CN207007335U - THz optical spectrum imagers based on three-dimensional phase grating and aperture segmentation technology - Google Patents
THz optical spectrum imagers based on three-dimensional phase grating and aperture segmentation technology Download PDFInfo
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Abstract
This patent discloses a kind of THz optical spectrum imagers based on three-dimensional phase grating and aperture segmentation technology, the THz optical spectrum imagers are made up of preset lens, preposition field stop, preposition collimating mirror, three-dimensional phase grating, rearmounted convergent mirror, rearmounted field stop, rearmounted collimating mirror, sub-aperture image mirror, detector, detector control process system and control acquisition process computer.The detector obtains target scene by the intensity signal of N number of zero order diffracted light of the N number of cellular institute diffraction of three-dimensional phase grating simultaneously in a manner of aperture segmentation, according to N number of optical path difference corresponding to N number of cellular of three-dimensional phase grating, obtain the corresponding relation data of N groups optical path difference and light intensity, pass through Fourier transformation, the THz spectrums and picture of target are obtained in real time, suitable for association areas such as THz spectral detections, analyses.
Description
Technical field
This patent is related to a kind of tera-hertz spectra imager, and in particular to one kind can obtain target THz spectrum and figure in real time
As the optical spectrum imagers of information.The THz optical spectrum imagers are by preset lens, preposition field stop, preposition collimating mirror, three-dimensional phase
Grating, rearmounted convergent mirror, rearmounted field stop, rearmounted collimating mirror, sub-aperture image mirror, detector, detector control process system
System and control acquisition process computer composition.The detector obtains target scene by three-dimensional phase simultaneously in a manner of aperture segmentation
The intensity signal of N number of zero order diffracted light of the N number of cellular institute diffraction of grating, according to the N corresponding to N number of cellular of three-dimensional phase grating
Individual optical path difference, the corresponding relation data of N groups optical path difference and light intensity is obtained, by Fourier transformation, the THz for obtaining target in real time is composed
And picture, suitable for association areas such as THz spectral detections, analyses.
Background technology
Terahertz (THz) ripple refers to electromagnetic wave (1THz of the frequency in the range of 0.1-10T (wavelength is 3000-30 μm)
=1012Hz).The generation system of THz ripples has two kinds at present, the THz wave producers based on photonic propulsion, and utilizes free electron
THz radiation source.THz wave producers based on photonic propulsion means are limited by the light energy use efficiency of poor efficiency, based on free electron
THz radiation source be limited by the continuous diminution of device size and make device very fragile, therefore the THz radiation energy that two ways obtains
Amount is still no more than 20mW at present.And the relatively strong of steam absorbs in air, the detection of the target Terahertz spectrum made faces very big be stranded
It is difficult.
At present, mainly there are two classes suitable for the spectral instrument of terahertz wave band：When infrared Fourier spectrometer and Terahertz
Domain spectrometer (THz-TDS).Infrared Fourier spectrometer is using Fourier Transform Technique light splitting with multichannel, high-throughout spy
Point, but Fourier Transform Technique relies on the sequential scanning of index glass, it is impossible in real time into spectrum, it is limited in quick change, complicated ring
Use in border；Secondly, basic configuration of the infrared Fourier spectrometer based on Michelson's interferometer, wherein essential point
Beam piece makes incident optical energy be lost 50%, limits use of the instrument in signal detection；In addition infrared Fourier spectrometer
Moving parts and step motion control motor are introduced, while increasing volume and power consumption, have impact on the service life of instrument.
Detections of the THz-TDS to terahertz signal is based on photoconductive sampling or electro-optic sampling, to object into time spectrum, it is necessary to according to
Secondary completion wavelength dimension, the scanning of space dimension is, it is necessary to take a substantial amount of time；Secondly THz-TDS needs to use femto-second laser to make
For the radiation appliance of THz wave so that bulky, the mobile difficulty of instrument；In addition its purposes of THz-TDS is in laboratory
Measurement of species is not appropriate for terahertz of the wild environment to limited distance target in saturating, the anti-rate characteristic of terahertz wave band in environment
Hereby spectrum detection and imaging applications.
The shortcomings that above two kind prior art, is mainly reflected in the following aspects：First, Fourier spectrometer and THz-
TDS, completing the imaging process of object needs to take a long time, and is not suitable under environmental condition complicated and changeable, target Terahertz
The real-time detection of spectrum and imaging demand；2nd, its purposes of THz-TDS be in laboratory environment measurement of species in terahertz wave band
Thoroughly, anti-rate characteristic, wild environment is not appropriate for the Terahertz spectrum detection of limited distance target and imaging applications；3rd, Fourier
Spectrometer and THz-TDS, its is bulky, not readily portable.
The content of the invention
For the above-mentioned deficiency of prior art, this patent provides a kind of Terahertz spectrum based on static Fourier transformation and visited
Survey and imaging device, real-time detection and imaging are composed suitable for the Terahertz of target.
The technical scheme of this patent is as follows：
A kind of THz optical spectrum imagers based on three-dimensional phase grating and aperture segmentation technology, including according to optic path according to
The preset lens 1 of secondary arrangement, preposition field stop 2, preposition collimating mirror 3, three-dimensional phase grating 4, rearmounted convergent mirror 5, rearmounted visual field
Diaphragm 6, rearmounted collimating mirror 7, sub-aperture convergent mirror 8, detector 9, the detector 9 are also connected with detector control process in turn
System 10 and control acquisition process computer 11, as shown in Figure of description 1.Above-mentioned preposition collimating mirror 3, three-dimensional phase grating 4,
Rearmounted convergent mirror 5, rearmounted field stop 6, rearmounted collimating mirror 7, sub-aperture convergent mirror 8 are formed based on three-dimensional phase grating beam splitting
Aperture segmentation THz spectrum imaging systems.The focal plane of above-mentioned preset lens 1 overlaps with the front focal plane of preposition collimating mirror 3；It is above-mentioned preposition to regard
Field diaphragm 2 is square, and positioned at the focal plane of preset lens 1, the area of its size and visual field and detector 9 matches；Above-mentioned rearmounted meeting
The focal plane of poly- mirror 5 overlaps with the front focal plane of rearmounted collimating mirror 7；Above-mentioned rearmounted field stop 6 is circular, positioned at rearmounted convergent mirror 5
Focal plane, its perforate size only allows the zero order diffracted light of grating to pass through.Above-mentioned preset lens 1, preposition collimating mirror 3, rearmounted convergence
Mirror 5, rearmounted collimating mirror 7, sub-aperture convergent mirror 8 are designed using the apochromatism of terahertz wave band.
The structure of above-mentioned Terahertz solid phase grating 4 is as shown in Figure of description 2, by the upper surface of cuboid metallic plate 12
A series of rectangular recess for carving flat smooths is formed, and the material of metallic plate is aluminium, iron, aluminium alloy or titanium alloy, and described is recessed
Groove bottom is parallel with the upper surface of cuboid metallic plate 12, and the depth of groove is respectively h1、h2、…、hN-1、hN, h1、h2、h3、…、
hN-2、hN-1、hN, sequentially increase, N is the number of cellular, and depth identical groove is considered as a cellular.
The maximum groove depth h of above-mentioned three-dimensional phase grating 4max, entered as the spectral resolution R required by design objective and light
Firing angle α is together decided on, and is met：
In formula, α represents incidence angle of the THz wave in three-dimensional phase grating surface, and R is the spectral resolution of system,
The number N of grating cellular meets：
In formula, σmaxThe maximum wave number of terahertz wave band used in expression；
Grating cellular introduce optical path difference be：
In formula, h represents the groove depth of grating cellular；
The three-dimensional phase grating formed for N number of cellular, the phase difference corresponding to i-th of grating cellular are：
Wherein hiThe groove depth of i-th of grating cellular is represented, N represents the cellular total number of three-dimensional phase grating.
The number n of cellular further groove meets:
In formula：σminThe smallest wavenumber of THz wave used in expression；
The dutycycle of grating：d:A ＞ 1, wherein d are screen periods, namely the width of grating cellular, a are groove groove width, and b is
The length of grating cellular, namely the flute length of groove.
The number and the number N of cellular in three-dimensional phase grating 4 of the sub-aperture of sub-aperture convergent mirror 8 are consistent；
Above-mentioned sub-aperture convergent mirror 8 includes a piece of silicon chip 13 and the N number of parameter identical rectangle sub-lens i being arranged on silicon chip1...,
iN, lenslet arrays are formed, as shown in Figure of description 2.
The form parameter of the rectangle sub-lens meets with the form parameter of grating cellular：
E=d × f2/f1；G=b × f2×cos(α)/f1 (6)
Wherein e represents rectangle sub-lens i1..., iNWidth, g represents rectangle sub-lens i1..., iNHeight, d represents three-dimensional
The width of the unit born of the same parents of phase grating 4, i.e., the screen periods of three-dimensional phase grating 4, b represent the length of the three-dimensional unit born of the same parents of phase grating 4, f1
Represent the focal length of rearmounted convergent mirror 5, f2The focal length of rearmounted collimating mirror 7 is represented, α represents THz wave in three-dimensional phase grating surface
Incidence angle.
N number of signal that above-mentioned detector control process system 10 gathers to detector 9 carries out parallel processing, extracts it respectively
Strength information, this N number of signal intensity and the optical path difference of the N number of cellular of three-dimensional phase grating form Fourier transform pairs；Above-mentioned control
The Fourier transform pairs that collecting computer 11 is formed to N groups data carries out Fourier transformation, you can the THz spectrum of target are obtained,
The superposition of THz spectrum can be obtained to the THz images of target.
The action principle of this patent is as follows：
The THz ripples that target is sent are collected by preset lens 1, and the space filtering through preposition field stop 2 is accurate by preposition collimating mirror 3
Directly, parallel incident Terahertz solid phase grating 4.Diffraction occurs for the parallel THz wave oblique incidence solid phase grating 4 of wide range, spreads out
Penetrate light to focus at lens focal plane by rearmounted convergent mirror 5 ,+1 order diffraction ripple, -1 order diffraction ripple and other higher levels are secondary to spread out
Ejected wave is filtered out by the rearmounted field stop 6 positioned at lens focal plane, and 0 order diffraction light of three-dimensional phase grating continues Free propagation,
It is parallel THz wave through rearmounted collimating mirror 7 collimation.
Due to cellular one, cellular two, cellular three ..., cellular N there is different groove depths, it is to incident THz wave
Different zones produce different phase-modulations, have the wavefront of regional corresponding with the N number of cellular of grating in 0 order diffraction ripple
There are different phase informations, therefore the parallel THz wave that 0 order diffraction ripple is obtained after rearmounted collimating mirror 7, its wavefront tool
There is N number of varying strength region, corresponded with the optical path difference of N number of cellular of three-dimensional phase grating 4.
The parallel THz wave collimated through rearmounted collimating mirror 7 is assembled by sub-aperture convergent mirror 8, and N number of focusing is produced in focal plane
Point is detected by detector 9, by the parallel processing for the detector control process system 10 being connected with detector 9, obtains and solid
The optical path difference of N number of cellular of phase grating 4 N number of intensity level correspondingly.Finally by control collecting computer 11 to obtaining
N groups optical path difference and light intensity data carry out Fourier transformation, obtain the THz spectrums of target, modal data be superimposed to the THz for obtaining target
Image.
The core of this patent is to be combined three-dimensional phase grating with aperture segmentation technology, while measures three-dimensional phase grating
The intensity signal of the zero order diffracted light of each cellular, the corresponding relation data of N groups optical path difference and light intensity is obtained, is become by Fourier
Change, obtain the THz spectrums and picture of target in real time.
Compared with prior art, the THz optical spectrum imagers based on three-dimensional phase grating and aperture segmentation technology have following
Advantage：First, compared with Fourier spectrometer and THz-TDS, based on the THz spectrum of three-dimensional phase grating and aperture segmentation technology into
As instrument can realize the real-time detection and imaging of target THz spectrums；2nd, the THz based on three-dimensional phase grating and aperture segmentation technology
Optical spectrum imagers carry out composing detection and imaging using the zero order diffracted light of grating, have the advantages of capacity usage ratio is high, applicable
In the real-time detection and imaging of weak signal；3rd, used based on three-dimensional phase grating and the THz optical spectrum imagers of aperture segmentation technology
Three-dimensional phase grating as light-splitting device, there is simple in construction, small volume, without moving parts the advantages of, be applicable to outdoor multiple
Miscellaneous changeable environment.
Brief description of the drawings
Fig. 1 is the principle schematic diagram of this patent.
Fig. 2 is three-dimensional phase grating structure schematic diagram.
Fig. 3 is sub-aperture image mirror structural representation.
Embodiment
Specific implementation of the patent example, such as Fig. 1, Fig. 2, shown in Fig. 3 are provided below in conjunction with the accompanying drawings.
THz optical spectrum imagers described in the present embodiment, by preset lens 1, preposition field stop 2, preposition collimating mirror 3, cubic phase
Position grating 4, rearmounted convergent mirror 5, rearmounted field stop 6, rearmounted collimating mirror 7, sub-aperture convergent mirror 8, detector 9, detector control
Processing system 10 processed and control acquisition process computer 11 form.
In order to ensure wide spectrum image quality and signal to noise ratio, preset lens 1, preposition collimating mirror 3, rearmounted convergent mirror 5, rearmounted standard
Straight mirror 7, sub-aperture convergent mirror 8 are designed using the apochromatism of terahertz wave band, are ensured in the range of full spectral coverage, monochromatic light dispersion
Circular diameter is less than detector list pixel dimension.
As shown in Figure 3,9 lenslets are bonded on a smooth silicon chip structure of sub-aperture convergent mirror 8.It is accurate to ensure
The spectrum and image information of target are obtained, the size of lens should be set in strict accordance with proportionate relationship.
The present embodiment uses following main devices：
1. preset lens 1：Material HDPE, focal length 600mm, bore 160mm.Preposition collimating mirror 3, rearmounted convergent mirror 5, rearmounted standard
Straight mirror 7：Material HDPE, focal length 300mm, bore 80mm.
2. three-dimensional phase grating 4：Cellular number 6, groove depth be followed successively by 0.1635cm, 0.327cm, 0.4905cm,
0.654cm、0.8175cm、0.981cm。
3. sub-aperture convergent mirror 8：The size 20mm*20mm of sub-lens, focal length 200mm.
4th, preposition aperture diaphragm 2：Pore size 15mm*15mm.Rearmounted field stop 6：Opening diameter 12mm.
The operation principle of the present embodiment is as described below：
The THz ripples that target is sent are collected by preset lens 1, and the space filtering through preposition field stop 2 is accurate by preposition collimating mirror 3
Directly, diffraction occurs for parallel incident Terahertz solid phase grating 4, and diffraction light gathers by rearmounted convergent mirror 5 at lens focal plane
Jiao, the secondary diffracted wave of+1 order diffraction ripple, -1 order diffraction ripple and other higher levels is by the rearmounted field stop 6 positioned at lens focal plane
Filter out, 0 order diffraction light of three-dimensional phase grating continues Free propagation, is parallel THz wave through rearmounted collimating mirror (7) collimation, warp
The parallel THz wave that rearmounted collimating mirror 7 collimates is assembled by sub-aperture convergent mirror 8, and 6 focus points are produced by detector 9 in focal plane
Detection, by the parallel processing for the detector control process system 10 being connected with detector 9,6 intensity levels are obtained, with cubic phase
The optical path difference of 6 cellulars of position grating 4 corresponds.Finally by control collecting computer 11 to 6 groups of optical path differences of acquisition with
Light intensity data carries out Fourier transformation, obtains the THz spectrums of target, modal data is superimposed to the THz images for obtaining target.
Claims (4)
1. a kind of THz optical spectrum imagers based on three-dimensional phase grating and aperture segmentation technology, including be made up of too N number of cellular
The three-dimensional phase grating (4) of hertz, and preset lens (1), the detector (9) being arranged in order according to optic path, the detector
(9) detector control process system (10) and control acquisition process computer (11) are also connected with turn, it is characterised in that：
Preset lens (1) that described THz optical spectrum imagers are arranged in order according to optic path, preposition field stop (2), preposition standard
Straight mirror (3), three-dimensional phase grating (4), rearmounted convergent mirror (5), rearmounted field stop (6), rearmounted collimating mirror (7), sub-aperture meeting
Poly- mirror (8), detector (9), the detector (9) are connected with detector control process system (10) and control acquisition process in turn
Computer (11)；
The preposition collimating mirror (3), three-dimensional phase grating (4), rearmounted convergent mirror (5), rearmounted field stop (6), rearmounted collimation
Mirror (7), sub-aperture convergent mirror (8) composition aperture segmentation THz light spectrum image-forming optical systems；The focal plane of the preset lens (1) is with before
The front focal plane for putting collimating mirror (3) overlaps；The preposition field stop (2) is square, the focal plane positioned at preset lens (1), its size
Match with the area of visual field and detector (9)；The focal plane of the rearmounted convergent mirror (5) and the front focal plane of rearmounted collimating mirror (7)
Overlap；The rearmounted field stop (6) is circular, and the focal plane positioned at rearmounted convergent mirror (5), its perforate size only allows grating
Zero order diffracted light passes through；
The detector (9) obtains target scene by the N number of cellular institute diffraction of three-dimensional phase grating (4) simultaneously in a manner of aperture segmentation
N number of zero order diffracted light intensity signal, N is positive integer, and N value meets：
<mrow>
<mi>N</mi>
<mo>&GreaterEqual;</mo>
<mfrac>
<mrow>
<mn>4</mn>
<msub>
<mi>h</mi>
<mrow>
<mi>m</mi>
<mi>a</mi>
<mi>x</mi>
</mrow>
</msub>
<msub>
<mi>&sigma;</mi>
<mrow>
<mi>m</mi>
<mi>a</mi>
<mi>x</mi>
</mrow>
</msub>
</mrow>
<mrow>
<mi>cos</mi>
<mrow>
<mo>(</mo>
<mi>&alpha;</mi>
<mo>)</mo>
</mrow>
</mrow>
</mfrac>
</mrow>
In formula：Above-mentioned hmaxFor the maximum groove depth of three-dimensional phase grating (4), α represents THz wave in three-dimensional phase grating surface
Incident angle α is angle of incidence of light, σmaxThe maximum wave number of terahertz wave band used in expression；The detector control process system
(10) parallel processing is carried out to N number of signal of detector (9) collection, while extracts its strength information；The control collection calculates
The Fourier transform pairs that machine (11) is formed to N number of intensity and corresponding light path difference data carries out Fourier transformation, you can obtains mesh
Target THz spectrum, the superposition of THz spectrum can be obtained to the THz images of target.
2. the THz optical spectrum imagers according to claim 1 based on three-dimensional phase grating and aperture segmentation technology, its feature
It is：The sub-aperture convergent mirror (8) includes a piece of silicon chip (13) and the series of parameters identical rectangle being arranged on silicon chip
Sub-lens are formed；The number of rectangle sub-lens and grating cellular in three-dimensional phase grating (4) in the sub-aperture convergent mirror (8)
Number N is consistent, i.e., the number of rectangle sub-lens is N in sub-aperture convergent mirror (8)；Rectangle sub-lens (the i1..., iN)
The form parameter of form parameter and grating cellular meet：
E=d × f2/f1；G=b × f2×cos(α)/f1
Wherein e represents rectangle sub-lens (i1..., iN) width, g represents rectangle sub-lens (i1..., iN) height, d represent cubic phase
The screen periods of position grating (4), b represent the length of three-dimensional phase grating (4) unit born of the same parents, f1The focal length of rearmounted convergent mirror (5) is represented,
f2The focal length of rearmounted collimating mirror (7) is represented, α represents incidence angle of the THz wave in three-dimensional phase grating surface.
3. the THz optical spectrum imagers according to claim 1 based on three-dimensional phase grating and aperture segmentation technology, its feature
It is：The detector (9) applies to the multi-element surface array detector of terahertz wave band, and the pixel number of detector must be son
The integral multiple of rectangle sub-lens number N in aperture convergent mirror (8).
4. the THz optical spectrum imagers according to claim 1 based on three-dimensional phase grating and aperture segmentation technology, its feature
It is：The preset lens (1), preposition collimating mirror (3), rearmounted convergent mirror (5), rearmounted collimating mirror (7), sub-aperture convergent mirror (8)
Using the optical lens designed through apochromatism of terahertz wave band.
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| CN108444913A (en) * | 2018-01-30 | 2018-08-24 | 中国科学院上海技术物理研究所 | Based on unit born of the same parents' solid phase grating and mutually with reference to the THz spectrometers of technology |
| CN108489930A (en) * | 2018-01-30 | 2018-09-04 | 中国科学院上海技术物理研究所 | Passive type THz spectrometers based on unit born of the same parents' solid phase grating |
| CN109141635B (en) * | 2018-07-23 | 2023-12-12 | 南京邮电大学 | Imaging spectrometer and hyperspectral imaging method thereof |
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| CN109708757B (en) * | 2018-12-11 | 2022-02-08 | 南京邮电大学 | Imaging spectrometer based on scattering effect and high spatial resolution spectral imaging method |
| CN109946750B (en) * | 2019-03-29 | 2023-12-26 | 中国科学院上海技术物理研究所 | Spectrum-configurable infrared and terahertz multispectral composite detection imaging device |
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| KR101721455B1 (en) * | 2009-08-11 | 2017-04-10 | 코닌클리케 필립스 엔.브이. | Multi-spectral imaging |
| JP5768429B2 (en) * | 2011-03-23 | 2015-08-26 | セイコーエプソン株式会社 | Terahertz wave detection device, terahertz wavelength filter, imaging device, and measurement device |
| CN105675131B (en) * | 2016-01-13 | 2018-03-27 | 南京邮电大学 | THz wave spectrometry device and its measuring method based on diffraction effect |
| CN106125176B (en) * | 2016-07-11 | 2018-06-26 | 中国科学院上海技术物理研究所 | A kind of one-dimensional three-dimensional phase grating of Terahertz |
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