CN108444913A - Based on unit born of the same parents' solid phase grating and mutually with reference to the THz spectrometers of technology - Google Patents
Based on unit born of the same parents' solid phase grating and mutually with reference to the THz spectrometers of technology Download PDFInfo
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- CN108444913A CN108444913A CN201810091018.5A CN201810091018A CN108444913A CN 108444913 A CN108444913 A CN 108444913A CN 201810091018 A CN201810091018 A CN 201810091018A CN 108444913 A CN108444913 A CN 108444913A
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- 238000001328 terahertz time-domain spectroscopy Methods 0.000 description 2
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
- G01N21/3586—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation by Terahertz time domain spectroscopy [THz-TDS]
Abstract
The invention discloses a kind of based on unit born of the same parents' solid phase grating and mutually with reference to the THz spectrometers of technology, and spectrometer includes Terahertz light source, preposition convergent lens, preposition field stop, collimating mirror, unit born of the same parents' solid phase grating, postposition convergent lens, sample room, detector, detector control process system, control acquisition process computer.The unit born of the same parents solid phase grating uses special single structure cell, by controlling groove depth, introduce additional optical distance, phase-modulation is carried out to diffraction THz wave, the energy of diffraction THz wave is set to concentrate on ± 1 grade, the mutual test for recycling ± 1 order diffraction light efficiently and in real time to obtain background spectra and bias light measured target transmission or reflection with reference to technology is composed, the spectrum that phase-modulation is brought is eliminated by normalization technology again and is distorted situation, by mutually obtaining final sample transmission or reflectance spectrum with reference to technology.The spectrometer can real-time, the full terahertz wave band of effective acquisition measured target spectral information.
Description
Technical field
The present invention relates to a kind of tera-hertz spectra measuring instruments, and in particular to it is a kind of can in real time, effective acquisition measured target
The tera-hertz spectra measuring instrument of terahertz light spectrum information.The THz optical spectrum instrumentations by Terahertz light source, preposition convergent lens,
Preposition field stop, collimating mirror, unit born of the same parents' solid phase grating, postposition convergent lens, postposition aperture diaphragm, sample room, left line
Array detector, empty room, right linear array detector, left linear array detector control process system, right linear array detector control process system
With control acquisition process computer, electric rotating machine, guide rail composition.The unit born of the same parents solid phase grating uses special unit
Born of the same parents' structure introduces additional optical distance, carries out phase-modulation to diffraction THz wave, make diffraction THz wave by controlling groove depth
Energy concentrates on ± 1 grade, and the detector recycles ± 1 order diffraction light beam, real by normalizing technology and mutually referring to technology
When obtain measured target spectral information.The spectrometer can be real-time, the full terahertz wave band of effective acquisition measured target
Spectral information is suitable for the related fields such as terahertz light spectrometry analysis.
Background technology
THz wave refers to electromagnetic wave of the frequency in 0.1THz to 10THz ranges, corresponding photon energy 0.38meV
To 38meV, the turning of corresponding molecule or molecular radical, between vibration level photon transition.The Terahertz radiated by detecting material
Spectrum is capable of providing the basic structure information of substance, so the vibration of multipolarity molecule, rotational frequency, the basis of drug and
The mechanism of action, the low energy exciting phenomena of electronic material, the phonon of solid material, magnon, plasmon and fluid molecule
Vibrate equal excitation phenomenon.
At this stage, there are mainly two types of the detection instruments of terahertz wave band, far infrared Fourier transform spectrometer, and terahertz
Hereby time-domain spectroscopy instrument.Far infrared Fourier transform spectrometer, is based on Fourier Transform Technique and realizes spectrographic detection, has mostly logical
Road, high-throughput advantage, but Fourier spectrometer completes the sequential scanning that spectral line measurement relies on index glass, it cannot be in real time at spectrum；Its
Secondary, basic system of the Fourier spectrometer based on Michelson's interferometer, wherein beam splitter make incident THz wave be lost
50%, limit use of the instrument in signal detection；Third, due to the presence of moving component, Fourier trasform spectroscopy
Instrument has that high energy consumption, service life are shorter.
Terahertz time-domain spectroscopy instrument is based on photoconductive antenna or electro-optic sampling to the detection of THz wave.To object at
When picture, terahertz time-domain spectroscopy instrument needs to complete the scanning of wavelength peacekeeping space dimension, needs to take a substantial amount of time, Wu Fada
To in real time at the high request of spectrum.
In the patent document of Patent No. 201710037295.3, describes and a kind of utilizing three-dimensional phase grating and hole
The static Fourier transform spectrometer that diameter cutting techniques are realized, this spectrometer have capacity usage ratio height and real time imagery
Feature.But the neck being applicable in using the static Fourier transform spectrometer that three-dimensional phase grating and aperture segmentation technology are realized
Domain is different；Its application field is the imaging and detection of remote faint terahertz signal, is not suitable for the spectrum analysis of substance.
The shortcomings that prior art major embodiment in the following areas：First, the prior art is all unable to reach wants at spectrum in real time
It asks；Secondly, the problems such as Fourier transform spectrometer, is due to volume, the light loss of beam splitting chip and the movement of swing arm, terahertz time-domain
The spectrum that the problems such as spectrometer is due to imaging time cannot be satisfied the substance under environment complicated and changeable obtains work.
Invention content
For the above-mentioned deficiency of the prior art, the present invention provides one kind to be joined based on unit born of the same parents' solid phase grating and mutually
The THz spectrometers of technology are examined, tera-hertz spectra detection, analysis are suitable for.
Technical scheme is as follows：
It is arranged successively based on unit born of the same parents' solid phase grating and mutually with reference to the THz spectrometers of technology, including foundation optic path
The Terahertz light source 1 of row, preposition convergent lens 2, preposition field stop 3, collimating mirror 4, unit born of the same parents' solid phase grating 5, postposition
Convergent lens 6, postposition aperture diaphragm 7, the left linear array detector for being placed in sample room 8 on electric rotating machine 15, being placed on guide rail 16
10, empty room 9, right linear array detector 11, the left linear array detector 10 and right linear array detector 11 are also connected with detector in turn
Control process system 12,13 and control acquisition process computer 14, based on unit born of the same parents' solid phase grating and mutually with reference to technology
Transmission or reflection pattern work may be selected in THz spectrometers, and in a reflective mode enabling, being placed in sample room 8 on electric rotating machine 15 can lead to
The whole reflection spectral position of overwinding modulation, left linear array detector 10 can be moved on track 16 to be adapted to reflection spectral position, such as specification
Shown in attached drawing 1.The back focal plane of above-mentioned preposition convergent mirror 2 is overlapped with the front focal plane of collimating mirror 4；Above-mentioned field stop 3 be it is rectangular,
Positioned at the focal plane of preposition collimating mirror 2, the area phase of size and visual field and left linear array detector 10 and right linear array detector 11
Match；In a transmissive mode, the back focal plane phase of above-mentioned left linear array detector 10 and right linear array detector 11 and postposition convergent lens 6
It overlaps.In a reflective mode enabling, left linear array detector 10 and the back focal plane picture formed by 8 front surface of sample room of postposition convergent lens 6
Face position overlaps.Above-mentioned preposition convergent lens 2, collimating mirror 4, postposition convergent lens 6 are all made of the multiple colour killing of terahertz wave band
Difference design.
It is described based on unit born of the same parents' solid phase grating and mutually refer to technology THz spectrometers, utilize unit born of the same parents' solid phase
Grating 5 substantially reduces the body of the optical spectrum instrumentation instead of the Michelson formula interferometer structure in Fourier spectrometer
Product, and the abrasion of the movement without swing arm, have longer service life, have the characteristics of miniaturization, long-life.
The structure of said units born of the same parents' solid phase grating 5 as shown in Figure of description 2, material be aluminium, iron, aluminium alloy or
Titanium alloy, the groove floor is parallel with the upper surface of cuboid metallic plate, and the depth of groove is h, and the number of groove is n.
Compared with the three-dimensional phase grating in the file of Patent No. 201620721539.0, unit born of the same parents' solid phase grating uses
The groove depth of special single structure cell, i.e., all rectangular recess is identical, and determines depth of groove by the centre frequency of light source.
The unit born of the same parents solid phase grating 5 can regard a series of zero light paths being arranged alternately as to the modulating action of light
Poor plane andPhase difference plane, the screen function of the unit born of the same parents solid phase grating 5 is as shown in (1) formula：
Wherein, a is the groove width of groove, and d is grating constant, by grating diffration equation
D (sin θ-sin α)=m λ (2)
θ is the angle of diffraction of diffraction light, and α is the incidence angle of light.
△ be ± 1 order diffraction light in groove surface and grating upper surface the optical path difference in diffraction direction, have
It is 1 to enable the duty ratio of grating:1, i.e.,
D/a=2
When incident light wave is plane wave, if its amplitude is 1, then after grating, spatial distribution is
U (u, v)=F { u (x, y) }=F { t (x, y) } (5)
Wherein, u and v is respectively the transverse and longitudinal coordinate of image planes.
After bringing (1) formula into (5) formula, abbreviation can obtain
Wherein,Z is distance of the image planes to grating face.
M grades of diffraction light amplitude is
Wherein,
M grades of diffraction efficiency is
± 1 order diffraction efficiency is
For unit born of the same parents' solid phase grating 5, diffraction light energy is concentrated mainly on 0 grade and ± 1 grade, Ke Yitong
It crosses and chooses specific h the energy of diffraction light is enabled to focus primarily upon on ± 1 order diffraction light, realize very high capacity usage ratio, work as h
When (10) the formula relationship of satisfaction, frequency v0Light ± 1 order diffraction light diffraction efficiency be 1：
According to (3) formula and (4) formula, when light oblique incidence, in order to make ± 1 order diffraction light reach identical modulation efficiency,
H need to meet relationship：
In order to make diffraction efficiency reach maximum, h need to be in the h of satisfaction (11) formula relationshipprimaryMiddle selection is wherein so that light path
Hs of the poor △ as close possible to integerprimary.That is the groove depth h of the unit born of the same parents solid phase grating 5, by the centre frequency of light source
v0Angle of incidence of light α is codetermined, and is met：
The number n of 5 further groove of unit born of the same parents solid phase grating meets：
Wherein：σmax、σminMaximum wave number, the smallest wavenumber of terahertz wave band used are indicated respectively.
In unit born of the same parents' solid phase grating 5, the groove width a of groove meets the λ of a >=10max, the duty ratio of grating meets d/a ＞
1, the length l of slot is at least maximum wavelength λmax100 times.
It is described mutual with reference to technology, that is, it utilizes ± 1 grade of spectrum of diffraction light to exist simultaneously and be distributed identical feature, passes through
Sample is placed in ± 1 grade certain level-one and forms test spectral, and empty room damping capacity is placed at another grade and is formed with reference to bias light
Spectrum can be obtained the spectral information of sample by comparing the corresponding energy difference of same frequency in two spectrum.
It is described mutual with reference to technology, the detection of reference spectra and test spectral, no testing background ginseng respectively can be carried out at the same time
The environment that spectrum is brought with test spectral is examined, error caused by temperature and time variation can obtain high-precision transmitted photons
Spectrum or reflectance spectrum；Also, it is described it is mutual with reference to technology due to without measuring carrying out background spectrum after sample test spectrum,
Greatly shorten the acquisition time of transmitted photons spectrum or reflectance spectrum.For these reasons, the mutual technology that refers to makes based on single
Cellular solid phase grating and the THz spectrometers for mutually referring to technology disclosure satisfy that the spectral measurement requirement under complex environment.
The mutual reference technology filters out non-± 1 order diffraction stray light by postposition aperture diaphragm 7, obtains efficient ± 1
Order diffraction light path, the trepanning peak e of either side thang-kng hole sitemax, minimum point eminWith from postposition convergent lens 6 away from
It is respectively required for meeting following relationship from R：
Wherein, θ is+1 order diffraction light and 0 order diffraction light angle, θmaxFor the maximum value of the angle, θminMost for the angle
Small value, υmaxFor the maximum frequency of incident THz wave, υminFor the minimum frequency of incident THz wave, d is grating constant, and α is
The incidence angle of parallel THz wave incidence unit born of the same parents' solid phase grating 5, β are three-dimensional phase grating 5 and postposition convergent lens 6
Angle, D is that light beam is irradiated to the bore on three-dimensional phase grating 5, and s is three-dimensional phase grating 5 to postposition convergent lens 6
Distance, f are the focal length of postposition convergent lens 6.
Treated sample should be placed in the sample room 8, in a transmissive mode, sample should be processed into front and rear surfaces
The roughness Ra of the preferable sample strip of the depth of parallelism, sample strip surface should meet (19) formula：
± 1 order diffraction light reinforced by the interference of unit born of the same parents' solid phase grating 5 is due to same order of interference different frequency
Light by interference modulations when corresponding optical path difference it is different, it is corresponding when the light of different order of interference same frequencies is by interference modulations
Optical path difference is different, and with test spectrum there are problem of dtmf distortion DTMF, which is corrected obtained background spectra by the normalization technology,
Being multiplied by normalization coefficient by the respective frequencies energy datum of background spectra and test spectrum to obtaining can eliminate, the normalization system
Number is related to incident angle α and the corresponding frequency υ of the energy datum：
In formula ,+1 corresponds to+1 order diffraction light, and -1 corresponds to -1 order diffraction light, and α is that parallel THz wave incidence unit born of the same parents are three-dimensional
The incidence angle of phase grating 5, υ are the corresponding frequency of the energy datum, and h is the unit born of the same parents' solid being calculated by (12) formula
The groove depth of phase grating 5.
The action principle of the present invention is as follows：
It is described based on unit born of the same parents' solid phase grating and mutually with reference to technology THz spectrometers have transmission-type with it is reflective
Two kinds of operating modes, under transmissive operation pattern, left linear array detector 10 is located at initial position, left line with electric rotating machine 15
10 front surface of array detector is each perpendicular to 6 optical axis of postposition convergent lens with sample front surface in sample room 8, and after lens
Position of focal plane.In this operating mode, the parallel THz waves of terahertz emission source radiation are collected by preset lens 2, through preposition visual field
The space filtering of diaphragm 3 is collimated by preposition collimating mirror 4, and diffraction, diffraction occurs after parallel incidence unit born of the same parents' solid phase grating 5
Light is focused by postposition convergent lens 6 at lens focal plane, other diffraction lights in addition to ± 1 order diffraction wave are by postposition hole
Diameter diaphragm 7 filters out, and+1 order diffraction light is detected after penetrating sample room 8 by left linear array detector 10, and -1 order diffraction light passes through empty room 9
It is detected by right linear array detector 11 after decaying.Under reflective operation pattern, electric rotating machine 15 adjusts sample room 8 by rotation
Angle is to adjust reflection spectral position, and left linear array detector 10 adjusts position on track 16 until left linear array detector 10 is with after
The back focal plane image planes position formed by 8 front surface of sample room of convergent lens 6 is set to overlap.In this operating mode ,+1 order diffraction light
It is detected by left linear array detector 10 after being reflected through sample room 8, -1 order diffraction light is detected after the decaying of empty room 9 by left linear array
Device 11 detects.
Since ± 1 order diffraction wave of 5 diffraction of unit born of the same parents' solid phase grating has identical spatial distribution, lead to
Cross the Strength Changes of ± 1 order diffraction wave of comparison, you can obtain the Terahertz spectrum of measured target.
Core of the invention is unit born of the same parents solid phase grating technology passing through comparison with being mutually combined with reference to technology
The energy variation of ± 1 order diffraction wave respective frequencies is obtained, obtains the Terahertz spectrum information of measured target in real time.
Compared with prior art, have with reference to the Terahertz spectrometry instrument of technology based on unit born of the same parents' solid phase grating and mutually
It has the advantage that：One, compared with existing Fourier spectrometer and THz-TDS technologies, based on unit born of the same parents' solid phase grating and
Mutually there is high capacity usage ratio with reference to the Terahertz spectrometry instrument of technology, the spectrographic detection of small-signal can be met.Two,
Compared with prior art, based on unit born of the same parents' solid phase grating and mutually with reference to the Terahertz spectrometry instrument of technology using static state
Grating beam splitting principle, the error that no traverse measurement is brought have longer service life, and without Michelson interference formula structure,
Has the characteristics that miniaturization, suitable for being used under various complex environments.Three, compared with prior art, it is based on unit born of the same parents' cubic phase
Position grating and the Terahertz spectrometry instrument for mutually referring to technology measure reference background spectrum and test spectral simultaneously, without at twice
It carries out, greatly shortens the acquisition time of transmitted photons or reflectance spectrum.Four, compared with Fourier spectrometer and THz-TDS,
Have to object in real time at the function of spectrum based on unit born of the same parents' solid phase grating and mutually with reference to the Terahertz spectrometry instrument of technology,
The error that the upper environmental change of no time is brought, has high accuracy rate.
Description of the drawings
Fig. 1：Based on unit born of the same parents' solid phase grating and mutually with reference to the THz spectrometer schematic diagrames of technology.
Fig. 2：Unit born of the same parents' solid phase grating schematic diagram.
Specific implementation mode
1 the present invention is further described with reference to the accompanying drawings of the specification.
As shown in Figure of description 1, based on unit born of the same parents' solid phase grating and mutually with reference to the THz spectrometers of technology, including
According to the Terahertz light source 1 that optic path is arranged in order, preposition convergent lens 2, preposition field stop 3, collimating mirror 4, unit born of the same parents
Three-dimensional phase grating 5, postposition aperture diaphragm 7, is placed in sample room 8 on electric rotating machine 15, is placed in guide rail 16 postposition convergent lens 6
On left linear array detector 10, empty room 9, right linear array detector 11, left linear array detector control process system 12, right linear array visit
Survey device control process system 13 and control acquisition process computer 14.
Embodiment 1：Mutual reference light spectrometer for 400GHz -435GHz wave bands
The present invention is used using following construction：
1. using transmissive operation pattern.
2. using commercial customization 400GHzIMPATT THz sources, bandwidth 50GHz.
3. the angle of plane is less than 0.5 ° where sample front and rear surfaces, sample roughness Ra<2μm.
4. the material of convergent lens used in is HDPE (high density polyethylene (HDPE)), wherein preposition convergent lens 2, collimating mirror 4,
The focal length of postposition convergent lens 6 is 300mm, bore 80mm.
5. the angle of light beam incidence unit born of the same parents' solid phase grating 5 is 45 °.
6. postposition convergent lens 6 and 5 angle of unit born of the same parents' solid phase grating are 45 °.
7. one-dimensional 5 groove depth of unit born of the same parents solid phase grating of Terahertz is 1.4846733cm.
8. the number of the groove width 1cm of unit born of the same parents' solid phase grating 5, screen periods 2cm, slot are 5, the length of slot is
80cm。
9. the distance of 6 range cell born of the same parents' solid phase grating of postposition convergent lens is 100mm.
10. 3 trepanning size 15mm*15mm of preposition field stop, postposition aperture diaphragm 7 apart from postposition convergent lens 6 away from
From for 250mm, the upper edge of either side is in 20mm, and lower edge is in 7mm.
The present invention main working process be：
1 carries out the depth of parallelism to test sample first is handled with roughness, and is placed into 8 initial position of sample room；
2 select Terahertz light source 1 according to measure spectrum range is intended to；
3 selected operating modes, and sample room 8 and 10 position of left linear array detector are adjusted by electric rotating machine 15；
4 open Terahertz light source 1, start to measure；
5 through left linear array detector control process system 12, right linear array detector control process system 13 and control acquisition at
What reason computer 14 was handled obtains the transmission spectrum or reflectance spectrum of sample.
Main operational principle of the present invention such as Figure of description 1 is illustrated：
After selected operating mode, the parallel THz wave that Terahertz light source 1 radiates is collected through preposition convergent lens 2, before menstruation
It is collimated by preposition collimating mirror 4 after setting the space filtering of field stop 3, diffraction occurs for incident unit born of the same parents solid phase grating 5, spreads out
Light is penetrated after postposition convergent lens 6 by postposition aperture diaphragm 7 and the stray light in addition to ± 1 order diffraction light, ± 1 order diffraction light
It is visited respectively by left linear array detector 10 and right linear array detector 11 after the transmission of sample room 8 (or reflection) and empty room 9 decay
It surveys, most afterwards through left linear array detector control process system 12, right linear array detector control process system 13 and control acquisition process
The processing of computer 14 obtains the transmission spectrum or reflectance spectrum of sample.
Claims (4)
1. it is a kind of based on unit born of the same parents' solid phase grating and mutually refer to technology THz spectrometers, it include according to optic path according to
The Terahertz light source (1) of secondary arrangement, preposition convergent lens (2), preposition field stop (3), collimating mirror (4), unit born of the same parents' cubic phase
Position grating (5), postposition convergent lens (6), postposition aperture diaphragm (7), sample room (8), left linear array detector (10), empty room (9),
Right linear array detector (11), left linear array detector (10) and right linear array detector (11) are also connected with left linear array detector control in turn
Processing system (12), right linear array detector control process system (13) and control acquisition process computer (14) processed, feature exists
In：
The described THz spectrometers are arranged in sequence with Terahertz light source (1) according to optic path, and preposition convergent lens (2) preposition regards
Field diaphragm (3), collimating mirror (4), unit born of the same parents' solid phase grating (5), postposition convergent lens (6), postposition aperture diaphragm (7), sample
Product room (8), left linear array detector (10), empty room (9), right linear array detector (11), left linear array detector (10) are connected with left line
Array detector control process system (12), right linear array detector (11) are connected with right linear array detector control process system (13)；
Left linear array detector control process system (12) and right linear array detector control process system (13) calculate with control acquisition process
Machine (14) is connected；
Transmission or reflection pattern work may be selected in the THz spectrometers, and in a transmissive mode, electric rotating machine (15) is located at initial
Position, sample room (8) front surface and postposition convergent lens (6) optical axis are perpendicular, and left linear array detector (10) is in guide rail (16)
Initial position coincides with postposition convergent lens (6) back focal plane；In a transmissive mode, Terahertz light source (1) radiation it is parallel too
Hertz wave is collected through preposition convergent lens (2), and the space filtering through preposition field stop (3) is collimated by preposition collimating mirror (4), is put down
Diffraction occurs for row incidence unit born of the same parents' solid phase grating (5), and diffraction light is after postposition convergent lens (6) by postposition aperture diaphragm
(7) stray light in addition to ± 1 order diffraction light is filtered off, ± 1 order diffraction light is decayed by sample room (8) transmission and empty room (9) respectively
It is detected respectively by left linear array detector (10) and right linear array detector (11) afterwards, most afterwards through left linear array detector control process system
(12), right linear array detector control process system (13) and control acquisition process computer (14) normalized and mutual reference portion
Reason obtains the transmission spectrum of sample；
In a reflective mode enabling, electric rotating machine (15) adjusts sample room (8) angle to adjust reflection spectral position, left linear array by rotation
Position is adjusted on guide rail (16) for detector (10) until left linear array detector (10) and postposition convergent lens (6) are by sample room
(8) back focal plane image planes position formed by front surface overlaps；In a reflective mode enabling, ± 1 order diffraction light is anti-by sample room (8) respectively
It penetrates after decaying with empty room (9) and is detected respectively by left linear array detector (10) and right linear array detector (11), most visited afterwards through left linear array
Survey device control process system (12), right linear array detector control process system (13) and control acquisition process computer (14) normalizing
Change processing and obtains the reflectance spectrum of sample with mutual reference process.
2. the THz spectrometers for based on unit born of the same parents' solid phase grating and mutually referring to technology according to right 1, feature exists
In the unit born of the same parents solid phase grating (5) is modulated ± 1 order diffraction interference of light by depth of groove h and reinforced, depth of groove h
With the centre frequency υ of light source0, incident angle α meets relational expression：
The groove depth h of the i.e. described unit born of the same parents solid phase grating (5), by the centre frequency v of light source0Angle of incidence of light α is codetermined,
Meet：
Wherein, c is the light velocity, and d is grating constant, and α is the incidence of parallel THz wave incidence unit born of the same parents' solid phase grating (5)
Angle, hprimaryTo make centre frequency v0The identical groove depth array of ± 1 order diffraction light modulation effect, h be groove depth array in so that
Modulate the best groove depth data of stiffening effect.
3. the THz spectrometers for based on unit born of the same parents' solid phase grating and mutually referring to technology according to right 1, feature exists
In the trepanning peak e of postposition aperture diaphragm (7) either side thang-kng hole sitemax, minimum point eminWith from postposition convergent lens
(6) distance R is respectively required for meeting following relationship：
Wherein, θ is+1 order diffraction light and 0 order diffraction light angle, θmaxFor the maximum value of the angle, θminFor the minimum of the angle
Value, υmaxFor the maximum frequency of incident THz wave, υminFor the minimum frequency of incident THz wave, d is grating constant, and α is flat
The incidence angle of row THz wave incidence unit born of the same parents' solid phase grating (5), β are three-dimensional phase grating (5) and postposition convergent lens
(6) angle, D are that light beam is irradiated to the bore on three-dimensional phase grating (5), and s is that three-dimensional phase grating (5) is saturating to postposition convergence
The distance of mirror (6), f are the focal length of postposition convergent lens (6).
4. the THz spectrometers for based on unit born of the same parents' solid phase grating and mutually referring to technology according to right 1, feature exists
In the method for described control acquisition process computer (14) normalized is as follows：The normalized is i.e. to corresponding frequency
Rate energy datum is multiplied by normalization coefficient, and the normalization coefficient is related to incident angle α and the corresponding frequency υ of the energy datum：
In formula ,+1 corresponds to+1 order diffraction light, and -1 corresponds to -1 order diffraction light, and α is parallel THz wave incidence unit born of the same parents' solid phase
The incidence angle of grating (5), υ are the corresponding frequency of the energy datum, and h is the groove depth of unit born of the same parents' solid phase grating (5).
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