CN102997983B - Electronic-balance-based automatic silicon wafer counter - Google Patents
Electronic-balance-based automatic silicon wafer counter Download PDFInfo
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- CN102997983B CN102997983B CN201210388392.4A CN201210388392A CN102997983B CN 102997983 B CN102997983 B CN 102997983B CN 201210388392 A CN201210388392 A CN 201210388392A CN 102997983 B CN102997983 B CN 102997983B
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Abstract
The invention discloses an electronic-balance-based automatic silicon wafer counter which comprises an electronic balance. The electronic balance comprises an input and display panel. An internal signal processing device is disposed in the electronic balance. The input and display panel is provided with a numeric input device, a silicon wafer thickness selection and display device, a silicon wafer specification selector, a silicon wafer size selector and a counting result display device. The counting result display device is provided with a 'weight' display panel and a 'number' display panel. The internal signal processing device processes input from the numeric input device, the silicon wafer thickness selection and display device, the silicon wafer specification selector and the silicon wafer size selector, and displays the silicon wafer weight and number counting result on the 'weight' display panel and the 'number' display panel. The electronic-balance-based automatic silicon wafer counter is developed based on a common electronic balance, is effective in counting silicon wafers and has the advantages of convenience, practicality and low cost.
Description
Technical field
The invention belongs to integrated circuit and support industry semi-conductor silicon chip processing and manufacturing field and be particularly related to a kind of silicon chip based on electronic balance and automatically count sheet devices, be applicable to the semi-conductor silicon chip counting of weighing.
Background technology
Semi-conductor silicon chip manufacturing belongs to integrated circuit and supports industry, all the time, all to support industry and strategic new industry as emphasis, and the sheet number of semi-conductor silicon chip statistics, add up to by artificial spot film for a long time, artificial spot film inevitably can produce error in data, and at semicon industry, this produces extremely rigorous field, and sheet miscounts mistake greatly affects image product; Also review and have a negative impact for production data; In addition, artificial spot film also can increase silicon chip surface scratch, increases inspection loss.
Photovoltaic industry is fast-developing in recent years industry, and its emphasis base material-silicon chip of solar cell is because relating to production line circulation etc., and each link all needs to add up to sheet number, and sheet number statistics is the earliest also to adopt artificial spot film to complete.At present also there is the spot film machine based on photovoltaic principals, utilized image processing means to carry out sheet and count statistics.But this series products is more difficult because technology realizes, and the factors such as cost of development height, all have price higher, universal difficulty is large.
Meanwhile, semi-conductor silicon chip belongs to and is circle, and edge curvature is larger, and optical focal length is difficult to adjust, and edge image is compared with difficult collection or effective image pixel is few, and image focusing difficulty or effective image deficiency, cannot realize counting.In addition,, for semi-conductor silicon chip, because conduction type, crystal have different reference surface differences when different to equal-specification, sometimes also need carry out reference surface processing according to client.At present conventional processing is mainly by disk, single reference surface, double reference surface; There are 3 cun, 4 cun, 5 cun, 6 cun, 8 cun, 12 cun according to size; Position and the length of the silicon chip of different size to reference surface has clearly regulation, and consistance is strong.For having the silicon chip of reference surface, photo-electric spot film machine cannot be realized edge image focusing, cannot carry out sheet and count calculating, in addition, in actual production, also can there is the silicon chip of asymmetric chamfering, in this case, silicon chip edge shape is asymmetric, and photo-electric spot film machine cannot be realized spot film more.Therefore so far, also do not have formal photo-electric spot film machine to be applied to semi-conductor silicon chip manufacturing, in production, still adopt Traditional Man spot film.
For silicon chip processing, because product requirement is higher, in general process of manufacture, product all has more consistent thickness and consistent diameter dimension, simultaneously for test silicon wafer resistivity, the thickness of silicon chip first need to be carried out to stepping, be generally 5 microns one grade, ensure that consistency of thickness just can carry out resistivity measurement, so just ensure silicon wafer thickness consistance, simultaneously because silicon chip shape and diameter dimension all have good consistance.
In actual production link, especially OQC link, checking of sheet number is vital, and Traditional Man spot film cannot meet the high request of existing production to product quality, and photo-electric spot film machine has and cannot avoid the born defect in ground in the application of semi-conductor silicon chip manufacturing industry.How to realize conveniently, practical, cheap spot film device and method be the subject matter of puzzlement silicon chip spot film counting.
Summary of the invention
Technical matters to be solved by this invention is just to provide a kind of silicon chip based on electronic balance and automatically counts sheet devices, efficiently realizes silicon chip spot film counting, has advantages of convenience, practical, cheap.
For solving the problems of the technologies described above, the present invention adopts following technical scheme: the silicon chip based on electronic balance is counted sheet devices automatically, comprise electronic balance, described electronic balance comprises input and display panel, in electronic balance, be provided with internal signal treating apparatus, it is characterized in that: described input and display panel are provided with numerical value input media, silicon wafer thickness is selected and display device, silicon chip specification selecting arrangement, die size selecting arrangement, metering device displaying result, described metering device displaying result is provided with " weight " display panel, " sheet number " display panel, described internal signal treating apparatus is according to numerical value input media, silicon wafer thickness is selected and display device, the input of silicon chip specification selecting arrangement and die size selecting arrangement is processed and on " weight " display panel and " sheet number " display panel, is shown that silicon chip weight and sheet number measure result.
As preferably, on described metering device displaying result, be also provided with " accumulative total sheet number " display panel and " cumulative number " display panel.
As preferably, described silicon wafer thickness is selected and display device is provided with " thickness is reached the standard grade " button, " thickness rolls off the production line " button, " single maximum number " button, and corresponding " thickness is reached the standard grade " button, " thickness rolls off the production line " button, " single maximum number " button are respectively equipped with display panel.
As preferably, described silicon chip specification selecting arrangement comprises " disk " button, " single reference surface " button, " double reference surface " button and " square piece " button,
As preferably, described die size selecting arrangement comprises " 3 cun " button, " 4 cun " button, " 5 cun " button, " 6 cun " button.
As preferably, described internal signal treating apparatus comprises weighing device, silicon area calculation element, silicon chip volume calculation element, silicon chip sheet is counted calculation element, silicon area calculation element calculates silicon area according to die size and specification, silicon chip volume calculation element calculates the weight of single silicon chip according to silicon area and silicon wafer thickness, the weighing scale that sheet is counted the calculation element silicon chip gross weight that calculating obtains according to weighing device and single silicon chip calculates silicon chip sheet number and finally on " weight " display panel and " sheet number " display panel, shows silicon chip weight and sheet number metering result.
As preferably, described internal signal treating apparatus is also provided with single maximum count calculation element, and this single maximum count calculation element calculates single maximum count value and judges whether to exceed this single maximum count value according to the silicon wafer thickness of selecting.
As preferably, described internal signal treating apparatus also comprised one accumulative total sheet count statistic device, this accumulative total sheet is counted statistic device and is recorded single count value and be added finally result is shown on device displaying result in metering, described input and display panel are provided with " accumulative total " button and " stopping accumulative total " button is counted for single and stored count between switching.
The present invention is based on general electronic balance and develop, mainly utilize intrinsic physical characteristics between weight and density to realize the calculating of sheet number, can efficiently realize silicon chip spot film counting, there is convenience, practical, cheap.
Brief description of the drawings
Below in conjunction with the drawings and specific embodiments, the invention will be further described:
Fig. 1 is external structure schematic diagram of the present invention;
Fig. 2 is inner structure schematic diagram of the present invention;
Fig. 3 is input and display panel schematic diagram;
Fig. 4 is counting principle schematic diagram of the present invention.
Embodiment
As shown in Figures 1 to 4, for specific embodiments of the invention, first, the present invention has the structure of general balance, comprises microscope carrier 1, day flat structure 8, sensor 9, chassis 16, accumulator 7, switch 2, power supply input port 3, internal signal treating apparatus 10, input and display panel 5, level meter 6, horizontal adjustment pin 4.
Different from existing day flat structure, first, described input and display panel 5 are provided with numerical value input media 13, silicon wafer thickness selection and display device 14, silicon chip specification selecting arrangement 17, die size selecting arrangement 15, metering device displaying result 11.
Wherein, numerical value input media 13 is identical with the numerical value input panel of conventional balance, and it is for input thickness numerical value.
Silicon wafer thickness is selected and display device 14 is provided with " thickness is reached the standard grade " button, " thickness rolls off the production line " button, " single maximum number " button, and corresponding " thickness is reached the standard grade " button, " thickness rolls off the production line " button, " single maximum number " button are respectively equipped with display panel.Select " thickness is reached the standard grade " button and " thickness rolls off the production line " button, and in numerical value input media 13, input corresponding one-tenth-value thickness 1/10 and can be internal signal treating apparatus 10 thickness parameter is provided, and obtain single maximum number by internal signal treating apparatus 10, and show on the corresponding display panel of " single maximum number " button.
Silicon chip specification selecting arrangement 17 bags expand " disk " button, " single reference surface " button, " double reference surface " button and " square piece " button.Die size selecting arrangement 15 comprises " 3 cun " button, " 4 cun " button, " 5 cun " button, " 6 cun " button.Select the specification of silicon chip and the size of silicon chip to can be internal signal treating apparatus area calculating parameter is provided.
Metering device displaying result 11 is provided with " weight " display panel, " sheet number " display panel, " accumulative total sheet number " display panel and " cumulative number " display panel.Described input and display panel 5 are provided with function key area 12 in metering below device displaying result 11, and described function key area 12 is provided with peeling ", " accumulative total " and " stopping totally " button.
Described internal signal treating apparatus 10 comprises weighing device, silicon area calculation element, silicon chip volume calculation element, silicon chip sheet are counted calculation element, silicon area calculation element calculates silicon area according to die size and specification, silicon chip volume calculation element calculates the weight of single silicon chip according to silicon area and silicon wafer thickness, the weighing scale that sheet is counted the calculation element silicon chip gross weight that calculating obtains according to weighing device and single silicon chip calculates silicon chip sheet number and shows on metering device displaying result.
Described internal signal treating apparatus 10 is also provided with single maximum count calculation element, and this single maximum count calculation element calculates single maximum count value and judges whether to exceed according to the silicon wafer thickness of selecting and changes single maximum count value.First, this single maximum count value can show, secondly, change single maximum count value if exceeded on the corresponding display panel of " single maximum number " button, the corresponding display panel of " single maximum number " button can show " exceeding " or other alarms, and prompting reduces the sheet number of weighing.
Described internal signal treating apparatus 10 has also comprised that an accumulative total sheet counts statistic device, and this accumulative total sheet is counted statistic device and recorded single count value and be added finally result is shown on " totally sheet number " display panel." accumulative total " and " stopping accumulative total " button is for the switching between single counting and stored count.
First, select and display device 14, silicon chip specification selecting arrangement 17 at silicon wafer thickness, the silicon chip of on die size selecting arrangement 15, needs being weighed makes a choice, secondly, described internal signal treating apparatus relies on weighing device, silicon area calculation element, silicon chip volume calculation element, silicon chip sheet to count calculation element to process and calculate silicon chip sheet number and finally on " sheet number " display panel, show.
If select " accumulative total " button of described input and display panel 5, described accumulative total sheet is counted statistic device work, the counting of can repeatedly weighing, described accumulative total sheet is counted statistic device and is recorded single count value and be added and finally result is shown on " sheet number " display panel, if select " stop accumulative total " button, described accumulative total sheet is counted statistic device and is quit work.
Principle of the present invention is mainly the inherent characteristic that based single crystal silicon density and weight transform.General silicon chip has the shape of formulation, as disk, square piece, single reference surface, double reference surface etc.Silicon chip can be regarded regular right cylinder as, that is, as long as know silicon wafer thickness, diameter dimension, shape, can transform the quantity that obtains silicon chip by weight.Formula is as follows:
nρv＝nρsh＝m
N=m/ ρ sh(wherein n is silicon chip sheet number, and ρ is that monocrystalline silicon density s is silicon area, and h is silicon wafer thickness, and m is the weight of weighing.）
Can find out from upper formula, just can weigh and carry out sheet and count conversion as long as silicon chip diameter dimension and thickness have better consistance.
Counting principle of the present invention is as follows:
1, design silicon wafer thickness gear inputting interface, and can calculate single maximum count amount.5 microns one grade of silicon wafer thickness first arranges in the once metering of different-thickness silicon chip and rolls off the production line in software, prevents that the sheet number that test error causes is inaccurate, and while weighing, the weight that rolls off the production line on same shelves thickness silicon chip is less than single silicon chip weight.Suppose certain gear silicon chip (h2-h1=5 and h1<h2) between h1～h2, it is n that the sheet of this specification of single weighing is counted maximum number, and n<h1/ (h2-h1)=h1/5(n is integer).If the single maximum count of 295-300 micron thickness shelves is that 58pcs is each.
2, there is diameter dimension input, specification, area computing function.Can input by diameter dimension, specification select calculate silicon area s, it is m that electronic balance obtains weight.Counting principle m/ ρ sh1 < n < m/ ρ sh2, n < h1/5(n is integer), meet above condition simultaneously and obtain counting n.
3, sheet is counted statistical function, has designed sheet and count statistical function in software, has single counting, stored count, directly function of weighing.If single sheet number exceedes range, show " no to scale " prompting, remind and reduce several pieces numbers of single poidometer, weigh for the first time and be counted as n1, be n2 for the second time, be n3 for the third time.Count sheet and count n=n1+n2+n3.There is Protection Counter Functions simultaneously, can again add up.
Electronic balance of the present invention has AC power input port, can directly connect 220v AC power and use; In addition, electronic balance of the present invention has been equipped with accumulator as off-line power supply, ensures the convenience that in use procedure, device shifts and uses.
Apparatus of the present invention also possess the Presentation Function of weighing, and can, separately as weighing use, increase the diversity of functions of the equipments.
Embodiment 1
The actual use of the present invention step: (with 285-290,3 cun of circular silicon chips, 211pcs wait acknowledge.According to principle, single maximum count n=56.)
1. device for opening switch, is placed on the basket that holds silicon chip on balance.
2. to be shown stable, click peeling.
3. verification counterweight is placed on basket, confirms that weight shows consistent with counterweight mark.
4. input silicon wafer thickness 285-290, and select " 3 cun ", " disk ".
5. silicon chip to be counted is put into basket in batches, and click " accumulative total ".
6., if it is too much once to put into slice, thin piece, can shows " exceeding ", and be not counted in accumulative total sheet number.
7. repeat 5-6 step and can obtain final total sheet number.Obtain respectively " exceeding ", " 56 ", " 55 ", " exceeding ", " 55 ", " 45 ".
8. " accumulative total sheet number " shows 211pcs; " cumulative number " shows 4 times.
9. by " stopping accumulative total ", can stop accumulative total.
Embodiment 2
OQC, N14,295-300 micron, 501pcs, disk, every 50pcs interval 1pcs filter paper, wherein having 1 cutter silicon chip is 51pcs, and inspection sheet number is examined use apparatus of the present invention entirely eventually, and inspection requires 500pcs/ box, 50pcs/ cutter eventually.
Inspection situation is as follows:
| Testing time | Weight (g) | Sheet number (pcs) | Situation |
| 1 | 272.5 | 50 | Normally |
| 2 | 273.3 | 50 | Normally |
| 3 | 272.8 | 50 | Normally |
| 4 | 277.5 | 51 | Extremely |
| 5 | 273.1 | 50 | Normally |
| 6 | 272.6 | 50 | Normally |
| 7 | 272.5 | 50 | Normally |
| 8 | 273.3 | 50 | Normally |
| 9 | 273.4 | 50 | Normally |
| 10 | 272.8 | 50 | Normally |
Embodiment 3
5 cun of single reference surface, asymmetric chamfering silicon chip, thickness 525-530 micron.Sheet is counted the unknown, uses apparatus of the present invention and method to carry out sheet and counts calculating.
1. on input thickness, roll off the production line, obtain single maximum count value n=104pcs.
2. select size " 5 cun ", " single reference surface ", also count by " accumulative total ".
3. count several times, be respectively " 52 ", " 46 ", " 68 ", " 42 ", " 45 " 253pcs altogether.
4. adopting artificial several pieces modes to check, is 253pcs, consistent with piece counting apparatus result.
Claims (1)
1. the silicon chip based on electronic balance is counted sheet devices automatically, comprise electronic balance, described electronic balance comprises input and display panel (5), in electronic balance, be provided with internal signal treating apparatus (10), it is characterized in that: described input and display panel (5) are provided with numerical value input media (13), silicon wafer thickness is selected and display device (14), silicon chip specification selecting arrangement (17), die size selecting arrangement (15), metering device displaying result (11), described metering device displaying result (11) is provided with " weight " display panel, " sheet number " display panel, described internal signal treating apparatus is according to numerical value input media (13), silicon wafer thickness is selected and display device (14), the input of silicon chip specification selecting arrangement (17) and die size selecting arrangement (15) is processed and on " weight " display panel and " sheet number " display panel, is shown that silicon chip weight and sheet number measure result, on described metering device displaying result (11), be also provided with " accumulative total sheet number " display panel and " cumulative number " display panel, described silicon wafer thickness is selected and display device is provided with " thickness is reached the standard grade " button, " thickness rolls off the production line " button, " single maximum number " button, and corresponding " thickness is reached the standard grade " button, " thickness rolls off the production line " button, " single maximum number " button is respectively equipped with display panel, described silicon chip specification selecting arrangement comprises " disk " button, " single reference surface " button, " double reference surface " button and " square piece " button, described die size selecting arrangement comprises " 3 cun " button, " 4 cun " button, " 5 cun " button, " 6 cun " button, described internal signal treating apparatus comprises weighing device, silicon area calculation element, silicon chip volume calculation element, silicon chip sheet is counted calculation element, silicon area calculation element calculates silicon area according to die size and specification, silicon chip volume calculation element calculates the weight of single silicon chip according to silicon area and silicon wafer thickness, the weighing scale that sheet is counted the calculation element silicon chip gross weight that calculating obtains according to weighing device and single silicon chip calculates silicon chip sheet number and finally on " weight " display panel and " sheet number " display panel, shows silicon chip weight and sheet number metering result, described internal signal treating apparatus is also provided with single maximum count calculation element, this single maximum count calculation element calculates single maximum count value and judges whether to exceed this single maximum count value according to the silicon wafer thickness of selecting, described internal signal treating apparatus also comprised one accumulative total sheet count statistic device, this accumulative total sheet is counted statistic device and is recorded single count value and be added finally result is shown metering device displaying result (11) is upper, described input and display panel (5) are provided with " accumulative total " button and " stopping accumulative total " button is used for the switching between single counting and stored count,
Using this silicon chip automatically to count sheet devices carries out silicon chip and automatically counts the method for sheet and comprise the steps:
First, at numerical value input media (13), silicon wafer thickness selection and display device (14), silicon chip specification selecting arrangement (17), the upper silicon chip that needs are weighed of die size selecting arrangement (15) makes a choice,
Different-thickness silicon chip is set in software and once measures and roll off the production line, silicon wafer thickness between h1～h2, wherein h2-h1=5 micron and h1<h2, the maximum number of single weighing silicon chip is n, wherein n <
h1/
(h2-h1)=
h1/
5, n is integer;
Secondly, described internal signal treating apparatus relies on weighing device, silicon area calculation element, silicon chip volume calculation element, silicon chip sheet to count calculation element and process and calculate silicon chip sheet number,
By diameter dimension input, specification select calculate silicon area s, electronic balance obtains weight m, wherein
m/
ρ sh1< n <
m/
ρ sh2, n <
h1/
5, and n is integer, and ρ is monocrystalline silicon density, and h is silicon wafer thickness, and m is the weight of weighing;
If select described " accumulative total " button, described accumulative total sheet is counted statistic device work, the counting stored count of can repeatedly weighing, weigh for the first time and be counted as n1, be n2 for the second time, be n3 for the third time, count sheet and count n=n1+n2+n3, and result is shown on " accumulative total sheet number " display panel and " cumulative number " display panel.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104215313A (en) * | 2014-09-11 | 2014-12-17 | 珠海格力电器股份有限公司 | Device and system for automatically counting standard work-pieces of air conditioner |
| CN104457943A (en) * | 2014-12-18 | 2015-03-25 | 常熟市意欧仪器仪表有限公司 | Electronic balance with recording function |
| CN108268930B (en) * | 2018-01-31 | 2022-02-01 | 华北理工大学 | Bar weighing counter and weighing counting method |
| CN109145398B (en) * | 2018-07-30 | 2024-01-05 | 白杨 | Goods quantity calculating method based on weighing |
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| CN202885938U (en) * | 2012-10-12 | 2013-04-17 | 孙新利 | Silicon chip automatic chip-counting device based on electronic balance |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| GB0210945D0 (en) * | 2002-05-14 | 2002-06-19 | Volumatic Ltd | "Apparatus for counting articles by weight" |
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| US4512428A (en) * | 1983-05-05 | 1985-04-23 | K-Tron International, Inc. | Weighing apparatus and method |
| JPS61122525A (en) * | 1984-11-20 | 1986-06-10 | Teraoka Seiko Co Ltd | Counting device |
| CN101506631A (en) * | 2006-09-27 | 2009-08-12 | 株式会社岛津制作所 | Electronic balance |
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