CN1644954A - Displacement controllable air spring vibrating insulative basement - Google Patents
Displacement controllable air spring vibrating insulative basement Download PDFInfo
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- CN1644954A CN1644954A CN 200510009629 CN200510009629A CN1644954A CN 1644954 A CN1644954 A CN 1644954A CN 200510009629 CN200510009629 CN 200510009629 CN 200510009629 A CN200510009629 A CN 200510009629A CN 1644954 A CN1644954 A CN 1644954A
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Abstract
'Vibration isolation system for air spring through displacement control' consists of matrix, air spring, gas supply system, and altitude control unit. Height control unit consists of displacement transducer, controller, and electromagnetic directional valve. The absolute altitude of matrix and width of non-sensitive range are adjusted by controller. Displacement transducer has strong anti-interfere capability, short response time and good reliability, determining the tiny vibration displacement, improving the measure accuracy and precision. Good Vibration isolation effect is obtained based on air spring characteristics of heavy load ability and low rigidity, so, the inhfluence of basic vibration on measure of super precise experiment apparatus is dramatically reduced, and the requirement of experiment apparatus is satisfied.
Description
Technical field
The present invention relates to displacement controllable air spring vibrating insulative basement.
Background technique
Control mode mainly adopts levelling valve in actual air spring vibration isolation basis at present, and mechanical type and electromagnetic type dual mode are arranged, and the electromagnetic type control unit is highly sensitive, but easily produces misoperation sometimes; The mechanical type control unit is reliable, no misoperation, but be difficult to regulate basic absolute altitude position, horizontal attitude and not sensing zone width, wherein the not sensing zone width is the displacement range of pneumatic spring at the state lower substrate of not inflating also not exhaust.After installation, the absolute position of matrix is fixed, and the not sensing zone width can't be adjusted on demand in real time, and the levelling valve in the reality is in running order always, so it is easy to wear, working life is shorter.
Summary of the invention
The objective of the invention is to overcome the deficiency that exists in the above-mentioned technology, the air spring vibrating insulative basement of a kind of may command and adjustment absolute altitude position, horizontal attitude and not sensing zone width is provided.
For achieving the above object, the technical solution used in the present invention is that the height control unit is made up of displacement transducer, controller, solenoid directional control valve, relative displacement between displacement sensor the earth and the matrix, the output line of displacement transducer links to each other with the controller input signal line, controller output links to each other with the electromagnetic switch valve coil, and the air-path interface of solenoid directional control valve links to each other with ambient air, pneumatic spring and air supply system respectively.
Described displacement transducer is a tangent displacement sensor, is installed in the height displacement of terrestrial survey matrix, or is installed in the displacement of measuring ground on the matrix.
Described displacement transducer is a non-contact displacement transducer, is installed in the height displacement of terrestrial survey matrix, or is installed in the displacement of measuring ground on the matrix.
Described displacement transducer is by the indirect Displacement Measurement of lever displacement amplifying mechanism.
Described solenoid directional control valve is the three-position electromagnetic selector valve.
Advantage of the present invention
(1) but the width of absolute altitude position, horizontal attitude and the not sensing zone of real-time regulated matrix.
(2) adopt switching value control electromagnetic switch valve events by controller, avoided unnecessary wearing and tearing, prolonged working life.
Description of drawings
Accompanying drawing 1 is that non-contact displacement transducer 1 is combined with three-position electromagnetic selector valve 2, and displacement transducer 1 is installed in the pneumatic spring basic schematic of the height displacement of terrestrial survey matrix;
Accompanying drawing 2 is that non-contact displacement transducer 4 is combined with three-position electromagnetic selector valve 5, and displacement transducer 4 is installed in the pneumatic spring basic schematic of measuring the displacement on ground on the matrix;
Accompanying drawing 3 is that tangent displacement sensor 7 is combined with three-position electromagnetic selector valve 8, and displacement transducer 7 is installed in the pneumatic spring basic schematic of the height displacement of terrestrial survey matrix;
Accompanying drawing 4 is that tangent displacement sensor 10 is combined with three-position electromagnetic selector valve 11, and displacement transducer 10 is installed in the pneumatic spring basic schematic of measuring the displacement on ground on the matrix;
Accompanying drawing 5 is combined with three-position electromagnetic selector valve 14 by the non-contact displacement transducer 13 of lever displacement amplifying mechanism 16 indirect measurement matrix displacements, and displacement transducer 13 is installed in the pneumatic spring basic schematic of the height displacement of terrestrial survey matrix.
Accompanying drawing 6 is combined with three-position electromagnetic selector valve 18 by the non-contact displacement transducer 17 of lever displacement amplifying mechanism 20 indirect measurement matrix displacements, and displacement transducer 17 is installed in the pneumatic spring basic schematic of measuring the displacement on ground on the matrix.
Accompanying drawing 8 is combined with three-position electromagnetic selector valve 26 by the tangent displacement sensor 25 of lever displacement amplifying mechanism 28 indirect measurement matrix displacements, and displacement transducer 25 is installed in the pneumatic spring basic schematic of measuring the displacement on ground on the matrix.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are described in further detail.
By Fig. 1-Fig. 8 as can be known, the present invention is that the height control unit is by displacement transducer (1,4,7,10,13,17,21,25) controller (3,6,9,12,15,19,23,27) solenoid directional control valve (2,5,8,11,14,18,22,26) form, displacement transducer (1,4,7,10,13,17,21,25) relative displacement between measurement the earth and the matrix, displacement transducer (1,4,7,10,13,17,21,25) output line and controller (3,6,9,12,15,19,23,27) input signal cable links to each other, controller (3,6,9,12,15,19,23,27) output and solenoid directional control valve (2,5,8,11,14,18,22,26) coil links to each other, solenoid directional control valve (2,5,8,11,14,18,22,26) air-path interface respectively with ambient air, pneumatic spring links to each other with air supply system.
Described displacement transducer (1,4,17,25) is contactless displacement transducer.
Described displacement transducer (7,10,13,21) is the displacement transducer of contact-type.
Described displacement transducer (1,4,7,10,13,17,21,25) is the displacement transducer by the indirect Displacement Measurement of lever displacement amplifying mechanism (16,20,24,28).
Described solenoid directional control valve (2,5,8,11,14,18,22,26) is the three-position electromagnetic selector valve.
Embodiment 1:
As shown in Figure 1, a kind of air spring vibrating insulative basement, the height control unit is made up of displacement transducer 1, controller 3, solenoid directional control valve 2, the relative displacement of adopting non-contact displacement transducer 1 to measure between the earth and the matrix, the output line of displacement transducer 1 links to each other with controller 3 input signal cables, controller 3 outputs link to each other with solenoid directional control valve 2 coils, and the air-path interface of solenoid directional control valve 2 links to each other with ambient air, pneumatic spring and air supply system respectively;
Embodiment 2:
As shown in Figure 2, a kind of air spring vibrating insulative basement, the height control unit is made up of displacement transducer 4, controller 6, solenoid directional control valve 5, the relative displacement of adopting non-contact displacement transducer 4 to measure between the earth and the matrix, the output line of displacement transducer 4 links to each other with controller 6 input signal cables, controller 6 outputs link to each other with solenoid directional control valve 5 coils, and the air-path interface of solenoid directional control valve 5 links to each other with ambient air, pneumatic spring and air supply system respectively;
Embodiment 3:
As shown in Figure 3, a kind of air spring vibrating insulative basement, the height control unit is made up of displacement transducer 7, controller 9, solenoid directional control valve 8, the relative displacement of adopting tangent displacement sensor 7 to measure between the earth and the matrix, the output line of displacement transducer 7 links to each other with controller 9 input signal cables, controller 9 outputs link to each other with solenoid directional control valve 8 coils, and the air-path interface of solenoid directional control valve 8 links to each other with ambient air, pneumatic spring and air supply system respectively;
Embodiment 4:
As shown in Figure 4, a kind of air spring vibrating insulative basement, the height control unit is made up of displacement transducer 10, controller 12, solenoid directional control valve 11, the relative displacement of adopting tangent displacement sensor 10 to measure between the earth and the matrix, the output line of displacement transducer 10 links to each other with controller 12 input signal cables, controller 12 outputs link to each other with solenoid directional control valve 11 coils, and the air-path interface of solenoid directional control valve 11 links to each other with ambient air, pneumatic spring and air supply system respectively;
Embodiment 5:
As shown in Figure 5, a kind of air spring vibrating insulative basement, the height control unit is made up of displacement transducer 13, controller 15, solenoid directional control valve 14, adopt the tangent displacement sensor 13 measurement the earth of lever displacement amplifying mechanism 16 indirect Displacement Measurement and the relative displacement between the matrix, the output line of displacement transducer 13 links to each other with controller 15 input signal cables, controller 15 outputs link to each other with solenoid directional control valve 14 coils, and the air-path interface of solenoid directional control valve 14 links to each other with ambient air, pneumatic spring and air supply system respectively.
Embodiment 6:
As shown in Figure 6, a kind of air spring vibrating insulative basement, the height control unit is made up of displacement transducer 17, controller 19, solenoid directional control valve 18, adopt the non-contact displacement transducer 17 measurement the earth of lever displacement amplifying mechanism 20 indirect Displacement Measurement and the relative displacement between the matrix, the output line of displacement transducer 17 links to each other with controller 19 input signal cables, controller 19 outputs link to each other with solenoid directional control valve 18 coils, and the air-path interface of solenoid directional control valve 18 links to each other with ambient air, pneumatic spring and air supply system respectively.
Embodiment 7:
As shown in Figure 7, a kind of air spring vibrating insulative basement, the height control unit is made up of displacement transducer 21, controller 23, solenoid directional control valve 22, adopt the tangent displacement sensor 21 measurement the earth of lever displacement amplifying mechanism 24 indirect Displacement Measurement and the relative displacement between the matrix, the output line of displacement transducer 21 links to each other with controller 23 input signal cables, controller 23 outputs link to each other with solenoid directional control valve 22 coils, and the air-path interface of solenoid directional control valve 22 links to each other with ambient air, pneumatic spring and air supply system respectively.
Embodiment 8:
As shown in Figure 8, a kind of air spring vibrating insulative basement, the height control unit is made up of displacement transducer 25, controller 27, solenoid directional control valve 26, adopt the non-contact displacement transducer 25 measurement the earth of lever displacement amplifying mechanism 28 indirect Displacement Measurement and the relative displacement between the matrix, the output line of displacement transducer 25 links to each other with controller 27 input signal cables, controller 27 outputs link to each other with solenoid directional control valve 26 coils, and the air-path interface of solenoid directional control valve 26 links to each other with ambient air, pneumatic spring and air supply system respectively.
Basic principle of the present invention is: realize the height control of matrix by the height control unit.Structurally, the height control unit is made up of displacement transducer, controller, solenoid directional control valve, relative displacement between displacement sensor the earth and the matrix, the output line of displacement transducer links to each other with the controller input signal line, controller output links to each other with the electromagnetic switch valve coil, and the air-path interface of solenoid directional control valve links to each other with ambient air, pneumatic spring and air supply system respectively.According to application need in the reality, displacement transducer can have multiple metering system, as: tangent displacement sensor, non-contact displacement transducer, displacement transducer by the indirect Displacement Measurement of lever displacement amplifying mechanism.On arrangement, the height control unit adopts 3 layouts, promptly adopts three cover height control units to adjust the level of control matrix, in particular cases, also can adopt multiple spot to arrange, as: 4 layouts.
Claims (5)
1. displacement controllable air spring vibrating insulative basement, form by matrix, air spring system, air supply system, height control unit, it is characterized in that: the height control unit is made up of displacement transducer, controller, solenoid directional control valve, relative displacement between displacement sensor the earth and the matrix, the output line of displacement transducer links to each other with the controller input signal line, controller output links to each other with the electromagnetic switch valve coil, and the air-path interface of solenoid directional control valve links to each other with ambient air, pneumatic spring and air supply system respectively.
2. as claim 1 described air spring vibrating insulative basement, it is characterized in that: described displacement transducer is a tangent displacement sensor, is installed in the height displacement of terrestrial survey matrix, or is installed in the displacement of measuring ground on the matrix.
3. as claim 1 described air spring vibrating insulative basement, it is characterized in that: described displacement transducer is a non-contact displacement transducer, is installed in the height displacement of terrestrial survey matrix, or is installed in the displacement of measuring ground on the matrix.
4. as claim 2,3 described air spring vibrating insulative basements, it is characterized in that: described displacement transducer is by the indirect Displacement Measurement of lever displacement amplifying mechanism.
5. as claim 1 described air spring vibrating insulative basement, it is characterized in that: described solenoid directional control valve is the three-position electromagnetic selector valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510009629 CN1644954A (en) | 2005-01-18 | 2005-01-18 | Displacement controllable air spring vibrating insulative basement |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510009629 CN1644954A (en) | 2005-01-18 | 2005-01-18 | Displacement controllable air spring vibrating insulative basement |
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| CN1644954A true CN1644954A (en) | 2005-07-27 |
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| CN 200510009629 Pending CN1644954A (en) | 2005-01-18 | 2005-01-18 | Displacement controllable air spring vibrating insulative basement |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101813152B (en) * | 2009-08-19 | 2012-02-08 | 中国人民解放军海军工程大学 | Intelligent air bag vibration isolation device |
| CN103047514A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Air floatation vibration isolation platform on basis of air floatation zero-position reference and laser auto-collimation measurement |
| CN103075620A (en) * | 2012-12-19 | 2013-05-01 | 哈尔滨工业大学 | Air spring vibration isolation platform based on spring zero reference and laser self-collimating measurement |
| CN103075617A (en) * | 2012-12-19 | 2013-05-01 | 哈尔滨工业大学 | Air spring vibration isolation platform based on maglev zero reference and laser self-collimating measurement |
| CN103075618A (en) * | 2012-12-19 | 2013-05-01 | 哈尔滨工业大学 | Gas floating vibration isolation platform based on gas magnetic zero reference and laser self-collimating measurement |
| CN103075619A (en) * | 2012-12-19 | 2013-05-01 | 哈尔滨工业大学 | Maglev vibration isolation platform based on gas magnetic zero reference and laser self-collimating measurement |
| CN104476204A (en) * | 2014-11-20 | 2015-04-01 | 中国航空工业集团公司北京航空精密机械研究所 | Large vertical precision machine |
| CN107972689A (en) * | 2017-11-29 | 2018-05-01 | 中车长春轨道客车股份有限公司 | The method of adjustment of subway car bogie air spring |
| CN113884004A (en) * | 2021-09-08 | 2022-01-04 | 长江存储科技有限责任公司 | Air floatation system of scanning electron microscope for measuring characteristic dimension and scanning electron microscope |
-
2005
- 2005-01-18 CN CN 200510009629 patent/CN1644954A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101813152B (en) * | 2009-08-19 | 2012-02-08 | 中国人民解放军海军工程大学 | Intelligent air bag vibration isolation device |
| CN103047514A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Air floatation vibration isolation platform on basis of air floatation zero-position reference and laser auto-collimation measurement |
| CN103075620A (en) * | 2012-12-19 | 2013-05-01 | 哈尔滨工业大学 | Air spring vibration isolation platform based on spring zero reference and laser self-collimating measurement |
| CN103075617A (en) * | 2012-12-19 | 2013-05-01 | 哈尔滨工业大学 | Air spring vibration isolation platform based on maglev zero reference and laser self-collimating measurement |
| CN103075618A (en) * | 2012-12-19 | 2013-05-01 | 哈尔滨工业大学 | Gas floating vibration isolation platform based on gas magnetic zero reference and laser self-collimating measurement |
| CN103075619A (en) * | 2012-12-19 | 2013-05-01 | 哈尔滨工业大学 | Maglev vibration isolation platform based on gas magnetic zero reference and laser self-collimating measurement |
| CN103075619B (en) * | 2012-12-19 | 2015-03-25 | 哈尔滨工业大学 | Maglev vibration isolation platform based on gas magnetic zero reference and laser self-collimating measurement |
| CN104476204A (en) * | 2014-11-20 | 2015-04-01 | 中国航空工业集团公司北京航空精密机械研究所 | Large vertical precision machine |
| CN107972689A (en) * | 2017-11-29 | 2018-05-01 | 中车长春轨道客车股份有限公司 | The method of adjustment of subway car bogie air spring |
| CN107972689B (en) * | 2017-11-29 | 2019-09-10 | 中车长春轨道客车股份有限公司 | The method of adjustment of subway vehicle bogie air spring |
| CN113884004A (en) * | 2021-09-08 | 2022-01-04 | 长江存储科技有限责任公司 | Air floatation system of scanning electron microscope for measuring characteristic dimension and scanning electron microscope |
| CN113884004B (en) * | 2021-09-08 | 2024-06-07 | 长江存储科技有限责任公司 | Air floatation system of scanning electron microscope for feature size measurement and scanning electron microscope |
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Owner name: HARBIN INSTITUTE OF TECHNOLOGY Free format text: FORMER OWNER: HARBIN INSTITUTE OF TECHNOLOGY; APPLICANT Effective date: 20060922 |
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Effective date of registration: 20060922 Address after: 150001 No. 92 West straight street, Harbin, Heilongjiang Applicant after: Harbin Institute of Technology Address before: 150001 No. 92 West straight street, Harbin, Heilongjiang Applicant before: Harbin Institute of Technology Co-applicant before: Yao Shaoming |
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