CN202256091U - Piezoelectric quartz crystal sensor chip - Google Patents
Piezoelectric quartz crystal sensor chip Download PDFInfo
- Publication number
- CN202256091U CN202256091U CN2011203283625U CN201120328362U CN202256091U CN 202256091 U CN202256091 U CN 202256091U CN 2011203283625 U CN2011203283625 U CN 2011203283625U CN 201120328362 U CN201120328362 U CN 201120328362U CN 202256091 U CN202256091 U CN 202256091U
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- CN
- China
- Prior art keywords
- quartz crystal
- sensor chip
- substrate
- crystal sensor
- piezoelectric quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model relates to a piezoelectric quartz crystal sensor chip which is used for detecting trace substances in a gas phase or a liquid phase. The piezoelectric quartz crystal sensor chip comprises a quartz crystal substrate and metal electrodes on two surfaces of the quartz crystal substrate. In the traditional quartz crystal sensor chip, electrode leading wire regions on two surfaces of the substrate are located in the unoccupied direction, an opposite radial direction as usual, at the periphery of the substrate. As the electrode leading wire regions on two surfaces of the quartz crystal substrate are located at the same direction identical to the radial direction of the periphery of the substrate, the piezoelectric quartz crystal sensor chip is particularly suitable for a clamping type sensor bracket.
Description
Technical field
The utility model is a kind of piezoelectric quartz crystal sensor chip, is used for the detection of gas phase or liquid phase micro substance, belongs to science detecting instrument field.
Technical background
QCM (QCM) is a kind of novel sensor measuring technique; The principle that it utilizes the change of frequency of quartz vibrator to be directly proportional with the mass change of plane of crystal; But the mass change of detecting electrode surface n g level and solution viscosity, density, the isoparametric variation of modified membrane viscoelasticity; Have highly sensitive; Characteristics such as can measure in real time, fields such as chemistry, material science, biology and medical science are carried out in the exploratory development of the microprocess and the mechanism of action and are demonstrated bright development prospect in modern times.
The core component of quartz crystal sensor is the quartz crystal sensor chip, and the version of chip is directly connected to the complicated and simple and practicality of carrying the sensor chip supporting structure.Existing quartz crystal sensor chip, the contact conductor district on substrate two sides all be in the substrate circumference without direction, be generally the footpath round about, the applicability of this chip has limitation, can not be applicable to " clipping " sensor stand.The adaptability that the unicity of quartz crystal sensor chip structure causes quartz crystal oscillator to detect is limited to.
Summary of the invention
The purpose of the utility model provides a kind of piezoelectric quartz crystal sensor chip, remedies the deficiency of prior art with a kind of new structural design, is particularly suitable for " clipping " sensor stand and uses.
The technical scheme that the utility model adopts is following: a kind of piezoelectric quartz crystal sensor chip; Metal electrode by quartz crystal substrate and two sides thereof constitutes; The area of said two sides metal electrode can be the same or different; Metal electrode is the coat of metal on quartz crystal substrate two sides, and the material of the coat of metal can be various metals such as gold, silver, titanium, stainless steel.The coat of metal can be divided into circular electrode workspace that is positioned at the quartz crystal substrate center and the contact conductor district that extends to quartz crystal substrate edge according to its function.The contact conductor district on this quartz crystal substrate two sides is in substrate circumference same direction radially; It is the contact conductor district projection coincidence in the axial direction on substrate two sides; Be particularly suitable for " clipping " sensor stand and use, can insert easily in the gaseous environment or in the sample solution to be checked and detect.
The beneficial effect that the piezoelectric quartz crystal sensor chip that the utility model provides has is: because the contact conductor district on quartz crystal substrate two sides is in substrate circumference same direction radially; Can use " clipping " sensor stand simply and easily; Both can insert in the gaseous environment and detect; Also can be equipped with in the various containers of sample to be tested or on-the-spot on-line real time monitoring, have extensive applicability at detection cell, beaker, reaction bulb etc.
Description of drawings
Fig. 1 is the front view of this case quartz crystal sensor chip, and Fig. 2 is a sectional view shown in the A-A among Fig. 1.
Among the figure, 1-a face metal electrode, 2-quartz crystal substrate, 3-b face metal electrode, 4-electrode workspace, 5-contact conductor district.
Embodiment
Below in conjunction with accompanying drawing the utility model is described further.
As shown in the figure, a kind of piezoelectric quartz crystal sensor chip is made up of a face metal electrode 1, quartz crystal substrate 2 and b face metal electrode 3.Quartz crystal substrate 2 is the quartz crystal slice of AT cutting, and metal electrode 1 and 3 is the coat of metal attached to quartz crystal substrate 2 two sides (a, b).Two sides (a, b) metal electrode 1 can be identical with 3 area, also can be different, and its material can be one of multiple metals such as gold, silver, titanium, stainless steel.Metal electrode 1 and 3 can be divided into circular electrode workspace 4 that is positioned at the quartz crystal substrate center and the contact conductor district 5 that extends to quartz crystal substrate edge according to its function.Two sides (a, b) metal electrode 1 and 3 contact conductor district 5 are in quartz crystal substrate 2 circumference same direction radially, promptly the contact conductor district 5 on substrate two sides in the axial direction projection overlap, be specially adapted to " clipping " sensor stand and use.
Claims (1)
1. piezoelectric quartz crystal sensor chip is made up of the metal electrode on quartz crystal substrate and two sides thereof, it is characterized in that the contact conductor district (5) on quartz crystal substrate (2) two sides is in substrate circumference same direction radially.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203283625U CN202256091U (en) | 2011-09-03 | 2011-09-03 | Piezoelectric quartz crystal sensor chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203283625U CN202256091U (en) | 2011-09-03 | 2011-09-03 | Piezoelectric quartz crystal sensor chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202256091U true CN202256091U (en) | 2012-05-30 |
Family
ID=46117315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203283625U Expired - Lifetime CN202256091U (en) | 2011-09-03 | 2011-09-03 | Piezoelectric quartz crystal sensor chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202256091U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103023455A (en) * | 2012-11-20 | 2013-04-03 | 崔学晨 | Quartz crystal oscillator with electrodes on same face |
| CN104541148A (en) * | 2012-08-10 | 2015-04-22 | 富士通株式会社 | Qcm sensor and method for manufacturing same |
-
2011
- 2011-09-03 CN CN2011203283625U patent/CN202256091U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104541148A (en) * | 2012-08-10 | 2015-04-22 | 富士通株式会社 | Qcm sensor and method for manufacturing same |
| CN103023455A (en) * | 2012-11-20 | 2013-04-03 | 崔学晨 | Quartz crystal oscillator with electrodes on same face |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Henan Kerui Science and Technology Co., Ltd. Assignor: Cui Xuechen Contract record no.: 2012410000017 Denomination of utility model: Piezoelectric quartz crystal sensor chip Granted publication date: 20120530 License type: Exclusive License Record date: 20120313 |
|
| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120530 |