CN102985231A - Industrial robot, method for controlling industrial robot, and method for teaching industrial robot - Google Patents
Industrial robot, method for controlling industrial robot, and method for teaching industrial robot Download PDFInfo
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- CN102985231A CN102985231A CN2011800340629A CN201180034062A CN102985231A CN 102985231 A CN102985231 A CN 102985231A CN 2011800340629 A CN2011800340629 A CN 2011800340629A CN 201180034062 A CN201180034062 A CN 201180034062A CN 102985231 A CN102985231 A CN 102985231A
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- 238000000034 method Methods 0.000 title claims description 12
- 230000007246 mechanism Effects 0.000 claims abstract description 78
- 230000005540 biological transmission Effects 0.000 claims description 42
- 239000000758 substrate Substances 0.000 description 133
- 239000011521 glass Substances 0.000 description 19
- 238000010586 diagram Methods 0.000 description 10
- 238000001514 detection method Methods 0.000 description 9
- 230000033001 locomotion Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
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- 238000009434 installation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/102—Gears specially adapted therefor, e.g. reduction gears
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Provided is an industrial robot which is capable of correcting a tilt of a carried-in subject to be transferred, while suppressing a positional shift of the subject, irrespective of the moving direction of a hand at the time of carrying out the subject. The industrial robot is provided with: the hand (3); an arm (4), which has a second arm section (16) that rotatably supports the hand (3), and a first arm section (15) that rotatably supports the second arm section (16); a first drive motor (21) for extending and retracting the arm (4); a second drive motor (22) for relatively rotating the hand (3) with respect to the second arm section (16); and a power transmitting mechanism (23) for transmitting power of the first drive motor (21) and power of the second drive motor (22). The power transmitting mechanism (23) transmits power of the first drive motor (21) to the arm (4) and the hand (3) such that the hand (3) substantially linearly moves in a state wherein the hand is facing a predetermined direction, and the power transmitting mechanism also transmits power of the second drive motor (22) to the hand (3) such that the hand (3) relatively rotates with respect to the second arm section (16).
Description
Technical field
The present invention relates to a kind of industrial robot that the carrying object of regulation is carried.In addition, the invention still further relates to control method and the indicating means of above-mentioned industrial robot.
Background technology
At present, known have a kind of industrial robot (for example with reference to patent documentation 1) of carrying the glass substrate that liquid crystal display uses.The industrial robot of record comprises in the patent documentation 1: for the hand of glass substrate loading; The arm that supplies hand to install in the mode that can rotate; And the main part that supplies arm to install in the mode that can rotate.Arm is made of the first arm and the second arm.Main part is configured on the pallet, and can be mobile along prescribed direction linearity ground.In this industrial robot, arm is flexible in the hand mode mobile on linearity ground under the state of prescribed direction.In addition, this industrial robot makes hand mobile with respect to the direction of the moving direction quadrature of pallet with main part usually, takes out of with the glass substrate that will be disposed in the box.
In the industrial robot that patent documentation 1 is put down in writing, the installation of sensors that is used for the inclination of glass substrate in horizontal plane that is disposed in the box detected is in hand.In addition, when the inclination of the glass substrate in being disposed at box is detected by sensor, this industrial robot makes main part move towards prescribed direction with respect to pallet, and make arm with respect to the main part ormal weight that circles round, suppress with the position deviation on the moving direction of main part of glass substrate of being moved into regulation and move into the position to from box, taking out of, and the inclination of glass substrate is revised.Under this state, make arm flexible in box, to take out of glass substrate, make main part mobile in the opposite direction, and arm is circled round in the opposite direction, after having revised inclination and position deviation, glass substrate is moved into the position of moving into of regulation.
The prior art document
Patent documentation
Patent documentation 1: Japanese Patent Laid-Open 2003-117862 communique
Summary of the invention
Invent technical problem to be solved
In the industrial robot that patent documentation 1 is put down in writing, main part is moved with respect to pallet, therefore, on one side can suppress glass substrate with main part with respect to the position deviation on the moving direction of pallet, Yi Bian revise the inclination of glass substrate.Yet, in this industrial robot, if for example hand main part with respect to the moving direction of pallet on linearity ground mobile to take out of the glass substrate in the box, then be difficult to suppress on one side glass substrate with main part with respect to the position deviation on the direction of the moving direction quadrature of pallet, Yi Bian revise the inclination of glass substrate.That is, in this industrial robot, the moving direction of the hand when taking out of glass substrate, Yi Bian be difficult to suppress the position deviation of glass substrate, Yi Bian revise rightly the inclination of glass substrate.
Therefore, while technical problem of the present invention is to provide the position deviation of a kind of moving direction of the hand when taking out of the carrying object, the carrying object that can both suppress to move into to revise the industrial robot of its inclination.
The technical scheme that the technical solution problem adopts
For solving the problems of the technologies described above, the feature of industrial robot of the present invention is to comprise: hand, this hand load the carrying object; Arm, this arm have hand are supported to second arm that can rotate and the base end side of the second arm is supported to these at least two arms of the first arm that can rotate in its front in its front; The first drive motor, this first drive motor are used for making arm flexible; The second drive motor, this second drive motor are used for hand is relatively rotated with respect to the second arm; And Poewr transmission mechanism, this Poewr transmission mechanism is used for transmitting the power of the first drive motor and the power of the second drive motor, Poewr transmission mechanism with hand under the state of prescribed direction roughly the linearity ground mode of moving with the transmission of power of the first drive motor to arm and hand, and with hand with respect to the second arm in relative rotation mode with the transmission of power of the second drive motor to hand.
Industrial robot of the present invention comprises: be used for making hand with respect to the second arm the second drive motor in relative rotation; And the Poewr transmission mechanism that be used for to transmit the power of the power of the first drive motor and the second drive motor, Poewr transmission mechanism with hand with respect to the second arm in relative rotation mode with the transmission of power of the second drive motor to hand.Therefore, in the present invention, the moving direction regardless of taking out of the hand of carrying during object can both make hand freely relatively rotate with respect to the second arm.Therefore, in the present invention, regardless of the moving direction of taking out of the hand of carrying during object, when detecting the inclination of carrying object, if hand is relatively rotated with respect to the second arm, and the main part of industrial robot is rotated, while the position deviation of the carrying object that then can both suppress to move into is revised its inclination.
In addition, in the present invention, even if the main part that does not have to be used for making industrial robot is towards the travel mechanism that prescribed direction moves, while the position deviation of the carrying object that also can suppress to move into is revised its inclination.Therefore, in the present invention, even if while the position deviation of the carrying object that can suppress to move into is revised its inclination, also can make the industrial robot miniaturization.In addition, in the present invention, when revising its inclination while the position deviation of the carrying object that suppresses to move into, make like that the main part of industrial robot compare the pitch time in the time of to shorten the inclination of revising the carrying object towards the situation that prescribed direction moves with prior art.
In addition, in the present invention, Poewr transmission mechanism with hand under the state of prescribed direction roughly the mobile mode in linearity ground with the transmission of power of the first drive motor to arm and hand, therefore, if make the second drive motor be in halted state, then during the industrial robot emergent stopping in making action, hand can roughly stop after the mobile ormal weight in linearity ground under the state of prescribed direction.That is, if make the second drive motor be in halted state, even if then make the industrial robot emergent stopping in the action, also can keep hand towards the state of certain orientation, therefore, can suppress the disorder of the posture of industrial robot when emergent stopping.Therefore, in the present invention, even if make the industrial robot emergent stopping, can prevent that also the position of not expecting of the peripheral equipment of hand and industrial robot from colliding.
In the present invention, comparatively it is desirable to, the second drive motor is installed on the first arm, and Poewr transmission mechanism comprises: the second reductor, this the second reductor is disposed at the linking part of the first arm and the second arm, and transmits the power of the first drive motor to this second reductor; The 3rd reductor, the 3rd reductor and the second drive motor link; The first belt wheel, this first belt wheel are disposed at the base end side of the second arm and are fixed in the efferent of the 3rd reductor; The second belt wheel, this second belt wheel are disposed at the front of the second arm and are fixed in the base end side of hand; And driving-belt, this driving-belt is set up in the first belt wheel and the second belt wheel.If the employing said structure then can be simplified the structure of Poewr transmission mechanism relatively.
In the present invention, for example, the efferent of the second reductor remains in the front of the first arm in the mode that can rotate, and be fixed in the base end side of the second arm, the input part of the second reductor remains in the efferent of the second reductor in revolvable mode, the efferent of the 3rd reductor remains in the front of the first arm in the mode that can rotate, and the input part of the 3rd reductor remains in the efferent of the 3rd reductor in revolvable mode.
In the present invention, comparatively it is desirable to, the input part of the second reductor and efferent form roughly tubular, dispose the input part of the second reductor in interior all sides of the efferent of the second reductor, dispose the efferent of the 3rd reductor in the mode of interior all sides of the input part that passes the second reductor.If the employing said structure then is disposed at the situation comparison in the outside of the second reductor with the efferent of the 3rd reductor, can make the linking part miniaturization of the first arm and the second arm.
In the present invention, comparatively it is desirable to, the second drive motor is installed on the second arm, and Poewr transmission mechanism comprises: the second reductor, this the second reductor is disposed at the linking part of the first arm and the second arm, and transmits the power of the first drive motor to this second reductor; The 3rd reductor, the 3rd reductor have sun gear, planetary gear, internal gear and planetary gear are held in revolvable pinion frame, and link with the second drive motor; The 4th reductor, the 4th reductor is disposed at the linking part of the second arm and hand; The first belt wheel, this first belt wheel are disposed at the base end side of the second arm and are fixed in the input part of the second reductor; The second belt wheel, this second belt wheel are disposed at the front of the second arm and are fixed in the input part of the 4th reductor; The 3rd belt wheel, the 3rd belt wheel is fixed in sun gear; Four-tape wheel, this four-tape wheel is fixed in pinion frame; The 5th belt wheel, the 5th belt wheel is fixed in internal gear; The 6th belt wheel, the 6th belt wheel is fixed in the rotating shaft of the second drive motor; The first driving-belt, this first driving-belt is set up in the first belt wheel and the 3rd belt wheel; The second driving-belt, this second driving-belt are set up in the second belt wheel and four-tape wheel; And the 3rd driving-belt, the 3rd driving-belt is set up in the 5th belt wheel and the 6th belt wheel.If the employing said structure, then the linking part at the second arm and hand disposes the 4th reductor, therefore, can improve the rigidity of the linking part of the second arm and hand.Therefore, while revise it for the position deviation that suppresses to carry object, even if make hand in relative rotation in the situation, hand be rotated rightly with respect to the second arm at the power that utilizes the second drive motor.
In the present invention, for example, the efferent of the second reductor remains in the front of the first arm in the mode that can rotate, and be fixed in the base end side of the second arm, the input part of the second reductor remains in the efferent of the second reductor in revolvable mode, the efferent of the 4th reductor remains in the front of the second arm in the mode that can rotate, and be fixed in the base end side of hand, the input part of the 4th reductor remains in the efferent of the 4th reductor in revolvable mode, and internal gear remains in the second arm in the mode that can rotate.
In the present invention, also can adopt following structure: the second drive motor is installed on the second arm, Poewr transmission mechanism comprises: the second reductor, and this second reductor is disposed at the linking part of the first arm and the second arm, and transmits the power of the first drive motor to this second reductor; The 3rd reductor, the 3rd reductor has the first angular wheel, the second angular wheel, triconic gear and retaining member and links with the second drive motor, the second angular wheel and triconic gear and the first angular wheel engagement and opposite each other, retaining member is held in the first angular wheel can rotate; The 4th reductor, the 4th reductor is disposed at the linking part of the second arm and hand; The first belt wheel, this first belt wheel are disposed at the base end side of the second arm and are fixed in the input part of the second reductor; The second belt wheel, this second belt wheel are disposed at the front of the second arm and are fixed in the input part of the 4th reductor; The 3rd belt wheel, the 3rd belt wheel is fixed in the second angular wheel; Four-tape wheel, this four-tape wheel is fixed in the triconic gear; The 5th belt wheel, the 5th belt wheel is fixed in retaining member; The 6th belt wheel, the 6th belt wheel is fixed in the rotating shaft of the second drive motor; The first driving-belt, this first driving-belt is set up in the first belt wheel and the 3rd belt wheel; The second driving-belt, this second driving-belt are set up in the second belt wheel and four-tape wheel; And the 3rd driving-belt, the 3rd driving-belt is set up in the 5th belt wheel and the 6th belt wheel.Even if in this case, owing to dispose the 4th reductor at the linking part of the second arm and hand, therefore, also can improve the rigidity of the linking part of the second arm and hand.Therefore, while revise it for the position deviation that suppresses to carry object, even if make hand in relative rotation in the situation, hand be rotated rightly with respect to the second arm at the power that utilizes the second drive motor.
In the present invention, for example, the efferent of the second reductor remains in the front of the first arm in the mode that can rotate, and be fixed in the base end side of the second arm, the input part of the second reductor remains in the efferent of the second reductor in revolvable mode, the efferent of the 4th reductor remains in the front of the second arm in the mode that can rotate, and be fixed in the base end side of hand, the input part of the 4th reductor remains in the efferent of the 4th reductor in revolvable mode, and retaining member remains in the second arm in the mode that can rotate.
In the present invention, for example, industrial robot comprises that the base end side with the first arm is supported to the arm supporting member that can rotate, the first drive motor is installed on the first arm or arm supporting member, Poewr transmission mechanism also comprises the first reductor, and this first reductor is disposed at the linking part of arm supporting member and the first arm and links with the first drive motor.
In the present invention, for example, the efferent of the first reductor remains in the base end side of the first arm in the mode that can rotate, and is fixed in the arm supporting member, and the input part of the first reductor remains in the efferent of the first reductor in revolvable mode.
In the present invention, comparatively it is desirable to, the second drive motor comprises the brake that the rotating shaft that makes the second drive motor stops.If the employing said structure then when object is carried in carrying usually, can make the rotating shaft of the second drive motor stop reliably.Therefore, during industrial robot emergent stopping in making action, can make hand that linearity roughly moves reliably towards prescribed direction.Therefore, when making the industrial robot emergent stopping, can prevent reliably that the position of not expecting of the peripheral equipment of hand and industrial robot from colliding.
In the present invention, industrial robot comprises: the arm supporting member, and this arm supporting member is supported to and can rotates as the axial base end side with the first arm that rotates with above-below direction; Cyclotron mechanism, this cyclotron mechanism are used for circling round with the arm supporting member that axially makes of above-below direction as convolution; And control part, this control part is controlled industrial robot, and when arm extends, hand enters in the resettlement section that can accommodate the carrying object, when arm shrinks, to carry object takes out of from the resettlement section, if the end of the inboard that is disposed at the resettlement section of carrying object is made as inboard end in the time of will carrying object and be contained in the resettlement section, the end of the in the outer part position that is disposed at the resettlement section of carrying object is made as outboard end when being contained in the carrying object in the resettlement section, and the line at the center of the center of the inboard end that passes the carrying object will carry object and be contained in the resettlement section time and outboard end is made as datum line, then arm be stretched to can will be contained in carrying object in the resettlement section be loaded under the state of position of hand, when observing from above-below direction, the center of rotation of hand that is disposed at the linking part of the second arm and hand is configured on the datum line, and the center of the leading section of hand is configured on the datum line, be contracted under the state of radius of gyration for the position of minimum of the industrial robot that utilizes cyclotron mechanism when convolution (radius of gyration of the robot when utilizing the cyclotron mechanism convolution exists under the state of hand for the position of minimum) at arm, when observing from above-below direction, the centre of gyration of arm supporting member is configured on the center of rotation of hand and the hand center line that the center of the leading section of hand is connected, and the center of the inboard end of taking out of object of taking out of is configured on the datum line, control part utilizes cyclotron mechanism to make the convolution of arm supporting member, and while being rotated, hand make arm flexible, so that the carrying object is carried.
If employing said structure, even if then for example move in the situation of carrying object at the hand of the industrial robot that can along continuous straight runs the moves moving direction towards industrial robot, the centre of gyration that is contained in the center of carrying object of resettlement section and arm supporting member produces deviation in the direction with the moving direction quadrature of industrial robot, also can take out of rightly the carrying object in the resettlement section.In addition, for example, even if in the situation that industrial robot can not along continuous straight runs moves, the centre of gyration that is contained in the center of carrying object of resettlement section and arm supporting member produces deviation in the direction of the direction quadrature that moves towards the resettlement section with hand, also can take out of rightly the carrying object in the resettlement section.
In the present invention, comparatively it is desirable to, industrial robot comprises: the arm supporting member, and this arm supporting member is supported to and can rotates as the axial base end side with the first arm that rotates with above-below direction; Cyclotron mechanism, this cyclotron mechanism are used for circling round with the arm supporting member that axially makes of above-below direction as convolution; And control part, this control part is controlled industrial robot, and when arm extends, hand enters in the resettlement section that can accommodate the carrying object, when arm shrinks, to carry object takes out of from the resettlement section, if the end of the inboard that is disposed at the resettlement section of carrying object is made as inboard end in the time of will carrying object and be contained in the resettlement section, the end of the in the outer part position that is disposed at the resettlement section of carrying object is made as outboard end when being contained in the carrying object in the resettlement section, and the line at the center of the center of the inboard end that passes the carrying object will carry object and be contained in the resettlement section time and outboard end is made as datum line, then in the situation that control part is indicated industrial robot, arm be stretched to can will be contained in carrying object in the resettlement section be loaded under the state of position of hand, when observing from above-below direction, if being disposed at the center of the leading section of the center of rotation of hand of linking part of the second arm and hand and hand is configured on the datum line, and the centre of gyration that utilizes the arm supporting member of cyclotron mechanism convolution is not configured in is connected the center of rotation of hand on the hand center line that the center of leading section connects with hand, industrial robot is moved, be configured in state on the datum line with the center of the leading section of the center of rotation of keeping on one side hand and hand, on one side the centre of gyration of arm supporting member is configured on the hand center line.If the employing said structure even if hand is freely relatively rotated with respect to the second arm, also can easily carry out the indication operation of industrial robot.
Industrial robot of the present invention, namely comprise with above-below direction and axially the base end side of the first arm is supported to the arm supporting member that can rotate and is used for comparatively it is desirable to according to following control method as the industrial robot that axially makes the cyclotron mechanism that the arm supporting member circles round that circles round and controlled with above-below direction as what rotate, this control method is as follows: be made as inboard end if will carry the end of carrying the inboard that is disposed at the resettlement section of object when object is contained in the resettlement section that can accommodate the carrying object, the end of the in the outer part position that is disposed at the resettlement section of carrying object is made as outboard end when being contained in the carrying object in the resettlement section, and the line at the center of the center of the inboard end that passes the carrying object will carry object and be contained in the resettlement section time and outboard end is made as datum line, then arm is stretched to the position that the carrying object that can will be contained in the resettlement section is loaded into hand, when observing from above-below direction, the center of rotation of hand that is disposed at the linking part of the second arm and hand is configured on the datum line, and with the center configuration of the leading section of hand on datum line, arm is contracted to the radius of gyration of the industrial robot when utilizing the cyclotron mechanism convolution and is the position (radius of gyration of the industrial robot when hand moves to and utilizes the cyclotron mechanism convolution is the position of minimum) of minimum, when observing from above-below direction, the centre of gyration that utilizes the arm supporting member of cyclotron mechanism convolution is configured on the center of rotation of hand and the hand center line that the center of the leading section of hand is connected, and with the center configuration of the inboard end of taking out of object of taking out of on datum line, utilize cyclotron mechanism to make the convolution of arm supporting member, and while being rotated, hand make arm flexible, so that the carrying object is carried.
If employing said structure, even if then for example move in the situation of carrying object at the hand of the industrial robot that can along continuous straight runs the moves moving direction towards industrial robot, the centre of gyration that is contained in the center of carrying object of resettlement section and arm supporting member produces deviation in the direction with the moving direction quadrature of industrial robot, also can take out of rightly the carrying object in the resettlement section.In addition, for example, even if in the situation that industrial robot can not along continuous straight runs moves, the centre of gyration that is contained in the center of carrying object of resettlement section and arm supporting member produces deviation in the direction of the direction quadrature that moves towards the resettlement section with hand, also can take out of rightly the carrying object in the resettlement section.
Industrial robot of the present invention, namely comprise with above-below direction and axially the base end side of the first arm is supported to the arm supporting member that can rotate and is used for comparatively it is desirable to be instructed to by following indicating means as the cyclotron mechanism industrial robot that the arm supporting member circles round that axially makes that circles round with above-below direction as what rotate, this indicating means is as follows: be made as inboard end if will carry the end of carrying the inboard that is disposed at the resettlement section of object when object is contained in the resettlement section that can accommodate the carrying object, the end of the in the outer part position that is disposed at the resettlement section of carrying object is made as outboard end when being contained in the carrying object in the resettlement section, and the line at the center of the center of the inboard end that passes the carrying object will carry object and be contained in the resettlement section time and outboard end is made as datum line, then arm be stretched to can will be contained in carrying object in the resettlement section be loaded under the state of position of hand, when observing from above-below direction, if being disposed at the center of the leading section of the center of rotation of hand of linking part of the second arm and hand and hand is configured on the datum line, and the centre of gyration that utilizes the arm supporting member of cyclotron mechanism convolution is not configured in is connected the center of rotation of hand on the hand center line that the center of leading section connects with hand, industrial robot is moved, be configured in state on the datum line with the center of the leading section of the center of rotation of keeping on one side hand and hand, on one side the centre of gyration of arm supporting member is configured on the hand center line.If the employing said structure even if hand is freely relatively rotated with respect to the second arm, also can easily carry out the indication operation of industrial robot.
In the indicating means of industrial robot of the present invention, comparatively it is desirable to, arm be stretched to can will be contained in carrying object in the resettlement section be loaded under the state of position of hand, hand is rotated, Yi Bian make carry object and hand towards aliging.If the employing said structure, then with use cyclotron mechanism etc. make carrying object and hand towards the situation of aliging relatively, can easily make carry object and hand towards aliging.
The invention effect
As mentioned above, in industrial robot of the present invention, regardless of the moving direction of taking out of the hand of carrying during object, while the position deviation of the carrying object that can both suppress to move into is revised its inclination.
Description of drawings
Fig. 1 is the top view of the industrial robot of embodiment of the present invention.
Fig. 2 is the side view from the E-E direction indication industrial robot of Fig. 1.
Fig. 3 is the block diagram that the control part of expression industrial robot shown in Figure 1 reaches the various motor that are connected with control part.
Fig. 4 is the schematic diagram for the structure of the Poewr transmission mechanism of explanation embodiment of the present invention.
Fig. 5 is the enlarged drawing of the F section of Fig. 4.
Fig. 6 is the top view of the relation between the hand during be used to the inclination of the substrate that industrial robot shown in Figure 1 is described and mounting substrate.
Fig. 7 is the top view be used to the indicating means that industrial robot shown in Figure 1 is described.
Fig. 8 is the top view be used to the effect that industrial robot shown in Figure 1 is described.
Fig. 9 is the schematic diagram for the structure of the Poewr transmission mechanism of another embodiment of explanation the present invention.
Figure 10 is the enlarged drawing of the G section of Fig. 9.
Figure 11 is the schematic diagram be used to the structure that reductor shown in Figure 10 and periphery thereof are described.
Figure 12 is the schematic diagram for the structure of the reductor of another embodiment of explanation the present invention and periphery thereof.
Figure 13 is the top view for the control method of the industrial robot of another embodiment of explanation the present invention.
The specific embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.
(schematic configuration of industrial robot)
Fig. 1 is the top view of the industrial robot 1 of embodiment of the present invention.Fig. 2 is the side view from the E-E direction indication industrial robot 1 of Fig. 1.Fig. 3 is the block diagram that the control part 20 of expression industrial robot 1 shown in Figure 1 reaches the various motor that are connected with control part 20.In the following description, with 3 mutually orthogonal directions respectively as directions X, Y-direction and Z direction.In the present embodiment, the Z direction is consistent with above-below direction.In addition, in the following description, with directions X as fore-and-aft direction, with Y-direction as left and right directions.
The industrial robot 1 of present embodiment (hereinafter referred to as " robot 1 ") is for the articulated robot that is glass substrate 2 (hereinafter referred to as " substrate 2 ") that liquid crystal display the is used carrying usefulness of carrying to the carrying object.As shown in Figure 1 and Figure 2, robot 1 comprises: two hands 3 that substrate 2 loads; Two arms 4 that each hand 3 in front and two hands 3 links; The main part 5 that two arms 4 are supported; And the substructure member 6 that main part 5 is supported to energy along continuous straight runs (particularly being left and right directions) movement.Main part 5 comprises: the arm supporting member 7 that the base end side of two arms 4 is supported; For the arm supporting member 7 fixing lift components 8 that also can move up and down; Supporting member 8 is supported to the cylindrical component 9 that can move up at upper and lower; Consist of the end portion of main part 5 and the base station 10 that can move horizontally with respect to substructure member 6; And convolution member 11 fixing for the lower end of cylindrical component 9 and that can circle round with respect to base station 10.
The base end side of hand 3 is linking the front of above-below direction as the mode of axially rotating of rotating and arm 4.Industrial robot with above-mentioned patent documentation 1 record on hand 3 similarly is equipped with sensor (not shown), and this sensor detects for the inclination (specifically substrate 2 is with respect to the inclination of taking out of direction of the substrates such as fore-and-aft direction 2) of the substrate 2 that the resettlement section (such as box) of accommodating at substrate 2 is accommodated.
The base end side of arm supporting member 7 is fixed in lift component 8.In the present embodiment, two hands 3, two arms 4 and two arm supporting members 7 are configured on above-below direction overlapping.That is, the robot 1 of present embodiment is the robot of Dual-arm.
In robot 1, supporting member 8 moves up and down with respect to cylindrical component 9 with hand 3 and arm 4 etc.In addition, arm 4 is flexible with respect to main part 5.Particularly, arm 4 is flexible in the mode that linearity under the state of prescribed direction moves with hand 3.In addition, base station 10 moves horizontally with respect to substructure member 6.In addition, convolution member 11 is with respect to base station 10 convolutions.By the combination of above-mentioned action, robot 1 is carried from the resettlement section that substrate 2 is accommodated substrate 2 towards the job position that substrate 2 is carried out the regulation operation.In the present embodiment, when arm 4 elongation, hand 3 enters in the resettlement section, and when arm 4 shrank, the substrate 2 that is loaded into hand 3 was taken out of from the resettlement section.
As shown in Figure 3, Figure 4, the robot 1 of present embodiment comprises: for the first drive motor 21 that arm 4 is stretched; Be used for making hand 3 with respect to the second arm 16 the second drive motor 22 in relative rotation; And the Poewr transmission mechanism 23 that is used for the power of transmission the first drive motor 21 and the second drive motor 22.As shown in Figure 3, the first drive motor 21 and the second drive motor 22 are connected with the control part 20 that robot 1 is controlled.In addition, horizontal drive also is connected with control part 20 with motor 12, lifting drive motor 13 and convolution drive motor 14.
(structure of Poewr transmission mechanism and periphery thereof)
Fig. 4 is the schematic diagram for the structure of the Poewr transmission mechanism 23 of explanation embodiment of the present invention.Fig. 5 is the enlarged drawing of the F section of Fig. 4.
The first drive motor 21 is installed on the first arm 15.Particularly, in the closer position of the linking part of distance the first arm 15 and the second arm 16, the first drive motor 21 is installed on the first arm 15.Rotating shaft at the first drive motor 21 is fixed with belt wheel 24.
The second drive motor 22 also is installed on the first arm 15.Particularly, in the position than the linking part of the first drive motor 21 more close the first arms 15 and the second arm 16, the second drive motor 22 is installed on the first arm 15.This second drive motor 22 is motor of band brake.That is, the second drive motor 22 comprises the brake that its rotating shaft is stopped.Rotating shaft at the second drive motor 22 is fixed with belt wheel 25.
Reductor 28 comprises: input part 40; Efferent 41; And efferent 41 is held in revolvable clamping flange 42.Clamping flange 42 is fixed in the front of the first arm 15.In Fig. 4, example shown in Figure 5, clamping flange 42 is fixed in the lower face side of the front of the first arm 15.Efferent 41 remains in the front of the first arm 15 in the mode that can rotate by clamping flange 42.Be fixed with the belt wheel 43 as the first belt wheel at an end of efferent 41 (in Fig. 4, example shown in Figure 5, being the upper end).Belt wheel 43 is disposed at the inside of the base end side of the second arm 16.In addition, efferent 41 is configured to interior all sides of the input part 35 of the reductor 27 by forming tubular.It is distolateral that input part 40 remains in another of efferent 41 in revolvable mode.Be fixed with belt wheel 44 at input part 40.Belt wheel 25 and the belt wheel 44 added driving-belts 45 that are provided with in the rotating shaft of being fixed in the second drive motor 22.The power that is passed to the second drive motor 22 of input part 40 via driving-belt 45 and belt wheel 44 etc. is slowed down and is passed to efferent 41.In addition, belt wheel 44 also can be integrally formed with input part 40.
In the internal configurations of the front of the second arm 16 belt wheel 46 as the second belt wheel is arranged.That is, the linking part at the second arm 16 and hand 3 disposes belt wheel 46.Belt wheel 46 is fixed in the base end side of hand 3.At belt wheel 43 and the belt wheel 46 added driving-belts 47 that are provided with.
In the present embodiment, when the first drive motor 21 drove, arm 4 was flexible.In addition, in the present embodiment, set length, reductor 26,27 speed reducing ratio and the belt wheel 24,33,38,43 of length, second arm 16 of the first arm 15,46 diameter, make hand 3 mobile on linearity ground under the state of prescribed direction with the power that utilizes the first drive motor 21.For example, set length, reductor 26,27 speed reducing ratio and the belt wheel 24,33,38,43 of length, second arm 16 of the first arm 15,46 diameter, make hand 3 mobile along fore-and-aft direction linearity ground under the state of prescribed direction with the power that utilizes the first drive motor 21, perhaps make hand 3 mobile along left and right directions linearity ground under the state of left and right directions.
In addition, in the present embodiment, when the second drive motor 22 drove, even if the first drive motor 21 stops, hand 3 also can relatively rotate with respect to the second arm 16.
(control method of industrial robot)
Fig. 6 is the top view of the relation between the hand 3 during be used to the inclination of the substrate 2 that industrial robot shown in Figure 11 is described and mounting substrate 2.
In above such robot that consists of 1, when taking out of the substrate 2 that is contained in the resettlement section, control part 20 at first makes the first drive motor 21 drive, so that arm 4 is flexible, and utilizes the sensor of being located at hand 3 that substrate 2 is detected with respect to its inclination of taking out of direction.At this moment, the second drive motor 22 has been applied braking, the rotating shaft of the second drive motor 22 stops.
If do not detect the inclination (if perhaps the inclination of substrate 2 is in below the setting) of substrate 2 by the tilt detection action of this substrate 2, then control part 20 makes the first drive motor 21 drive again, make arm 4 stretch to take out of substrate 2 from the resettlement section, and the substrate 2 of taking out of is moved into the job position of regulation.When arm 4 stretched, hand 3 was mobile along fore-and-aft direction linearity ground under the state of fore-and-aft direction, perhaps mobile along left and right directions linearity ground under the state of left and right directions.In addition, at this moment, the state of the hand 3 in the resettlement section during mounting substrate 2 is the state shown in the double dot dash line of Fig. 6.That is, at this moment, hand 3 and substrate 2 take out of the direction almost parallel.In addition, at this moment, the second drive motor 22 has been applied braking, the rotating shaft of the second drive motor 22 stops.
On the other hand, if go out the inclination (if perhaps the inclination of detected substrate 2 surpasses setting) of substrate 2 by the tilt detection motion detection of substrate 2, then taking out of the roughly position deviation on the direction of quadrature of direction with it in order to suppress substrate 2, and the inclination of correction substrate 2, control part 20 drives the second drive motor 22, so that hand 3 rotates ormal weight with respect to the second arm 16, and convolution drive motor 14 is driven, so that convolution member 11 rotates ormal weight with respect to base station 10.
This action both can be carried out under the state that arm 4 shrinks, and also can carry out under the state of arm 4 elongations.Under the state that arm 4 shrinks, carry out in the situation of this action, after having carried out this action, control part 20 applies braking so that the second drive motor 22 stops and convolution drive motor 14 is stopped, the first drive motor 21 is driven, so that arm 4 elongations, then, lifting drive motor 13 is driven, in the resettlement section, substrate 2 is loaded into hand 3.At this moment, the state of the hand 3 during mounting substrate 2 is the state shown in the solid line of Fig. 6 in the resettlement section.That is, at this moment, hand 3 is with respect to the at a slant degree identical with the inclination of substrate 2 of direction of taking out of of substrate 2.
In addition, if revise the inclination of substrate 2 and under the state of arm 4 elongations, make hand 3 rotate ormal weights and make convolution member 11 rotate the action of ormal weights, then control part 20 is under the state that the second drive motor 22 and convolution drive motor 14 are stopped, the first drive motor 21 is driven so that arm 4 elongations, then, the second drive motor 22 is driven so that hand 3 rotates ormal weight, and convolution drive motor 14 is driven so that convolution member 11 rotates ormal weight, then, lifting drive motor 13 is driven in the resettlement section substrate 2 is loaded into hand 3.At this moment, the state of the hand 3 during mounting substrate 2 is the state shown in the solid line of Fig. 6 in the resettlement section.
When in the resettlement section, substrate 2 being loaded into hand 3, control part 20 drives the second drive motor 22, so that hand 3 is towards rotating ormal weight with the direction of just now direction of rotation, and convolution drive motor 14 is driven, so that convolution member 11 is towards rotating ormal weight with the direction of just now direction of rotation.Like this, the state of the hand 3 of mounting substrate 2 just becomes the state shown in the double dot dash line of Fig. 6 in the resettlement section, can revise the inclination of the substrate 2 that is contained in the resettlement section under the repressed state of position deviation of the direction of taking out of the direction quadrature with it of substrate 2.
Then, under the state that the second drive motor 22 and convolution drive motor 14 are stopped, control part 20 drives so that hand 3 shrinks the first drive motor 21, thereby takes out of substrate 2 from the resettlement section.When arm 4 shrank, hand 3 was mobile along fore-and-aft direction linearity ground under the state of fore-and-aft direction, perhaps mobile along left and right directions linearity ground under the state of left and right directions.In addition, then, control part 20 makes 14 drivings such as grade of convolution drive motor, after robot 1 has been carried out compulsory exercise, under the state that the second drive motor 22 and convolution drive motor 14 are stopped, the first drive motor 21 is driven so that arm 4 is flexible, thereby substrate 2 is moved into job position.At this moment, hand 3 is mobile along fore-and-aft direction linearity ground under the state of fore-and-aft direction, perhaps mobile along left and right directions linearity ground under the state of left and right directions.
In addition, go out in the tilt detection motion detection by substrate 2 in the situation of inclination of substrate 2, also can make in the inclination according to substrate 2 hand 3 rotate ormal weight and convolution member 11 is rotated under the state of ormal weight with respect to base station 10 with respect to the second arm 16, from the resettlement section, take out of substrate 2, then, make hand 3 rotate in the opposite direction ormal weight, and make convolution member 11 rotate in the opposite direction ormal weight, subsequently, substrate 2 is moved into job position.In this case, when substrate 2 is moved into job position under the repressed state of the position deviation of the direction of taking out of the direction quadrature with it, revise the inclination of the substrate 2 that is contained in the resettlement section.In addition, go out in the tilt detection motion detection by substrate 2 in the situation of inclination of substrate 2, can also be on one side make hand 3 rotate ormal weights and make convolution member 11 rotate ormal weights with respect to base station 10 with respect to the second arm 16 according to the inclination of substrate 2, arm 4 is stretched.
(indicating means of industrial robot)
Fig. 7 is the top view be used to the indicating means that industrial robot shown in Figure 11 is described.Below, the indicating means of (namely under the state that the arm 4 extends) robot 1 in the resettlement section of hand 3 in the mobile situation of coming carrying substrate 2 in the upper linearity ground of fore-and-aft direction (directions X) is described.The indication of robot 1 is to be undertaken by the indication operating terminal (programmable device (teaching pendant)) that operator's use ﹠ Control section 20 connects.
In addition, substrate 2 forms rectangular tabular, in the following description, 2a is held as the inboard in the end of substrate 2 that is disposed at the inboard of resettlement section when substrate 2 is contained in the resettlement section, is disposed at the end of substrate 2 in the outside of resettlement section when substrate 2 is contained in the resettlement section as outboard end 2b.The line of the center C 10 of passing inboard end 2a when in addition, being contained in substrate 2 in the resettlement section and the center C 20 of outboard end 2b is as datum line LB.When the indication operation of robot 1, substrate 2 is contained in the resettlement section under the state that does not tilt with respect to fore-and-aft direction, datum line LB and fore-and-aft direction almost parallel.
When the robot 1 in the resettlement section in the situation that the hand 3 under the state of fore-and-aft direction is moved carrying substrate 2 along fore-and-aft direction linearity ground indicates, at first, shown in Fig. 7 (A), make arm 4 be stretched to the substrate 2 that can will be contained in the resettlement section and be loaded into the position of hand 3, and hand 3 is entered in the resettlement section.Then, when observing from above-below direction, the hand centre line L H that is connected with the center that will be disposed at the leading section that the second arm 16 and the center of rotation C1 of the hand 3 of the linking part of hand 3 be connected with hand (more specifically being the center of the leading section of the hand 3 on the direction with the direction quadrature of hand fork elongation) C2 is roughly parallel to the mode of datum line LB (being that hand centre line L H is roughly parallel to fore-and-aft direction), the second drive motor 22 is driven make hand 3 rotations.That is, hand 3 is rotated, and meanwhile make substrate 2 and hand 3 towards aliging.
Then, shown in Fig. 7 (B), Fig. 7 (C), when observing from above-below direction, horizontal drive is driven with motor 12, convolution drive motor 14 and/or the first drive motor 21 makes hand 3 move up at right and left, on one side keeping the state of hand centre line L H and datum line LB almost parallel, Yi Bian make distance L 1 between the end of an end face of the substrate 2 on the left and right directions and hand 3 equal distance L 2 (being that hand centre line L H and datum line LB are overlapping) between the other end of the other end of the substrate 2 on the left and right directions and hand 3.In addition, hand 3 is moved up in front and back, so that the relative position of the substrate 2 on the fore-and-aft direction and hand 3 becomes assigned position.That is, when observing from above-below direction, carry out micromotion in the mode that hand centre line L H and datum line LB are overlapping, thereby carry out the contraposition of substrate 2 and hand 3.
The centre of gyration C3 that at this moment, may produce the convolution member 11 that utilizes cyclotron mechanism convolution shown in Fig. 7 (B) is not configured in the state on the hand centre line L H and the member 11 that circles round as Fig. 7 (C) shown in centre of gyration C3 is configured in the state on the hand centre line L H.In the present embodiment, be configured in the situation on the hand centre line L H at the centre of gyration C3 of convolution member 11, finish the indication operation of robot 1 in the resettlement section.
On the other hand, be not configured in the situation on the hand centre line L H at the centre of gyration C3 of convolution member 11, horizontal drive is driven with motor 12, convolution drive motor 14 and/or the first drive motor 21 make robot 1 action, to keep the overlapping state of hand centre line L H and datum line LB on one side, the centre of gyration C3 of member 11 of will circling round on one side is configured on the hand centre line L H, then finishes the indication operation of robot 1 in the resettlement section.By carrying out above-mentioned indication operation, hand 3 is mobile along fore-and-aft direction linearity ground under the state of fore-and-aft direction, thus carrying substrate 2 rightly.
In addition, in the present embodiment, when observing from above-below direction, carry out micromotion in the mode that hand centre line L H and datum line LB are overlapping, after the contraposition of having carried out substrate 2 and hand 3, if the centre of gyration C3 of convolution member 11 is not configured on the hand centre line L H, then control part 20 automatically makes horizontal drive motor 12, convolution drive motor 14 and/or the first drive motor 21 drive and make robot 1 action, keeping on one side the hand centre line L H state overlapping with datum line LB, one side will the circle round centre of gyration C3 of member 11 be configured on the hand centre line L H.In addition, in the present embodiment, when the centre of gyration C3 of convolution member 11 was configured in hand centre line L H when upper, shown in Fig. 7 (C), the center of rotation C4 of the first arm 15 that is disposed at the linking part of arm supporting member 7 and the first arm 15 also is configured on the hand centre line L H.
(the main effect of present embodiment)
As mentioned above, in the present embodiment, when the second drive motor 22 drove, hand 3 relatively rotated with respect to the second arm 16.Therefore, in the present embodiment, the moving direction of the hand 3 when taking out of substrate 2 in the resettlement section can both make hand 3 freely relatively rotate with respect to the second arm 16.That is, even if the moving direction of the hand 3 when taking out of substrate 2 in the resettlement section for example is fore-and-aft direction or left and right directions, hand 3 is freely relatively rotated with respect to the second arm 16.Therefore, in the present embodiment, when detecting the inclination of substrate 2, the moving direction of the hand 3 when taking out of substrate 2, hand 3 is relatively rotated with respect to the second arm 16, and convolution member 11 is relatively rotated with respect to base station 10, thereby Yi Bian suppress the position deviation of substrate 2, Yi Bian revise the inclination of substrate 2.
In addition, in the present embodiment, the position deviation that suppresses substrate 2 when one side, when revising the inclination of substrate 2 on one side, need not to make the main part 5 of robot 1 to move up at right and left, therefore, when revising the inclination of substrate 2, make like that the main part 5 of robot 1 compare the pitch time in the time of to shorten the inclination of revising substrate 2 in the situation that right and left moves up with prior art.Namely, when revising the inclination of substrate 2 while the position deviation that suppresses substrate 2, make in the situation that the main part 5 of robot 1 moves along left and right directions, need make the main part 5 of robot 1 move to significantly the state shown in the solid line from the state shown in the double dot dash line of Fig. 8, but in the present embodiment, need not to make main part 5 to move, therefore, can correspondingly shorten pitch time.
In the present embodiment, when from the resettlement section towards job position carrying substrate 2, the second drive motor 22 is applied braking, utilize the power of the first drive motor 21 to make arm 4 flexible, so that hand 3 is mobile on linearity ground under the state of prescribed direction.Therefore, if make robot 1 emergent stopping when carrying substrate 2, then hand 3 can roughly stop after the mobile ormal weight in linearity ground under the state of prescribed direction.That is, even if make robot 1 emergent stopping in the action, also can keep hand 3 towards the state of certain orientation, therefore, can suppress the disorder of the posture of robot 1 when emergent stopping.Therefore, in the present embodiment, even if make robot 1 emergent stopping, can prevent that also the position of not expecting of the peripheral equipment of hand 3 and robot 1 from colliding.
In the present embodiment, be fixed with belt wheel 43 at the efferent 41 of the reductor 28 that links with the second drive motor 22, be fixed with belt wheel 46 at the base end side of hand 3, at belt wheel 43 and the belt wheel 46 added driving-belts 47 that are provided with.Therefore, the structure of Poewr transmission mechanism 23 can be simplified relatively.In addition, in the present embodiment, efferent 41 is configured to the interior all sides by the input part 35 of the reductor 27 that forms tubular, therefore, the situation that is disposed at the outside of reductor 27 with efferent 41 compares, can be with the linking part miniaturization of the first arm 15 and the second arm 16.
In the present embodiment, when the robot 1 in the resettlement section in the situation that hand 3 is moved carrying substrate 2 along fore-and-aft direction linearity ground indicates, arm 4 be stretched to can will be contained in substrate 2 in the resettlement section be loaded under the state of position of hand 3, when observing from above-below direction, in the mode of hand centre line L H and datum line LB almost parallel the second drive motor 22 is driven, thus with substrate 2 and hand 3 towards aliging.Therefore, in the present embodiment, make easily substrate 2 and hand 3 towards aliging.
Namely, for example convolution drive motor 14 is driven carry out substrate 2 and hand 3 in the situation of aliging, distance between the front end of centre of gyration C3 and hand 3 is elongated, therefore, the front end of hand 3 is large with respect to the mobile quantitative change of rotation amount of convolution drive motor 14, be difficult to make substrate 2 and hand 3 towards aliging.Relative therewith, in the present embodiment, the second drive motor 22 is driven make substrate 2 and hand 3 towards aliging, distance between the front end of the center of rotation C1 of hand 3 and hand 3 shortens, therefore, can suppress the front end of hand 3 with respect to the amount of movement of the rotation amount of the second drive motor 22, make easily substrate 2 and hand 3 towards aliging.
In the present embodiment, when the indication of the robot 1 in the resettlement section in the situation of carrying out hand 3 and move along the fore-and-aft direction linearity carrying substrate 2, observe from above-below direction, carry out micromotion in the mode that hand centre line L H and datum line LB are overlapping, after the contraposition of having carried out substrate 2 and hand 3, if the centre of gyration C3 of convolution member 11 is not configured on the hand centre line L H, then make horizontal drive motor 12, convolution drive motor 14 and/or the first drive motor 21 drive and make robot 1 action, to keep the overlapping state of hand centre line L H and datum line LB on one side, one side is configured in centre of gyration C3 on the hand centre line L H.Therefore, even if hand 3 is freely relatively rotated with respect to the second arm 16, do not need the indication operation of the complexity of robot 1 yet, thereby can easily indicate operation.
In addition, in the present embodiment, control part 20 automatically makes horizontal drive drive with motor 12, convolution drive motor 14 and/or the first drive motor 21 and makes robot 1 action, to keep the overlapping state of hand centre line L H and datum line LB on one side, on one side centre of gyration C3 is configured on the hand centre line L H, therefore, operator's indication operation becomes more easy.
(variation 1 of Poewr transmission mechanism)
Fig. 9 is the schematic diagram for the structure of the Poewr transmission mechanism 53 of another embodiment of explanation the present invention.Figure 10 is the enlarged drawing of the G section of Fig. 9.Figure 11 is the schematic diagram be used to the structure that reductor shown in Figure 10 58 and periphery thereof are described.
In the above-described embodiment, the linking part at the second arm 16 and hand 3 disposes belt wheel 46.In addition, for example shown in Figure 9, also can dispose at the linking part of the second arm 16 and hand 3 reductor 50 as the 4th reductor.In this case, can improve the rigidity of the linking part of the second arm 16 and hand 3.Therefore, tilt while revise it for the position deviation that suppresses substrate 2, even if make hand 3 in relative rotation in the situation, hand 3 be rotated rightly with respect to the second arm 16 at the power that utilizes the second drive motor 22.
In the variation 1 of Fig. 9～shown in Figure 11, be provided with Poewr transmission mechanism 53 to replace above-mentioned Poewr transmission mechanism 23.Below, the structure of Poewr transmission mechanism 53 is described.In addition, in the following description, to the identical symbol of the structure mark of the Poewr transmission mechanism 53 that shares with the structure of Poewr transmission mechanism 23 and omit or simplify its explanation.
Except reductor 50, Poewr transmission mechanism 53 also comprises above-mentioned reductor 26 and reductor 27.In addition, Poewr transmission mechanism 53 comprises the reductor 58 of conduct the 3rd reductor that links with the second drive motor 22.In variation 1, the first drive motor 21 similarly is installed on the first arm 15 with above-mentioned embodiment.In addition, in this variation 1, the second drive motor 22 is installed on the second arm 16.This second drive motor 22 is disposed at the inside of the base end side of the second arm 16.
As mentioned above, reductor 27 comprises input part 35, efferent 36 and clamping flange 37.In the above-described embodiment, be not fixed with belt wheel at the other end of input part 35, but in this variation 1, be fixed with belt wheel 60 as the first belt wheel at the other end of input part 35.
As shown in figure 11, reductor 58 is the planet-gear speed reducers that have sun gear 62, a plurality of planetary gear 63, internal gear 64 and planetary gear 63 is held in revolvable pinion frame 65.Reductor 58 is disposed at the inside of the second arm 16.Be fixed with belt wheel 66 as the 3rd belt wheel at sun gear 62.Be fixed with the belt wheel 67 of taking turns as the four-tape at planetary gear 65.Internal gear 64 is installed on the second arm 16 by bearing 68, can rotate with respect to the second arm 16.That is, internal gear 64 remains in the second arm 16 in the mode that can rotate.Be fixed with belt wheel 69 as the 5th belt wheel at internal gear 64.In addition, belt wheel 69 also can be integrally formed with internal gear 64.
In this variation 1, set length, reductor 26,27,50,58 speed reducing ratio and the belt wheel 24,33,38,60,66,67 of length, second arm 16 of the first arm 15,73 diameter etc., make hand 3 mobile on linearity ground under the state of prescribed direction with the power that utilizes the first drive motor 21.In addition, in this variation 1, when the second drive motor 22 drives, internal gear 64 rotates and planetary gear 63 is rotated, therefore, the power of the second drive motor 22 is passed to hand 3 via pinion frame 65, belt wheel 67,73, driving-belt 75 and reductor 50, thereby hand 3 is relatively rotated with respect to the second arm 16.In addition, in this variation 1, also the same with above-mentioned embodiment, when the tilt detection motion detection by substrate 2 goes out the inclination of substrate 2, in order to revise the inclination of substrate 2 while the position deviation that suppresses substrate 2, robot 1 drives the second drive motor 22, so that hand 3 rotates ormal weight with respect to the second arm 16, and makes convolution member 11 rotate ormal weight with respect to base station 10.
(variation 2 of Poewr transmission mechanism)
Figure 12 is the schematic diagram for the structure of the reductor 88 of another embodiment of explanation the present invention and periphery thereof.
In variation 1, planet-gear speed reducer is that reductor 58 links by driving-belt 77 and the second drive motor 22.In addition, for example shown in Figure 12, also can with comprise the first angular wheel 81, with the second angular wheel 82 and the triconic gear 83 of the engagement of the first angular wheel 81 and the reductor 88 that the first angular wheel 81 is held in revolvable retaining member 84 by driving- belt 77 and 22 bindings of the second drive motor.
In reductor 88, the second angular wheel 82 is configured on above-below direction relative with triconic gear 83.In addition, above-mentioned belt wheel 66 is fixed in the second angular wheel 82 by axle 85, and above-mentioned belt wheel 67 is fixed in triconic gear 83 by axle 85.The first angular wheel 81 is fixed in horizontal direction as the axle 86 that axially is configured, and axle 86 remains in retaining member 84 in revolvable mode.Retaining member 84 is installed on the second arm 16 by bearing 87, can rotate with respect to the second arm 16.That is, retaining member 84 remains in the second arm 16 in the mode that can rotate.Be fixed with belt wheel 89 as the 5th belt wheel at retaining member 84.Belt wheel 76 and the belt wheel 89 added driving-belts 77 that are provided with in the rotating shaft of being fixed in the second drive motor 22.In addition, belt wheel 89 also can be integrally formed with retaining member 84.
In this variation 2, set length, reductor 26,27,50 speed reducing ratio and the belt wheel 24,33,38,60,66,67 of length, second arm 16 of the first arm 15,73 diameter etc., make hand 3 mobile on linearity ground under the state of prescribed direction with the power that utilizes the first drive motor 21.In addition, in this variation 2, when the second drive motor 22 drives, retaining member 84 rotates and the first angular wheel 81 is rotated, therefore, the power of the second drive motor 22 is passed to hand 3 via triconic gear 83, belt wheel 67,73, driving-belt 75 and reductor 50, thereby hand 3 is relatively rotated with respect to the second arm 16.
(variation of the control method of industrial robot)
Figure 13 is the top view for the control method of the industrial robot 1 of another embodiment of explanation the present invention.
In the above-described embodiment, under the state that the second drive motor 22 and convolution drive motor 14 are stopped, control part 20 drives so that hand 4 shrinks the first drive motor 21, thereby substrate 2 is carried.In addition, for example move in the situation of carrying substrate 2 along left and right directions (Y-direction) at hand 3, and the convolution member 11 the off-centring of centre of gyration C3 along fore-and-aft direction from the resettlement section situation (namely, be not configured in situation on the datum line LB of the substrate 2 that is contained in the resettlement section and does not tilt with respect to left and right directions at the centre of gyration C3 of convolution member 11 as shown in figure 13) under, control part 20 also can make the second drive motor 22 and convolution drive motor 14 drive on one side, the first drive motor 21 is driven, so that arm 4 stretches carrying substrate 2.
In this case, shown in Figure 13 (A), arm 4 be stretched to can will be contained in substrate 2 in the resettlement section be loaded under the state of position of hand 3, when observing from above-below direction, the center of rotation C1 of hand 3 is configured on the datum line LB, and the center C 2 of the leading section of hand 3 is configured on the datum line LB.In addition, shown in Figure 13 (B), the radius of gyration of the robot 1 when arm 4 is contracted to circle round convolution centered by the centre of gyration C3 of member 11 is (radius of gyration of the robot 1 during in convolution centered by centre of gyration C3 exists under the state of hand 3 as minimum position) under the state of minimum position, when observing from above-below direction, H disposes centre of gyration C3 in the hand centre line L, and the center C 10 of the inboard end 2a of the substrate 2 of being taken out of is configured on the datum line LB.In addition, Yi Bian control part 20 circles round convolution member 11 and hand 3 is rotated, Yi Bian make arm 4 flexible, with carrying substrate 2.
In this case, even if move the off-centring of centre of gyration C3 along fore-and-aft direction from the resettlement section of convolution member 11 in the situation of carrying substrate 2 along left and right directions at hand 3, also can take out of rightly from the resettlement section substrate 2.In addition, in this case, when moving between the state that the state and the arm 4 that make robot 1 in arm 4 elongations shrink, it is comparatively desirable by PTP action (point-to-point action) robot 1 being moved.Make in the situation of robot 1 action by the PTP action, comparing with the situation that robot 1 is moved by the interpolation action, can suppress the vibration of hand 3.Yet, also can make robot 1 action in the mobile mode of datum line LB by the interpolation action with the center C 10 of the inboard end 2a of substrate 2.
(other embodiment)
Above-mentioned embodiment is the example in the preferred embodiment of the present invention, but the present invention is not limited thereto, and can carry out various distortion and implement in the scope that does not change the technology of the present invention thought.
In the above-described embodiment, robot 1 comprises the substructure member 6 that main part 5 is supported, but robot 1 also can not comprise substructure member 6.That is, main part 5 also can be to move up at right and left.Even if in this case, also can make by the inclination according to substrate 2 hand 3 rotate ormal weight and make convolution member 11 rotate ormal weight with respect to base station 10 with respect to the second arm 16, revise its inclination while suppress the position deviation of substrate 2.Therefore, in this case, even if revise its inclination while can suppress the position deviation of substrate 2, also can make robot 1 miniaturization.
In addition, even if main part 5 can not move along left and right directions and along with the centre of gyration C3 of the direction convolution member 11 of the moving direction quadrature of hand 3 in the situation of the off-centring of resettlement section, as shown in figure 13, by the second drive motor 22 and convolution drive motor 14 are driven, the first drive motor 21 is driven make arm 4 flexible, also can take out of rightly from the resettlement section substrate 2.
In the above-described embodiment, the first drive motor 21 is installed on the first arm 15.In addition, for example, the first drive motor 21 also can be installed on arm supporting member 7.In this case, be fixed with belt wheel at the other end (being the lower end in the example shown in Figure 4) of the input part 30 of reductor 26, at this belt wheel be installed on the added driving-belt that is provided with of belt wheel of the rotating shaft of the first drive motor 21.In addition, at the belt wheel 33 of the input part 30 that is fixed in reductor 26 be fixed in the belt wheel 38 added driving-belts that are provided with of the input part 35 of reductor 27.
In the above-described embodiment, the base end side of arm 4 is supported on the front of arm supporting member 7 in the mode that can rotate.In addition, for example, the base end side of arm 4 also can be supported in the mode that can rotate convolution member 11.Convolution member 11 in this situation is that the base end side with arm 4 is supported to the arm supporting member that can rotate.
In the above-described embodiment, arm 4 is made of the first arm 15 and the second arm 16 these two arms, but arm 4 also can be made of the arm more than three.In addition, in the above-described embodiment, robot 1 is the so-called double arm robot that comprises two hands 3 and two arms 4, but robot 1 also can be the single armed humanoid robot that comprises a hand 3 and an arm 4.In addition, in the above-described embodiment, the carrying object of being carried by robot 1 is substrate 2, but also can is semiconductor wafer etc. beyond the substrate 2 by the carrying object that robot 1 is carried.
(symbol description)
1 robot (industrial robot)
2 substrates (glass substrate, carrying object)
The inboard end of 2a
The 2b outboard end
3 hands (hand)
4 arms
7 arm supporting members
15 first arms
16 second arms
20 control parts
21 first drive motors
22 second drive motors
23,53 Poewr transmission mechanisms
26 reductors (the first reductor)
27 reductors (the second reductor)
28 reductors (the 3rd reductor)
30 input parts (input part of the first reductor)
31 efferents (efferent of the first reductor)
35 input parts (input part of the second reductor)
36 efferents (efferent of the second reductor)
40 input parts (input part of the 3rd reductor)
41 efferents (efferent of the 3rd reductor)
43 belt wheels (the first belt wheel)
46 belt wheels (the second belt wheel)
47 driving-belts
50 reductors (the 4th reductor)
58 reductors (the 3rd reductor)
60 belt wheels (the first belt wheel)
62 sun gears
63 planetary gears
64 internal gears
65 pinion frames
66 belt wheels (the 3rd belt wheel)
67 belt wheels (four-tape wheel)
69 belt wheels (the 5th belt wheel)
70 input parts (input part of the 4th reductor)
71 efferents (efferent of the 4th reductor)
73 belt wheels (the second belt wheel)
74 driving-belts (the first driving-belt)
75 driving-belts (the second driving-belt)
76 belt wheels (the 6th belt wheel)
77 driving-belts (the 3rd driving-belt)
81 first angular wheels
82 second angular wheels
83 triconic gears
84 retaining members
88 reductors (the 3rd reductor)
89 belt wheels (the 5th belt wheel)
The center of rotation of C1 hand
The center of the leading section of C2 hand
The C3 centre of gyration
The center of the inboard end of C10 (center of the inboard end of carrying object)
The center of C20 outboard end (center of the outboard end of carrying object)
The LB datum line
LH hand center line
Claims (16)
1. an industrial robot is characterized in that, comprising:
Hand, this hand load the carrying object;
Arm, this arm have described hand are supported to second arm that can rotate and the base end side of described the second arm is supported to these at least two arms of the first arm that can rotate in its front in its front;
The first drive motor, this first drive motor are used for making described arm flexible;
The second drive motor, this second drive motor are used for described hand is relatively rotated with respect to described the second arm; And
Poewr transmission mechanism, this Poewr transmission mechanism is used for transmitting the power of described the first drive motor and the power of described the second drive motor,
Described Poewr transmission mechanism with described hand under the state of prescribed direction roughly the linearity ground mode of moving with the transmission of power of described the first drive motor to described arm and described hand, and with described hand with respect to described the second arm transmission of power that mode will described the second drive motor in relative rotation described hand extremely.
2. industrial robot as claimed in claim 1 is characterized in that,
Described the second drive motor is installed on described the first arm,
Described Poewr transmission mechanism comprises:
The second reductor, this second reductor is disposed at the linking part of described the first arm and described the second arm, and transmits the power of described the first drive motor to this second reductor;
The 3rd reductor, the 3rd reductor and described the second drive motor link;
The first belt wheel, this first belt wheel are disposed at the base end side of described the second arm and are fixed in the efferent of described the 3rd reductor;
The second belt wheel, this second belt wheel are disposed at the front of described the second arm and are fixed in the base end side of described hand; And
Driving-belt, this driving-belt are set up in described the first belt wheel and described the second belt wheel.
3. industrial robot as claimed in claim 2 is characterized in that,
The efferent of described the second reductor remains in the front of described the first arm in the mode that can rotate, and is fixed in the base end side of described the second arm,
The input part of described the second reductor remains in the efferent of described the second reductor in revolvable mode,
The efferent of described the 3rd reductor remains in the front of described the first arm in the mode that can rotate,
The input part of described the 3rd reductor remains in the efferent of described the 3rd reductor in revolvable mode.
4. industrial robot as claimed in claim 2 or claim 3 is characterized in that,
The input part of described the second reductor and efferent form roughly tubular,
Dispose the input part of described the second reductor in interior all sides of the efferent of described the second reductor,
Dispose the efferent of described the 3rd reductor in the mode of interior all sides of the input part that passes described the second reductor.
5. industrial robot as claimed in claim 1 is characterized in that,
Described the second drive motor is installed on described the second arm,
Described Poewr transmission mechanism comprises:
The second reductor, this second reductor is disposed at the linking part of described the first arm and described the second arm, and transmits the power of described the first drive motor to this second reductor;
The 3rd reductor, the 3rd reductor have sun gear, planetary gear, internal gear and described planetary gear are held in revolvable pinion frame, and link with described the second drive motor;
The 4th reductor, the 4th reductor is disposed at the linking part of described the second arm and described hand;
The first belt wheel, this first belt wheel are disposed at the base end side of described the second arm and are fixed in the input part of described the second reductor;
The second belt wheel, this second belt wheel are disposed at the front of described the second arm and are fixed in the input part of described the 4th reductor;
The 3rd belt wheel, the 3rd belt wheel is fixed in described sun gear;
Four-tape wheel, this four-tape wheel is fixed in described pinion frame;
The 5th belt wheel, the 5th belt wheel is fixed in described internal gear;
The 6th belt wheel, the 6th belt wheel is fixed in the rotating shaft of described the second drive motor;
The first driving-belt, this first driving-belt are set up in described the first belt wheel and described the 3rd belt wheel;
The second driving-belt, this second driving-belt are set up in described the second belt wheel and described four-tape wheel; And
The 3rd driving-belt, the 3rd driving-belt are set up in described the 5th belt wheel and described the 6th belt wheel.
6. industrial robot as claimed in claim 5 is characterized in that,
The efferent of described the second reductor remains in the front of described the first arm in the mode that can rotate, and is fixed in the base end side of described the second arm,
The input part of described the second reductor remains in the efferent of described the second reductor in revolvable mode,
The efferent of described the 4th reductor remains in the front of described the second arm in the mode that can rotate, and is fixed in the base end side of described hand,
The input part of described the 4th reductor remains in the efferent of described the 4th reductor in revolvable mode,
Described internal gear remains in described the second arm in the mode that can rotate.
7. industrial robot as claimed in claim 1 is characterized in that,
Described the second drive motor is installed on described the second arm,
Described Poewr transmission mechanism comprises:
The second reductor, this second reductor is disposed at the linking part of described the first arm and described the second arm, and transmits the power of described the first drive motor to this second reductor;
The 3rd reductor, the 3rd reductor has the first angular wheel, the second angular wheel, triconic gear and retaining member and links with described the second drive motor, described the second angular wheel and described triconic gear and described the first angular wheel engagement and opposite each other, described retaining member is held in described the first angular wheel can rotate;
The 4th reductor, the 4th reductor is disposed at the linking part of described the second arm and described hand;
The first belt wheel, this first belt wheel are disposed at the base end side of described the second arm and are fixed in the input part of described the second reductor;
The second belt wheel, this second belt wheel are disposed at the front of described the second arm and are fixed in the input part of described the 4th reductor;
The 3rd belt wheel, the 3rd belt wheel are fixed in described the second angular wheel;
Four-tape wheel, this four-tape wheel is fixed in described triconic gear;
The 5th belt wheel, the 5th belt wheel is fixed in described retaining member;
The 6th belt wheel, the 6th belt wheel is fixed in the rotating shaft of described the second drive motor;
The first driving-belt, this first driving-belt are set up in described the first belt wheel and described the 3rd belt wheel;
The second driving-belt, this second driving-belt are set up in described the second belt wheel and described four-tape wheel; And
The 3rd driving-belt, the 3rd driving-belt are set up in described the 5th belt wheel and described the 6th belt wheel.
8. industrial robot as claimed in claim 7 is characterized in that,
The efferent of described the second reductor remains in the front of described the first arm in the mode that can rotate, and is fixed in the base end side of described the second arm,
The input part of described the second reductor remains in the efferent of described the second reductor in revolvable mode,
The efferent of described the 4th reductor remains in the front of described the second arm in the mode that can rotate, and is fixed in the base end side of described hand,
The input part of described the 4th reductor remains in the efferent of described the 4th reductor in revolvable mode,
Described retaining member remains in described the second arm in the mode that can rotate.
9. such as each described industrial robot in the claim 1 to 8, it is characterized in that,
Described industrial robot comprises that the base end side with described the first arm is supported to the arm supporting member that can rotate,
Described the first drive motor is installed on described the first arm or described arm supporting member,
Described Poewr transmission mechanism also comprises the first reductor, and this first reductor is disposed at the linking part of described arm supporting member and described the first arm and links with described the first drive motor.
10. industrial robot as claimed in claim 9 is characterized in that,
The efferent of described the first reductor remains in the base end side of described the first arm in the mode that can rotate, and is fixed in described arm supporting member,
The input part of described the first reductor remains in the efferent of described the first reductor in revolvable mode.
11. such as each described industrial robot in the claim 1 to 10, it is characterized in that,
Described the second drive motor comprises the brake that the rotating shaft that makes described the second drive motor stops.
12. such as each described industrial robot in the claim 1 to 11, it is characterized in that,
Described industrial robot comprises:
The arm supporting member, this arm supporting member is supported to and can rotates as the axial base end side with described the first arm that rotates with above-below direction;
Cyclotron mechanism, this cyclotron mechanism are used for above-below direction as the described arm supporting member convolution of axially making of convolution; And
Control part, this control part is controlled described industrial robot,
And when described arm elongation, described hand enters in the resettlement section that can accommodate described carrying object, when described arm shrinks, described carrying object is taken out of from described resettlement section,
If the end of the inboard that is disposed at described resettlement section of described carrying object is made as inboard end when being contained in described carrying object in the described resettlement section, the end in the outside that is disposed at described resettlement section of described carrying object is made as outboard end when being contained in described carrying object in the described resettlement section, and the line at the center of the center of passing described inboard end when being contained in described carrying object in the described resettlement section and described outboard end is made as datum line
Then described arm be stretched to can will be contained in described carrying object in the described resettlement section be loaded under the state of position of described hand, when observing from above-below direction, the center of rotation of described hand that is disposed at the linking part of described the second arm and described hand is configured on the described datum line, and the center of the leading section of described hand is configured on the described datum line
Be contracted under the state of radius of gyration for the position of minimum of the described industrial robot when utilizing the convolution of described cyclotron mechanism at described arm, when observing from above-below direction, the centre of gyration of described arm supporting member is configured on the center of rotation of described hand and the hand center line that the center of the leading section of described hand is connected, and the described center of taking out of the described inboard end of object of taking out of is configured on the described datum line
Described control part utilizes described cyclotron mechanism to make described arm supporting member convolution, while and make described hand rotation make described arm flexible, so that described carrying object is carried.
13. such as each described industrial robot in the claim 1 to 12, it is characterized in that,
Described industrial robot comprises:
The arm supporting member, this arm supporting member is supported to and can rotates as the axial base end side with described the first arm that rotates with above-below direction;
Cyclotron mechanism, this cyclotron mechanism are used for above-below direction as the described arm supporting member convolution of axially making of convolution; And
Control part, this control part is controlled described industrial robot,
And when described arm elongation, described hand enters in the resettlement section that can accommodate described carrying object, when described arm shrinks, described carrying object is taken out of from described resettlement section,
If the end of the inboard that is disposed at described resettlement section of described carrying object is made as inboard end when being contained in described carrying object in the described resettlement section, the end in the outside that is disposed at described resettlement section of described carrying object is made as outboard end when being contained in described carrying object in the described resettlement section, and the line at the center of the center of passing described inboard end when being contained in described carrying object in the described resettlement section and described outboard end is made as datum line
Then in the situation that described control part is indicated described industrial robot, described arm be stretched to can will be contained in described carrying object in the described resettlement section be loaded under the state of position of described hand, when observing from above-below direction, the center that is disposed at the leading section of the center of rotation of described hand of linking part of described the second arm and described hand and described hand is configured on the described datum line, if and the centre of gyration that utilizes the described arm supporting member of described cyclotron mechanism convolution be not configured in the center of rotation of described hand be connected on the hand center line that the center of leading section of hand connects, described industrial robot is moved, be configured in state on the described datum line with the center of the leading section of the center of rotation of keeping on one side described hand and described hand, on one side the centre of gyration of described arm supporting member is configured on the described hand center line.
14. the control method of an industrial robot, this industrial robot are each described industrial robots in the claim 1 to 11, it comprises:
The arm supporting member, this arm supporting member is supported to and can rotates as the axial base end side with described the first arm that rotates with above-below direction; And
Cyclotron mechanism, this cyclotron mechanism are used for circling round as the described arm supporting member of axially making of convolution with above-below direction,
The control method of described industrial robot is characterised in that,
If the end of the inboard that is disposed at described resettlement section of described carrying object is made as inboard end when being contained in described carrying object in the resettlement section that can accommodate described carrying object, the end in the outside that is disposed at described resettlement section of described carrying object is made as outboard end when being contained in described carrying object in the described resettlement section, and the line at the center of the center of passing described inboard end when being contained in described carrying object in the described resettlement section and described outboard end is made as datum line
Then described arm is stretched to the position that the described carrying object that can will be contained in described resettlement section is loaded into described hand, when observing from above-below direction, the center of rotation of described hand that is disposed at the linking part of described the second arm and described hand is configured on the described datum line, and with the center configuration of the leading section of described hand on described datum line
Described arm is contracted to the radius of gyration of the described industrial robot when utilizing described cyclotron mechanism convolution and is the position of minimum, when observing from above-below direction, the centre of gyration that utilizes the described arm supporting member of described cyclotron mechanism convolution is configured on the center of rotation of described hand and the hand center line that the center of the leading section of described hand is connected, and with the center configuration of the described described inboard end of taking out of object of taking out of on described datum line
Utilize cyclotron mechanism to make described arm supporting member convolution, while and make described hand rotation make described arm flexible, so that described carrying object is carried.
15. the indicating means of an industrial robot, this industrial robot are each described industrial robots in the claim 1 to 12, it comprises:
The arm supporting member, this arm supporting member is supported to and can rotates as the axial base end side with described the first arm that rotates with above-below direction; And
Cyclotron mechanism, this cyclotron mechanism are used for circling round as the described arm supporting member of axially making of convolution with above-below direction,
The indicating means of described industrial robot is characterised in that,
If the end of the inboard that is disposed at described resettlement section of described carrying object is made as inboard end when being contained in described carrying object in the resettlement section that can accommodate described carrying object, the end in the outside that is disposed at described resettlement section of described carrying object is made as outboard end when being contained in described carrying object in the described resettlement section, and the line at the center of the center of passing described inboard end when being contained in described carrying object in the described resettlement section and described outboard end is made as datum line
Then described arm be stretched to can will be contained in described carrying object in the described resettlement section be loaded under the state of position of described hand, when observing from above-below direction, the center that is disposed at the leading section of the center of rotation of described hand of linking part of described the second arm and described hand and described hand is configured on the described datum line, if and the centre of gyration that utilizes the described arm supporting member of described cyclotron mechanism convolution be not configured in the center of rotation of described hand be connected on the hand center line that the center of leading section of hand connects, described industrial robot is moved, be configured in state on the described datum line with the center of the leading section of the center of rotation of keeping on one side described hand and described hand, on one side the centre of gyration of described arm supporting member is configured on the described hand center line.
16. the indicating means of industrial robot as claimed in claim 15 is characterized in that,
Described arm be stretched to can will be contained in described carrying object in the described resettlement section be loaded under the state of position of described hand, make described hand rotation on one side, Yi Bian make described carrying object and described hand towards aliging.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
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| CN201510028120.7A CN104626133B (en) | 2010-07-14 | 2011-07-01 | Industrial robot, the control method of industrial robot and the indicating means of industrial robot |
| CN201510028045.4A CN104647363B (en) | 2010-07-14 | 2011-07-01 | The control method of industrial robot, industrial robot and the indicating means of industrial robot |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
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| JP2010159770 | 2010-07-14 | ||
| JP2010-159770 | 2010-07-14 | ||
| PCT/JP2011/065195 WO2012008321A1 (en) | 2010-07-14 | 2011-07-01 | Industrial robot, method for controlling industrial robot, and method for teaching industrial robot |
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| CN201510028120.7A Division CN104626133B (en) | 2010-07-14 | 2011-07-01 | Industrial robot, the control method of industrial robot and the indicating means of industrial robot |
| CN201510028045.4A Division CN104647363B (en) | 2010-07-14 | 2011-07-01 | The control method of industrial robot, industrial robot and the indicating means of industrial robot |
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| CN102985231A true CN102985231A (en) | 2013-03-20 |
| CN102985231B CN102985231B (en) | 2015-06-10 |
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| CN201510028045.4A Active CN104647363B (en) | 2010-07-14 | 2011-07-01 | The control method of industrial robot, industrial robot and the indicating means of industrial robot |
| CN201510028120.7A Active CN104626133B (en) | 2010-07-14 | 2011-07-01 | Industrial robot, the control method of industrial robot and the indicating means of industrial robot |
| CN201180034062.9A Active CN102985231B (en) | 2010-07-14 | 2011-07-01 | Industrial robot, method for controlling industrial robot, and method for teaching industrial robot |
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| CN201510028045.4A Active CN104647363B (en) | 2010-07-14 | 2011-07-01 | The control method of industrial robot, industrial robot and the indicating means of industrial robot |
| CN201510028120.7A Active CN104626133B (en) | 2010-07-14 | 2011-07-01 | Industrial robot, the control method of industrial robot and the indicating means of industrial robot |
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| JP (1) | JP5798118B2 (en) |
| KR (1) | KR101452650B1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104924301A (en) * | 2014-03-19 | 2015-09-23 | 株式会社安川电机 | Carrying system and motion correcting method for carrying robot |
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| CN108161895A (en) * | 2016-12-07 | 2018-06-15 | 日本电产三协（浙江）有限公司 | Industrial robot |
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Also Published As
| Publication number | Publication date |
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| CN104626133A (en) | 2015-05-20 |
| KR20130031335A (en) | 2013-03-28 |
| WO2012008321A1 (en) | 2012-01-19 |
| TW201208839A (en) | 2012-03-01 |
| CN102985231B (en) | 2015-06-10 |
| CN104647363A (en) | 2015-05-27 |
| TWI572467B (en) | 2017-03-01 |
| KR101452650B1 (en) | 2014-10-22 |
| CN104626133B (en) | 2016-08-24 |
| JP5798118B2 (en) | 2015-10-21 |
| JPWO2012008321A1 (en) | 2013-09-09 |
| CN104647363B (en) | 2016-04-20 |
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