CN107632066B - A kind of surface acoustic wave hydrogen gas sensor based on palladium-nickel alloy film - Google Patents
A kind of surface acoustic wave hydrogen gas sensor based on palladium-nickel alloy film Download PDFInfo
- Publication number
- CN107632066B CN107632066B CN201710646178.7A CN201710646178A CN107632066B CN 107632066 B CN107632066 B CN 107632066B CN 201710646178 A CN201710646178 A CN 201710646178A CN 107632066 B CN107632066 B CN 107632066B
- Authority
- CN
- China
- Prior art keywords
- palladium
- nickel alloy
- alloy film
- delay line
- acoustic wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
The present invention provides a kind of surface acoustic wave hydrogen gas sensors based on palladium-nickel alloy film, comprising: gas chamber (2), air pump (3), tracheae (4), differential type oscillating circuit board (1) be parallel with two and the SAW delay line that is set in gas chamber (2) in the same direction；The air pump (3) is connect by tracheae (4) with gas chamber (2)；Palladium-nickel alloy film is provided on the wherein acoustic surface wave propagation path of a SAW delay line；The electric signal that the differential type oscillating circuit board (1) is used to export two SAW delay lines after hydrogen acts on carries out Frequency mixing processing, using the difference frequency signal of generation as the output result of sensor.The present invention is by using delay line type structure a kind of parallel and being arranged in the same direction, it will help improves the temperature stability of hydrogen sensor-based system, and obtains higher detection sensitivity；Improve the detection speed of surface acoustic wave hydrogen gas sensor as sensitive membrane by using palladium-nickel alloy film simultaneously.
Description
Technical field
The present invention relates to surface acoustic wave gas sensor technology field, in particular to a kind of sound based on palladium-nickel alloy film
Surface wave hydrogen gas sensor.
Background technique
A kind of form of the Hydrogen Energy as using energy source, the features such as because of its availability and using upper cleaning, facilitate,
To adjustment energy consumption structure, greenhouse gas emission, reply climate change etc., important in inhibiting, Hydrogen Technology are reduced
There is huge development space with industry.In recent years, as the increasingly exhausted and greenhouse effects of fossil fuel increasingly show, Hydrogen Energy
A kind of attention as cleaning, efficient and rich reserves secondary energy sources, by more and more national.
Currently, Hydrogen Energy has been classified as the important component of national energy system by multiple countries and regions.It is existing in Europe
Being taken the lead by Germany Hydrogen Energy is included in European Union's energy system, especially after 2013, Germany's developing operation more than ten
A hydrogen energy storage demonstrative project；The U.S. is in recent years in presumption principle fuel cell energetically；Japan is even more gathering around for hydrogen energy source development and utilization
Wholesale, and plenty of time and fund have been put into thus；South Korea also starts to have an effect since 2000 in this field.Wherein, Japanese
Commercialization stage has been come into hydrogen cell automobile field with Germany.In terms of national situations, China's water electrolysis hydrogen production skill
Preferably, the related industry chain including components control, integrated etc. is also gradually forming on the basis of art.But the fire point of hydrogen
It is lower than natural gas, transport and storage safety requirements with higher to Hydrogen Energy, so in Hydrogen Energy transport, storage, use process
In there is an urgent need to carry out to density of hydrogen, scene is online, fast and accurately detects.
Current hydrogen gas sensor technology mainly has electrochemistry, catalyst combustion etc., but the hydrogen detection of different principle
Means performance difference is larger.Have the response time fast (being less than 2s) using the hydrogen gas sensor of surface acoustic wave (SAW) technology, measures
The advantages of concentration range wide (10ppm-100%.), and under larger measurement of concetration, precision meets basic measurement needs, surely
It is qualitative preferable.SAW hydrogen gas sensor mainly uses sensing modality of the SAW device in conjunction with sensitive membrane, the synthesis of sensitive membrane at present
The main performance of sensor is directly affected with preparation.Existing SAW hydrogen gas sensor detection speed was slower, in tens seconds grades.
Summary of the invention
It is an object of the present invention to solve the slow-footed technical problem of detection present in existing hydrogen gas sensor,
Realize that hydrogen gas sensor has the characteristics that detect speed, good temperature stability faster；It provides a kind of based on palladium-nickel alloy
The surface acoustic wave hydrogen gas sensor of film, inventive sensor include two in parallel be arranged in the same direction and on acoustic propagation path
The delay line of distribution improves the detection speed of sensor by optimization sensitive thin film film thickness and alloy proportion.
In order to solve the above technical problems, a kind of surface acoustic wave hydrogen sensing based on palladium-nickel alloy film provided by the invention
Device, comprising: gas chamber, air pump and tracheae；The air pump is connect by tracheae with gas chamber, for hydrogen to be delivered in gas chamber；
The sensor further include differential type oscillating circuit board, two it is parallel and be set to the indoor SAW delay line of gas in the same direction；In
Palladium-nickel alloy film is provided on the acoustic surface wave propagation path of one of SAW delay line；The differential type oscillation
The electric signal that circuit board is used to export two SAW delay lines after hydrogen acts on carries out Frequency mixing processing, by the difference of generation
Output result of the frequency signal as sensor.
As a further improvement of the above technical scheme, the palladium-nickel alloy film is plated in sound using magnetron sputtering technique
Surface wave delay line surface, coating film thickness are 10nm~300nm, in the palladium-nickel alloy film proportion of nickel 10%~30% it
Between.
As a further improvement of the above technical scheme, the SAW delay line includes: piezoelectric substrate and is pressing
Along two interdigital transducers of acoustic surface wave propagation direction setting on electric substrate；The conjunction of palladium nickel is provided between two interdigital transducers
Gold thin film.
As a further improvement of the above technical scheme, the piezoelectric substrate use around Y-direction rotate 128 ° cut and
The LiNbO propagated in X direction3Or LiTaO3The piezoelectric substrate of material；The piezoelectric coupling coefficient of the piezoelectric substrate is 5.4%.
As a further improvement of the above technical scheme, the interdigital transducer in the SAW delay line using aluminium or
Electrode made of palladium-nickel alloy material, electrode film thickness are 1% λx~1.5% λx, λxFor along the wave length of sound in Acoustic Wave Propagation direction.
As a further improvement of the above technical scheme, the surface of the SAW delay line is covered with SiO2It is thin
Film.
As a further improvement of the above technical scheme, the differential type oscillating circuit board includes being connected to two sound tables
Oscillating loop, frequency mixer and filter on surface wave delay line；The differential type oscillating circuit board is led to by oscillating loop starting of oscillation
Cross the electric signal that oscillating loop receives SAW delay line output；Phase shifter and amplification are provided on the oscillating loop
Device is respectively used to carry out phase shift and signal enhanced processing to electric signal；The frequency mixer is used to export two oscillating loops
Electric signal carry out Frequency mixing processing；The filter is used to for the signal after mixing being filtered.
A kind of surface acoustic wave hydrogen gas sensor advantage based on palladium-nickel alloy film of the invention is:
The present invention is by using delay line type structure a kind of parallel and being arranged in the same direction, using with high tension electricity coefficient
The LiNbO for rotating 128 ° of cuttings around Y and propagating in X direction3Piezoelectric substrate covers opposite with its temperature coefficient polarity on its surface
SiO2Film improves device temperature stability, and using palladium-nickel alloy film as sensitive membrane, Lai Tigao surface acoustic wave hydrogen
The detection speed of gas sensor, so that detection time shortens to 2s.Meanwhile two delay line it is parallel and be arranged to difference knot in the same direction
Structure, it will help improve the temperature stability of hydrogen sensor-based system, and obtain higher detection sensitivity.
Detailed description of the invention
Fig. 1 is the surface acoustic wave hydrogen gas sensor configuration schematic diagram based on palladium-nickel alloy film in the embodiment of the present invention；
Fig. 2 is the surface acoustic wave device structure schematic diagram in the embodiment of the present invention；
Fig. 3 is the palladium-nickel alloy membrane structure schematic diagram in the embodiment of the present invention；
Fig. 4 is the differential type oscillating circuit board structural schematic diagram in the embodiment of the present invention.
Attached drawing mark:
1, differential type oscillating circuit board 2, gas chamber
3, air pump 4, tracheae
5, delay line 6, reference delay line are detected
7, SAW device 8, piezoelectric substrate
9、SiO2Film 10, detection the first interdigital transducer of delay line
11, the second interdigital transducer of delay line 12, palladium-nickel alloy film are detected
13, the first interdigital transducer of reference delay line 14, the second interdigital transducer of reference delay line
Specific embodiment
With reference to the accompanying drawings and examples to a kind of surface acoustic wave hydrogen based on palladium-nickel alloy film of the present invention
Sensor is described in detail.
As shown in Figure 1, a kind of hydrogen gas sensor based on surface acoustic wave techniques of the present invention, the surface acoustic wave
Hydrogen gas sensor includes: differential type oscillating circuit board 1, gas chamber 2, air pump 3, tracheae 4, detects delay line 5 and reference delay line 6,
The air pump 3 is connect by tracheae 4 with gas chamber 2.When working sensor, 3 transtracheal 4 of air pump sucks under test gas, gas
Into in sealed gas chamber 2, completed by the SAW device for the palladium nickel film for being coated with selective absorption hydrogen placed in gas chamber 2 to gas
The detection of body.The detection delay line 5 and reference delay line 6 are that have mutually isostructural SAW delay line, in parallel and
It is produced on same piezoelectric substrate, and is set in gas chamber 2 in the same direction；It wherein detects and is set on the acoustic surface wave propagation path of delay line
It is equipped with palladium-nickel alloy film；The differential type oscillating circuit board 1 is used for two SAW delay lines after hydrogen acts on
The electric signal of output carries out Frequency mixing processing, using the difference frequency signal of generation as the output result of sensor；By differential configuration with
The influence of peripheral environment especially temperature is eliminated to the greatest extent, and realizes the multiplication of detection sensitivity.
Hydrogen gas sensor of the invention is to utilize the mass effect after palladium nickel film absorption hydrogen, i.e. density and elasticity modulus
Change influence that surface acoustic wave is generated, after palladium nickel film absorption hydrogen, the variation of density causes the frequency of surface acoustic wave to drop
It is low, and the variation of elasticity modulus then increases the frequency of surface acoustic wave, the two makes its frequency liter to the combined influence of surface acoustic wave
It is high.It is coated with palladium nickel film on detection delay line at this time, does not plate palladium nickel film on reference delay line, uncoated delay line rises
Reference role；When sensor contacts are to hydrogen, the output frequency of two delay lines has difference, realizes hydrogen by the difference
Sensing.
Due to Metal Palladium to hydrogen have very strong adsorption capacity and well selectivity, using palladium-nickel alloy film with
When the hydrogen gas sensor that SAW device combines detects hydrogen, hydrogen is decomposed into hydrogen atom under the catalysis of palladium, and gives birth in conjunction with palladium
At PdHx, to change film characteristics, the propagation of SAW is had an impact, to realize the sensing to hydrogen.PdHx is a kind of
Palladium atom and hydrogen atom combine the substance generated, and wherein Pd refers to that palladium atom, H refer to that hydrogen atom, x refer to hydrogen atom quantity.
In addition, though Metal Palladium has very strong adsorption capacity and well selectivity to hydrogen, but since palladium film absorbs
It can be undergone phase transition after hydrogen, out of phase lattice differs greatly, and after absorption repeatedly and desorption hydrogen, palladium film is easy to distortion and becomes
Shape is even damaged, and silver, nickel etc. are added in palladium film thus and generates palldium alloy, the stability of enhanced film；To enhance sensor
The stability of hydrogen is detected, the performance of repetitive operation is more preferable.
The palladium-nickel alloy film can be used magnetron sputtering technique and be plated in SAW device surface, coating film thickness be 10nm~
300nm.The proportion of nickel is between 10%~30% in palladium-nickel alloy film.
The basic structure of SAW delay line is formed by piezoelectric substrate and in two interdigital transducers being wherein arranged.It is left
Electric signal is changed into acoustical signal by the interdigital transducer at end, after being propagated by acoustic medium, is reduced by the interdigital transducer of right end
Electric signal output.Spread speed of the surface acoustic wave in piezoelectric substrate 5 orders of magnitude slower than electromagnetic wave, and the energy of surface acoustic wave
Piezoelectric substrate surface is concentrated on, so SAW delay line can be realized simultaneously multi-signal processing.
As shown in figure 4, the circuit board may particularly include: the oscillation rings being connected on two SAW delay lines
Road, frequency mixer and filter；For circuit board by the power module power supply of setting, delay line device, should as frequency feedback unit
Differential type oscillating circuit board receives the telecommunications that SAW delay line exports by oscillating loop starting of oscillation, and by oscillating loop
Number；It is provided with phase shifter and amplifier on the oscillating loop, is respectively used to carry out at phase shift and signal amplification electric signal
Reason；The frequency mixer is used to the electric signal of two oscillating loop outputs carrying out Frequency mixing processing；The filter is used for will
Signal after mixing is filtered.
When circuit board is worked normally by oscillating loop starting of oscillation, since the subsequent signal of oscillating loop will be input to mixing
Device, device operating frequencies are MHz rank, and mixed signal becomes KHz rank, substantially increases resolution ratio, to improve biography
The detection sensitivity of sensor.
Refering to what is shown in Fig. 2, in the present embodiment, making the above-mentioned SAW hydrogen gas sensor based on palladium-nickel alloy film, the biography
Sensor includes SAW device 7, and the SAW device 7 includes: 8, two groups of one piece of piezoelectric substrate and is produced on same pressure
Parallel setting in the same direction on electric substrate 8, and there is mutually isostructural detection delay line 5 and reference delay line 6, be covered in detection and prolong
The SiO on slow 6 surface of line 5 and reference delay line2Film 9, the palladium-nickel alloy film 12 being distributed on detection delay line 5.Examining
Survey coated with palladium nickel alloy film 12 between the first interdigital transducer of delay line 10 and detection the second interdigital transducer of delay line 11, palladium
Nickel alloy film absorbs hydrogen, and delay line surface acoustic surface wave speed is caused to change, by with reference delay line first is interdigital changes
The signal contrast that energy device 13 and the second interdigital transducer of reference delay line 14 export, obtains the difference on the frequency of two delay lines, thus
Complete the detection to hydrogen.
The piezoelectric substrate 8 is using having rotate 128 ° around Y-direction and cutting and propagate in X direction for high tension electricity coefficient
LiNbO3Piezoelectric substrate.The interdigital transducer of the detection delay line 5 and reference delay line 6 is all made of aluminium electrode, electrode film
Thickness is 1% λx~1.5% λx, λxFor along the wave length of sound in Acoustic Wave Propagation direction.In the present embodiment, the palladium-nickel alloy is thin
Film 12 uses film thickness for palladium-nickel alloy (Pd:90%, Ni:10%) material of 10nm.
In addition, there is document to show: aluminium electrode is changed to sensitive material and is capable of increasing response, therefore, the detection delay
Interdigital transducers electrodes in line 5 and reference delay line 6 can also be made of palladium-nickel alloy material, and palladium nickel electrode film thickness can also
It is designed as 1% λx~1.5% λx。
The covering of 8 surface of piezoelectric substrate and the opposite polarity SiO of its single order temperature coefficient2Film is as temperature-compensating
Layer simultaneously carries out interdigital protection, the temperature coefficient of device itself is reduced using the opposite feature of two kinds of temperatures coefficient, to reach
Improve the purpose of device temperature stability.
In view of influencing caused by temperature factor, piezoelectric substrate requires to choose piezoelectric modulus height, and the temperature coefficient linearity is good
Material be made, it is easy to accomplish temperature-compensating, in the present embodiment, so 8 material of piezoelectric substrate can select LiNbO3Or
LiTaO3Equal materials are made.
Lithium columbate crystal presses cut type and the direction of propagation, can form a variety of different combinations, and every kind of combination has not again
Same propagation characteristic.When the direction of propagation is X-direction, common cut type has the rotary Y cutting of different angle.In the present embodiment,
The piezoelectric substrate 8 is the LiNbO for rotating 128 ° of cuttings around Y-direction and propagating in X direction3Piezoelectric substrate.The piezoelectric substrate 8 tool
There are higher acoustic speed, acoustic speed 3979m/s, the piezoelectric coupling coefficient of the piezoelectric substrate is 5.4%, can be improved
The loss of SAW device and signal-to-noise performance improve the sensitivity of sensor.
For the preparation of SAW device in the present invention, specific design of Structural Parameters includes the following contents:
To prepare the palladium-nickel alloy film with structure shown in Fig. 3, the film thickness by palladium-nickel alloy film is needed to be designed as
10nm, width is 50 λ to film in the x-directionx, width is 50 λ in the y-directiony.Film and detection the first interdigital transducer of delay line
Edge spacing with detection the second interdigital transducer of delay line is 5 λx, the distribution size of film is 50 λx×50λy。
Wherein, the working frequency of SAW hydrogen gas sensor is 150MHz, and substrate material, which is used, rotates 128 ° of cuttings around Y and along X
The LiNbO that direction is propagated3Piezoelectric substrate, aluminium electrode or palladium nickel electrode film thickness are designed as 200nm.Detect delay line first is interdigital
Transducer length is 130 λx, and it is divided into 4 groups；The length for detecting the second interdigital transducer of delay line is 40 λx.First interdigital changes
Centre distance between energy device and the second interdigital transducer is 60 λx.It is used in detection delay line and the covering of reference delay line surface
The SiO of temperature-compensating and interdigital protection2Film, film thickness 30nm.
The sound aperture for detecting delay line is 60 λy.In addition, the reference delay line structure of SAW hydrogen gas sensor and detection postpone
Line is identical, parallel on same piezoelectric substrate and setting in the same direction.It designs, obtains a kind of based on palladium-nickel alloy through the above structure
The SAW hydrogen gas sensor of film, prepared sample size are 10mm × 5mm.
Surface acoustic wave hydrogen gas sensor based on above structure, the present invention pass through optimization sensitive thin film film thickness and alloy proportion
Speed is detected to improve the hydrogen of sensor；The substrate material for selecting temperature stability good and the delay-line structure using differential type
To overcome the influence of temperature.
It should be noted last that the above examples are only used to illustrate the technical scheme of the present invention and are not limiting.Although ginseng
It is described the invention in detail according to embodiment, those skilled in the art should understand that, to technical side of the invention
Case is modified or replaced equivalently, and without departure from the spirit and scope of technical solution of the present invention, should all be covered in the present invention
Scope of the claims in.
Claims (5)
1. a kind of surface acoustic wave hydrogen gas sensor based on palladium-nickel alloy film, comprising: gas chamber (2), air pump (3) and tracheae (4)；
The air pump (3) is connect by tracheae (4) with gas chamber (2), for hydrogen to be delivered in gas chamber (2)；It is characterized in that, should
Sensor further includes differential type oscillating circuit board (1), two saw delay that are parallel and being set in gas chamber (2) in the same direction
Line；Palladium-nickel alloy film is provided on the wherein acoustic surface wave propagation path of a SAW delay line；The difference
The electric signal that formula oscillating circuit board (1) is used to export two SAW delay lines after hydrogen acts on carries out Frequency mixing processing,
Using the difference frequency signal of generation as the output result of sensor；
The palladium-nickel alloy film is plated in SAW delay line surface using magnetron sputtering technique, coating film thickness be 10nm~
300nm, the proportion of nickel is between 10%~30% in the palladium-nickel alloy film；
The SAW delay line includes: piezoelectric substrate (8) and sets on piezoelectric substrate (8) along acoustic surface wave propagation direction
Two interdigital transducers set；Palladium-nickel alloy film (12) are provided between two interdigital transducers.
2. the surface acoustic wave hydrogen gas sensor according to claim 1 based on palladium-nickel alloy film, which is characterized in that described
Piezoelectric substrate (8) cut and the LiNbO that propagate in X direction using rotate 128 ° around Y-direction3Or LiTaO3The piezoelectricity base of material
Piece (8)；The piezoelectric coupling coefficient of the piezoelectric substrate (8) is 5.4%.
3. the surface acoustic wave hydrogen gas sensor according to claim 1 based on palladium-nickel alloy film, which is characterized in that described
For interdigital transducer in SAW delay line using electrode made of aluminium or palladium-nickel alloy material, electrode film thickness is 1% λx~
1.5% λx, λxFor along the wave length of sound in Acoustic Wave Propagation direction.
4. the surface acoustic wave hydrogen gas sensor according to claim 1 based on palladium-nickel alloy film, which is characterized in that described
The surface of SAW delay line be covered with SiO2Film.
5. the surface acoustic wave hydrogen gas sensor according to claim 1 based on palladium-nickel alloy film, which is characterized in that described
Differential type oscillating circuit board (1) include the oscillating loop, frequency mixer and filter being connected on two SAW delay lines；
The differential type oscillating circuit board (1) receives SAW delay line output by oscillating loop starting of oscillation, and by oscillating loop
Electric signal；It is provided with phase shifter and amplifier on the oscillating loop, is respectively used to carry out phase shift to electric signal and signal is put
Big processing；The frequency mixer is used to the electric signal of two oscillating loop outputs carrying out Frequency mixing processing；The filter is used
It is filtered in by the signal after mixing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710646178.7A CN107632066B (en) | 2017-08-01 | 2017-08-01 | A kind of surface acoustic wave hydrogen gas sensor based on palladium-nickel alloy film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710646178.7A CN107632066B (en) | 2017-08-01 | 2017-08-01 | A kind of surface acoustic wave hydrogen gas sensor based on palladium-nickel alloy film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107632066A CN107632066A (en) | 2018-01-26 |
| CN107632066B true CN107632066B (en) | 2019-11-19 |
Family
ID=61099122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710646178.7A Active CN107632066B (en) | 2017-08-01 | 2017-08-01 | A kind of surface acoustic wave hydrogen gas sensor based on palladium-nickel alloy film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107632066B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108508054B (en) * | 2018-04-08 | 2020-06-30 | 许昌学院 | Hydrogen acoustic rotation relaxation detection method |
| CN109342558A (en) * | 2018-11-26 | 2019-02-15 | 中国科学院声学研究所 | A kind of surface acoustic wave hydrogen gas sensor based on palladium copper nano-wire film |
| JP7343991B2 (en) * | 2019-03-19 | 2023-09-13 | 太陽誘電株式会社 | Piezoelectric thin film resonators, acoustic wave devices, filters and multiplexers |
| CN111189910B (en) * | 2020-01-10 | 2022-07-15 | 西安科技大学 | Delay line type based surface acoustic wave sensing circuit system design method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101101278A (en) * | 2007-07-19 | 2008-01-09 | 南京工业大学 | Acoustic surface wave microhydrogen sensor and its production process |
| CN101458230A (en) * | 2008-12-29 | 2009-06-17 | 南开大学 | Multichannel surface acoustic wave chemical sensing system |
-
2017
- 2017-08-01 CN CN201710646178.7A patent/CN107632066B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101101278A (en) * | 2007-07-19 | 2008-01-09 | 南京工业大学 | Acoustic surface wave microhydrogen sensor and its production process |
| CN101458230A (en) * | 2008-12-29 | 2009-06-17 | 南开大学 | Multichannel surface acoustic wave chemical sensing system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107632066A (en) | 2018-01-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107632066B (en) | A kind of surface acoustic wave hydrogen gas sensor based on palladium-nickel alloy film | |
| Wang et al. | Development of a Pd/Cu nanowires coated SAW hydrogen gas sensor with fast response and recovery | |
| Xu et al. | Implementation of guiding layers of surface acoustic wave devices: A review | |
| CN101458230A (en) | Multichannel surface acoustic wave chemical sensing system | |
| CN201348624Y (en) | Multi-channel surface acoustic wave chemical sensing device | |
| CN101198865A (en) | Wireless oil filter sensor | |
| CN100567977C (en) | Little hydrogen gas sensor of surface acoustic wave and manufacture craft thereof | |
| CN106153718B (en) | A kind of piezoelectric crystal gas transducer with double working modes | |
| CN102841138A (en) | Surface acoustic wave gas sensor based on two-dimensional phonon crystal reflecting grating | |
| CN101034083B (en) | Manufacturing method of sonic surface wave gas sensor | |
| CN102636564A (en) | Surface acoustic wave gas sensor array integrated with heater and preparation method thereof | |
| Qiu et al. | Film bulk acoustic-wave resonator based ultraviolet sensor | |
| CN103336092B (en) | Hydrogen sensor based on vortex street and piezoelectric film and preparation method of hydrogen sensor | |
| CN101135674A (en) | Method for improving sonic surface wave gas sensors temperature stability | |
| CN105738470B (en) | A kind of sonic surface wave gas sensors | |
| JP2006220508A (en) | Gas sensor | |
| CN109342558A (en) | A kind of surface acoustic wave hydrogen gas sensor based on palladium copper nano-wire film | |
| JP2007024566A (en) | Hydrogen sensor, fuel cell, and vehicle equipped therewith | |
| Chen et al. | Theoretical research on ultrasonic sensors based on high-order Lamb waves | |
| CN102680572A (en) | Method for manufacturing surface acoustic wave transducer sensitive membrane | |
| CN103512950A (en) | Surface acoustic wave (SAW) formaldehyde gas sensor using water to absorb formaldehyde | |
| CN205920087U (en) | Piezo electric crystal gas sensor with two mode | |
| CN203191355U (en) | Surface acoustic wave gas sensor | |
| CN102375030A (en) | Method for manufacturing semiconductor thin-film material | |
| CN102774064B (en) | Sensitive adsorption film and its manufacturing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |