CN103090161B - Gas magnetic vibration isolation platform based on spring zero position benchmark and laser auto-collimation measurement - Google Patents

Gas magnetic vibration isolation platform based on spring zero position benchmark and laser auto-collimation measurement Download PDF

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Publication number
CN103090161B
CN103090161B CN201210571965.7A CN201210571965A CN103090161B CN 103090161 B CN103090161 B CN 103090161B CN 201210571965 A CN201210571965 A CN 201210571965A CN 103090161 B CN103090161 B CN 103090161B
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photoelectric detector
vibration
angle
dispersion prism
laser
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CN201210571965.7A
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CN103090161A (en
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谭久彬
杨远源
王雷
赵勃
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Harbin Institute of Technology
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Harbin Institute of Technology
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Abstract

The invention discloses a gas magnetic vibration isolation platform based on a spring zero position benchmark and laser auto-collimation measurement and belongs to ultra-precision measurement and ultra-precision machining equipment. The gas magnetic vibration isolation platform based on the spring zero position benchmark and the laser auto-collimation measurement adopts three or more vibration isolators with static pressure gas magnetic structures to support gas magnetic vibration isolation platform bodies and the load of the vibration isolators. Platform six degrees of freedom posture monitoring is realized through a beam splitter prism and a photoelectric detector. A vertical and horizontal displacement actuator is arranged between the vibration isolators and the platform body to achieve the adjustment of the six degrees of freedom of the platform body. A zero position benchmark device supported by a spring damper can effectively isolate the influence of ground vibration on a reference light beam testing. Stability of the laser beam zero position benchmark is improved. Flat drift and angle drift of a reference light beam are tested by the photoelectric detector, and a pair of wedge prisms with adjustable relative position intervals and angles is used for adjusting the flat drift and the angle drift of the reference light beam to achieve reference beam calibration. Therefore, platform vibration isolation performance is significantly improved.

Description

Based on the gas magnetic vibration-isolating platform that pneumatic spring zero reference and laser auto-collimation are measured
Technical field
The invention belongs to ultra precise measurement and Ultra-precision Turning is equipped, relate generally to a kind of gas magnetic vibration-isolating platform measured based on pneumatic spring zero reference and laser auto-collimation.
Background technique
In ultraprecise metrology and measurement and Ultra-precision Turning field, the platform with high quality level attitude is the basic guarantee carrying out precision measuremnt and large-scale integrated circuit (LSI) manufacture.The application of high quality level attitude gas magnetic vibration-isolating platform is very extensive.In the factory that bioscience, electron optics, precision optical machinery processing, Physicochemical test and research thereof are relevant, the horizontal attitude control of platform can have influence on the experiments of measuring result of machinery equipment and the usability of instrument apparatus, and directly can affect the rejection of gas magnetic vibration-isolating platform to vibration.Along with the raising of the grade of accuracy of ultra precise measurement instrument and Ultra-precision Turning manufacturing equipment, the impact of ambient vibration on instrument and equipment is increasing.Gas magnetic vibration-isolating platform as emerging device for vibration insutation also along with the manufacturing development of precision type instrument.The horizontal attitude of gas magnetic vibration-isolating platform then directly to have influence on above it put the precision of instrument and equipment, being therefore stabilized in precision type instrument manufacture and scientific research of gas magnetic vibration-isolating platform attitude seems especially important.Particularly for R&D institution of China and enterprise, along with the manufacturing high speed development of vlsi circuit and improving constantly of requiring measuring accuracy and Measurement sensibility, based on the stability of vibration-isolating platform also receive acid test more.
Along with ultraprecise instrument and system are to the improve of operating environment requirements, traditional passive vibration isolation mode restricts by factors such as vibration isolator material behavior, structural rigidity, cannot meet the vibration isolation requirement to low frequency signal.For this problem, active Vibration Isolation combines with passive vibration isolation device by researcher, reaches the object (Vibration Isolation Apparatus For Stage. U.S. Patent Publication No. US006327024B1) promoting low frequency vibration isolation performance.One or more vibration damper is arranged between worktable and pedestal by the method, and damping device has an electric actuator, and the signal of final controlling element to a position transducer responds, and plays active vibration isolation effect, improves its low frequency vibration isolation performance.The method Problems existing is: 1) worktable does not possess pose adjustment function; 2) position sensor feedback signal is relative quantity, does not have absolute zero position benchmark, accurately cannot locate operating position.
In order to realize vibration isolation table stage body pose adjustment function, the China Measures Institute proposes the pneumatic pose adjustment scheme of a kind of vibration-isolating platform (vibrating isolation foundation precise leveling system.Patent publication No.: CN 101353897A).The program adopts two grad vibration isolation platform, and precision optics vibration-isolating platform is positioned on vibrating isolation foundation, by measuring the angle of vibration-isolating platform and horizontal plane, carries out inflation/deflation control to pneumatic spring, reaches the object of adjustment vibration-isolating platform attitude.Program Problems existing is: 1) in public technology scheme, vibration-isolating platform cannot realize accurate location; 2) by adjusting vibration-isolating platform attitude to pneumatic spring inflation/deflation, system response time is slow.
China Watercraft The Ninth Design & Research Institute Engineering Co., Ltd. proposes a kind of every (the microvibration-preventing basis of multiple stage precision type instrument centralized arrangement, micro-basis that shakes.Patent publication No.: CN 200920078087.9).The program devises two-layer independently vibration isolation table up and down, and upper strata adopts T-shaped cross section vibration isolation base, and vibration isolation base is supported on lower floor's concrete beam by vibration isolation element, and this structure can reduce vibrating isolation system barycenter, improves vibration isolation efficiency.The problem of the program is, only adopts passive vibration isolation mode, cannot isolate low-frequency vibration signal.
Chongqing Normal University proposes a kind of precise vibration isolation device (a kind of precise vibration isolation device.Publication number: CN200920207338.9).The program adopts two-layer vibration insulation structure, first layer passive vibration isolation device is formed by pneumatic spring is in parallel with magnetic rheological body, second layer vibration isolator is formed by pneumatic spring is in parallel with micro actuator, double-layer structure tandem arrangement, and the program improves the anti-vibration performance of isolation mounting to low frequency signal.The problem of the program is, vibration-isolating platform does not possess pose adjustment function.
The common problem that existing patent of invention exists:
1. the measurement of pair vibration-isolating platform is relative position, does not have absolute zero position benchmark, therefore accurately cannot locate vibration-isolating platform position;
2., not to the attitude highi degree of accuracy control program of vibration-isolating platform, therefore vibration-isolating platform cannot obtain high-level anti-vibration performance.
The detection scheme of gas magnetic vibration-isolating platform stage body horizontal attitude has multiple, and pinpoint method mainly carrys out detection level attitude by setting up rectangular coordinate system, measures stage body separately by degree change in displacement.The displacement measurement of gas magnetic vibration-isolating platform stage body need adopt optical non-contact method of measurement, otherwise sensor will give vibrating isolation system additional stiffness and damping, destroys gas magnetic vibration-isolating platform natural frequency, reduces anti-vibration performance.The method kind of conventional contactless optical measurement displacement has and detects based on ccd image, based on the frequency discrimination of laser and amplitude discrimination measurement etc.Due to the change in displacement that platform stage body is on six-freedom degree, mutually interfere between each degrees of freedom, the method for measurement based on image cannot realize; And be difficult to realize high-precision measurement based on the impact that the method Stimulated Light self of laser detection is drifted about.But what require gas magnetic vibration-isolating platform anti-vibration performance improves constantly, require to reach micron dimension to the control accuracy of stage body attitude displacement, and platform is all large or in super large stage body situation.So have that Bit andits control precision is high, anti-vibration performance is excellent, reach the large-scale of more than VC-F rank or super sized type gas magnetic vibration-isolating platform be ultra precise measurement both at home and abroad at present and the active demand of manufacturing equipment every/dampening apparatus.
Summary of the invention
Object of the present invention is exactly for above-mentioned prior art Problems existing, in conjunction with actual demand, design provides a kind of gas magnetic vibration-isolating platform measured based on pneumatic spring zero reference and laser auto-collimation, reaches the stability improving laser beam zero reference, the object realizing Reference beam calibration, improve platform anti-vibration performance.
Technical solution of the present invention is:
Based on the gas magnetic vibration-isolating platform that pneumatic spring zero reference and laser auto-collimation are measured, described gas magnetic vibration-isolating platform stage body is configured on more than 3 or 3 equally distributed vibration isolators, vibration isolator is configured on pedestal, described vibration isolator is by vibration isolator pedestal, vibration isolator support and vibration isolator worktable are formed, vibration isolator worktable is arranged in vibration isolator pedestal, vibration isolator support is configured on vibration isolator pedestal lateral part, vertical deviation final controlling element is configured between each vibration isolator and gas magnetic vibration-isolating platform stage body, described vertical deviation final controlling element adopts the rotary-type voice coil motor of vertical placement, rotary-type voice coil motor mover and the gas magnetic vibration-isolating platform stage body of vertical deviation final controlling element are connected, the rotary-type voice coil motor stator arrangement of vertical deviation final controlling element is on vibration isolator support, measure the laser position optical path of gas magnetic vibration-isolating platform stage body six-degree-of-freedom posture by He-Ne laser, laser collimation system, zero reference device, stage body attitude photoelectric detector, stage body attitude dispersion prism is formed, wherein stage body attitude photoelectric detector, stage body attitude dispersion prism is packed on gas magnetic vibration-isolating platform stage body lower side, described stage body attitude dispersion prism comprises the first dispersion prism, second dispersion prism, 3rd dispersion prism and the 4th dispersion prism, and the first dispersion prism is positioned in the rear side transmission laser light path of laser collimation system, second dispersion prism and the 3rd dispersion prism lay respectively in the transmittance and reflectance light path of the first dispersion prism, 4th dispersion prism is positioned on the reflected light path of the 3rd dispersion prism, described stage body attitude photoelectric detector comprises the first photoelectric detector, the second photoelectric detector, the 3rd photoelectric detector and the 4th photoelectric detector, wherein the first photoelectric detector and the second photoelectric detector lay respectively in the transmittance and reflectance light path of the second dispersion prism, and the 3rd photoelectric detector and the 4th photoelectric detector lay respectively in the transmittance and reflectance light path of the 4th dispersion prism, described laser collimation system float with angle by laser bundle-enlarging collimation system, convex lens, flat drift and detects photoelectric detector, light beam regulating mechanism, puts down and to float and angle is floated and detected dispersion prism and form, wherein light beam regulating mechanism floats in the drift of laser bundle-enlarging collimation system peace and angle and detects between dispersion prism, convex lens float in flat drift and angle and detect dispersion prism peace and to float and angle is floated and detected between photoelectric detector, and light beam regulating mechanism comprises angle of wedge prism, the angle of wedge prism of adjustable relative position spacing and angle, described zero reference device comprises zero reference photoelectric detector mountion plate and the natural frequency passive damper lower than 0.5Hz, zero reference photoelectric detector mountion plate is arranged on pedestal by passive damper, and is positioned in the downside refractive light paths of laser collimation system, float flat drift that photoelectric detector forms and angle by flat drift photoelectric detector and angle to float and detect photoelectric detector and be packed on zero reference device zero reference photoelectric detector mountion plate, its initial position, each flat drift, angle drift photoelectric detector receiving plane are vertical with respective moving direction respectively, and receiving plane center overlaps with corresponding beam center.
The drift of described stage body attitude photoelectric detector peace and angle are floated and are detected photoelectric detector and comprise position sensitive detector PSD, CCD, four-quadrant detector QPD and silicon photocell.
Described passive damper adopts air spring constructions, and passive damper is zero stiffness vibration damper.
The good result of technological innovation of the present invention and generation is:
1) this device zero reference device adopts passive damper to support, passive damper natural frequency is lower than 0.5Hz, the impact that the vibration effectively can isolating ground detects Reference beam, substantially increases the stability of laser beam zero reference, and this is one of innovative point of the present invention and outstanding advantages.
2) the present invention adopts two photoelectric detectors to detect the flat drift of Reference beam and angle drift respectively, and cuts down flat drift and the angle drift of Reference beam in real time with the angle of wedge prism of a pair adjustable relative position spacing and angle, realizes Reference beam and calibrates; Adopt photoelectric detector and the monitoring of dispersion prism implementation platform six-degree-of-freedom posture, and realized controlling every/vibration reduction platform movement in vertical direction highi degree of accuracy by vertical deviation final controlling element, improve platform anti-vibration performance, this is innovative point of the present invention and outstanding advantages two.
Accompanying drawing illustrates:
Fig. 1 is the gas magnetic vibration-isolating platform three-dimensional structure schematic diagram measured based on pneumatic spring zero reference and laser auto-collimation;
Fig. 2 is the structural representation of the gas magnetic vibration-isolating platform measured based on pneumatic spring zero reference and laser auto-collimation;
Fig. 3 is the plan view of Fig. 2;
Fig. 4 is laser collimation system structural representation;
Fig. 5 is zero reference apparatus structure schematic diagram;
Fig. 6 is light beam regulating mechanism two schemes structural representation;
Fig. 7 is that the flat drift of laser beam floats Cleaning Principle schematic diagram with angle;
Fig. 8 is vibration isolator and vertical displacement final controlling element assembly structure schematic diagram.
Piece number in figure: 1-He-Ne laser; 2-laser collimation system; 3-zero reference device; 3a-zero reference photoelectric detector mountion plate; 3b-passive damper; 4-vibration isolator; 4a-vibration isolator pedestal; 4b-vibration isolator support; 4c-vibration isolator worktable; 5-pedestal; 6-gas magnetic vibration-isolating platform stage body; 7-stage body attitude photoelectric detector; 7a-first photoelectric detector; 7b-second photoelectric detector; 7c-the 3rd photoelectric detector; 7d-the 4th photoelectric detector; 8-vertical deviation final controlling element; The rotary-type voice coil motor mover of 8a-; The rotary-type voice coil motor stator of 8b-; The flat drift of 9-is floated with angle and is detected dispersion prism; 10-stage body attitude dispersion prism; 10a-first dispersion prism; 10b-second dispersion prism; 10c-the 3rd dispersion prism; 10d-the 4th dispersion prism; 11-laser bundle-enlarging collimation system; 12-convex lens; The flat drift of 13-is floated with angle and is detected photoelectric detector; 13a-flat drift photoelectric detector; 13b-angle drift photoelectric detector; 14-light beam regulating mechanism; 14a-angle of wedge prism A; 14b-angle of wedge prism B.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:
Based on the gas magnetic vibration-isolating platform that pneumatic spring zero reference and laser auto-collimation are measured, described gas magnetic vibration-isolating platform stage body 6 is configured on more than 3 or 3 equally distributed vibration isolators 4, vibration isolator 4 is configured on pedestal 5, described vibration isolator 4 is by vibration isolator pedestal 4a, vibration isolator support 4b and vibration isolator worktable 4c is formed, vibration isolator worktable 4c is arranged in vibration isolator pedestal 4a, vibration isolator support 4b is configured on vibration isolator pedestal 4a lateral part, vertical deviation final controlling element 8 is configured between each vibration isolator 4 and gas magnetic vibration-isolating platform stage body 6, described vertical deviation final controlling element 8 adopts the rotary-type voice coil motor of vertical placement, rotary-type voice coil motor mover 8a and the gas magnetic vibration-isolating platform stage body 6 of vertical deviation final controlling element 8 are connected, the rotary-type voice coil motor stator 8b of vertical deviation final controlling element 8 is configured on vibration isolator support 4b, measure the laser position optical path of gas magnetic vibration-isolating platform stage body 6 six-degree-of-freedom posture by He-Ne laser 1, laser collimation system 2, zero reference device 3, stage body attitude photoelectric detector 7, stage body attitude dispersion prism 10 is formed, wherein stage body attitude photoelectric detector 7, stage body attitude dispersion prism 10 is packed on gas magnetic vibration-isolating platform stage body 6 lower side, described stage body attitude dispersion prism 10 comprises the first dispersion prism 10a, second dispersion prism 10b, 3rd dispersion prism 10c and the 4th dispersion prism 10d, and the first dispersion prism 10a is positioned in the rear side transmission laser light path of laser collimation system 2, second dispersion prism 10b and the 3rd dispersion prism 10c lays respectively in the transmittance and reflectance light path of the first dispersion prism 10a, 4th dispersion prism 10d is positioned on the reflected light path of the 3rd dispersion prism 10c, described stage body attitude photoelectric detector 7 comprises the first photoelectric detector 7a, the second photoelectric detector 7b, the 3rd photoelectric detector 7c and the 4th photoelectric detector 7d, wherein the first photoelectric detector 7a and the second photoelectric detector 7b lays respectively in the transmittance and reflectance light path of the second dispersion prism 10b, and the 3rd photoelectric detector 7c and the 4th photoelectric detector 7d lays respectively in the transmittance and reflectance light path of the 4th dispersion prism 10d, described laser collimation system 2 float with angle by laser bundle-enlarging collimation system 11, convex lens 12, flat drift and detects photoelectric detector 13, light beam regulating mechanism 14, puts down and to float and angle is floated and detected dispersion prism 9 and form, wherein light beam regulating mechanism 14 floats in the drift of laser bundle-enlarging collimation system 11 peace and angle and detects between dispersion prism 9, convex lens 12 float in flat drift and angle and detect dispersion prism 9 peace and to float and angle is floated and detected between photoelectric detector 13, and light beam regulating mechanism 14 comprises angle of wedge prism A14a, the angle of wedge prism B14b of adjustable relative position spacing and angle, described zero reference device 3 comprises zero reference photoelectric detector mountion plate 3a and the natural frequency passive damper 3b lower than 0.5Hz, zero reference photoelectric detector mountion plate 3a is arranged on pedestal 5 by passive damper 3b, and is positioned in the downside refractive light paths of laser collimation system 2, float flat drift that photoelectric detector 13b forms and angle by flat drift photoelectric detector 13a and angle to float and detect photoelectric detector 13 and be packed on the zero reference photoelectric detector mountion plate 3a of zero reference device 3, its initial position, it is vertical with respective moving direction respectively that photoelectric detector 13a, 13b receiving plane is floated in each flat drift, angle, and receiving plane center overlaps with corresponding beam center.
The drift of described stage body attitude photoelectric detector 7 peace and angle are floated and are detected photoelectric detector 13 and comprise position sensitive detector PSD, CCD, four-quadrant detector QPD and silicon photocell.
Described passive damper 3b adopts air spring constructions, and passive damper 3b is zero stiffness vibration damper.
Workflow of the present invention is as follows:
Stage body attitude is measured by laser position optical path, a branch of source laser that laser 1 sends is first by laser collimation system 2, floated by flat drift and angle and detect dispersion prism 9 and separate two bundle Reference beams, float photoelectric detector 13b by flat drift photoelectric detector 13a and angle respectively to receive, detect flat drift value and the angle drift value of Reference beam self, finally by its flat drift of light beam regulating mechanism 14 adjustment in real time and angle drift.Flat drift and angle floats and are detected photoelectric detector 13 and effectively isolate the impact that the vibration that is greater than 0.5Hz detects Reference beam, realize zero reference device 3 and stage body and greatly isolate, as the position absolute zero position benchmark of gas magnetic vibration-isolating platform stage body 6 six-freedom degree.Light beam separates four road light beams through stage body attitude dispersion prism 10 again, finally received by stage body attitude photoelectric detector 7, realize the position probing of the six-freedom degree of stage body attitude thus, after resolving, realize stage body attitude Three Degree Of Freedom by vertical deviation final controlling element 8 again adjust control in real time.
Because laser beam has flat drift and angle drift, therefore reference path has certain deviation, so need all the time all to adjust, to ensure the accuracy of Reference beam.Ensure that the level of Reference beam is the basis ensureing plateau levels attitude.The flat drift of Reference beam and angle are floated to be floated by the flat drift be fixed on zero reference device 3 and angle and are detected photoelectric detector 13 and measure.The flat drift of light beam is detected by photoelectric detector 13a, and angle drift of laser is detected by the photoelectric detector 13b with convex lens 12, and suppresses by light beam regulating mechanism 14.Light beam regulating mechanism 14 passes through angle and the relative position spacing of adjustment two angle of wedge prisms, suppresses the angle drift peace drift of light beam.After determining Reference beam, the flat drift of record demarcation floats with angle the output value detecting photoelectric detector 13 is initial value, makes output value approach to the initial value demarcated during calibration.
During work, Reference beam is by real time calibration, photoelectric detector real-time sampling, adopt 12 values at every turn and remove a maximum value and a minimum value, and 10 remaining values are averaged make comparisons with respective initial value respectively, just can obtain the attitudes vibration of gas magnetic vibration-isolating platform stage body 6 under ground vibration affects through process.Control system controls vertical deviation final controlling element 8 Three Degree Of Freedom adjustment stage body attitude error according to this measured value, makes gas magnetic vibration-isolating platform stage body be in metastable state, thus makes gas magnetic vibration-isolating platform have less vibration transmissibility, realizes every/vibration damping.

Claims (3)

1. based on the gas magnetic vibration-isolating platform that pneumatic spring zero reference and laser auto-collimation are measured, it is characterized in that gas magnetic vibration-isolating platform stage body (6) is configured on more than 3 or 3 equally distributed vibration isolators (4), vibration isolator (4) is configured on pedestal (5), described vibration isolator (4) is by vibration isolator pedestal (4a), vibration isolator support (4b) and vibration isolator worktable (4c) are formed, vibration isolator worktable (4c) is arranged in vibration isolator pedestal (4a), vibration isolator support (4b) is configured on vibration isolator pedestal (4a) lateral part, vertical deviation final controlling element (8) is configured between each vibration isolator (4) and gas magnetic vibration-isolating platform stage body (6), described vertical deviation final controlling element (8) adopts the rotary-type voice coil motor of vertical placement, rotary-type voice coil motor mover (8a) and gas magnetic vibration-isolating platform stage body (6) of vertical deviation final controlling element (8) are connected, the rotary-type voice coil motor stator (8b) of vertical deviation final controlling element (8) is configured on vibration isolator support (4b), measure the laser position optical path of gas magnetic vibration-isolating platform stage body (6) six-degree-of-freedom posture by He-Ne laser (1), laser collimation system (2), zero reference device (3), stage body attitude photoelectric detector (7), stage body attitude dispersion prism (10) is formed, wherein stage body attitude photoelectric detector (7), stage body attitude dispersion prism (10) is packed on gas magnetic vibration-isolating platform stage body (6) lower side, described stage body attitude dispersion prism (10) comprises the first dispersion prism (10a), second dispersion prism (10b), 3rd dispersion prism (10c) and the 4th dispersion prism (10d), and the first dispersion prism (10a) is positioned in the rear side transmission laser light path of laser collimation system (2), second dispersion prism (10b) and the 3rd dispersion prism (10c) lay respectively in the transmittance and reflectance light path of the first dispersion prism (10a), 4th dispersion prism (10d) is positioned on the reflected light path of the 3rd dispersion prism (10c), described stage body attitude photoelectric detector (7) comprises the first photoelectric detector (7a), the second photoelectric detector (7b), the 3rd photoelectric detector (7c) and the 4th photoelectric detector (7d), wherein the first photoelectric detector (7a) and the second photoelectric detector (7b) lay respectively in the transmittance and reflectance light path of the second dispersion prism (10b), and the 3rd photoelectric detector (7c) and the 4th photoelectric detector (7d) lay respectively in the transmittance and reflectance light path of the 4th dispersion prism (10d), described laser collimation system (2) is by laser bundle-enlarging collimation system (11), convex lens (12), flat drift is floated with angle and is detected photoelectric detector (13), light beam regulating mechanism (14), flat drift and angle are floated and are detected dispersion prism (9) and form, wherein light beam regulating mechanism (14) is positioned at the drift of laser bundle-enlarging collimation system (11) peace and angle is floated and detected between dispersion prism (9), convex lens (12) are positioned at flat drift and angle and float and detect that dispersion prism (9) is peaceful to be floated and angle is floated and detected between photoelectric detector (13), light beam regulating mechanism (14) comprises the angle of wedge prism A (14a) of adjustable relative position spacing and angle, angle of wedge prism B (14b), described zero reference device (3) comprises zero reference photoelectric detector mountion plate (3a) and the natural frequency passive damper (3b) lower than 0.5Hz, zero reference photoelectric detector mountion plate (3a) is arranged on pedestal (5) by passive damper (3b), and is positioned in the downside refractive light paths of laser collimation system (2), float flat drift that photoelectric detector (13b) forms and angle by flat drift photoelectric detector (13a) and angle to float and detect photoelectric detector (13) and be packed on the zero reference photoelectric detector mountion plate (3a) of zero reference device (3), its initial position, each flat drift, angle drift photoelectric detector (13a, 13b) receiving plane are vertical with respective moving direction respectively, and receiving plane center overlaps with corresponding beam center.
2. the gas magnetic vibration-isolating platform measured based on pneumatic spring zero reference and laser auto-collimation according to claim 1, is characterized in that described stage body attitude photoelectric detector (7) peace drift and angle are floated and detects photoelectric detector (13) and comprise position sensitive detector PSD, CCD, four-quadrant detector QPD and silicon photocell.
3. the gas magnetic vibration-isolating platform measured based on pneumatic spring zero reference and laser auto-collimation according to claim 1, it is characterized in that described passive damper (3b) adopts air spring constructions, and passive damper (3b) is zero stiffness vibration damper.
CN201210571965.7A 2012-12-19 2012-12-19 Gas magnetic vibration isolation platform based on spring zero position benchmark and laser auto-collimation measurement Expired - Fee Related CN103090161B (en)

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