CN102980857A - Terahertz time-domain spectroscopy system for realizing terahertz quick imaging by using frequency optical comb - Google Patents
Terahertz time-domain spectroscopy system for realizing terahertz quick imaging by using frequency optical comb Download PDFInfo
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Abstract
The invention discloses a terahertz time-domain spectroscopy system for realizing terahertz quick imaging by using a frequency optical comb. The system combines different structural units into the same region according to a transmittance characteristic of a periodic structure to obtain a transmittance spectrum with stacked transmittance peaks; the stacked transmittance spectrum forms a frequency optical comb in a frequency spectrum; a transmittance characteristic of an imaging optical comb is related to a space arrangement position of the periodic structure; based on the relevance, a large-light-spot terahertz light beam can enter the imaging light comb and an object to be measured; and a transmittance signal is collected by spot detection. Transmittance characteristic space distribution information of the object to be measured is extracted through data processing, so that quick imaging can be realized. The terahertz time-domain spectroscopy system is suitable for wide-band terahertz imaging; compared with the conventional point-to-point scanning imaging system, the terahertz time-domain spectroscopy system has the advantages that the imaging time is greatly saved; a new concept is supplied to terahertz imaging detection; and the terahertz time-domain spectroscopy system has a great significance for large-scale application of terahertz safety detection and identification.
Description
Technical field
The present invention relates to the Terahertz application, particularly a kind of terahertz time-domain spectroscopy system that utilizes the frequencies of light comb to realize the Terahertz fast imaging wherein also relates to design processing and formation method that terahertz imaging light is combed.
Background technology
Along with the THz science and technology more and more comes into one's own, it is in communication, and radar detects, and the imaging aspect has entered practical stage.The Transflective characteristic of metal periodic structure is realizing the THz device, such as wave filter, switch, polarizer, position phase retardation device etc., has shown huge potentiality.The advantage of studying the transmissison characteristic of metal periodic structure at the THz wave band is, 1) most metals almost show as the characteristic of perfect conductor at terahertz wave band, and the conductivity difference of different metal can not have much impact to the transmissison characteristic of metal periodic structure; 2) aspect manufacture craft, THz wave is between visible light and near-infrared band, and the physical size of metal periodic structure is in micron dimension under this wave band, and manufacture craft is ripe, and these all provide feasibility for the device of making terahertz wave band.At present, the terahertz time-domain spectroscopy system imaging generally adopts the point by point scanning formation method, and the Terahertz hot spot that use to focus on carries out two-dimensional scan at sample surfaces, and the method is the size of size and Terahertz hot spot per sample, and the running time is very long.And this scanning needs to use the Terahertz hot spot that focuses on, and imaging system needs four to throw the face mirror.During measurement, samples vertical is positioned on the throwing face mirror foci, otherwise experimental result is had larger impact, and adopts two-dimension translational platform Quality control position, and experimental system is complicated, and technical difficulty is large and testing cost is higher, has limited its large-scale application.In addition, use detector array can realize fast imaging, but the terahertz detector unit size has limited the size of each image-generating unit, imaging resolution is limited, and terahertz detector itself is expensive, and the detector array high cost is not suitable for large-scale practical application.
Summary of the invention
This purpose is: a kind of terahertz time-domain spectroscopy system that utilizes the frequencies of light comb to realize the Terahertz fast imaging is provided, adopt composite metal structures to produce the imaging comb, avoided using focusing Terahertz scanning object, utilize the large tracts of land thz beam, realize the imaging of object under test one-shot measurement.
The technical solution used in the present invention is: a kind of terahertz time-domain spectroscopy system that utilizes the frequencies of light comb to realize the Terahertz fast imaging, the THz pulse that THz source emits in this terahertz time-domain spectroscopy system, throw the face mirror by first and form parallel beam, imaging comb and object under test that this parallel beam forms by compounding period successively, then focus on the terahertz detector through the second light beam of throwing the face mirror, the information exchange that terahertz detector receives is crossed computing machine and is carried out the data processing, extract the transmission feature space distribution information of object under test, realize fast imaging; Wherein:
The described device that is detected is that single-point receives, and once surveys and can obtain whole object under test spatial transmission information;
Described imaging comb, utilize the frequency selective characteristic of periodic microtexture, use different parameters periodicity microtexture as cellular construction, the cellular construction of not concentricity selection frequency is compound in the same plane, form the frequencies of light comb device in the 0.1THz-10THz frequency range, working range can cover whole terahertz wave band by chance, also therein some wave band work; The cellular construction periodic metal construction of described imaging comb, material can use any metal or alloy, and material category is equal to or greater than a kind of, and number of layers is equal to or greater than one deck, and the imaging comb can have base material or without base material; The cellular construction cycle of described imaging comb, the metal level gross thickness was greater than 10 nanometers greater than 1 micron, and the imaging comb comprises a cellular construction at least.
The transmissison characteristic of cellular construction and positional alignment need in advance design in the described imaging comb, the transmissison characteristic of cellular construction is to show as the logical or band resistance characteristic of band at transmission spectrum, the positional alignment of cellular construction directly have influence on imaging comb on frequency spectrum transmission peaks or the corresponding relation of transmission paddy and locus, the later stage need to be carried out data according to corresponding relation and be proposed processing.
The outside that forms this imaging comb in the described imaging comb is surrounded by a metal frame, and when guaranteeing that thz beam exceeds imaging comb area, thz beam does not overflow from device periphery.
Described imaging comb with the front and back position that object under test is placed is: make the incident of Terahertz parallel beam sequentially for combing by object under test and imaging successively.
Described imaging comb can be placed on the position that terahertz pulse is arranged arbitrarily in the light path with object under test.
Described imaging comb with the incident angle of object under test is: but thz beam vertical incidence or incide on imaging comb and the object under test with 0-180 ° of scope.
Principle of the present invention is:
A kind of frequency domain superimposed characteristics of compounding period that utilizes of the present invention is made into the frequencies of light comb, realize the method for fast imaging at terahertz wave band, the method is utilized the transmissison characteristic of periodic structure, the different structure unit is compound in the same area, obtain the transmission spectrum of transmission peaks stack, the transmission spectrum after the stack will be combed by forming frequency light on frequency spectrum.The transmissison characteristic of imaging comb is relevant with the space arrangement position of periodic structure, utilizes this correlativity, can use the large spot thz beam to incide on imaging comb and the object under test, uses point to survey and collects transmission signal.Process the transmission feature space distribution information that extracts object under test through data, realize fast imaging.
The present invention's advantage compared with prior art is:
(1), method of the present invention is applicable to the wide-band terahertz imaging, with respect to traditional point by point scanning imaging, greatly saved imaging time.
(2), the present invention provides a kind of new approaches for terahertz imaging detects, the large-scale practicality of Terahertz safety check and identification is significant.
(3) the present invention is in traditional Terahertz system, only needs slightly change experimental system and data processing method, can realize this fast imaging function, and is good with existing Terahertz system compatibility, improvement cost is low.
Description of drawings:
Fig. 1 utilizes the frequencies of light comb to realize the synoptic diagram of Terahertz fast imaging method.
Fig. 2 is the concrete synoptic diagram of structure 5, and wherein, 11 for forming the unit cycle metal construction of imaging comb, and 12 is base material.
Fig. 3 is after thz beam is combed by imaging, the frequency spectrum light comb that is composited, and frequency spectrum shows as the stack of a series of transmission paddy.
Fig. 4 for for thz beam by the frequency spectrum behind imaging comb and the object under test 6, partly comprised the spatial information of object under test with the disappearance of Fig. 3 contrast.
Fig. 5 is after data are processed, the spatial information of object under test and figure reduction.
Among the figure: THz source 1; Terahertz (THz) pulse 2; First throws face mirror 3; Parallel beam 4; Imaging comb 5; Object under test 6; Second throws face mirror 7; Light beam 8; Terahertz detector 9; Computing machine 10; Cellular construction 11; Base material 12; Metal frame 13.
Embodiment:
Introduce in detail the present invention below in conjunction with the drawings and specific embodiments.
As shown in Figure 1, (the THz Time Domain Spectroscopic System of terahertz time-domain spectroscopy system, THz-TDS) Terahertz (THz) pulse 2 that THz source 1 emits in, throw face mirror 3 by first and form parallel beam 4, parallel beam incides after the imaging comb 5 of compounding period formation, by converging on the terahertz detector 9 received through the second light beam 8 of throwing face mirror 7 again behind the object under test 6, carry out data by computing machine 10 and process, extract the spatial information of object under test.
In the described terahertz imaging system, the terahertz pulse by image-generating unit and object under test converges to terahertz detector through throwing face mirror 7 and once receives information, can process the object under test information that obtain by data after adopting some detection means one-shot measurement.
The imaging comb 5 that adopts composite metal structures to produce, its structural unit has filter action for Terahertz, shows as the logical or band resistance characteristic of band to characteristic frequency.The frequency characteristic of imaging comb depends on the parameters such as the material, size of structural unit, and the light comb is composited by the structural unit that difference sees through characteristic, therefore, demonstrates stack through characteristic at frequency spectrum.The stack frequency spectrum of frequency spectrum light comb is relevant with the structural unit, the arrangement mode that form the imaging comb, utilize this correlativity, thz beam appears after composite array light comb and the object under test, hot spot converges at terahertz detector, utilize computing machine that data are processed, can obtain at frequency spectrum the spatial information of object under test.
Described imaging comb structural unit adopts periodically metal construction.Overwhelming majority metal almost shows as the characteristic of perfect conductor at terahertz wave band, so can adopt any kind metal or metal alloy, and material category is equal to or greater than a kind of.
The mode of described imaging comb structural unit group imaging comb adopts the individual layer complex method, the bar structure unit is arranged in the same plane according to certain rule, the structural unit number of plies is equal to or greater than one deck, and imaging comb can have base material or without base material.
Described imaging comb structural unit has the logical or band resistance characteristic of band at terahertz wave band.
The structural unit requirement of described group of imaging comb, the transmission feature of each structural unit is difference to some extent, and the unit in corresponding space can be differentiated on light comb frequency spectrum.Its arrangement mode can be by the design arbitrary arrangement, and correspondingly, data extracting mode and arrangement mode need to carry out pre-service, carry out afterwards the object under test imaging again.
In the described terahertz imaging system, the placement location of imaging comb and object under test.Terahertz passes through object under test again by the imaging comb first, and perhaps light beam is combed by imaging by object under test first again, can obtain the same result.When the imaging comb was all shone by parallel beam with object under test, object imaging magnification ratio was 1; When imaging comb and object under test are converged or during the diverging light irradiation, the object imaging will be exaggerated or dwindle.
This example adopts imaging comb as shown in Figure 3, and 4*4 metal resonant ring array is combined into the imaging comb array of 3*3 as cellular construction 11, and the outside is surrounded by metal frame 13.Each structural unit is because size is different, and corresponding resonance frequency is not identical yet, in the synthetic frequencies of light comb, and f
Nm(n, m=1,2,3) are respectively the resonance frequency of unit structure.Image-forming step was divided into for two steps:
At first, thz beam focuses on the terahertz detector after shining the imaging comb, can obtain the frequencies of light comb of formation rule in the 0.1-10THz wave band, as the reference signal.
Make Terahertz directional light comb by passing through again object under test after the imaging comb, terahertz detector is obtained frequency spectrum carry out the data processing, can obtain the spatial information of object under test.As shown in Figure 4, testing sample is one opaque " L " type object, and in the frequency spectrum that obtains, disappearance has appearred in correspondence position.Extract through data, Image Mosaics will obtain image shown in Figure 5 after processing.
Because the fully not saturating terahertz light of some part of object under test, the figure that therefore obtains is black white image, if the transmitance of object between 0-1, will obtain the gray level image of object.
The part that the present invention does not elaborate belongs to techniques well known.Above embodiment is only in order to technical scheme of the present invention to be described but not be limited in the scope of embodiment; to those skilled in the art; as long as various variations claim limit and the spirit and scope of the present invention determined in; these variations are apparent, and all utilize innovation and creation that the present invention conceives all at the row of protection.
Claims (6)
1. one kind is utilized frequencies of light to comb the terahertz time-domain spectroscopy system that realizes the Terahertz fast imaging, it is characterized in that: the THz pulse (2) that THz source (1) emits in this terahertz time-domain spectroscopy system, throw face mirror (3) by first and form parallel beam (4), imaging comb (5) and object under test (6) that this parallel beam (4) forms by compounding period successively, then focus on the terahertz detector (9) through the second light beam (8) of throwing face mirror (7), the information exchange that terahertz detector (9) receives is crossed computing machine (10) and is carried out the data processing, extract the transmission feature space distribution information of object under test (6), realize fast imaging; Wherein:
The described device (9) that is detected is that single-point receives, and once surveys and can obtain whole object under test spatial transmission information;
Described imaging comb, utilize the frequency selective characteristic of periodic microtexture, use different parameters periodicity microtexture as cellular construction, the cellular construction of not concentricity selection frequency is compound in the same plane, form the frequencies of light comb device in the 0.1THz-10THz frequency range, working range can cover whole terahertz wave band by chance, also therein some wave band work; The cellular construction periodic metal construction of described imaging comb (5), material can use any metal or alloy, material category is equal to or greater than a kind of, and number of layers is equal to or greater than one deck, and imaging comb can have base material (12) or without base material; The cellular construction cycle of described imaging comb, the metal level gross thickness was greater than 10 nanometers greater than 1 micron, and the imaging comb comprises a cellular construction at least.
2. a kind of frequencies of light of utilizing according to claim 1 is combed the terahertz time-domain spectroscopy system that realizes the Terahertz fast imaging, it is characterized in that: transmissison characteristic and positional alignment (11) needs of cellular construction design in advance in the described imaging comb (5), the transmissison characteristic of cellular construction is to show as the logical or band resistance characteristic of band at transmission spectrum, the positional alignment of cellular construction directly have influence on imaging comb on frequency spectrum transmission peaks or the corresponding relation of transmission paddy and locus, the later stage need to be carried out data according to corresponding relation and be proposed processing.
3. a kind of frequencies of light of utilizing according to claim 2 is combed the terahertz time-domain spectroscopy system that realizes the Terahertz fast imaging, it is characterized in that: the outside that forms this imaging comb in the described imaging comb (5) is surrounded by a metal frame (12), when guaranteeing that thz beam exceeds imaging comb area, thz beam does not overflow from device periphery.
4. a kind of frequencies of light of utilizing according to claim 1 is combed the terahertz time-domain spectroscopy system that realizes the Terahertz fast imaging, and it is characterized in that: described imaging comb (5) with the front and back position that object under test (6) is placed is: make the incident of Terahertz parallel beam sequentially for passing through successively object under test (6) and imaging comb (5).
5. a kind of frequencies of light of utilizing according to claim 1 is combed the terahertz time-domain spectroscopy system that realizes the Terahertz fast imaging, and it is characterized in that: described imaging comb (5) can be placed on the position that terahertz pulse is arranged arbitrarily in the light path with object under test (6).
6. according to claim 1 to 5 each described a kind of terahertz time-domain spectroscopy systems that utilize frequencies of light combs to realize the Terahertz fast imaging, it is characterized in that: described imaging comb (5) with the incident angle of object under test (6) is: but thz beam vertical incidence or incide on imaging comb (5) and the object under test (6) with 0-180 ° of scope.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103575654A (en) * | 2013-11-05 | 2014-02-12 | 湖北久之洋红外系统股份有限公司 | Method and system for improving terahertz scanning imaging speed |
| CN103969215A (en) * | 2014-05-15 | 2014-08-06 | 中国石油大学(北京) | Terahertz time-domain spectroscopy system and measurement method thereof |
| CN105973481A (en) * | 2016-07-07 | 2016-09-28 | 西安应用光学研究所 | Terahertz source wavelength measuring apparatus and method |
| CN106017674A (en) * | 2016-05-11 | 2016-10-12 | 上海朗研光电科技有限公司 | Noise-immunity adaptive-compensation terahertz optical comb spectrum detection method |
| CN106442378A (en) * | 2016-09-26 | 2017-02-22 | 上海理工大学 | Device for improving test accuracy of spectrum absorbance on basis of terahertz optical combs |
| CN108458987A (en) * | 2018-06-05 | 2018-08-28 | 天津大学 | A kind of THz wave computer-aided tomography imaging device and method |
| CN110146932A (en) * | 2019-05-23 | 2019-08-20 | 深圳市华讯方舟太赫兹科技有限公司 | Terahertz imaging detection device |
| CN110275219A (en) * | 2019-05-23 | 2019-09-24 | 深圳市华讯方舟太赫兹科技有限公司 | Terahertz imaging detection device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1126255A2 (en) * | 2000-02-16 | 2001-08-22 | Saitama University | An imaging spectral device |
| CN1445529A (en) * | 2003-03-27 | 2003-10-01 | 上海交通大学 | Imaging method of tera Hertz wave 2D electro-optical area array |
| CN101251492A (en) * | 2008-01-02 | 2008-08-27 | 阮双琛 | Continuous wave HZ real time imaging apparatus and method thereof |
| CN102445420A (en) * | 2011-10-13 | 2012-05-09 | 中国科学院上海微系统与信息技术研究所 | Transmission imaging device and method based on tera-hertz quantum device |
-
2012
- 2012-11-20 CN CN201210472804.2A patent/CN102980857B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1126255A2 (en) * | 2000-02-16 | 2001-08-22 | Saitama University | An imaging spectral device |
| CN1445529A (en) * | 2003-03-27 | 2003-10-01 | 上海交通大学 | Imaging method of tera Hertz wave 2D electro-optical area array |
| CN101251492A (en) * | 2008-01-02 | 2008-08-27 | 阮双琛 | Continuous wave HZ real time imaging apparatus and method thereof |
| CN102445420A (en) * | 2011-10-13 | 2012-05-09 | 中国科学院上海微系统与信息技术研究所 | Transmission imaging device and method based on tera-hertz quantum device |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103575654A (en) * | 2013-11-05 | 2014-02-12 | 湖北久之洋红外系统股份有限公司 | Method and system for improving terahertz scanning imaging speed |
| CN103575654B (en) * | 2013-11-05 | 2016-09-07 | 湖北久之洋红外系统股份有限公司 | A kind of method and system improving Terahertz scanning imagery speed |
| CN103969215A (en) * | 2014-05-15 | 2014-08-06 | 中国石油大学(北京) | Terahertz time-domain spectroscopy system and measurement method thereof |
| CN106017674A (en) * | 2016-05-11 | 2016-10-12 | 上海朗研光电科技有限公司 | Noise-immunity adaptive-compensation terahertz optical comb spectrum detection method |
| CN105973481A (en) * | 2016-07-07 | 2016-09-28 | 西安应用光学研究所 | Terahertz source wavelength measuring apparatus and method |
| CN105973481B (en) * | 2016-07-07 | 2018-08-28 | 西安应用光学研究所 | THz source wavelength measuring apparatus and method |
| CN106442378A (en) * | 2016-09-26 | 2017-02-22 | 上海理工大学 | Device for improving test accuracy of spectrum absorbance on basis of terahertz optical combs |
| CN106442378B (en) * | 2016-09-26 | 2019-01-15 | 上海理工大学 | The device of spectral absorption accurate testing degree is improved based on Terahertz light comb |
| CN108458987A (en) * | 2018-06-05 | 2018-08-28 | 天津大学 | A kind of THz wave computer-aided tomography imaging device and method |
| CN110146932A (en) * | 2019-05-23 | 2019-08-20 | 深圳市华讯方舟太赫兹科技有限公司 | Terahertz imaging detection device |
| CN110275219A (en) * | 2019-05-23 | 2019-09-24 | 深圳市华讯方舟太赫兹科技有限公司 | Terahertz imaging detection device |
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