WO2020143217A1

WO2020143217A1 - Masking unit, and mask plate assembly provided with masking unit

Info

Publication number: WO2020143217A1
Application number: PCT/CN2019/098462
Authority: WO
Inventors: 王志祥; 沈阳; 王国兵; 康梦华; 叶訢
Original assignee: 昆山工研院新型平板显示技术中心有限公司; 昆山国显光电有限公司
Priority date: 2019-01-09
Filing date: 2019-07-30
Publication date: 2020-07-16
Also published as: CN109722630B; CN109722630A

Abstract

Provided are a masking unit (100) and a mask plate assembly provided with the masking unit. The masking unit (100) is used for the evaporation forming of pixels of an organic light-emitting display. The masking unit (100) comprises a coating area (11), which is provided with multiple evaporation openings (110) for the evaporation forming of the pixels. The masking unit further comprises a first auxiliary area (12), wherein the first auxiliary area (12) is provided with at least one first side portion (12a) adjacent to at least one side of the coating area (11); each of the first side portions (12a) comprises at least one row of first openings (120); each of the first openings (120) extends in a direction from the inside to the outside of the first side portion (12a); and the width of each of the first openings (120) gradually decreases in the extending direction thereof. The coating area (11) in the masking unit (100) is connected to a peripheral region thereof by means of the first auxiliary area (12), and on the basis of a gradient pattern of the first openings (120) in the first auxiliary area (12), the probability of breakage at the position of the junction between the coating area (11) of the masking unit (100) and the peripheral region of the coating area can be effectively reduced.

Description

Mask unit and mask plate assembly with the mask unit

Technical field

The present application relates to the field of organic light-emitting display manufacturing, and in particular to a mask unit for manufacturing pixels of an organic light-emitting display and a mask plate assembly having the mask unit.

Background technique

The traditional liquid crystal display (LCD) requires a backlight to work, so it has a heavy weight and a large thickness. The organic light-emitting display, that is, organic light-emitting diodes (Organic Light-Emitting Diodes, OLED for short) is a self-luminous device. Compared with a liquid crystal display, an organic light-emitting display (OLED display for short) does not require a backlight, so it has the advantages of light weight, thin thickness, low power consumption, wide viewing angle, and fast screen response. Based on this, organic light-emitting display technology is the technology that can best meet the functional requirements of people for future displays. In recent years, there have been more and more researches on organic light-emitting display technology in the industry.

At present, in the production process of organic light-emitting displays, a relatively mature technology for realizing pixel production is vacuum evaporation technology. Generally, organic materials are deposited by vapor deposition at specific positions on the substrate above the evaporation source, so as to achieve the formation of pixels of a specific shape. Specifically, in the pixel manufacturing process, the mask assembly (may also be called a mask assembly) is immediately under the substrate, and the mask unit (which may also be called a mask unit) constituting the mask assembly is preliminarily A coating area is designed, and an evaporation opening consistent with the pixel pattern to be evaporated is formed in the coating area, and an organic material is deposited at a specific position of the substrate through the evaporation opening to form a desired pixel pattern on the substrate.

However, there are the following problems:

First of all, the mask unit is made of metal sheet, but since the thickness of the metal sheet is usually in the order of micrometers, the boundary between the coating area of the evaporation opening and the non-open area around it is prone to breakage, resulting in the scrap of the mask plate . Secondly, in the manufacturing process of the mask plate, it is usually necessary to tension the mask unit constituting the mask plate, and after the mask unit is tensioned, the evaporation opening near the junction position of the coating area is prone to appear large The position is shifted, which affects the quality of the final evaporated pixel. Furthermore, because the stress environment of each area of the coating area on the mask unit is different, under the effect of tension, the deformation in different positions in the coating area is different, which leads to poor uniformity of the evaporation openings in the coating area.

Summary of the invention

This application aims to solve at least one of the technical problems existing in the prior art. In order to achieve the above-mentioned object of the invention, this application provides a mask unit. The specific design method is as follows.

A masking unit for vapor deposition of organic light-emitting display pixels includes a coating area, the coating area has a plurality of vapor deposition openings for vapor forming the pixels, and the mask unit further includes a first auxiliary Area, the first auxiliary area has at least one first side portion adjacent to at least one side of the coating area, each of the first side portions includes at least one row of first openings, each of the first The opening extends from the inner side of the first side portion closer to the coating area toward the outer side of the first side portion away from the coating area, and the width dimension of the first opening is in its extending direction Up gradually decreases.

In one of the embodiments, the first opening has a triangular shape or a curved extending shape.

In one of the embodiments, the first opening is an isosceles triangle, and an end of the first opening away from the corresponding coating area forms an apex angle of the isosceles triangle.

In one of the embodiments, the extended length dimension of the first opening is 2-3 times the center distance between two adjacent evaporation openings in the extending direction of the first opening.

In one of the embodiments, the first side portion further has at least one row of second openings, the second openings are located between the outermost evaporation openings of the coating area and the first openings, the The second opening and the corresponding evaporation opening in the coating area together form a matrix array.

In one of the embodiments, the second opening is arranged to surround the corresponding coating area.

In one of the embodiments, the first side portions are provided in pairs and adjacent to the opposite two sides of the corresponding coating area.

In one of the embodiments, the first opening is arranged to surround the corresponding coating area.

In one of the embodiments, the first auxiliary area has four first side portions adjacent to the four sides of the coating area, and every two adjacent first side portions meet A junction is formed at the position, and a plurality of third openings are distributed in the junction. In the direction away from the coating area, the total opening area of the third opening in the unit area of each junction is gradually Decrease the trend.

In one of the embodiments, the size of the opening of the third opening decreases along a direction away from the coating area.

In one of the embodiments, the size of the plurality of third openings is the same; along the direction away from the coating area, the number of the third openings in the unit area of the intersection becomes smaller.

In one of the embodiments, the mask unit is elongated and further has a second auxiliary region, the second auxiliary region has a pair of distributed in the coating region in the width direction of the mask unit With respect to the second side portions other than the two sides, the length direction of each second side portion is consistent with the length direction of the mask unit and there are a plurality of fourth openings distributed inside; In the distribution direction of the middle of the two side portions toward both ends in the longitudinal direction, the total opening area of the fourth opening in a unit area tends to increase.

In one of the embodiments, the openings of the plurality of fourth openings have the same size, and in the distribution direction from the middle of the second side portion toward both ends in the longitudinal direction, every two adjacent The center distance between the fourth openings gradually decreases.

In one of the embodiments, the plurality of fourth openings are distributed at equal intervals, and in the distribution direction from the middle of the second side portion toward both ends in the longitudinal direction, the plurality of fourth openings The opening size gradually increases.

In one of the embodiments, the mask unit is elongated, and a pair of the first side portions are distributed on opposite sides of the coating area in the width direction of the mask unit, and from In the distribution direction of the middle of each first side portion toward the two ends in the longitudinal direction, the spacing between each two adjacent first openings gradually decreases.

In one of the embodiments, another pair of the first side portions are distributed on opposite sides of the coating area in the length direction of the mask unit, and the An opening is distributed at even intervals.

The present application also provides a mask plate assembly, which includes a mask outer frame, and the mask plate assembly further includes at least one mask unit as described above, which is tensioned on the mask outer frame.

The beneficial effect of the present application is that the coating area of the mask plate unit involved in this application is connected to its surrounding area through the first auxiliary area, and based on the gradual shape of the first opening in the first auxiliary area, the coating of the mask unit can be effectively reduced The probability of breakage at the boundary between the zone and its surrounding area improves the life of the mask assembly; in addition, the first auxiliary zone can play a role in stress relief, which can effectively reduce the evaporation opening in the coating zone during the tensioning of the mask unit The amount of positional deviation increases the overall accuracy of the vapor deposition opening, which is conducive to improving the pixel quality of the vapor deposition.

BRIEF DESCRIPTION

FIG. 1 is a schematic structural diagram of a mask unit;

Figure 2 shows the first enlarged schematic view of part a in Figure 1;

FIG. 3 is a second enlarged schematic view of part a in FIG. 1;

FIG. 4 is a third enlarged schematic diagram of part a in FIG. 1;

FIG. 5 is a fourth enlarged schematic diagram of part a in FIG. 1;

FIG. 6 is a schematic diagram of another structure of the mask unit;

FIG. 7 is a first enlarged schematic diagram of part b in FIG. 6;

FIG. 8 is a second enlarged schematic view of part b in FIG. 6;

9 is a schematic diagram of a third structure of the mask unit;

FIG. 10 is an enlarged schematic view of part c in FIG. 9.

detailed description

The mask unit involved in the present application is used for the vapor deposition of the pixels of the organic light emitting display, and the present application will be described in detail below with reference to the specific embodiments shown in the drawings.

Example one

Referring to FIG. 1, it shows an embodiment of the mask unit 100 of the present application. With reference to FIG. 2, the mask unit 100 in this embodiment includes a plurality of coating regions 11 and a non-coating region (not labeled in the figure) surrounding the coating region 11, each coating region 11 has a plurality of evaporation openings 110, The vapor deposition opening 110 is used for vapor deposition of pixels. In a specific embodiment, the arrangement of the plurality of evaporation openings 110 is the same as the arrangement of pixels on the organic light-emitting display, which is usually arranged in an array. It should be noted that the boundary between each coating area 11 and the non-coating area is a virtual boundary. The virtual boundary is, for example, a closed shape surrounded by a line tangent to the vapor deposition opening 110 of the outermost circle of the coating area 11. In this embodiment, the evaporation openings 110 of the coating area 11 are arranged in the form of a matrix, and the coating area 11 can be regarded as a rectangular area, which has four sides, and each side is associated with a corresponding row of evaporation openings Tangent.

In this application, the non-coating area around each coating area 11 is divided into at least one auxiliary area, and an opening of a suitable configuration is provided in the auxiliary area, so that the auxiliary area functions to buffer the connection between the coating area and the non-coating area In this way, the probability of breakage at the boundary between the coating area of the mask unit and its surrounding area can be effectively reduced. In addition, the auxiliary region can also play a role in stress relief, which helps to improve the accuracy of the vaporization opening, and is conducive to improving the quality of the vapor-formed pixel.

In the present embodiment, specifically, the non-coating area of the mask unit 100 includes a first auxiliary area 12 having four first side portions 12a adjacent to the four sides of the coating area 11, Each first side portion 12a is provided with a first opening 120. FIG. 2 shows a partial area of two first side portions 12a adjacent to two sides of the vapor deposition zone. In other embodiments, the first auxiliary area 12 may include one, two, or three first side portions adjacent to one side, two sides, or three sides of the coating area 11. In some embodiments, the first side portions 12 a are provided in pairs and adjacent to the opposite sides of the coating area 11, which is beneficial to improve the position accuracy of the evaporation opening 110 in the coating area 11.

With further reference to FIG. 2, each first side portion in this embodiment includes a row of first openings 120 spaced a certain distance from the adjacent side, and each first opening 120 is defined by the first side portion 12a. The inner side extends to the outer side, wherein the width dimension of each first opening 120 gradually decreases in its extending direction. In this application, it can be easily understood that the inside of the first side portion refers to the side of the first side portion 12a close to the coating area 11, and the outside of the first side portion refers to the side of the first side portion 12a The other side away from the coating area 11. It can be understood that the width direction of each first opening 120 refers to a direction perpendicular to the extending direction of the first opening.

In a specific implementation process, the mask unit 100 is usually made of a metal sheet, and the metal sheet usually has a thickness in the order of micrometers. In this embodiment, the coating area 11 of the mask unit 100 is connected to its surrounding area through the first side portion 12a of the first auxiliary area 12, and the first opening 120 of the first side portion 12a is designed to have a gradual shape. It can buffer the connection between the coating area 11 and the surrounding non-coating area, which can effectively reduce the breakage probability at the boundary between the coating area 11 of the mask unit 100 and the surrounding non-coating area. In addition, the first auxiliary region 12 can play a role of stress relief, so that the positional deviation of the evaporation opening 110 in the coating region 11 can be effectively reduced during the tensioning process of the mask unit 100, thereby improving the overall evaporation opening 110 Accuracy is conducive to the quality of the finally formed pixels.

The first opening 120 in this embodiment is triangular. As an example, the first opening 120 is an isosceles triangle, wherein the end of the first opening 120 away from the corresponding coating region 11 constitutes the apex angle of the isosceles triangle.

As a specific implementation structure of this embodiment, referring to FIG. 2, the extension length of the first opening 120 ranges from 2 to the center distance between two adjacent evaporation openings 110 in the extending direction of the first opening 120 -3 times. At this time, the combined effect of the first auxiliary area 12 on the anti-breakage effect and the stress relief effect is the best.

In addition, in this embodiment, the first openings 120 in each first side portion 12a are evenly distributed, and the center distance between each two adjacent first openings 120 is the same as that of two adjacent evaporation openings in the same direction The center spacing of 110 is the same.

In this embodiment, in each first side portion 12a, the total length of a row of first openings 120 is the same as the total length of an adjacent row of vapor deposition openings 110. In addition, in this embodiment, the first opening 120 is disposed to surround the corresponding coating area 11.

Example 2

Referring to FIG. 3 with reference to FIG. 1, this embodiment differs from the first embodiment in that the first side portion of this embodiment further has at least one row of second openings 130. The second openings 130 are located on the outermost side of the coating area 11. Between the plated opening 110 and the first opening 120 described above. All the evaporation openings 110 and the second openings 130 together form a matrix array.

Specifically, the second opening 130 and the vapor deposition opening 110 have the same opening shape and size. In a direction parallel to the corresponding side, the center spacing between two adjacent second openings 130 is equal to the center spacing between two adjacent first vapor deposition openings 110. In the direction perpendicular to the corresponding side, the center distance between the outermost evaporation opening 110 and the adjacent second opening 130, two adjacent second openings 130 (assuming that each first side portion is provided In the case where there are at least two rows of second openings 130, the center spacing between two adjacent vapor deposition openings 110 has the same set value. In this way, after the mask unit 100 is tensioned, the vapor deposition opening 110 of the coating area 11 has more excellent position accuracy than the first embodiment.

Specifically in the implementation structure shown in FIG. 3, the first side portion has a row of second openings 130 disposed adjacent to the outermost evaporation openings 110 of the coating area 11. In other embodiments, each first side portion may also have two or more rows of second openings 130.

The first opening 120 in this embodiment is substantially the same as the first opening 120 in the first embodiment described above. It should be noted that, in this embodiment, the second opening 130 and the vapor deposition opening 110 together form a rectangular array. At this time, in each first side portion, the total length of a row of first openings 120 may be The total length of the second openings 130 in a row is the same. In addition, in this embodiment, the second opening 130 is disposed to surround the corresponding coating area 11.

Example Three

Referring to FIG. 4 in conjunction with FIG. 1, in this embodiment, the first auxiliary region 12 has four first side portions disposed adjacent to the four sides of the coating region 11. The difference between this embodiment and the above-described second embodiment is that each two A junction 15 is formed at the junction of two adjacent first side portions, and a plurality of third openings 150 are distributed in the junction 15. Wherein, in the direction away from the coating area 11, the total opening area of the third opening 150 per unit area in each intersection 15 gradually decreases.

Specifically in the implementation structure shown in FIG. 4, in the lateral direction (corresponding to the length direction of the mask unit 100 and the coating area 11 ), the distance value between every two adjacent third openings 150 is the same, and in the longitudinal direction (corresponding to the mask unit 100 And the width direction of the coating region 11) the pitch value of every two adjacent third openings 150 is also the same. The opening size of the third opening 150 in the intersection 15 may gradually decrease in a direction away from the coating region 11 in the lateral direction and a direction away from the coating region 11 in the longitudinal direction. The gradually decreasing rule is, for example: The longitudinal dimensions of the multiple third openings 150 in the same horizontal row are equal, and the lateral dimension gradually decreases in the direction away from the coating area; the lateral dimensions of the multiple third openings 150 in the same vertical row are equal, and the longitudinal dimension is away from the coating film The area gradually shrinks in the direction. Of course, the change rule of the opening size of the third opening 150 in the junction 15 is not limited to the above rule. In this way, during the tensioning process of the vapor deposition unit 100, the junction 15 can gradually release the stress that the corner position of the coating zone 11 bears, which can further optimize the position accuracy of the vapor deposition opening 110 in the coating zone 11.

In this embodiment, the intersection 15 can also achieve the purpose of “in the direction away from the coating area 11, the total opening area of the third opening 150 per unit area in each intersection 15 decreases gradually”. For example, the opening sizes of the third openings 150 in the intersection 15 may all be the same, but the arrangement of the third openings 150 becomes increasingly sparse in the direction away from the coating area 11 (not shown in the figure).

Example 4

Referring to FIG. 5 in conjunction with FIG. 1, this embodiment differs from the first embodiment described above in that the first opening 120 in this embodiment has a curved extension shape. Referring specifically to FIG. 5, the first opening 120 is S-shaped. In other embodiments, the first opening 120 may also have a C-shaped or other curved extension shape, and specifically, no further expansion is performed here.

Example 5

As shown in FIGS. 6 and 7, this embodiment differs from the above-mentioned embodiment one in that the non-coating area of the mask unit 100 in this embodiment further includes a second auxiliary area 14. In some embodiments, the mask unit 100 is elongated, and the second auxiliary region 14 has a pair of second side portions 14a distributed on opposite sides of the coating region 11, as shown in FIG. A pair of second side portions 14 a of the two auxiliary regions 14 are distributed on opposite sides of the coating region 11 in the width direction of the mask unit 100. In this embodiment, a pair of first side portions are provided in addition to the two sides of the width direction of the coating region 11 (the same as the width direction of the mask unit 100). At this time, the second side portions 14a and the first side portions The side portion 12a is adjacent, that is, the first side portion 12a is located between the coating region 11 and the second side portion 14a.

In this embodiment, the length direction of each second side portion 14a is consistent with the length direction of the mask unit 100, and a number of circular fourth openings 140 are distributed inside. Referring to the direction indicated by the arrow in FIG. 7, the total opening area of the fourth opening 140 per unit area gradually increases in the distribution direction from the middle of the second side portion 14 a toward both ends in the longitudinal direction.

Generally, after applying tension to both ends of the mask unit 100 in the length direction of the mask unit 100, the middle area of the mask unit 100 in the width direction within the span of each coating area 11 in the length direction The amount of shrinkage is greater than the amount of shrinkage in the width direction of both end regions. However, based on the design of the fourth opening 140 in the second auxiliary region 14 in this embodiment, the uncoated region of the mask unit 100 exerts a drag on the middle region of the coated region 11 within the span of the length direction of each coated region 11 The force is greater than the pulling force applied to the two ends of the coating area 11, so that the width shrinkage of each coating area 11 of the mask unit 100 can be more balanced, so that the evaporation opening 110 in each coating area 11 has better Of uniformity.

As shown in FIG. 7, in this embodiment, the opening sizes of all the fourth openings 140 are uniform and are in the distribution direction from the middle of the second side portion toward both ends in the longitudinal direction (refer to the direction indicated by the arrow ), the center distance between each two adjacent fourth openings 140 gradually decreases. As shown in the figure, the interval L1 between the two adjacent fourth openings 140 near the end is smaller than the interval L2 between the two adjacent fourth openings 140 near the middle.

In addition, in some embodiments, the shape of the fourth opening 140 may be a semicircle, a rectangle, a triangle, or other shapes.

Example Six

Referring to FIG. 8 in conjunction with FIG. 6, the difference between this embodiment and the above-mentioned embodiment 5 is that in this embodiment, “in the distribution direction from the middle of the second side portion toward both ends in the longitudinal direction, the unit area The total opening area of the upper fourth opening 140 is gradually increasing. The way is: all the fourth openings 140 are distributed at equal intervals in the distribution direction from the middle of the second side portion toward the two ends in the longitudinal direction (refer to the figure 8), the opening size of the fourth opening 140 gradually increases. In this way, the technical effect of improving the uniformity of the evaporation opening 110 in each coating area 11 described in Embodiment 5 can also be achieved.

Example 7

As shown in FIG. 9 and FIG. 10, the mask unit 100 in this embodiment is elongated. The difference from the first embodiment is that the mask unit 100 in this embodiment has a pair of The first side portions distributed on the opposite sides of the coating area 11 in the width direction (only the first side portions on the side of the coating area 11 are shown in FIG. 10), and facing from the middle of each first side portion In the distribution direction of both ends in the length direction (refer to the direction indicated by the arrow in FIG. 10 ), the distance between each two adjacent first openings 120 gradually decreases. As shown in the figure, the distance D1 between two adjacent first openings 120 near the end is smaller than the distance D2 between two adjacent first openings 120 near the middle.

In this way, the second auxiliary region 14 in the fifth and sixth embodiments need not be provided in this embodiment, and the technology for improving the uniformity of the evaporation opening 110 in the coating region 11 described in the fifth and sixth embodiments can also be achieved effect.

In addition, in other embodiments, the mask unit 100 further includes another pair of first side portions distributed on opposite sides of the coating region 11 in the length direction of the mask unit 100, and the other pair of first sides The pitches of the first openings in the sides are evenly distributed.

Example 8

This embodiment provides a mask plate assembly. Specifically, the mask plate assembly includes a mask frame (not shown in the figure). The mask plate assembly in this embodiment further includes at least one The mask unit 100 as described in Embodiment 1 to Embodiment 7 on the mask outer frame.

When the mask assembly involved in the present application is applied to the evaporation molding of pixels of an organic light emitting display, the accuracy of the evaporation position of the pixels can be improved, and the quality of the finished organic light emitting display can be improved.

It should be understood that although this specification is described according to embodiments, not every embodiment only contains an independent technical solution. This description of the specification is for clarity only, and those skilled in the art should regard the specification as a whole, each The technical solutions in the embodiments can also be combined appropriately to form other embodiments that can be understood by those skilled in the art.

The series of detailed descriptions listed above are only specific descriptions of the feasible implementation manners of this application, they are not intended to limit the scope of protection of this application, and equivalent implementations made without departing from the technical spirit of this application or Changes should be included in the scope of protection of this application.

Claims

A masking unit for evaporation molding of organic light-emitting display pixels includes a plating area, the coating area has a plurality of evaporation openings for evaporation molding the pixels, wherein the masking unit further includes a first An auxiliary area, the first auxiliary area has at least one first side portion adjacent to at least one side of the coating area, each of the first side portions includes at least one row of first openings, each The first opening extends from the inside of the first side portion close to the coating area toward the outside of the first side portion away from the coating area, and the width of the first opening is The direction of extension gradually decreases.
The mask unit according to claim 1, wherein the first opening has a triangular shape or a curved extending shape.
The mask unit according to claim 2, wherein the first opening is an isosceles triangle, and an end of the first opening away from the corresponding coating area constitutes an apex angle of the isosceles triangle.
The mask unit according to claim 2, wherein the extension length dimension range of the first opening is 2- to the center distance between two adjacent evaporation openings in the extension direction of the first opening 3 times.
The mask unit according to claim 1, wherein the first side portion further has at least one row of second openings, the second openings are located at the outermost evaporation openings of the coating area and the first Between the openings, the second openings and the corresponding evaporation openings in the coating area together form a matrix array.
The mask unit according to claim 5, wherein the second opening is provided to surround the corresponding coating area.
The mask unit according to claim 1, wherein the first side portions are provided in pairs and are adjacent to opposite two sides of the corresponding coating area.
The mask unit according to claim 1, wherein the first opening is provided to surround the corresponding coating area.
The mask unit according to claim 1, wherein the first auxiliary area has four first side portions adjacent to four sides of the coating area, and every two adjacent A junction is formed at the junction of one side portion, a plurality of third openings are distributed in the junction, and the third opening in the unit area of each junction in the direction away from the coating area The total opening area of is gradually decreasing.
The mask unit according to claim 9, wherein the opening size of the third opening is reduced according to a certain rule in a direction away from the coating area.
The mask unit according to claim 9, wherein the plurality of third openings have the same size; the number of the third openings in the unit area of the junction changes along the direction away from the coating area less.
The mask unit according to any one of claims 1-11, wherein the mask unit is elongated and further has a second auxiliary area, the second auxiliary area having a pair of the mask The width direction of the unit is distributed on the second side portions other than the opposite sides of the coating area, and the length direction of each second side portion is consistent with the length direction of the mask unit and is distributed internally There are a plurality of fourth openings; in the distribution direction from the middle of the second side portion toward both ends in the longitudinal direction, the total opening area of the fourth openings per unit area is increasing.
The mask unit according to claim 12, wherein the plurality of fourth openings have the same opening size, and in the distribution direction from the middle of the second side portion toward both ends in the longitudinal direction, every two The center distance between the adjacent fourth openings gradually decreases.
The mask unit according to claim 12, wherein the plurality of fourth openings are distributed at equal intervals, and in the distribution direction from the middle of the second side portion toward both ends in the longitudinal direction thereof, the The opening sizes of the plurality of fourth openings gradually increase.
The mask unit according to any one of claims 1 to 5, wherein the mask unit is elongated, and the pair of first side portions are distributed in the width direction of the mask unit Opposite sides of the coating area, and in the distribution direction from the middle of each first side portion toward both ends of its length direction, the spacing between each two adjacent first openings gradually Decrease.
The mask unit according to claim 15, wherein another pair of the first side portions are distributed on opposite sides of the coating area in the length direction of the mask unit, and the other pair The first openings in one side are distributed at even intervals.
A mask plate assembly, comprising a mask frame, wherein the mask plate assembly further comprises at least one set according to any one of claims 1 to 16 tensioned on the mask frame Mask unit.