CN204203023U - A kind of mass sensor chip of overturning electrode exit - Google Patents
A kind of mass sensor chip of overturning electrode exit Download PDFInfo
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- CN204203023U CN204203023U CN201420677647.3U CN201420677647U CN204203023U CN 204203023 U CN204203023 U CN 204203023U CN 201420677647 U CN201420677647 U CN 201420677647U CN 204203023 U CN204203023 U CN 204203023U
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- quartz crystal
- crystal slice
- slice body
- electrode
- circle
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Abstract
The utility model relates to a kind of mass sensor chip of overturning electrode exit, belongs to technical field of electronic components.It comprises the metal film electrode on quartz crystal slice body and quartz crystal slice surface, it is characterized in that, the edge chamfer of described quartz crystal slice body, a plane breach is opened at this edge, two symmetrical arc metal film electrode lead-in wires are set on described quartz crystal slice body one surface, aforesaid plane breach is aimed at the middle part of one of them workplace contact conductor, and another surface turning to quartz crystal slice body is extended along this plane breach, form a circle as workplace electrode, another contact conductor and said working surface contact conductor are symmetricly set on the same surface of quartz crystal slice body, extend towards the center of circle of quartz crystal slice body in the middle part of it and form a circle using this center of circle as another electrode.The utility model can simplify manufacture craft, improves detection sensitivity, flexible and convenient to use.
Description
Technical field
The utility model relates to a kind of mass sensor chip of overturning electrode exit, belongs to technical field of electronic components.For quartz oscillator and quartz crystal microbalance sensor etc.
Background technology
Quartz-crystal unit can as the sensor detecting micro substance, utilize the principle that the frequency change of quartz-crystal unit is directly proportional to the mass change of plane of crystal, can the mass change of detecting electrode surface n g level and the viscosity of solution, density, modified membrane viscoelasticity and the isoparametric change of quality, have highly sensitive, the feature such as can to measure in real time, can be used as the means of on-line tracing monitoring microprocess change, at modern chemistry, material science, the exploratory development of microprocess and the mechanism of action is carried out in the aspect such as biology and medical science, good development prospect is presented in a lot of application.The core component of quartz oscillator is quartz-crystal unit, and it comprises the film plating layer on quartz crystal slice body and quartz crystal slice surface, and film plating layer is generally excellent electric conductor, using as electrode.Usually, the film plating layer as electrode is separately positioned on the two sides of quartz crystal slice, with thickness tangential manner excited oscillation when powering up.US Patent No. 7075216B1 discloses one " side field excitation sonic sensor " (Lateral field excited acoustic wave sensor) and it is characterized in that being coated with two using the half-round metal film of symmetry as electrode on quartz crystal slice surface, this design start time oscillation difficulty, have the one side of electrode not easily as testing face, and sensitivity is lower.
Summary of the invention
For above-mentioned the deficiencies in the prior art, the utility model provides a kind of mass sensor chip of overturning electrode exit, can simplify manufacture craft, improves detection sensitivity, flexible and convenient to use.
For realizing above-mentioned technical purpose, the utility model takes following technical scheme: a kind of mass sensor chip of overturning electrode exit, comprise the metal film electrode on quartz crystal slice body and quartz crystal slice surface, it is characterized in that, by the edge chamfer of described quartz crystal slice body, a plane breach is opened at this edge, two symmetrical arc metal film electrode lead-in wires are set on described quartz crystal slice body one surface, aforesaid plane breach is aimed at the middle part of one of them workplace contact conductor, and another surface turning to quartz crystal slice body is extended along this plane breach, form a circle as workplace electrode, another contact conductor and said working surface contact conductor are symmetricly set on the same surface of quartz crystal slice body, extend towards the center of circle of quartz crystal slice body in the middle part of it and form a circle using this center of circle as another electrode, described two electrodes and arc-shaped electrode lead-in wire electrically insulated from one another thereof.The plane indentation, there rounding of described quartz crystal slice body edges, causes metal film to wear and tear to avoid this place to have seamed edge.
The beneficial effects of the utility model are, the pair of electrodes lead-in wire due to quartz-crystal unit is arranged on the same face of crystal wafer, therefore easy for installation in the application, is easily connected with wire contacts; The symmetrical arc of electrode extends the anisotropy eliminating crystal wafer; Electrode reversion resistance reduces, and reduces crystal impedance.In addition, the plane breach at quartz crystal slice edge and rounding process, this place can be avoided to have seamed edge and cause metal film to wear and tear, and plane breach is easily processed.
Accompanying drawing explanation
Accompanying drawing is axonometric drawing, Fig. 1 is the structural representation of quartz crystal slice body of the present utility model, Fig. 2 is the structural representation in the symmetrical arc contact conductor face after quartz crystal slice body overlay film, and Fig. 3 is the structural representation of the workplace after quartz crystal slice body overlay film.
In figure, 1, quartz crystal slice body edges chamfering, 2, plane breach, 3, workplace contact conductor, 3 ' workplace electrode, 4, another contact conductor.
Embodiment
As Fig. 1, shown in Fig. 2 and Fig. 3, a kind of mass sensor chip of overturning electrode exit, comprise the metal film electrode on quartz crystal slice body and quartz crystal slice surface, by the edge chamfer 1 of described quartz crystal slice body, a plane breach 2 is opened at this edge, this plane breach 2 edge rounding, metal film is caused to wear and tear to avoid this place to have seamed edge, two symmetrical arc metal film electrode lead-in wires are set on a surface of described quartz crystal slice body, aforesaid plane breach 2 is aimed at the middle part of one of them workplace contact conductor 3, and another surface turning to quartz crystal slice body is extended along this plane breach 2, form a circle as workplace electrode 3 ', another contact conductor 4 and said working surface contact conductor 3 are symmetricly set on the same surface of quartz crystal slice body, extend towards the center of circle of quartz crystal slice body in the middle part of it and form a circle using this center of circle as another electrode, described two electrodes and arc-shaped electrode lead-in wire electrically insulated from one another thereof.The described metal film that arranges can adopt the prior art such as evaporation and magnetron sputtering to implement.
Claims (2)
1. the mass sensor chip of an overturning electrode exit, comprise the metal film electrode on quartz crystal slice body and quartz crystal slice surface, it is characterized in that, by the edge chamfer (1) of described quartz crystal slice body, a plane breach (2) is opened at this edge, two symmetrical arc metal film electrode lead-in wires are set on described quartz crystal slice body one surface, aforesaid plane breach (2) is aimed at the middle part of one of them workplace contact conductor (3), and another surface turning to quartz crystal slice body is extended along this plane breach, form a circle as workplace electrode (3 '), another contact conductor (4) and said working surface contact conductor (3) are symmetricly set on the same surface of quartz crystal slice body, extend towards the center of circle of quartz crystal slice body in the middle part of it and form a circle using this center of circle as another electrode, described two electrodes and arc-shaped electrode lead-in wire electrically insulated from one another thereof.
2. the mass sensor chip of overturning electrode exit according to claim 1, is characterized in that, plane breach (2) the place rounding of described quartz crystal slice body edges.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420677647.3U CN204203023U (en) | 2014-11-14 | 2014-11-14 | A kind of mass sensor chip of overturning electrode exit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420677647.3U CN204203023U (en) | 2014-11-14 | 2014-11-14 | A kind of mass sensor chip of overturning electrode exit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204203023U true CN204203023U (en) | 2015-03-11 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420677647.3U Active CN204203023U (en) | 2014-11-14 | 2014-11-14 | A kind of mass sensor chip of overturning electrode exit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204203023U (en) |
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2014
- 2014-11-14 CN CN201420677647.3U patent/CN204203023U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Henan Kerui Science and Technology Co., Ltd. Assignor: Cui Xuechen Contract record no.: 2015410000029 Denomination of utility model: Mass sensor chip of turning electrode leading-out terminal Granted publication date: 20150311 License type: Exclusive License Record date: 20150423 |
|
| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| EC01 | Cancellation of recordation of patent licensing contract |
Assignee: Henan Kerui Science and Technology Co., Ltd. Assignor: Cui Xuechen Contract record no.: 2015410000029 Date of cancellation: 20160708 |
|
| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model |