CN103047512B - Magnetic suspension vibration isolation platform on basis of zero-position reference of springs and laser auto-collimation measurement - Google Patents

Magnetic suspension vibration isolation platform on basis of zero-position reference of springs and laser auto-collimation measurement Download PDF

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Publication number
CN103047512B
CN103047512B CN201210574065.8A CN201210574065A CN103047512B CN 103047512 B CN103047512 B CN 103047512B CN 201210574065 A CN201210574065 A CN 201210574065A CN 103047512 B CN103047512 B CN 103047512B
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vibration
photoelectric detector
dispersion prism
stage body
angle
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CN103047512A (en
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谭久彬
闻荣伟
王雷
赵勃
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Harbin Institute of Technology
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Harbin Institute of Technology
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Abstract

The invention discloses a magnetic suspension vibration isolation platform on the basis of zero-position reference of springs and laser auto-collimation measurement, and belongs to ultra-precision measurement and ultra-precision processing equipment. The magnetic suspension vibration isolation platform is provided with three or more vibration isolators, beam splitter prisms and photoelectric detectors. A magnetic suspension vibration isolation platform body and a load thereof are supported by the vibration isolators which are of static-pressure magnetic suspension structures, and six-degree-of-freedom postures of the platform are monitored by the beam splitter prisms and the photoelectric detectors, and are adjusted by perpendicular and horizontal displacement actuators arranged among the vibration isolators and the platform body. Influence of vibration of the ground to detection for reference beams is effectively isolated by a zero-position reference device supported by spring type dampers in the magnetic suspension vibration isolation platform, so that the laser beam zero-position reference stability is improved. Besides, horizontal drifting and angular drifting of the reference beams are detected by the photoelectric detectors and are adjusted by a pair of wedge prisms in real time, and the distance and angles of relative positions of the wedge prisms can be adjusted, so that the reference beams can be collimated, and the vibration isolation performance of the platform can be obviously improved.

Description

The floating vibration-isolating platform of magnetic based on spring zero reference and laser auto-collimation measurement
Technical field
The invention belongs to ultra precise measurement and ultraprecise process unit, relate generally to a kind of floating vibration-isolating platform of magnetic based on spring zero reference and laser auto-collimation measurement.
Background technique
In ultraprecise metrology and measurement and ultraprecise manufacture field, the platform with high quality level attitude is the basic guarantee that carries out precision measuremnt and large-scale integrated circuit (LSI) manufacture.The application of the floating vibration-isolating platform of high quality level attitude magnetic is very extensive.In bioscience, electron optics, precision optical machinery processing, physics and chemistry test and study in relevant factory, the horizontal attitude control of platform can have influence on the experiments of measuring result of machinery equipment and the usability of instrument apparatus, and can directly affect the rejection of the floating vibration-isolating platform of magnetic to vibration.Along with the raising of the grade of accuracy of ultra precise measurement instrument and ultraprecise manufacturing equipment, ambient vibration is increasing on the impact of instrument and equipment.The floating vibration-isolating platform of magnetic as emerging device for vibration insutation also along with the manufacturing development of precision type instrument.The horizontal attitude of the floating vibration-isolating platform of magnetic directly has influence on the precision of institute's instrument of putting and equipment above it, so magnetic floats being stabilized in precision type instrument manufacture and scientific research of vibration-isolating platform attitude and seems especially important.Particularly for China R&D institution and enterprise, along with the manufacturing high speed development of vlsi circuit and improving constantly that measuring accuracy and Measurement sensibility are required, as the stability of basic vibration-isolating platform, be also subject to acid test more.
Along with the raising that ultraprecise instrument and system require working environment, traditional passive vibration isolation mode is restricted by the factors such as vibration isolator material behavior, structural rigidity, cannot meet the vibration isolation requirement to low frequency signal.For this problem, researcher combines active Vibration Isolation with passive vibration isolation device, reaches the object (Vibration Isolation Apparatus For Stage. U.S. Patent Publication No. US006327024B1) that promotes low frequency vibration isolation performance.The method is arranged on one or more vibration dampers between worktable and pedestal, and damping device has an electric actuator, and final controlling element responds the signal of a position transducer, plays active vibration isolation effect, has promoted its low frequency vibration isolation performance.The problem that the method exists is: 1) worktable does not possess attitude adjustment function; 2) position sensor feedback signal is relative quantity, there is no absolute zero position benchmark, cannot accurately locate operating position.
In order to realize vibration isolation table stage body attitude, adjust function, the China Measures Institute has proposed the pneumatic attitude of a kind of vibration-isolating platform and has adjusted scheme (vibrating isolation foundation precise leveling system.Patent publication No.: CN 101353897A).This scheme adopts two grad vibration isolation platform, and precision optics vibration-isolating platform is positioned on vibrating isolation foundation, by measuring the angle of vibration-isolating platform and horizontal plane, pneumatic spring is carried out to inflation/deflation control, reaches the object of adjusting vibration-isolating platform attitude.The problem that this scheme exists is: 1) in public technology scheme, vibration-isolating platform cannot be realized accurate location; 2) by pneumatic spring inflation/deflation is adjusted to vibration-isolating platform attitude, system response time is slow.
China Watercraft The Ninth Design & Research Institute Engineering Co., Ltd. proposes a kind of every (the microvibration-preventing basis of many precision type instrument centralized arrangement, micro-basis that shakes.Patent publication No.: CN 200920078087.9).This conceptual design upper and lower two-layer independently vibration isolation table, upper strata adopts T-shaped cross section vibration isolation base, vibration isolation base is supported on lower floor's concrete beam by vibration isolation element, this structure can reduce vibrating isolation system barycenter, has improved vibration isolation efficiency.The problem of this scheme is, only adopts passive vibration isolation mode, cannot isolate low-frequency vibration signal.
Chongqing Normal University proposes a kind of precise vibration isolation device (a kind of precise vibration isolation device.Publication number: CN200920207338.9).This scheme adopts two-layer vibration insulation structure, first layer passive vibration isolation device forms by pneumatic spring is in parallel with magnetic rheological body, second layer vibration isolator forms by pneumatic spring is in parallel with micro actuator, double-layer structure tandem arrangement, and this scheme has improved the anti-vibration performance of isolation mounting to low frequency signal.The problem of this scheme is, vibration-isolating platform does not possess attitude and adjusts function.
The common problem that existing patent of invention exists:
1. the measurement of pair vibration-isolating platform is relative position, there is no absolute zero position benchmark, therefore cannot accurately locate vibration-isolating platform position;
2. the attitude highi degree of accuracy control program to vibration-isolating platform not, so vibration-isolating platform cannot obtain high-level anti-vibration performance.
The detection scheme of the floating vibration-isolating platform stage body horizontal attitude of magnetic has multiple, and pinpoint method is mainly to carry out detection level attitude by setting up rectangular coordinate system, measures stage body separately by degree change in displacement.The displacement measurement of the floating vibration-isolating platform stage body of magnetic need adopt optical non-contact method of measurement, otherwise sensor will be given vibrating isolation system additional stiffness and damping, destroys the floating vibration-isolating platform natural frequency of magnetic, reduces anti-vibration performance.The method kind that tradition non-contact optical is measured displacement have based on ccd image detect, frequency discrimination based on laser and amplitude discrimination measurement etc.Because platform stage body is the change in displacement on six-freedom degree, between each degrees of freedom, mutually to interfere, the method for measurement based on image cannot realize; And the impact of method Stimulated Light self based on laser detection drift is difficult to realize high-precision measurement.But what the floating vibration-isolating platform anti-vibration performance of magnetic was required improves constantly, the control accuracy of stage body attitude displacement is required to reach micron dimension, and platform is all in large or super large stage body situation.So have that displacement control accuracy is high, anti-vibration performance is excellent, reach the more than VC-F rank floating vibration-isolating platform of large-scale or super sized type magnetic be ultra precise measurement both at home and abroad at present and the active demand of manufacturing equipment every/dampening apparatus.
Summary of the invention
Object of the present invention is exactly the problem existing for above-mentioned prior art, in conjunction with actual demand, design provides a kind of magnetic of measuring based on spring zero reference and laser auto-collimation floating vibration-isolating platform, reach improve laser beam zero reference stability, realize Reference beam calibration, improve the object of platform anti-vibration performance.
Technical solution of the present invention is:
The floating vibration-isolating platform of magnetic based on spring zero reference and laser auto-collimation measurement, the floating vibration-isolating platform stage body of described magnetic is configured on 3 or 3 above equally distributed vibration isolators, vibration isolator is configured on pedestal, described vibration isolator is by vibration isolator pedestal, vibration isolator support and vibration isolator worktable form, vibration isolator worktable is arranged in vibration isolator pedestal, vibration isolator support is configured on vibration isolator pedestal lateral part, between each vibration isolator and the floating vibration-isolating platform stage body of magnetic, configure vertical deviation final controlling element and Horizontal displacement final controlling element, described vertical deviation final controlling element adopts the straight line type voice coil motor of vertical placement, the floating vibration-isolating platform stage body of the straight line type voice coil motor mover of vertical deviation final controlling element and magnetic is connected, the straight line type voice coil motor stator arrangement of vertical deviation final controlling element is on vibration isolator bearing, described Horizontal displacement final controlling element adopts the straight line type voice coil motor of horizontal positioned, the floating vibration-isolating platform stage body of the straight line type voice coil motor mover of Horizontal displacement final controlling element and magnetic is connected, the straight line type voice coil motor stator arrangement of Horizontal displacement final controlling element is on vibration isolator bearing, measure the laser position optical path of the floating vibration-isolating platform stage body six-degree-of-freedom posture of magnetic by He-Ne laser, laser collimation system, zero reference device, stage body attitude photoelectric detector, stage body attitude dispersion prism forms, stage body attitude photoelectric detector wherein, stage body attitude dispersion prism is packed on the floating vibration-isolating platform stage body of magnetic lower side, described stage body attitude dispersion prism comprises the first dispersion prism, the second dispersion prism, the 3rd dispersion prism and the 4th dispersion prism, and the first dispersion prism is positioned in the rear side transmission laser light path of laser collimation system, the second dispersion prism and the 3rd dispersion prism lay respectively in the transmission and reflected light path of the first dispersion prism, the 4th dispersion prism is positioned on the reflected light path of the 3rd dispersion prism, described stage body attitude photoelectric detector comprises the first photoelectric detector, the second photoelectric detector, the 3rd photoelectric detector and the 4th photoelectric detector, wherein the first photoelectric detector and the second photoelectric detector lay respectively in the transmission and reflected light path of the second dispersion prism, and the 3rd photoelectric detector and the 4th photoelectric detector lay respectively in the transmission and reflected light path of the 4th dispersion prism, described laser collimation system by laser bundle-enlarging collimation system, convex lens, flat float float with angle detect photoelectric detector, light beam regulating mechanism, flat floating with angle floated and detected dispersion prism and form, wherein light beam regulating mechanism floats and angle is floated and detected between dispersion prism in laser bundle-enlarging collimation system peace, convex lens float and angle is floated and detected that dispersion prism peace is floated and angle is floated and detected between photoelectric detector flat, and light beam regulating mechanism comprises angle of wedge prism, the angle of wedge prism of capable of regulating relative position spacing and angle, described zero reference device comprises that zero reference photoelectric detector mountion plate and natural frequency are lower than the passive damper of 0.5Hz, zero reference photoelectric detector mountion plate is arranged on pedestal by passive damper, and is positioned in the downside refractive light paths of laser collimation system, by flat flat floating with angle of floating that photoelectric detector and angle float that photoelectric detector forms, float and detect photoelectric detector and be packed on zero reference device zero reference photoelectric detector mountion plate, its initial position, each is flat floats, angle is floated photoelectric detector receiving plane moving direction is vertical respectively with separately, and receiving plane center overlaps with corresponding beam center.
Described stage body attitude photoelectric detector peace is floated with angle and is floated and detect photoelectric detector and comprise position sensitive detector PSD, CCD, four-quadrant detector QPD and silicon photocell.
Described passive damper adopts spring structure, and passive damper is zero stiffness vibration damper.
Described vertical deviation final controlling element adopts the straight line type voice coil motor of vertical placement, the floating vibration-isolating platform stage body of the straight line type voice coil motor mover of vertical deviation final controlling element and magnetic is connected, and the straight line type voice coil motor stator arrangement of vertical deviation final controlling element is on vibration isolator bearing; Horizontal displacement final controlling element adopts the straight line type voice coil motor of horizontal positioned, and the floating vibration-isolating platform stage body of the straight line type voice coil motor mover of Horizontal displacement final controlling element and magnetic is connected, and the straight line type voice coil motor stator arrangement of Horizontal displacement final controlling element is on vibration isolator bearing.
The good result of technological innovation of the present invention and generation is:
1) this device zero reference device adopts passive damper to support, passive damper natural frequency is lower than 0.5Hz, the impact that the vibration that can effectively isolate ground detects Reference beam, has improved the stability of laser beam zero reference greatly, and this is one of innovative point of the present invention and outstanding advantages.
2) flat the floating with angle that the present invention adopts two photoelectric detectors to detect respectively Reference beam floated, and floats with flat the floating with angle that the angle of wedge prism of a pair of capable of regulating relative position spacing and angle is subdued Reference beam in real time, realizes Reference beam calibration; Adopt photoelectric detector and the monitoring of dispersion prism implementation platform six-degree-of-freedom posture, and realize respectively every/vibration reduction platform Vertical direction and horizontal attitude movement high-precision and controlling by vertical deviation final controlling element and Horizontal displacement final controlling element, improved platform anti-vibration performance, this is two of innovative point of the present invention and outstanding advantages.
Accompanying drawing explanation:
Fig. 1 is the floating vibration-isolating platform three-dimensional structure schematic diagram of magnetic based on spring zero reference and laser auto-collimation measurement;
Fig. 2 is the structural representation of the floating vibration-isolating platform of magnetic based on spring zero reference and laser auto-collimation measurement;
Fig. 3 is the plan view of Fig. 2;
Fig. 4 is laser collimation system structural representation;
Fig. 5 is zero reference apparatus structure schematic diagram;
Fig. 6 is light beam regulating mechanism two schemes structural representation;
Fig. 7 is that flat the floating with angle of laser beam floated detection principle schematic;
Fig. 8 is vibration isolator and vertical displacement final controlling element, Horizontal displacement final controlling element assembly structure schematic diagram.
Piece number in figure: 1-He-Ne laser; 2-laser collimation system; 3-zero reference device; 3a-zero reference photoelectric detector mountion plate; 3b-passive damper; 4-vibration isolator; 4a-vibration isolator pedestal; 4b-vibration isolator support; 4c-vibration isolator worktable; 5-pedestal; 6-magnetic floats vibration-isolating platform stage body; 7-stage body attitude photoelectric detector; 7a-the first photoelectric detector; 7b-the second photoelectric detector; 7c-the 3rd photoelectric detector; 7d-the 4th photoelectric detector; 8-vertical deviation final controlling element; 8a-straight line type voice coil motor mover; 8b-straight line type voice coil motor stator; 9-Horizontal displacement final controlling element; 9a-straight line type voice coil motor mover; 9b-straight line type voice coil motor stator; 10-stage body attitude dispersion prism; 10a-the first dispersion prism; 10b-the second dispersion prism; 10c-the 3rd dispersion prism; 10d-the 4th dispersion prism; 11-laser bundle-enlarging collimation system; 12-convex lens; Flat the floating with angle of 13-floated detection photoelectric detector; The flat photoelectric detector that floats of 13a-; 13b-floats photoelectric detector in angle; 14-light beam regulating mechanism; 14a-angle of wedge prism A; 14b-angle of wedge prism B; Flat the floating with angle of 15-floated detection dispersion prism.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:
The floating vibration-isolating platform of magnetic based on spring zero reference and laser auto-collimation measurement, the floating vibration-isolating platform stage body 6 of described magnetic is configured on 3 or 3 above equally distributed vibration isolators 4, vibration isolator 4 is configured on pedestal 5, described vibration isolator 4 is by vibration isolator pedestal 4a, vibration isolator support 4b and vibration isolator worktable 4c form, vibration isolator worktable 4c is arranged in vibration isolator pedestal 4a, vibration isolator support 4b is configured on vibration isolator pedestal 4a lateral part, between each vibration isolator 4 and the floating vibration-isolating platform stage body 6 of magnetic, configure vertical deviation final controlling element 8 and Horizontal displacement final controlling element 9, described vertical deviation final controlling element 8 adopts the straight line type voice coil motor of vertical placement, the floating vibration-isolating platform stage body 6 of the straight line type voice coil motor mover 8a of vertical deviation final controlling element 8 and magnetic is connected, the straight line type voice coil motor stator 8b of vertical deviation final controlling element 8 is configured on vibration isolator bearing 4b, described Horizontal displacement final controlling element 9 adopts the straight line type voice coil motor of horizontal positioned, the floating vibration-isolating platform stage body 6 of the straight line type voice coil motor mover 9a of Horizontal displacement final controlling element 9 and magnetic is connected, the straight line type voice coil motor stator 9b of Horizontal displacement final controlling element 9 is configured on vibration isolator bearing 4b, measure the laser position optical path of floating vibration-isolating platform stage body 6 six-degree-of-freedom postures of magnetic by He-Ne laser 1, laser collimation system 2, zero reference device 3, stage body attitude photoelectric detector 7, stage body attitude dispersion prism 10 forms, stage body attitude photoelectric detector 7 wherein, stage body attitude dispersion prism 10 is packed on the floating vibration-isolating platform stage body of magnetic 6 lower sides, described stage body attitude dispersion prism 10 comprises the first dispersion prism 10a, the second dispersion prism 10b, the 3rd dispersion prism 10c and the 4th dispersion prism 10d, and the first dispersion prism 10a is positioned in the rear side transmission laser light path of laser collimation system 2, the second dispersion prism 10b and the 3rd dispersion prism 10c lay respectively in the transmission and reflected light path of the first dispersion prism 10a, the 4th dispersion prism 10d is positioned on the reflected light path of the 3rd dispersion prism 10c, described stage body attitude photoelectric detector 7 comprises the first photoelectric detector 7a, the second photoelectric detector 7b, the 3rd photoelectric detector 7c and the 4th photoelectric detector 7d, wherein the first photoelectric detector 7a and the second photoelectric detector 7b lay respectively in the transmission and reflected light path of the second dispersion prism 10b, and the 3rd photoelectric detector 7c and the 4th photoelectric detector 7d lay respectively in the transmission and reflected light path of the 4th dispersion prism 10d, described laser collimation system 2 by laser bundle-enlarging collimation system 11, convex lens 12, flat float float with angle detect photoelectric detector 13, light beam regulating mechanism 14, flat floating with angle floated and detected dispersion prism 15 and form, wherein light beam regulating mechanism 14 floats and angle is floated and detected between dispersion prism 15 in laser bundle-enlarging collimation system 11 peace, convex lens 12 float and angle is floated and detected that dispersion prism 15 peace are floated and angle is floated and detected between photoelectric detector 13 flat, and light beam regulating mechanism 14 comprises angle of wedge prism A14a, the angle of wedge prism B14b of capable of regulating relative position spacing and angle, described zero reference device 3 comprises that zero reference photoelectric detector mountion plate 3a and natural frequency are lower than the passive damper 3b of 0.5Hz, zero reference photoelectric detector mountion plate 3a is arranged on pedestal 5 by passive damper 3b, and is positioned in the downside refractive light paths of laser collimation system 2, by flat flat floating with angle of floating that photoelectric detector 13a and angle float that photoelectric detector 13b forms, float and detect photoelectric detector 13 and be packed on the zero reference photoelectric detector mountion plate 3a of zero reference device 3, its initial position, each is flat floats, photoelectric detector 13a is floated at angle, moving direction is vertical respectively with separately for 13b receiving plane, and receiving plane center overlaps with corresponding beam center.
Described stage body attitude photoelectric detector 7 peace are floated with angle and are floated and detect photoelectric detector 13 and comprise position sensitive detector PSD, CCD, four-quadrant detector QPD and silicon photocell.
Described passive damper 3b adopts spring structure, and passive damper 3b is zero stiffness vibration damper.
Described vertical deviation final controlling element 8 adopts the straight line type voice coil motor of vertical placement, the floating vibration-isolating platform stage body 6 of the straight line type voice coil motor mover 8a of vertical deviation final controlling element 8 and magnetic is connected, and the straight line type voice coil motor stator 8b of vertical deviation final controlling element 8 is configured on vibration isolator bearing 4b; Described Horizontal displacement final controlling element 9 adopts the straight line type voice coil motor of horizontal positioned, the floating vibration-isolating platform stage body 6 of the straight line type voice coil motor mover 9a of Horizontal displacement final controlling element 9 and magnetic is connected, and the straight line type voice coil motor stator 9b of Horizontal displacement final controlling element 9 is configured on vibration isolator bearing 4b.
Workflow of the present invention is as follows:
Stage body attitude is measured by laser position optical path, a branch of source laser that laser 1 sends is first by laser collimation system 2, by flat floating with angle, float and detect dispersion prism 15 and separate two bundle Reference beams, by flat photoelectric detector 13a and the angle of floating, float photoelectric detector 13b and receive respectively, detect flat drift value and the angle drift value of Reference beam self, finally by light beam regulating mechanism 14, adjust in real time its flat floating with angle and float.Flat float with angle float detect photoelectric detector 13 effectively isolation be greater than the impact that the vibration of 0.5Hz detects Reference beam, realize zero reference device 3 and stage body and the earth isolation, as the position absolute zero position benchmark of floating vibration-isolating platform stage body 6 six-freedom degrees of magnetic.Light beam separates four road light beams through stage body attitude dispersion prism 10 again, finally by stage body attitude photoelectric detector 7, received, realize thus the position probing of the six-freedom degree of stage body attitude, after resolving, by vertical deviation final controlling element 8 and Horizontal displacement final controlling element 9, realize stage body attitude six-degree-of-freedom again and adjust in real time control.
Because laser beam has flat floating with angle, float, so reference path has certain deviation, thus need all the time all adjust, to guarantee the accuracy of Reference beam.The level that guarantees Reference beam is the basis that guarantees platform horizontal attitude.Flat the floating with angle of Reference beam floated by flat the floating with angle being fixed on zero reference device 3 and floated and detect photoelectric detector 13 measurements.Flat the floating by photoelectric detector 13a of light beam detected, and angle drift of laser is detected by the photoelectric detector 13b with convex lens 12, and suppresses by light beam regulating mechanism 14.Light beam regulating mechanism 14 is by adjusting angle and the relative position spacing of two angle of wedge prisms, and the angle of inhibition light beam is floated peace and floated.Determine that record after Reference beam is demarcated and flatly float that to float with angle the output value that detects photoelectric detector 13 be initial value, during calibration, make output value approach to the initial value of demarcating.
During work, Reference beam is by real time calibration, photoelectric detector real-time sampling, adopt 12 values at every turn and remove a maximum value and a minimum value, and 10 remaining values are averaged and made comparisons with initial value separately respectively, through processing, just can obtain the attitude of the floating vibration-isolating platform stage body 6 of magnetic under ground vibration impact and change.Control system controls vertical deviation final controlling element 8 according to this measured value and Horizontal displacement final controlling element 9 six-degree-of-freedom are adjusted stage body attitude error, make the floating vibration-isolating platform stage body of magnetic in metastable state, thereby make the floating vibration-isolating platform of magnetic there is less vibration transmissibility, realize every/vibration damping.

Claims (3)

1. the magnetic based on spring zero reference and laser auto-collimation measurement floats vibration-isolating platform, it is characterized in that the floating vibration-isolating platform stage body (6) of magnetic is configured on 3 or 3 above equally distributed vibration isolators (4), vibration isolator (4) is configured on pedestal (5), described vibration isolator (4) is by vibration isolator pedestal (4a), vibration isolator support (4b) and vibration isolator worktable (4c) form, vibration isolator worktable (4c) is arranged in vibration isolator pedestal (4a), vibration isolator support (4b) is configured on vibration isolator pedestal (4a) lateral part, between each vibration isolator (4) and the floating vibration-isolating platform stage body (6) of magnetic, configure vertical deviation final controlling element (8) and Horizontal displacement final controlling element (9), described vertical deviation final controlling element (8) adopts the straight line type voice coil motor of vertical placement, the straight line type voice coil motor mover (8a) of vertical deviation final controlling element (8) is connected with the floating vibration-isolating platform stage body (6) of magnetic, the straight line type voice coil motor stator (8b) of vertical deviation final controlling element (8) is configured on vibration isolator bearing (4b), described Horizontal displacement final controlling element (9) adopts the straight line type voice coil motor of horizontal positioned, the straight line type voice coil motor mover (9a) of Horizontal displacement final controlling element (9) is connected with the floating vibration-isolating platform stage body (6) of magnetic, the straight line type voice coil motor stator (9b) of Horizontal displacement final controlling element (9) is configured on vibration isolator bearing (4b), measure the laser position optical path of floating vibration-isolating platform stage body (6) six-degree-of-freedom posture of magnetic by He-Ne laser (1), laser collimation system (2), zero reference device (3), stage body attitude photoelectric detector (7), stage body attitude dispersion prism (10) forms, stage body attitude photoelectric detector (7) wherein, stage body attitude dispersion prism (10) is packed on the floating vibration-isolating platform stage body (6) of magnetic lower end surface, described stage body attitude dispersion prism (10) comprises the first dispersion prism (10a), the second dispersion prism (10b), the 3rd dispersion prism (10c) and the 4th dispersion prism (10d), and the first dispersion prism (10a) is positioned in the transmission laser light path of laser collimation system (2), the second dispersion prism (10b) is positioned on the transmitted light path of the first dispersion prism (10a), the 3rd dispersion prism (10c) is positioned on the reflected light path of the first dispersion prism (10a), the 4th dispersion prism (10d) is positioned on the reflected light path of the 3rd dispersion prism (10c), described stage body attitude photoelectric detector (7) comprises the first photoelectric detector (7a), the second photoelectric detector (7b), the 3rd photoelectric detector (7c) and the 4th photoelectric detector (7d), wherein the first photoelectric detector (7a) is positioned on the transmitted light path of the second dispersion prism (10b), the second photoelectric detector (7b) is positioned on the reflected light path of the second dispersion prism (10b), the 3rd photoelectric detector (7c) is positioned on the transmitted light path of the 4th dispersion prism (10d), the 4th photoelectric detector (7d) is positioned on the reflected light path of the 4th dispersion prism (10d), described laser collimation system (2) is by laser bundle-enlarging collimation system (11), convex lens (12), flat floating with angle floated and detected photoelectric detector (13), light beam regulating mechanism (14), flat floating with angle floated and detected dispersion prism (15) formation, wherein light beam regulating mechanism (14) is positioned at that laser bundle-enlarging collimation system (11) peace is floated and angle is floated and detected between dispersion prism (15), convex lens (12) are positioned at flat float and angle is floated and detected that dispersion prism (15) peace is floated and angle is floated and detected between photoelectric detector (13), light beam regulating mechanism (14) comprises the angle of wedge prism A(14a of capable of regulating relative position spacing and angle), angle of wedge prism B(14b), described zero reference device (3) comprises that zero reference photoelectric detector mountion plate (3a) and natural frequency are lower than the passive damper (3b) of 0.5Hz, it is upper that zero reference photoelectric detector mountion plate (3a) is arranged on pedestal (5) by passive damper (3b), and be positioned in the downside refractive light paths of laser collimation system (2), by flat flat floating of floating that photoelectric detector (13a) and angle float that photoelectric detector (13b) forms, float detection photoelectric detector (13) with angle and be packed on the zero reference photoelectric detector mountion plate (3a) of zero reference device (3), flat float, moving direction is vertical respectively with separately for photoelectric detector is floated at angle (13a, 13b) receiving plane, and receiving plane center overlaps with corresponding beam center.
2. the floating vibration-isolating platform of the magnetic of measuring based on spring zero reference and laser auto-collimation according to claim 1, it is characterized in that described stage body attitude photoelectric detector (7) peace is floated with angle floats and detects photoelectric detector (13) and comprise position sensitive detector PSD, CCD image sensor, four-quadrant detector QPD and silicon photocell.
3. the floating vibration-isolating platform of magnetic based on spring zero reference and laser auto-collimation measurement according to claim 1, it is characterized in that described passive damper (3b) adopts spring structure, and passive damper (3b) is zero stiffness vibration damper.
CN201210574065.8A 2012-12-19 2012-12-19 Magnetic suspension vibration isolation platform on basis of zero-position reference of springs and laser auto-collimation measurement Expired - Fee Related CN103047512B (en)

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