air supporting vibration-isolating platform based on pneumatic spring zero reference and laser auto-collimation measurement
Technical field
The invention belongs to ultra precise measurement and ultraprecise process unit, relate generally to a kind of air supporting vibration-isolating platform based on pneumatic spring zero reference and laser auto-collimation measurement.
Background technique
In ultraprecise metrology and measurement and ultraprecise manufacture field, the platform with high quality level attitude is the basic guarantee that carries out precision measuremnt and large-scale integrated circuit (LSI) manufacture.The application of high quality level attitude air supporting vibration-isolating platform is very extensive.In bioscience, electron optics, precision optical machinery processing, physics and chemistry test and study in relevant factory, the horizontal attitude control of platform can have influence on the experiments of measuring result of machinery equipment and the usability of instrument apparatus, and can directly affect the rejection of air supporting vibration-isolating platform to vibration.Along with the raising of the grade of accuracy of ultra precise measurement instrument and ultraprecise manufacturing equipment, ambient vibration is increasing on the impact of instrument and equipment.Air supporting vibration-isolating platform as emerging device for vibration insutation also along with the manufacturing development of precision type instrument.The horizontal attitude of air supporting vibration-isolating platform directly have influence on above it the precision of the instrument of putting and equipment, so being stabilized in precision type instrument manufacture and scientific research of air supporting vibration-isolating platform attitude seems especially important.Particularly for China R&D institution and enterprise, along with the manufacturing high speed development of vlsi circuit and improving constantly that measuring accuracy and Measurement sensibility are required, as the stability of basic vibration-isolating platform, be also subject to acid test more.
Along with the raising that ultraprecise instrument and system require working environment, traditional passive vibration isolation mode is restricted by the factors such as vibration isolator material behavior, structural rigidity, cannot meet the vibration isolation requirement to low frequency signal.For this problem, researcher combines active Vibration Isolation with passive vibration isolation device, reaches the object (Vibration Isolation Apparatus For Stage. U.S. Patent Publication No. US006327024B1) that promotes low frequency vibration isolation performance.The method is arranged on one or more vibration dampers between worktable and pedestal, and damping device has an electric actuator, and final controlling element responds the signal of a position transducer, plays active vibration isolation effect, has promoted its low frequency vibration isolation performance.The problem that the method exists is: 1) worktable does not possess attitude adjustment function; 2) position sensor feedback signal is relative quantity, there is no absolute zero position benchmark, cannot accurately locate operating position.
In order to realize vibration isolation table stage body attitude, adjust function, the China Measures Institute has proposed the pneumatic attitude of a kind of vibration-isolating platform and has adjusted scheme (vibrating isolation foundation precise leveling system.Patent publication No.: CN 101353897A).This scheme adopts two grad vibration isolation platform, and precision optics vibration-isolating platform is positioned on vibrating isolation foundation, by measuring the angle of vibration-isolating platform and horizontal plane, pneumatic spring is carried out to inflation/deflation control, reaches the object of adjusting vibration-isolating platform attitude.The problem that this scheme exists is: 1) in public technology scheme, vibration-isolating platform cannot be realized accurate location; 2) by pneumatic spring inflation/deflation is adjusted to vibration-isolating platform attitude, system response time is slow.
China Watercraft The Ninth Design & Research Institute Engineering Co., Ltd. proposes a kind of every (the microvibration-preventing basis of many precision type instrument centralized arrangement, micro-basis that shakes.Patent publication No.: CN 200920078087.9).This conceptual design upper and lower two-layer independently vibration isolation table, upper strata adopts T-shaped cross section vibration isolation base, vibration isolation base is supported on lower floor's concrete beam by vibration isolation element, this structure can reduce vibrating isolation system barycenter, has improved vibration isolation efficiency.The problem of this scheme is, only adopts passive vibration isolation mode, cannot isolate low-frequency vibration signal.
Chongqing Normal University proposes a kind of precise vibration isolation device (a kind of precise vibration isolation device.Publication number: CN200920207338.9).This scheme adopts two-layer vibration insulation structure, first layer passive vibration isolation device forms by pneumatic spring is in parallel with magnetic rheological body, second layer vibration isolator forms by pneumatic spring is in parallel with micro actuator, double-layer structure tandem arrangement, and this scheme has improved the anti-vibration performance of isolation mounting to low frequency signal.The problem of this scheme is, vibration-isolating platform does not possess attitude and adjusts function.
The common problem that existing patent of invention exists:
1. the measurement of pair vibration-isolating platform is relative position, there is no absolute zero position benchmark, therefore cannot accurately locate vibration-isolating platform position;
2. the attitude highi degree of accuracy control program to vibration-isolating platform not, so vibration-isolating platform cannot obtain high-level anti-vibration performance.
The detection scheme of air supporting vibration-isolating platform stage body horizontal attitude has multiple, and pinpoint method is mainly to carry out detection level attitude by setting up rectangular coordinate system, measures stage body separately by degree change in displacement.The displacement measurement of air supporting vibration-isolating platform stage body need adopt optical non-contact method of measurement, otherwise sensor will be given vibrating isolation system additional stiffness and damping, destroys air supporting vibration-isolating platform natural frequency, reduces anti-vibration performance.The method kind that tradition non-contact optical is measured displacement have based on ccd image detect, frequency discrimination based on laser and amplitude discrimination measurement etc.Because platform stage body is the change in displacement on six-freedom degree, between each degrees of freedom, mutually to interfere, the method for measurement based on image cannot realize; And the impact of method Stimulated Light self based on laser detection drift is difficult to realize high-precision measurement.But what air supporting vibration-isolating platform anti-vibration performance was required improves constantly, the control accuracy of stage body attitude displacement is required to reach micron dimension, and platform is all in large or super large stage body situation.So have that displacement control accuracy is high, anti-vibration performance is excellent, reach more than VC-F rank large-scale or super sized type air supporting vibration-isolating platform be ultra precise measurement both at home and abroad at present and the active demand of manufacturing equipment every/dampening apparatus.
Summary of the invention
Object of the present invention is exactly the problem existing for above-mentioned prior art, in conjunction with actual demand, design provides a kind of air supporting vibration-isolating platform of measuring based on pneumatic spring zero reference and laser auto-collimation, reach improve laser beam zero reference stability, realize Reference beam calibration, improve the object of platform anti-vibration performance.
Technical solution of the present invention is:
Air supporting vibration-isolating platform based on pneumatic spring zero reference and laser auto-collimation measurement, described air supporting vibration-isolating platform stage body is configured on the above equally distributed vibration isolators of 3 or 3, vibration isolator is configured on pedestal, described vibration isolator is by vibration isolator pedestal, vibration isolator support and vibration isolator worktable form, vibration isolator worktable is arranged in vibration isolator pedestal, vibration isolator support is configured on vibration isolator pedestal lateral part, configuration level displacement actuator between each vibration isolator and air supporting vibration-isolating platform stage body, described Horizontal displacement final controlling element adopts the rotary-type voice coil motor of horizontal positioned, rotary-type voice coil motor mover and the air supporting vibration-isolating platform stage body of Horizontal displacement final controlling element are connected, the rotary-type voice coil motor stator arrangement of Horizontal displacement final controlling element is on vibration isolator bearing, measure the laser position optical path of air supporting vibration-isolating platform stage body six-degree-of-freedom posture by He-Ne laser, laser collimation system, zero reference device, stage body attitude photoelectric detector, stage body attitude dispersion prism forms, stage body attitude photoelectric detector wherein, stage body attitude dispersion prism is packed on air supporting vibration-isolating platform stage body lower side, described stage body attitude dispersion prism comprises the first dispersion prism, the second dispersion prism, the 3rd dispersion prism and the 4th dispersion prism, and the first dispersion prism is positioned in the rear side transmission laser light path of laser collimation system, the second dispersion prism and the 3rd dispersion prism lay respectively in the transmission and reflected light path of the first dispersion prism, the 4th dispersion prism is positioned on the reflected light path of the 3rd dispersion prism, described stage body attitude photoelectric detector comprises the first photoelectric detector, the second photoelectric detector, the 3rd photoelectric detector and the 4th photoelectric detector, wherein the first photoelectric detector and the second photoelectric detector lay respectively in the transmission and reflected light path of the second dispersion prism, and the 3rd photoelectric detector and the 4th photoelectric detector lay respectively in the transmission and reflected light path of the 4th dispersion prism, described laser collimation system by laser bundle-enlarging collimation system, convex lens, flat float float with angle detect photoelectric detector, light beam regulating mechanism, flat floating with angle floated and detected dispersion prism and form, wherein light beam regulating mechanism floats and angle is floated and detected between dispersion prism in laser bundle-enlarging collimation system peace, convex lens float and angle is floated and detected that dispersion prism peace is floated and angle is floated and detected between photoelectric detector flat, and light beam regulating mechanism comprises angle of wedge prism, the angle of wedge prism of capable of regulating relative position spacing and angle, described zero reference device comprises that zero reference photoelectric detector mountion plate and natural frequency are lower than the passive damper of 0.5Hz, zero reference photoelectric detector mountion plate is arranged on pedestal by passive damper, and is positioned in the downside refractive light paths of laser collimation system, by flat flat floating with angle of floating that photoelectric detector and angle float that photoelectric detector forms, float and detect photoelectric detector and be packed on zero reference device zero reference photoelectric detector mountion plate, its initial position, each is flat floats, angle float photoelectric detector receiving plane respectively with moving direction level separately, and receiving plane center overlaps with corresponding beam center.
Described stage body attitude photoelectric detector peace is floated with angle and is floated and detect photoelectric detector and comprise position sensitive detector PSD, CCD, four-quadrant detector QPD and silicon photocell.
Described passive damper adopts pneumatic spring structure, and passive damper is zero stiffness vibration damper.
Described Horizontal displacement final controlling element adopts the rotary-type voice coil motor of horizontal positioned, rotary-type voice coil motor mover and the air supporting vibration-isolating platform stage body of Horizontal displacement final controlling element are connected, and the rotary-type voice coil motor stator arrangement of Horizontal displacement final controlling element is on vibration isolator bearing.
The good result of technological innovation of the present invention and generation is:
1) this device zero reference device adopts passive damper to support, passive damper natural frequency is lower than 0.5Hz, the impact that the vibration that can effectively isolate ground detects Reference beam, has improved the stability of laser beam zero reference greatly, and this is one of innovative point of the present invention and outstanding advantages.
2) flat the floating with angle that the present invention adopts two photoelectric detectors to detect respectively Reference beam floated, and floats with flat the floating with angle that the angle of wedge prism of a pair of capable of regulating relative position spacing and angle is subdued Reference beam in real time, realizes Reference beam calibration; Adopt photoelectric detector and the monitoring of dispersion prism implementation platform six-degree-of-freedom posture, and realized every/vibration reduction platform horizontal motion highi degree of accuracy and being controlled by Horizontal displacement final controlling element, improved platform anti-vibration performance, this is two of innovative point of the present invention and outstanding advantages.
Accompanying drawing explanation:
Fig. 1 is the air supporting vibration-isolating platform three-dimensional structure schematic diagram based on pneumatic spring zero reference and laser auto-collimation measurement;
Fig. 2 is the structural representation of the air supporting vibration-isolating platform based on pneumatic spring zero reference and laser auto-collimation measurement;
Fig. 3 is the plan view of Fig. 2;
Fig. 4 is laser collimation system structural representation;
Fig. 5 is zero reference apparatus structure schematic diagram;
Fig. 6 is light beam regulating mechanism two schemes structural representation;
Fig. 7 is that flat the floating with angle of laser beam floated detection principle schematic;
Fig. 8 is vibration isolator and Horizontal displacement final controlling element assembly structure schematic diagram.
Piece number in figure: 1-He-Ne laser; 2-laser collimation system; 3-zero reference device; 3a-zero reference photoelectric detector mountion plate; 3b-passive damper; 4-vibration isolator; 4a-vibration isolator pedestal; 4b-vibration isolator support; 4c-vibration isolator worktable; 5-pedestal; 6-air supporting vibration-isolating platform stage body; 7-stage body attitude photoelectric detector; 7a-the first photoelectric detector; 7b-the second photoelectric detector; 7c-the 3rd photoelectric detector; 7d-the 4th photoelectric detector; 8-Horizontal displacement final controlling element; The rotary-type voice coil motor mover of 8a-; The rotary-type voice coil motor stator of 8b-; Flat the floating with angle of 9-floated detection dispersion prism; 10-stage body attitude dispersion prism; 10a-the first dispersion prism; 10b-the second dispersion prism; 10c-the 3rd dispersion prism; 10d-the 4th dispersion prism; 11-laser bundle-enlarging collimation system; 12-convex lens; Flat the floating with angle of 13-floated detection photoelectric detector; The flat photoelectric detector that floats of 13a-; 13b-floats photoelectric detector in angle; 14-light beam regulating mechanism; 14a-angle of wedge prism A; 14b-angle of wedge prism B.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:
Air supporting vibration-isolating platform based on pneumatic spring zero reference and laser auto-collimation measurement, described air supporting vibration-isolating platform stage body 6 is configured on the above equally distributed vibration isolators 4 of 3 or 3, vibration isolator 4 is configured on pedestal 5, described vibration isolator 4 is by vibration isolator pedestal 4a, vibration isolator support 4b and vibration isolator worktable 4c form, vibration isolator worktable 4c is arranged in vibration isolator pedestal 4a, vibration isolator support 4b is configured on vibration isolator pedestal 4a lateral part, configuration level displacement actuator 8 between each vibration isolator 4 and air supporting vibration-isolating platform stage body 6, described Horizontal displacement final controlling element 8 adopts the rotary-type voice coil motor of horizontal positioned, rotary-type voice coil motor mover 8a and the air supporting vibration-isolating platform stage body 6 of Horizontal displacement final controlling element 8 are connected, the rotary-type voice coil motor stator 8b of Horizontal displacement final controlling element 8 is configured on vibration isolator bearing 4b, measure the laser position optical path of air supporting vibration-isolating platform stage body 6 six-degree-of-freedom postures by He-Ne laser 1, laser collimation system 2, zero reference device 3, stage body attitude photoelectric detector 7, stage body attitude dispersion prism 10 forms, stage body attitude photoelectric detector 7 wherein, stage body attitude dispersion prism 10 is packed on air supporting vibration-isolating platform stage body 6 lower sides, described stage body attitude dispersion prism 10 comprises the first dispersion prism 10a, the second dispersion prism 10b, the 3rd dispersion prism 10c and the 4th dispersion prism 10d, and the first dispersion prism 10a is positioned in the rear side transmission laser light path of laser collimation system 2, the second dispersion prism 10b and the 3rd dispersion prism 10c lay respectively in the transmission and reflected light path of the first dispersion prism 10a, the 4th dispersion prism 10d is positioned on the reflected light path of the 3rd dispersion prism 10c, described stage body attitude photoelectric detector 7 comprises the first photoelectric detector 7a, the second photoelectric detector 7b, the 3rd photoelectric detector 7c and the 4th photoelectric detector 7d, wherein the first photoelectric detector 7a and the second photoelectric detector 7b lay respectively in the transmission and reflected light path of the second dispersion prism 10b, and the 3rd photoelectric detector 7c and the 4th photoelectric detector 7d lay respectively in the transmission and reflected light path of the 4th dispersion prism 10d, described laser collimation system 2 by laser bundle-enlarging collimation system 11, convex lens 12, flat float float with angle detect photoelectric detector 13, light beam regulating mechanism 14, flat floating with angle floated and detected dispersion prism 9 and form, wherein light beam regulating mechanism 14 floats and angle is floated and detected between dispersion prism 9 in laser bundle-enlarging collimation system 11 peace, convex lens 12 float and angle is floated and detected that dispersion prism 9 peace are floated and angle is floated and detected between photoelectric detector 13 flat, and light beam regulating mechanism 14 comprises angle of wedge prism A14a, the angle of wedge prism B14b of capable of regulating relative position spacing and angle, described zero reference device 3 comprises that zero reference photoelectric detector mountion plate 3a and natural frequency are lower than the passive damper 3b of 0.5Hz, zero reference photoelectric detector mountion plate 3a is arranged on pedestal 5 by passive damper 3b, and is positioned in the downside refractive light paths of laser collimation system 2, by flat flat floating with angle of floating that photoelectric detector 13a and angle float that photoelectric detector 13b forms, float and detect photoelectric detector 13 and be packed on the zero reference photoelectric detector mountion plate 3a of zero reference device 3, its initial position, each is flat floats, photoelectric detector 13a is floated at angle, 13b receiving plane respectively with moving direction level separately, and receiving plane center overlaps with corresponding beam center.
Described stage body attitude photoelectric detector 7 peace are floated with angle and are floated and detect photoelectric detector 13 and comprise position sensitive detector PSD, CCD, four-quadrant detector QPD and silicon photocell.
Described passive damper 3b adopts pneumatic spring structure, and passive damper 3b is zero stiffness vibration damper.
Described Horizontal displacement final controlling element 8 adopts the rotary-type voice coil motor of horizontal positioned, rotary-type voice coil motor mover 8a and the air supporting vibration-isolating platform stage body 6 of Horizontal displacement final controlling element 8 are connected, and the rotary-type voice coil motor stator 8b of Horizontal displacement final controlling element 8 is configured on vibration isolator bearing 4b.
Workflow of the present invention is as follows:
Stage body attitude is measured by laser position optical path, a branch of source laser that laser 1 sends is first by laser collimation system 2, by flat floating with angle, float and detect dispersion prism 9 and separate two bundle Reference beams, by flat photoelectric detector 13a and the angle of floating, float photoelectric detector 13b and receive respectively, detect flat drift value and the angle drift value of Reference beam self, finally by light beam regulating mechanism 14, adjust in real time its flat floating with angle and float.Flat float with angle float detect photoelectric detector 13 effectively isolation be greater than the impact that the vibration of 0.5Hz detects Reference beam, realize zero reference device 3 and stage body and the earth isolation, as the position absolute zero position benchmark of air supporting vibration-isolating platform stage body 6 six-freedom degrees.Light beam separates four road light beams through stage body attitude dispersion prism 10 again, finally by stage body attitude photoelectric detector 7, received, realize thus the position probing of the six-freedom degree of stage body attitude, after resolving, by Horizontal displacement final controlling element 8, realize stage body attitude Three Degree Of Freedom again and adjust in real time control.
Because laser beam has flat floating with angle, float, so reference path has certain deviation, thus need all the time all adjust, to guarantee the accuracy of Reference beam.The level that guarantees Reference beam is the basis that guarantees platform horizontal attitude.Flat the floating with angle of Reference beam floated by flat the floating with angle being fixed on zero reference device 3 and floated and detect photoelectric detector 13 measurements.Flat the floating by photoelectric detector 13a of light beam detected, and angle drift of laser is detected by the photoelectric detector 13b with convex lens 12, and suppresses by light beam regulating mechanism 14.Light beam regulating mechanism 14 is by adjusting angle and the relative position spacing of two angle of wedge prisms, and the angle of inhibition light beam is floated peace and floated.Determine that record after Reference beam is demarcated and flatly float that to float with angle the output value that detects photoelectric detector 13 be initial value, during calibration, make output value approach to the initial value of demarcating.
During work, Reference beam is by real time calibration, photoelectric detector real-time sampling, adopt 12 values at every turn and remove a maximum value and a minimum value, and 10 remaining values are averaged and made comparisons with initial value separately respectively, through processing, just can obtain the attitude of air supporting vibration-isolating platform stage body 6 under ground vibration impact and change.Control system is adjusted stage body attitude errors according to this measured value level of control displacement actuator 8 Three Degree Of Freedoms, makes air supporting vibration-isolating platform stage body in metastable state, thereby makes air supporting vibration-isolating platform have less vibration transmissibility, realizes every/vibration damping.

Claims (3)

1. the air supporting vibration-isolating platform of measuring based on pneumatic spring zero reference and laser auto-collimation, it is characterized in that air supporting vibration-isolating platform stage body (6) is configured on the above equally distributed vibration isolators (4) of 3 or 3, vibration isolator (4) is configured on pedestal (5), described vibration isolator (4) is by vibration isolator pedestal (4a), vibration isolator support (4b) and vibration isolator worktable (4c) form, vibration isolator worktable (4c) is arranged in vibration isolator pedestal (4a), vibration isolator support (4b) is configured on vibration isolator pedestal (4a) lateral part, configuration level displacement actuator (8) between each vibration isolator (4) and air supporting vibration-isolating platform stage body (6), described Horizontal displacement final controlling element (8) adopts the rotary-type voice coil motor of horizontal positioned, the rotary-type voice coil motor mover (8a) of Horizontal displacement final controlling element (8) is connected with air supporting vibration-isolating platform stage body (6), the rotary-type voice coil motor stator (8b) of Horizontal displacement final controlling element (8) is configured on vibration isolator bearing (4b), measure the laser position optical path of air supporting vibration-isolating platform stage body (6) six-degree-of-freedom posture by He-Ne laser (1), laser collimation system (2), zero reference device (3), stage body attitude photoelectric detector (7), stage body attitude dispersion prism (10) forms, stage body attitude photoelectric detector (7) wherein, stage body attitude dispersion prism (10) is packed on air supporting vibration-isolating platform stage body (6) lower end surface, described stage body attitude dispersion prism (10) comprises the first dispersion prism (10a), the second dispersion prism (10b), the 3rd dispersion prism (10c) and the 4th dispersion prism (10d), and the first dispersion prism (10a) is positioned in the transmission laser light path of laser collimation system (2), the second dispersion prism (10b) is positioned on the transmitted light path of the first dispersion prism (10a), the 3rd dispersion prism (10c) is positioned on the reflected light path of the first dispersion prism (10a), the 4th dispersion prism (10d) is positioned on the reflected light path of the 3rd dispersion prism (10c), described stage body attitude photoelectric detector (7) comprises the first photoelectric detector (7a), the second photoelectric detector (7b), the 3rd photoelectric detector (7c) and the 4th photoelectric detector (7d), wherein the first photoelectric detector (7a) is positioned on the transmitted light path of the second dispersion prism (10b), the second photoelectric detector (7b) is positioned on the reflected light path of the second dispersion prism (10b), the 3rd photoelectric detector (7c) is positioned on the transmitted light path of the 4th dispersion prism (10d), the 4th photoelectric detector (7d) is positioned on the reflected light path of the 4th dispersion prism (10d), described laser collimation system (2) is by laser bundle-enlarging collimation system (11), convex lens (12), flat floating with angle floated and detected photoelectric detector (13), light beam regulating mechanism (14), flat floating with angle floated and detected dispersion prism (9) formation, wherein light beam regulating mechanism (14) is positioned at that laser bundle-enlarging collimation system (11) peace is floated and angle is floated and detected between dispersion prism (9), convex lens (12) are positioned at flat float and angle is floated and detected that dispersion prism (9) peace is floated and angle is floated and detected between photoelectric detector (13), light beam regulating mechanism (14) comprises the angle of wedge prism A(14a of capable of regulating relative position spacing and angle), angle of wedge prism B(14b), described zero reference device (3) comprises that zero reference photoelectric detector mountion plate (3a) and natural frequency are lower than the passive damper (3b) of 0.5Hz, it is upper that zero reference photoelectric detector mountion plate (3a) is arranged on pedestal (5) by passive damper (3b), and be positioned in the downside refractive light paths of laser collimation system (2), by flat flat floating of floating that photoelectric detector (13a) and angle float that photoelectric detector (13b) forms, float detection photoelectric detector (13) with angle and be packed on the zero reference photoelectric detector mountion plate (3a) of zero reference device (3), flat float, photoelectric detector is floated at angle (13a, 13b) receiving plane respectively with moving direction level separately, and receiving plane center overlaps with corresponding beam center.
2. the air supporting vibration-isolating platform of measuring based on pneumatic spring zero reference and laser auto-collimation according to claim 1, it is characterized in that described stage body attitude photoelectric detector (7) peace is floated with angle floats and detects photoelectric detector (13) and comprise position sensitive detector PSD, CCD image sensor, four-quadrant detector QPD and silicon photocell.
3. the air supporting vibration-isolating platform based on pneumatic spring zero reference and laser auto-collimation measurement according to claim 1, it is characterized in that described passive damper (3b) adopts pneumatic spring structure, and passive damper (3b) is zero stiffness vibration damper.
CN201210571940.7A 2012-12-19 2012-12-19 Gas floating vibration isolation platform based on air spring zero reference and laser self-collimating measurement Active CN103075616B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2539906B2 (en) * 1989-01-31 1996-10-02 鹿島建設株式会社 Magnetic anti-vibration device
CN1587739A (en) * 2004-10-11 2005-03-02 北京航空航天大学 Six freedom super magnetostrictive active vibration control platform
CN102141110A (en) * 2011-01-24 2011-08-03 北京航空航天大学 Hydraulic vibration active isolation platform
CN102486250A (en) * 2010-12-03 2012-06-06 西安金和光学科技有限公司 Attitude adjustment platform with six degrees of freedom

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2539906B2 (en) * 1989-01-31 1996-10-02 鹿島建設株式会社 Magnetic anti-vibration device
CN1587739A (en) * 2004-10-11 2005-03-02 北京航空航天大学 Six freedom super magnetostrictive active vibration control platform
CN102486250A (en) * 2010-12-03 2012-06-06 西安金和光学科技有限公司 Attitude adjustment platform with six degrees of freedom
CN102141110A (en) * 2011-01-24 2011-08-03 北京航空航天大学 Hydraulic vibration active isolation platform

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