CN103021782B - 一种离子注入系统 - Google Patents
一种离子注入系统 Download PDFInfo
- Publication number
- CN103021782B CN103021782B CN201210533308.3A CN201210533308A CN103021782B CN 103021782 B CN103021782 B CN 103021782B CN 201210533308 A CN201210533308 A CN 201210533308A CN 103021782 B CN103021782 B CN 103021782B
- Authority
- CN
- China
- Prior art keywords
- ion implantation
- injecting gas
- implanted
- indium
- implant systems
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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- 239000007943 implant Substances 0.000 title claims abstract description 30
- 238000005468 ion implantation Methods 0.000 claims abstract description 45
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000013528 metallic particle Substances 0.000 claims abstract description 7
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 7
- 239000010703 silicon Substances 0.000 claims abstract description 7
- 230000005484 gravity Effects 0.000 claims abstract description 5
- 239000007789 gas Substances 0.000 claims description 63
- 229910052738 indium Inorganic materials 0.000 claims description 38
- 238000002347 injection Methods 0.000 claims description 37
- 239000007924 injection Substances 0.000 claims description 37
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 35
- 150000002500 ions Chemical class 0.000 claims description 35
- 239000000126 substance Substances 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 15
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 14
- 239000001301 oxygen Substances 0.000 claims description 14
- 229910052760 oxygen Inorganic materials 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 229910003437 indium oxide Inorganic materials 0.000 claims description 8
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 238000007654 immersion Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 229910001449 indium ion Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- BLBNEWYCYZMDEK-UHFFFAOYSA-N $l^{1}-indiganyloxyindium Chemical compound [In]O[In] BLBNEWYCYZMDEK-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201210533308.3A CN103021782B (zh) | 2012-12-11 | 2012-12-11 | 一种离子注入系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210533308.3A CN103021782B (zh) | 2012-12-11 | 2012-12-11 | 一种离子注入系统 |
Publications (2)
Publication Number | Publication Date |
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CN103021782A CN103021782A (zh) | 2013-04-03 |
CN103021782B true CN103021782B (zh) | 2016-02-03 |
Family
ID=47970265
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201210533308.3A Active CN103021782B (zh) | 2012-12-11 | 2012-12-11 | 一种离子注入系统 |
Country Status (1)
Country | Link |
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CN (1) | CN103021782B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109524285B (zh) * | 2017-09-19 | 2021-06-11 | 中国电子科技集团公司第四十八研究所 | 一种离子束刻蚀设备 |
CN113984788B (zh) * | 2021-12-24 | 2022-03-15 | 北京凯世通半导体有限公司 | 一种通过光学检测仪器对超低温离子注入设备监测的方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101142663A (zh) * | 2004-11-19 | 2008-03-12 | 科学技术研究院 | 掺杂的金属氧化物膜和制造该掺杂的金属氧化物膜的系统 |
CN102312210A (zh) * | 2010-07-05 | 2012-01-11 | 中国科学院微电子研究所 | 一种等离子体浸没离子注入系统 |
CN102808162A (zh) * | 2011-05-31 | 2012-12-05 | 无锡华润上华半导体有限公司 | 铟离子产生装置和方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3897620B2 (ja) * | 2002-03-14 | 2007-03-28 | 三菱重工業株式会社 | 高周波電力供給構造およびそれを備えたプラズマcvd装置 |
-
2012
- 2012-12-11 CN CN201210533308.3A patent/CN103021782B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101142663A (zh) * | 2004-11-19 | 2008-03-12 | 科学技术研究院 | 掺杂的金属氧化物膜和制造该掺杂的金属氧化物膜的系统 |
CN102312210A (zh) * | 2010-07-05 | 2012-01-11 | 中国科学院微电子研究所 | 一种等离子体浸没离子注入系统 |
CN102808162A (zh) * | 2011-05-31 | 2012-12-05 | 无锡华润上华半导体有限公司 | 铟离子产生装置和方法 |
Non-Patent Citations (1)
Title |
---|
高纯铟的制备方法;周智华等;《矿冶工程》;20030630;第23卷(第3期);第40-43页 * |
Also Published As
Publication number | Publication date |
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CN103021782A (zh) | 2013-04-03 |
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TR01 | Transfer of patent right |
Effective date of registration: 20190603 Address after: Room 820, 8th Floor, Building 1, 13 Guocheng Road, Shunqing District, Nanchong City, Sichuan Province Patentee after: Zhongke Jiuwei Technology Co.,Ltd. Address before: 100029 Microelectronics Institute, Chinese Academy of Sciences, 3 north earth road, Chaoyang District, Beijing Patentee before: Institute of Microelectronics, Chinese Academy of Sciences |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: An ion implantation system Effective date of registration: 20231109 Granted publication date: 20160203 Pledgee: Sichuan Tianfu Bank Co.,Ltd. Business Department Pledgor: Zhongke Jiuwei Technology Co.,Ltd. Registration number: Y2023980064475 |