CN103023455A - Quartz crystal oscillator with electrodes on same face - Google Patents

Quartz crystal oscillator with electrodes on same face Download PDF

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Publication number
CN103023455A
CN103023455A CN2012104714853A CN201210471485A CN103023455A CN 103023455 A CN103023455 A CN 103023455A CN 2012104714853 A CN2012104714853 A CN 2012104714853A CN 201210471485 A CN201210471485 A CN 201210471485A CN 103023455 A CN103023455 A CN 103023455A
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China
Prior art keywords
quartz crystal
electrodes
electrode
quartz
same face
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Pending
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CN2012104714853A
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Chinese (zh)
Inventor
俞宏
崔学晨
王保民
张利群
孙宪光
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崔学晨
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Priority to CN2012104714853A priority Critical patent/CN103023455A/en
Publication of CN103023455A publication Critical patent/CN103023455A/en
Pending legal-status Critical Current

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Abstract

The invention relates to a quartz crystal oscillator with electrodes on a same face, and belongs to the technical field of electronic elements. The quartz crystal oscillator with electrodes on the same face comprises a quartz crystal body and electrodes on the surface of a quartz crystal piece. The quartz crystal oscillator is characterized in that the two electrodes are arranged on the same face of the quartz crystal piece. One of the quartz electrodes located in the center of the face is circular and extends to form a lead toward the edge. The other one of the quartz electrodes, which is opened and circular, surrounds the periphery of the electrode and extends to form a lead toward the edge. The two electrodes are electrically insulated. The electrodes are made of excellent conductive materials. According to the quartz crystal oscillator provided by the invention, the manufacturing process is simplified, the detection sensitivity is improved, and the quartz crystal oscillator is agile and convenient to use.

Description

A kind of electrode is positioned at the quartz-crystal unit of the same face
Technical field
The present invention relates to the quartz-crystal unit that a kind of electrode is positioned at the same face, belong to technical field of electronic components.Be used for quartz oscillator and quartz crystal microbalance sensor etc.
Background technology
Quartz-crystal unit can be used as the transducer that detects micro substance, the principle of utilizing the frequency change of quartz-crystal unit to be directly proportional with the mass change of plane of crystal, but the mass change of detecting electrode surface n g level and the viscosity of solution, density, the isoparametric variation of modified membrane viscoplasticity, have highly sensitive, the characteristics such as can measure in real time, can be used as the means that on-line tracing monitoring microprocess changes, at modern chemistry, material science, the exploratory development of microprocess and the mechanism of action is carried out in the aspect such as biology and medical science, presents good development prospect in a lot of applications.The core component of quartz oscillator is quartz-crystal unit, and it comprises the film plating layer on quartz crystal slice body and quartz crystal slice surface, and film plating layer is generally good electric conductor, with as electrode.Usually, be separately positioned on the two sides of quartz crystal slice as the film plating layer of electrode, when powering up with thickness tangential manner excited oscillation.US Patent No. 7075216B1 discloses a kind of " side field excitation sonic sensor " (Lateral field excited acoustic wave sensor) is characterized in that being coated with on the quartz crystal slice surface two semicircle metal films with symmetry as electrode, this design start time oscillation difficulty, have the one side of electrode to be difficult for as testing face, and sensitivity is lower.
Summary of the invention
For above-mentioned the deficiencies in the prior art, the invention provides the quartz-crystal unit that a kind of electrode is positioned at the same face, can simplify manufacture craft, improve detection sensitivity, flexible and convenient to use.
For realizing above-mentioned technical purpose, the present invention takes following technical scheme: a kind of electrode is positioned at the quartz-crystal unit of the same face, the electrode that comprises quartz crystal slice body and quartz crystal slice surface, it is characterized in that, its two electrodes are arranged on the same face of quartz crystal slice, one of them electrode is positioned at the center of this face, stretch out lead-in wire for circle and to the edge, another electrode be open annular be surrounded on former electrodes around and stretch out lead-in wire to the edge, two electrode electric insulations, described electrode is take good electric conductor as material.The electrodeless one side of quartz crystal, can make as required becomes different testing faces.
The invention has the beneficial effects as follows that the pair of electrodes plate of quartz-crystal unit is arranged on the same side of crystal, can disposablely finish coating single side during manufacturing, do not need double-sided coating, simplified manufacture craft.Its back side is as the testing face of transducer, can select as required different plated films or carry out special surface preparation, and the resonant circuit electrode separates with the testing face electricity of transducer, has got rid of the impact on the resonant circuit electrode when other purposes of this electrode.The set-up mode of this kind electrode makes the mass sensitivity of the testing face of transducer improve 1-2 times, and makes the application of quartz-crystal unit more wide.
Description of drawings
Fig. 1-Fig. 6 is the structural representation of the embodiment of the invention 1, and the back side of quartz-crystal unit shown in the figure arranges plated film.Fig. 7-Figure 12 is the structural representation of the embodiment of the invention 2, and the back side of quartz-crystal unit shown in the figure does not arrange plated film.
Embodiment
Embodiment 1, such as Fig. 1-shown in Figure 6, a kind of electrode is positioned at the quartz-crystal unit of the same face, the electrode that comprises quartz crystal slice body and quartz crystal slice surface, its two electrodes are arranged on the same face of quartz crystal slice, and one of them electrode is positioned at the center of this face, stretch out lead-in wire for circle and to the edge, another electrode be open annular be positioned at former electrodes around, two electrode electric insulations, described electrode are take good electric conductor as material, such as gold or silver-colored.The electrodeless one side of quartz-crystal unit arranges metal coating, as testing face.
Embodiment 2, such as Fig. 7-Figure 12, a kind of electrode is positioned at the quartz crystal of the same face, the electrode that comprises quartz crystal slice body and quartz crystal slice surface, its two electrodes are arranged on the same face of quartz crystal slice, and one of them electrode is positioned at the center of this face, stretch out lead-in wire for circle and to the edge, another electrode be open annular be positioned at former electrodes around, two electrode electric insulations, described electrode are take good electric conductor as material, such as gold or silver-colored.The electrodeless one side of quartz-crystal unit does not arrange metal coating.

Claims (2)

1. an electrode is positioned at the quartz-crystal unit of the same face, the electrode that comprises quartz crystal slice body and quartz crystal slice surface, it is characterized in that, its two electrodes are arranged on the same face of quartz crystal slice, one of them electrode is positioned at the center of this face, for circular and stretch out lead-in wire to the edge, another electrode be open annular be surrounded on former electrodes around and stretch out lead-in wire, two electrode electric insulations to the edge.
2. quartz crystal according to claim 1 is characterized in that, described electrode is take good electric conductor as material.
CN2012104714853A 2012-11-20 2012-11-20 Quartz crystal oscillator with electrodes on same face Pending CN103023455A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2012104714853A CN103023455A (en) 2012-11-20 2012-11-20 Quartz crystal oscillator with electrodes on same face

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Application Number Priority Date Filing Date Title
CN2012104714853A CN103023455A (en) 2012-11-20 2012-11-20 Quartz crystal oscillator with electrodes on same face

Publications (1)

Publication Number Publication Date
CN103023455A true CN103023455A (en) 2013-04-03

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103558112A (en) * 2013-11-19 2014-02-05 东南大学 Detection device for quartz crystal microbalance
CN105675096A (en) * 2016-03-08 2016-06-15 成都柏森松传感技术有限公司 Device for manufacturing multichannel quartz crystal microbalance chip
CN105806730A (en) * 2016-03-08 2016-07-27 成都柏森松传感技术有限公司 Manufacturing template for multichannel quartz crystal microbalance chip
CN109374731A (en) * 2018-11-14 2019-02-22 江苏科技大学 A kind of quartz crystal microbalance of annular indium-tin oxide electrode
JP2021106272A (en) * 2016-11-14 2021-07-26 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated Selective etch rate monitor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7075216B1 (en) * 2004-03-31 2006-07-11 University Of Maine System Board Of Trustees Lateral field excited acoustic wave sensor
CN201766560U (en) * 2010-09-08 2011-03-16 成都奔月科技有限公司 Novel quartz crystal resonator
CN202256091U (en) * 2011-09-03 2012-05-30 崔学晨 Piezoelectric quartz crystal sensor chip
CN203086423U (en) * 2012-11-20 2013-07-24 崔学晨 Quartz crystal oscillator with electrodes on same face

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7075216B1 (en) * 2004-03-31 2006-07-11 University Of Maine System Board Of Trustees Lateral field excited acoustic wave sensor
CN201766560U (en) * 2010-09-08 2011-03-16 成都奔月科技有限公司 Novel quartz crystal resonator
CN202256091U (en) * 2011-09-03 2012-05-30 崔学晨 Piezoelectric quartz crystal sensor chip
CN203086423U (en) * 2012-11-20 2013-07-24 崔学晨 Quartz crystal oscillator with electrodes on same face

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103558112A (en) * 2013-11-19 2014-02-05 东南大学 Detection device for quartz crystal microbalance
CN103558112B (en) * 2013-11-19 2016-02-03 东南大学 Detection device for quartz crystal microbalance
CN105675096A (en) * 2016-03-08 2016-06-15 成都柏森松传感技术有限公司 Device for manufacturing multichannel quartz crystal microbalance chip
CN105806730A (en) * 2016-03-08 2016-07-27 成都柏森松传感技术有限公司 Manufacturing template for multichannel quartz crystal microbalance chip
CN105675096B (en) * 2016-03-08 2018-02-23 成都柏森松传感技术有限公司 The producing device of multichannel quartz crystal microbalance chip
CN105806730B (en) * 2016-03-08 2018-05-08 成都柏森松传感技术有限公司 The making template of multichannel quartz crystal microbalance chip
JP2021106272A (en) * 2016-11-14 2021-07-26 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated Selective etch rate monitor
JP7170765B2 (en) 2016-11-14 2022-11-14 アプライド マテリアルズ インコーポレイテッド Selective etch rate monitor
CN109374731A (en) * 2018-11-14 2019-02-22 江苏科技大学 A kind of quartz crystal microbalance of annular indium-tin oxide electrode
CN109374731B (en) * 2018-11-14 2021-07-13 江苏科技大学 Quartz crystal microbalance with annular indium tin oxide electrode

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Application publication date: 20130403