CN103014618A - Mask plate used for evaporation and manufacturing method thereof - Google Patents
Mask plate used for evaporation and manufacturing method thereof Download PDFInfo
- Publication number
- CN103014618A CN103014618A CN2012105696640A CN201210569664A CN103014618A CN 103014618 A CN103014618 A CN 103014618A CN 2012105696640 A CN2012105696640 A CN 2012105696640A CN 201210569664 A CN201210569664 A CN 201210569664A CN 103014618 A CN103014618 A CN 103014618A
- Authority
- CN
- China
- Prior art keywords
- hole
- evaporation
- mask plate
- row
- cushion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The invention relates to a mask plate used for evaporation and a method manufacturing method thereof. The mask plate comprises a plate frame and a mask plate that are fixed on the plate frame. A plurality of deposition holes are regularly arranged in the mask plate. The deposition holes are disposed in the centre of the mask plate. At least a row of cushion holes are disposed outside of the deposition holes. The cushion holes are parallel to the deposition holes. According to the manufacturing method, the deposition holes in the mask plate do not deform after a manufacturing process of the mask plate used for evaporation is completed. The effect is more remarkable when the method is used for producing a large-size mask plate used for evaporation, so that precision of the mask plate can be increased effectively, a manufacturing precision of an OLED display screen particularly a large-size OLED display screen is increased significantly and manufacturing cost is reduced.
Description
Technical field
The present invention relates to OLED display screen manufacturing technology field, particularly a kind of evaporation mask plate and manufacture method thereof.
Background technology
Organic electroluminescence device has luminous, the reaction times is fast, the visual angle is wide, cost is low, manufacturing process is simple, resolving power is good and the multiple advantages such as high brightness, is considered to the emerging utilisation technology of follow-on flat-panel screens.At OLED(Organic Light-Emitting Diode, organic electroluminescent LED) in the technology, mask plate technology in the vacuum evaporation is an extremely important and crucial technology, and the class of precision of this technology directly affects quality and the manufacturing cost of OLED product.
The mask plate that traditional evaporation is used is to process needed evaporation hole at mask plate first, this mask plate is welded on the sheet frame again.Yet, when being welded to mask plate on the sheet frame, mask plate need to be evened up tension, and on mask plate, made the evaporation hole, in the process of evening up, the evaporation hole can be subject to tightening power and be out of shape, make the evaporation hole depart from original size and shape, cause the shape and size error, and because the manufacturing process of OLED display screen is very high to the accuracy requirement in evaporation hole, this error obviously can produce very large negative impact to the evaporation effect, directly reduces the evaporation effect, makes the OLED display screen of producing have larger defective.
Summary of the invention
Main purpose of the present invention is, for above-mentioned deficiency of the prior art, provides a kind of evaporation with mask plate and manufacture method thereof, can effectively avoid the evaporation bore deformation, improves the precision and stability of mask plate.
For achieving the above object, the present invention by the following technical solutions.
The invention provides a kind of evaporation mask plate, comprise sheet frame and even up the mask plate that is fixed on the sheet frame, be provided with a plurality of regularly arranged evaporation holes on the described mask plate, described a plurality of evaporations hole is positioned at the central authorities of mask plate, the periphery in described evaporation hole is provided with at least one row's cushion hole, and each described cushion hole and described evaporation hole be arranged in parallel.
Preferably, described mask plate is horizontally arranged with N row evaporation hole, is vertically arranged with the capable evaporation of M hole, and the right and left in every row evaporation hole is respectively arranged with a described cushion hole, the up and down both sides in every row evaporation hole also are respectively arranged with a described cushion hole, form a circle buffer strip.
Preferably, each inside, described evaporation hole is provided with the bar shaped grid, and described evaporation hole is outside equipped with row or a row cushion hole, and every row's cushion hole is N, and every row cushion hole is M, and be arranged in parallel with described grid respectively.
Preferably, described cushion hole is rectangular through-hole or blind hole.
Preferably, described mask plate is made by Rhometal or an indium watt alloy, and thickness is 30～100 μ m.
Preferably, described sheet frame is made by Rhometal or an indium watt alloy, and thickness is 14-50 mm, and width is 30-80 mm.
The present invention also provides the manufacture method of a kind of above-mentioned evaporation with mask plate, and the method may further comprise the steps successively:
Described mask plate is cut into the size of being a bit larger tham described sheet frame size, lies on the described sheet frame, four limits of mask plate are evened up and are adjacent on described sheet frame;
Described mask plate is welded on the described sheet frame;
The unnecessary part of outward flange excision along described sheet frame;
Offer at least one row's cushion hole in the periphery of described mask plate;
Offer described evaporation hole in the centre of mask plate, and described cushion hole and evaporation hole are be arranged in parallel.
Preferably, described step along the unnecessary part of the outward flange excision of sheet frame is specially:
Adopt laser technology that described redundance is excised.
Preferably, described periphery in the evaporation hole step of offering at least one row's cushion hole specifically comprises:
Along mask plate laterally offer N row evaporation hole, be vertically arranged with the capable evaporation of M hole, the right and left in every row evaporation hole is offered respectively a described cushion hole, a described cushion hole is also offered respectively on the up and down both sides in every row evaporation hole, perhaps
Each inside, described evaporation hole is provided with the bar shaped grid, is outside equipped with row or a row cushion hole in described evaporation hole, and every row's cushion hole is N, and every row cushion hole is M, and be arranged in parallel with described grid respectively.
Preferably, describedly be positioned at the step of offering described evaporation hole in the sheet frame place at mask plate and be specially:
Adopt laser cutting parameter or chemical etching process to offer described evaporation hole.
The present invention is welded in mask plate on the sheet frame first, be positioned at the sheet frame place at mask plate again and offer the evaporation hole, and in the evaporation hole the other cushion hole that arranges, so that after evaporation was finished with the mask plate manufacturing, the evaporation hole on the mask plate can not deform, when the large-sized evaporation of production is used mask plate, effect is more obvious, therefore can effectively improve the precision and stability of mask plate, significantly promote the particularly manufacturing accuracy of large size OLED display screen of OLED display screen, reduce manufacturing cost.
Description of drawings
Fig. 1 is the structural representation one that evaporation is used mask plate in the embodiment of the invention.
Fig. 2 is the structural representation two that evaporation is used mask plate in the embodiment of the invention.
Fig. 3 is the schematic flow sheet that evaporation is used the manufacture method of mask plate in the embodiment of the invention.
The realization of the object of the invention, functional characteristics and advantage are described further with reference to accompanying drawing in connection with embodiment.
Embodiment
Describe technical scheme of the present invention in detail below with reference to drawings and the specific embodiments, so as clearer, understand invention essence of the present invention intuitively.
Fig. 1 is the structural representation one that evaporation is used mask plate in the embodiment of the invention; Fig. 2 is the structural representation two that evaporation is used mask plate in the embodiment of the invention.
With reference to shown in Figure 1, present embodiment provides a kind of evaporation mask plate, comprises sheet frame 1 and evens up the mask plate 2 that is fixed on the sheet frame, is provided with regularly arranged a plurality of evaporations hole 3 on the mask plate 2, this a plurality of evaporations hole 3 is positioned at the central authorities of mask plate 2, and is positioned at sheet frame 1 inside.Be provided with a circle cushion hole 4 in the periphery in evaporation hole 3, be used for the tension force that the power of tightening of buffering mask plate 2 is brought to evaporation hole 3, thereby protection evaporation hole 3 be indeformable.
The mask plate 2 of present embodiment is being horizontally arranged with N row evaporation hole 3, be vertically arranged with the capable evaporation of M hole 3, the right and left in every row evaporation hole 3 is respectively arranged with a cushion hole 4, the up and down both sides in every row evaporation hole 3 also are respectively arranged with a cushion hole 4, make each cushion hole 4 all parallel with evaporation hole 3.
With reference to shown in Figure 2, if the inside in each evaporation hole 3 is provided with bar shaped grid 31, then only need be outside equipped with in evaporation hole 3 row or a row cushion hole, and this row maybe this row cushion hole 4 and above-mentioned grid 31 be arranged in parallel.Wherein, every row's cushion hole 4 is N, every row cushion hole 4 is M, make every row's evaporation hole 3 respectively corresponding cushion holes 4, every row evaporation hole 3 is respectively corresponding cushion hole 4 also, and separately alignment, because the tension force from the direction parallel with grid 31 of mask plate 2 is applied on the grid 31, can not make evaporation hole 3 distortion, need not to arrange cushion hole 4, then be absorbed by cushion hole 4 fully from the tension force of mask plate 2.
In order to disperse more equably mentioned strain, the cushion hole 4 of present embodiment is set to the less rectangular through-hole of width or blind hole.Make the suffered tension force in evaporation hole 3 as far as possible little, can not change to guarantee its shape and size.
The mask plate 2 of present embodiment is made by Rhometal or an indium watt alloy, and thickness is 30～100 μ m, and sheet frame 1 is made by Rhometal or an indium watt alloy, and thickness is 14-50 mm, and width is 30-80 mm.Need to prove that the width of the said sheet frame 1 of the present invention does not refer to the width of the housing of sheet frame 1, the also width of non-inside casing, but the width of the part that is used for permanent mask plate 2 between the housing of fingerboard frame 1 and the inside casing.
Adopt the mask plate 2 of said structure, can make physical size and the initial size in evaporation hole 3 basically identical, can not change because of the tension force that is subject to mask plate 2, particularly when mask plate 2 is large size, the precision in evaporation hole 3 keeps effect more remarkable, thereby can produce high-quality OLED display screen.
Fig. 3 is the schematic flow sheet that evaporation is used the manufacture method of mask plate in the embodiment of the invention.
With reference to shown in Figure 3, present embodiment provides a kind of manufacture method that above-mentioned evaporation is used mask plate of processing, and the method mainly may further comprise the steps:
S1: mask plate is cut into the size of being a bit larger tham the sheet frame size, lies on the sheet frame, four limits of mask plate are evened up and are adjacent on sheet frame;
S2: mask plate is welded on the sheet frame;
S3: along the unnecessary part of outward flange excision of sheet frame;
S4: offer at least one row's cushion hole in the periphery of mask plate;
S5: offer the evaporation hole in the centre of mask plate, and cushion hole and evaporation hole are be arranged in parallel.
Wherein, in step S3, be specially along the step of the unnecessary part of the outward flange of sheet frame excision: adopt laser technology that redundance is excised.Because the cutting accuracy of laser cutting technique is higher, and need not complicated clamping process, just can be used for excising redundance.
In step S4, periphery at mask plate, be positioned on the position of sheet frame inside and offer at least one row's cushion hole, the quantity of cushion hole is corresponding to the quantity in default evaporation hole, even the evaporation hole is that M is capable, the N row, then along laterally offering N cushion hole, longitudinally offer M cushion hole, perhaps, if each inside, evaporation hole is provided with the bar shaped grid, be outside equipped with at least one row or at least one row cushion hole in the evaporation hole, every row's cushion hole is N, every row cushion hole is M, and be arranged in parallel with above-mentioned grid respectively.These cushion holes consist of a buffer strip, and it is peripheral to be arranged on the evaporation hole, can disperse equably the tension force of mask plate, avoid the evaporation hole to produce error because of stress deformation.
In step S5, in above-mentioned rectangle buffer strip, to offer the evaporation hole, and make the evaporation hole corresponding with cushion hole parallel, the cushion hole of arranged transversely is parallel with the evaporation hole of horizontally-arranged (M is capable), and the cushion hole that vertically arranges is parallel with the evaporation hole of file (N row).Present embodiment adopts laser cutting parameter or chemical etching process to process the evaporation hole, because laser cutting parameter and chemical etching process need not complicated clamping operation, can be to the mask plate injury yet, therefore, adopt laser cutting parameter and chemical etching process to offer the evaporation hole and can satisfy the actual process demand, and the evaporation hole can be processed into horn-likely, satisfy the evaporation demand of OLED display screen.
Adopt present method can make the shape and size in the evaporation hole on the mask plate keep original design accuracy, avoided traditional first processing evaporation hole, again mask plate is welded in the manufacturing process on the sheet frame and can makes the phenomenon of evaporation bore deformation, thereby can process large size, high-quality OLED display screen.
In sum, the present invention is welded in mask plate on the sheet frame first, be positioned at the sheet frame place at mask plate again and offer the evaporation hole, and on side, evaporation hole cushion hole is set, so that after evaporation is finished with the mask plate manufacturing, evaporation hole on the mask plate can not deform, when the large-sized evaporation of production was used mask plate, effect was more obvious, therefore can effectively improve the precision of mask plate, significantly promote the particularly manufacturing accuracy of large size OLED display screen of OLED display screen, reduce manufacturing cost.
The above only is the preferred embodiments of the present invention; be not so limit its claim; every equivalent structure or equivalent flow process conversion that utilizes specification sheets of the present invention and accompanying drawing content to do; directly or indirectly be used in other relevant technical fields, all in like manner be included in the scope of patent protection of the present invention.
Claims (10)
1. evaporation mask plate, comprise sheet frame and even up the mask plate that is fixed on the sheet frame, be provided with regularly arranged a plurality of evaporations hole on the described mask plate, it is characterized in that: described a plurality of evaporations hole is positioned at the central authorities of mask plate, the periphery in described evaporation hole is provided with at least one row's cushion hole, and each described cushion hole and described evaporation hole be arranged in parallel.
2. evaporation mask plate as claimed in claim 1, it is characterized in that: described mask plate is horizontally arranged with N row evaporation hole, be vertically arranged with the capable evaporation of M hole, the right and left in every row evaporation hole is respectively arranged with a described cushion hole of row, the up and down both sides in every row evaporation hole also are respectively arranged with a described cushion hole, form a circle buffer strip.
3. evaporation mask plate as claimed in claim 2, it is characterized in that: each inside, described evaporation hole is provided with the bar shaped grid, and described evaporation hole is outside equipped with row or a row cushion hole, and every row's cushion hole is N, every row cushion hole is M, and be arranged in parallel with described grid respectively.
4. evaporation mask plate as claimed in claim 1, it is characterized in that: described cushion hole is rectangular through-hole or blind hole.
5. evaporation mask plate as claimed in claim 1, it is characterized in that: described mask plate is made by Rhometal or an indium watt alloy, and thickness is 30～100 μ m.
6. evaporation mask plate as claimed in claim 5, it is characterized in that: described sheet frame is made by Rhometal or an indium watt alloy, and thickness is 14-50 mm, and width is 30-80 mm.
7. the manufacture method of the described evaporation usefulness of claim 1 mask plate is characterized in that, may further comprise the steps successively:
Described mask plate is cut into the size of being a bit larger tham described sheet frame size, lies on the described sheet frame, four limits of mask plate are evened up and are adjacent on described sheet frame;
Described mask plate is welded on the described sheet frame;
The unnecessary part of outward flange excision along described sheet frame;
Offer at least one row's cushion hole in the periphery of described mask plate;
Offer described evaporation hole in the centre of mask plate, and described cushion hole and evaporation hole are be arranged in parallel.
8. manufacture method as claimed in claim 7 is characterized in that, described step along the unnecessary part of the outward flange excision of sheet frame is specially:
Adopt laser technology that described redundance is excised.
9. manufacture method as claimed in claim 7 is characterized in that, the step that at least one row's cushion hole is offered in described periphery in the evaporation hole specifically comprises:
Along mask plate laterally offer N row evaporation hole, be vertically arranged with the capable evaporation of M hole, the right and left in every row evaporation hole is offered respectively a described cushion hole, a described cushion hole is also offered respectively on the up and down both sides in every row evaporation hole, perhaps
Each inside, described evaporation hole is provided with the bar shaped grid, is outside equipped with row or a row cushion hole in described evaporation hole, and every row's cushion hole is N, and every row cushion hole is M, and be arranged in parallel with described grid respectively.
10. manufacture method as claimed in claim 7 is characterized in that, describedly is positioned at the step of offering described evaporation hole in the sheet frame place at mask plate and is specially:
Adopt laser cutting parameter or chemical etching process to offer described evaporation hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105696640A CN103014618A (en) | 2012-12-25 | 2012-12-25 | Mask plate used for evaporation and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105696640A CN103014618A (en) | 2012-12-25 | 2012-12-25 | Mask plate used for evaporation and manufacturing method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103014618A true CN103014618A (en) | 2013-04-03 |
Family
ID=47963727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012105696640A Pending CN103014618A (en) | 2012-12-25 | 2012-12-25 | Mask plate used for evaporation and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103014618A (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103236398A (en) * | 2013-04-19 | 2013-08-07 | 深圳市华星光电技术有限公司 | Manufacturing method of photo mask plate and photo mask plate manufactured by using method |
| CN103472190A (en) * | 2013-09-12 | 2013-12-25 | 四川虹视显示技术有限公司 | Special mask plate for testing OLED (Organic Light Emitting Diode) material and/or device structure and testing method |
| CN103527916A (en) * | 2013-10-21 | 2014-01-22 | 青岛海信电器股份有限公司 | Metal part to be stamped |
| CN104097026A (en) * | 2013-04-10 | 2014-10-15 | 昆山思拓机器有限公司 | Manufacturing method of OLED (organic light emitting diode) metal mask plate |
| CN105349947A (en) * | 2015-10-27 | 2016-02-24 | 唐军 | Machining method for high-accuracy metal mask plate |
| CN107460436A (en) * | 2017-07-25 | 2017-12-12 | 武汉华星光电半导体显示技术有限公司 | Metal otter board and evaporation mask device |
| CN107868934A (en) * | 2016-09-22 | 2018-04-03 | 三星显示有限公司 | The method for manufacturing split type mask |
| CN108456846A (en) * | 2018-03-30 | 2018-08-28 | 昆山国显光电有限公司 | Mask plate and preparation method thereof |
| CN108531855A (en) * | 2018-05-31 | 2018-09-14 | 昆山国显光电有限公司 | The manufacturing method of mask plate, evaporation coating device and display device |
| WO2019080875A1 (en) * | 2017-10-25 | 2019-05-02 | 信利（惠州）智能显示有限公司 | Mask |
| CN110396660A (en) * | 2019-08-30 | 2019-11-01 | 昆山国显光电有限公司 | Mask plate and mask plate preparation method |
| WO2020143217A1 (en) * | 2019-01-09 | 2020-07-16 | 昆山工研院新型平板显示技术中心有限公司 | Masking unit, and mask plate assembly provided with masking unit |
| WO2021047610A1 (en) * | 2019-09-12 | 2021-03-18 | 京东方科技集团股份有限公司 | Mask device and manufacturing method therefor, evaporation method and display device |
| WO2022151368A1 (en) * | 2021-01-15 | 2022-07-21 | 京东方科技集团股份有限公司 | Mask plate assembly and processing method therefor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1510971A (en) * | 2002-11-29 | 2004-07-07 | �����ձ������ƶ���ʾ��ʽ���� | Evaporation mask and method for manufacturing organic electroluminescent device thereby |
| KR20080011571A (en) * | 2006-07-31 | 2008-02-05 | 삼성에스디아이 주식회사 | Mask for manufacturing organic light emitting display |
| CN203021638U (en) * | 2012-12-25 | 2013-06-26 | 唐军 | Mask plate for evaporation |
-
2012
- 2012-12-25 CN CN2012105696640A patent/CN103014618A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1510971A (en) * | 2002-11-29 | 2004-07-07 | �����ձ������ƶ���ʾ��ʽ���� | Evaporation mask and method for manufacturing organic electroluminescent device thereby |
| KR20080011571A (en) * | 2006-07-31 | 2008-02-05 | 삼성에스디아이 주식회사 | Mask for manufacturing organic light emitting display |
| CN203021638U (en) * | 2012-12-25 | 2013-06-26 | 唐军 | Mask plate for evaporation |
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104097026A (en) * | 2013-04-10 | 2014-10-15 | 昆山思拓机器有限公司 | Manufacturing method of OLED (organic light emitting diode) metal mask plate |
| CN103236398B (en) * | 2013-04-19 | 2015-09-09 | 深圳市华星光电技术有限公司 | The manufacture method of reticle mask plate and the reticle mask plate with the method making |
| CN103236398A (en) * | 2013-04-19 | 2013-08-07 | 深圳市华星光电技术有限公司 | Manufacturing method of photo mask plate and photo mask plate manufactured by using method |
| CN103472190A (en) * | 2013-09-12 | 2013-12-25 | 四川虹视显示技术有限公司 | Special mask plate for testing OLED (Organic Light Emitting Diode) material and/or device structure and testing method |
| CN103472190B (en) * | 2013-09-12 | 2015-08-12 | 四川虹视显示技术有限公司 | OLED material and/or device architecture test dedicated mask plate and method of testing |
| CN103527916A (en) * | 2013-10-21 | 2014-01-22 | 青岛海信电器股份有限公司 | Metal part to be stamped |
| CN103527916B (en) * | 2013-10-21 | 2016-05-11 | 青岛海信电器股份有限公司 | A kind of metalwork to be punched |
| CN105349947B (en) * | 2015-10-27 | 2018-01-12 | 深圳浚漪科技有限公司 | High-precision metal mask plate processing method |
| CN105349947A (en) * | 2015-10-27 | 2016-02-24 | 唐军 | Machining method for high-accuracy metal mask plate |
| CN107868934A (en) * | 2016-09-22 | 2018-04-03 | 三星显示有限公司 | The method for manufacturing split type mask |
| CN107868934B (en) * | 2016-09-22 | 2022-03-18 | 三星显示有限公司 | Method for manufacturing split mask |
| CN107460436A (en) * | 2017-07-25 | 2017-12-12 | 武汉华星光电半导体显示技术有限公司 | Metal otter board and evaporation mask device |
| WO2019080875A1 (en) * | 2017-10-25 | 2019-05-02 | 信利（惠州）智能显示有限公司 | Mask |
| CN108456846A (en) * | 2018-03-30 | 2018-08-28 | 昆山国显光电有限公司 | Mask plate and preparation method thereof |
| CN108531855A (en) * | 2018-05-31 | 2018-09-14 | 昆山国显光电有限公司 | The manufacturing method of mask plate, evaporation coating device and display device |
| CN108531855B (en) * | 2018-05-31 | 2020-11-13 | 昆山国显光电有限公司 | Mask plate, evaporation device and manufacturing method of display device |
| WO2020143217A1 (en) * | 2019-01-09 | 2020-07-16 | 昆山工研院新型平板显示技术中心有限公司 | Masking unit, and mask plate assembly provided with masking unit |
| CN110396660A (en) * | 2019-08-30 | 2019-11-01 | 昆山国显光电有限公司 | Mask plate and mask plate preparation method |
| CN110396660B (en) * | 2019-08-30 | 2021-10-08 | 昆山国显光电有限公司 | Mask plate and mask plate preparation method |
| WO2021047610A1 (en) * | 2019-09-12 | 2021-03-18 | 京东方科技集团股份有限公司 | Mask device and manufacturing method therefor, evaporation method and display device |
| WO2022151368A1 (en) * | 2021-01-15 | 2022-07-21 | 京东方科技集团股份有限公司 | Mask plate assembly and processing method therefor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103014618A (en) | Mask plate used for evaporation and manufacturing method thereof | |
| CN203021638U (en) | Mask plate for evaporation | |
| US9453948B2 (en) | Color filter substrate, manufacturing method thereof and display device | |
| EP3203519B1 (en) | Array substrate, method of manufacturing the array substrate using a mask plate and display device | |
| CN109830183B (en) | Display panel and display device | |
| CN109487206B (en) | Mask and mask device adopting same | |
| CN103682171A (en) | Compound mask plate | |
| CN202913046U (en) | Composited mask plate | |
| CN103852968A (en) | Mask strips and method for manufacturing organic light emitting diode display using same | |
| CN103236398B (en) | The manufacture method of reticle mask plate and the reticle mask plate with the method making | |
| CN103668052A (en) | Composite mask plate assembly | |
| CN103824872A (en) | Stretchable base plate, stretchable organic light-emitting display device and method of manufacturing the stretchable base plate and the stretchable organic light emitting display device | |
| CN103966547A (en) | Composite mask plate assembly | |
| CN103014619A (en) | Mask plate and processing method thereof | |
| CN202913048U (en) | Composted mask plate component | |
| CN203128640U (en) | Easy-to-weld mask plate | |
| CN204117516U (en) | High definition LED display | |
| CN103668049A (en) | Mask plate assembly for use in vapor deposition of large-sized OLED (Organic Light Emitting Diode) | |
| US20210028237A1 (en) | Color film substrate and preparation method therefor, and display panel and display device | |
| CN103668055A (en) | Mask component | |
| CN101831607A (en) | OLED (Organic Light Emitting Diode) mask and application method thereof | |
| CN104538422A (en) | Woled display device and manufacturing method thereof | |
| CN103144418A (en) | Steel plate mesh | |
| CN202003620U (en) | Splicing passive matrix organic light emitting diode (PMOLED) display screen | |
| US20180331311A1 (en) | Organic optoelectronic device and method for manufacturing the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| ASS | Succession or assignment of patent right |
Owner name: NANJING CHENGCHAO OPTOELECTRONIC TECHNOLOGY CO., L Free format text: FORMER OWNER: TANG JUN Effective date: 20140311 Free format text: FORMER OWNER: QIAN CHAO Effective date: 20140311 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 518000 SHENZHEN, GUANGDONG PROVINCE TO: 210000 NANJING, JIANGSU PROVINCE |
|
| TA01 | Transfer of patent application right |
Effective date of registration: 20140311 Address after: 429 room 210000, building C, No. 606, Ning six road, Nanjing chemical industry park, Jiangsu, China Applicant after: Nanjing ultra Photoelectric Technology Co., Ltd. Address before: 3, building A12, building 518000, an industrial zone, Ho Ho, Ho Ho Ho, Shenzhen, Guangdong Applicant before: Tang Jun Applicant before: Qian Chao |
|
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130403 |