CN106525235A - Chip type spectral imaging system - Google Patents
Chip type spectral imaging system Download PDFInfo
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- CN106525235A CN106525235A CN201610871427.8A CN201610871427A CN106525235A CN 106525235 A CN106525235 A CN 106525235A CN 201610871427 A CN201610871427 A CN 201610871427A CN 106525235 A CN106525235 A CN 106525235A
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- blaze angle
- concave mirror
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- 238000000701 chemical imaging Methods 0.000 title abstract description 5
- 238000001228 spectrum Methods 0.000 claims abstract description 35
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- 238000003384 imaging method Methods 0.000 claims description 20
- 102100025490 Slit homolog 1 protein Human genes 0.000 claims description 11
- 101710123186 Slit homolog 1 protein Proteins 0.000 claims description 11
- 238000005516 engineering process Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 6
- 230000001413 cellular effect Effects 0.000 claims description 5
- 238000010276 construction Methods 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 3
- 230000003595 spectral effect Effects 0.000 abstract description 8
- 230000003287 optical effect Effects 0.000 abstract description 6
- 230000010354 integration Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 10
- 238000005259 measurement Methods 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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- 238000005286 illumination Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
The invention discloses a chip type spectral imaging system which belongs to the spectral imaging field. The system consists mainly of an incident silt 1, a recessed surface reflection lens 2, a blaze angle fine-tuning type programmable raster 3, a recessed surface reflection lens 4, a surface array detector 5, an upper base 6, a middle layer 7, and a lower base 8. The system also integrates the front arranged optical path, light splitting, back arranged optical path and measuring functions to solve the problem that changes cannot be made according to actual application requirement in real time due to the factors like the large size and mass of an existing system and the fixed distribution of spectral energy. In the invention, a blaze angle fine-tuning type programmable raster is used as a light splitting component. Through the adjustment of the drive voltage, programmable control can be accomplished for the blaze angle to further control the diffracted spectra. When used in the spectral imaging system, the blaze angle fine-tuning type programmable raster can realize spatial modulation to the spectra, and at the same time, the integration of the single sheets of the drive control circuit and the light splitting component greatly narrows the size and reduces the weight of the system, greatly cutting the cost and making the system widely applied in the aerospace field.
Description
Art
The invention belongs to light spectrum image-forming field, relates generally to MEMS (MEMS) technology, silicon micromachining technology, imaging
Technology, spectral technique etc..
Prior art
Spectral imaging technology combines imaging technique and spectral technique, can be in the two-dimensional space scene information for obtaining target
While obtain the one-dimensional spectral information for characterizing its physical property and state, so as to reach the purpose of effectively identification target,
Remote sensing, target identification, medical imaging, differentiate that the field tool such as false proof is widely used.
In traditional spectrum imaging system, the beam splitter of its core mainly has grating, prism, filter wheel etc., can be real
The now selection to specific band.However, grating, prism and filter wheel are respectively necessary for by Tui Sao mechanisms or extra rotating mechanism
The light spectrum image-forming to target is completed, the rather voluminous of whole system, weight is also increased considerably using these methods, no
And use in particular cases compact beneficial to space structure.In recent years, with MEMS
(Microelectromechanical systems, MEMS) technology is developed rapidly, make to be provided simultaneously with preposition light path, light splitting,
The Single-Chip Integration spectrum imaging system of the functions such as rearmounted light path, measurement is possibly realized.Integrated light splitting, rearmounted light path, measurement work(
Can integrated spectrum imaging system it has been reported that but no preposition light path, and need hand assembled, light path debugging is difficult, time-consuming,
High cost, such as N.Neumann et al. propose LONG WAVE INFRARED enamel amber wave filter (IEEE Sensors-vol.2383,2010)；And
Other integrated spectrometers having been developed that, the beam splitter which adopts are traditional type grating, not with the tunable ability of spectrum,
And mainly for the curve of spectrum measure, such as T.Pugner et al. propose near-infrared micro spectrometer (Proc.SPIE,
vol.8167,816718,2011)。
The content of the invention
The purpose of the present invention is：A kind of chip type spectrum imaging system is proposed, while integrated preposition light path, light splitting, rearmounted
Light path and measurement function, are that solve caused by the factors such as existing system volume and quality are big, spectral power distribution is fixed cannot be with
The situation that real-time application is required and changed.
With reference to Fig. 1, integrated spectrum imaging system proposed by the present invention mainly include entrance slit 1, concave mirror 2,
Blaze angle is adjustable micro programmable gratings 3, concave mirror 4, planar array detector 5, upper substrate 6, intermediate layer 7, lower substrate 8.
The intermediate layer 7 causes upper substrate 6 and lower substrate 8 to be fixed into a certain specific distance；The entrance slit 1, glitter
Angle is adjustable micro programmable gratings 3 and planar array detector 5 are fixed in substrate 6；The concave mirror 2 and concave mirror
4 are fixed in lower substrate 8；
Incident light is irradiated to described glittering by after the entrance slit 1, becoming directional light Jing after concave mirror 2 is collimated
On angle is adjustable micro programmable gratings 3, by changing the blaze angle of the adjustable micro programmable gratings of blaze angle 3, realize to diffraction
The spatial modulation of spectral intensity, the difraction spectrum after modulation are focused on measuring cell 5 by concave mirror 4；
The entrance slit 1, as light hole, can be the shape such as square, rectangle, circle；
Described concave mirror 2 and concave mirror 4 are processed by high-accuracy MEMS technology by glass；
Described measuring cell 5 is linear array detector or planar array detector.
Described blaze angle is adjustable micro programmable gratings 3 are by the adjustable micro programmable gratings cellular construction of some blaze angles
Constitute, using electrostatic drive working method, with reference to Fig. 2, the cellular construction is by 11 groups of support beam 9, bottom electrode 10 and top crown
Into the end face of support beam 9 is fixed on top base 6, and 11 one side of the top crown is fixed on support beam 9 and can reverse around which；Institute
State bottom crown 10 to be fixed on base 6, as bottom electrode；The bottom electrode 10 constitutes a plate condenser, institute with top crown 11
State bottom crown 10 parallel with 6 plane of upper substrate with the initial plane of top crown 11；The support beam 9, bottom electrode 10 and top crown
11 are made by conductive material, such as DOPOS doped polycrystalline silicon, metal.
With reference to Fig. 3, during grating operation, apply a certain size voltage between bottom electrode 10 and top crown 11, generation it is quiet
Electrical affinity F makes top crown 11 twist around support beam 9, produces the angle theta with horizontal plane, and this angle theta is the blaze angle
The blaze angle of adjustable micro programmable gratings 3.By changing the voltage on the micro- beam of grating between bottom crown so that top crown 11 around
Support beam 9 twists, and so as to cause blaze angle to change, and then realizes the spatial modulation to difraction spectrum intensity.Therefore only
To be achieved that by the voltage between bottom crown on control grating and different wave length is glittered, so as to realize light spectrum image-forming.
The course of work of integrated spectrum imaging system proposed by the present invention, including following basic step：
Step 1：With reference to Fig. 4, by controlling the voltage on grating between bottom crown, grating is made in driving voltage U1Under glitter
Angle is θ1；
Step 2：With reference to Fig. 5, when light beam I is with incidence angle θiIncide on top crown 11, now blaze angle is θ1, according to
Grating equation d (sin θsi+sinθm)=k λ1Understand, work as incidence angle θiAnd diffraction anglemReflection law is met with respect to grating cutting face
When, the condition of glittering is reached, now grating equation is changed into d (2cos θisinθ1)=k λ1, it can thus be appreciated that blaze angle θ and blaze wavelength λ
Correspond, the angle of diffraction of diffraction primary maximum M obtained from entering is θm, blaze wavelength is λ1, θiWith θm、λ1Meet grating equation,
And diffraction light overwhelming majority energy (more than 90%) converges to blaze wavelength λ1On, and remove λ1The energy of outer other wavelength pictures is relative
It is relatively low, therefore the main wavelength that presents is λ on detector 51Picture.
Step 3：With reference to Fig. 6, blaze wavelength λ1Focused on measuring cell 5 by concave mirror 4；
Step 4：With reference to Fig. 7, by controlling the voltage on grating between bottom crown, grating is made in driving voltage U2Under glitter
Angle is θ2；
Step 5：With reference to Fig. 8, when light beam I is with incidence angle θiIncide on top crown 11, now blaze angle is θ2, according to
Grating equation d (sin θsi+sinθ'm)=k λ2Understand, work as incidence angle θiWith diffraction angle 'mIt is fixed reflection to be met with respect to grating cutting face
During rule, the condition of glittering is reached, now grating equation is changed into d (2cos θisinθ2)=k λ2, it can thus be appreciated that blaze angle θ and the ripple that glitters
Long λ is corresponded, and the angle of diffraction of diffraction primary maximum M obtained from entering is θ 'm, diffraction wavelength is λ2, θiWith θ 'm、λ2Meet grating
Equation, and diffraction light overwhelming majority energy (more than 90%) converges to blaze wavelength λ2On, and remove λ2The energy of outer other wavelength pictures
It is relatively low, therefore the main wavelength that presents is λ on detector 52Picture.
Step 6：With reference to Fig. 9, blaze wavelength λ2Focused on measuring cell 5 by concave mirror 4；
Step 7：With reference to Figure 10, it is x-axis direction to define spectral dispersion direction, and vertical with x-axis is y-axis direction.Due to glittering
Operationally, blaze wavelength and the angle of diffraction are corresponded for angle is adjustable micro programmable gratings 3, and diffraction intensity (more than 90%) collection
In in blaze wavelength, so the picture of corresponding blaze wavelength is only existed under specific blaze angle on detector 5；When blaze angle changes
When, the angle of diffraction also accordingly changes, and on detector 5, the picture of respective wavelength is shifted in the x direction.
The present invention is realized to dodging using the adjustable micro programmable gratings of blaze angle as beam splitter by adjusting driving voltage
The PLC technology at credit angle, and then difraction spectrum is controlled, it is used for into spectrum imaging system, the space to spectrum is capable of achieving and is adjusted
System, while the single-chip integration of drive control circuit and beam splitter is greatly reduced the volume and weight of system, cost
To be greatly lowered, there is boundless application prospect in fields such as Aero-Space.
Description of the drawings
The integrated spectrum imaging system schematic diagram that Fig. 1 is proposed
The cellular construction schematic diagram of Fig. 2 blaze angles are adjustable micro programmable gratings 3
The fundamental diagram of Fig. 3 blaze angles are adjustable micro programmable gratings 3
Fig. 4 blaze angles are adjustable, and 3 driving voltage of micro programmable gratings is U1Corresponding blaze angle θ1Schematic diagram
Fig. 5 blaze angles are θ1When grating optical property schematic diagram
Fig. 6 blaze angles are θ1When corresponding blaze wavelength λ1Spectrum imaging system schematic diagram
Fig. 7 blaze angles are adjustable, and 3 driving voltage of micro programmable gratings is U2Corresponding blaze angle θ2Schematic diagram
Fig. 8 blaze angles are θ2When grating optical property schematic diagram
Fig. 9 blaze angles are θ2When corresponding blaze wavelength λ2Spectrum imaging system schematic diagram
Figure 10 difference blaze angle θ1、θ2Correspondence blaze wavelength is respectively λ1、λ2'sTarget object is in planar array detector 5
On spatial distribution schematic diagram
Specific embodiment
With reference to Fig. 1, the integrated spectrum imaging system that the present embodiment is proposed mainly includes entrance slit 1, concave mirror
2nd, the adjustable micro programmable gratings 3 of blaze angle, concave mirror 4, planar array detector 5, upper substrate 6, intermediate layer 7, lower substrate 8.
Incident light becomes directional light by entrance slit 1, concave mirror 2 and is irradiated on the adjustable micro programmable gratings of blaze angle 3, leads to
The blaze angle for changing the adjustable micro programmable gratings of blaze angle 3 is crossed, the spatial modulation to difraction spectrum intensity is realized, after modulation
Difraction spectrum is focused on measuring cell 5 by concave mirror 4.
Described entrance slit 1 is fixed in upper substrate 6 using rectangle as light hole.
Described concave mirror 2 and concave mirror 4 are processed by high-accuracy MEMS technology by glass, are fixed on
In lower substrate 8.Concave mirror 2 plays collimating effect to incident light；Concave mirror 4 plays focussing force to diffraction light.
Described blaze angle is adjustable, and micro programmable gratings 3 are located in upper substrate 6, and it is parallel that Jing concave mirrors 2 are collimated
Illumination is mapped on the adjustable micro programmable gratings of blaze angle 3, after optical grating diffraction focuses on measuring cell by concave mirror 4
On 5.
Described blaze angle is adjustable, and micro programmable gratings 3 adopt electrostatic drive working method, and with reference to Fig. 2, its unit is tied
Structure is made up of support beam 9, bottom electrode 10 and top crown 11, and the end face of support beam 9 is fixed on top base 6；Support beam 9, lower electricity
Pole 10 and top crown 11 are made by conductive material DOPOS doped polycrystalline silicon, and bottom electrode 10 constitutes a plate condenser with top crown 11.
Blaze angle adjustable miniature programmable grating 3 is made up of hundreds of to thousands of this cellular constructions.
With reference to Fig. 3, during grating operation, apply a certain size voltage between bottom electrode 10 and top crown 11, generation it is quiet
Electrical affinity F makes top crown 11 twist around support beam 9, produces the angle theta with horizontal plane, and this angle theta is the blaze angle
The blaze angle of adjustable micro programmable gratings 3.By changing the voltage on the micro- beam of grating between bottom crown so that top crown 11 around
Support beam 9 twists, and so as to cause blaze angle to change, and then realizes the spatial modulation to difraction spectrum intensity.Therefore only
To be achieved that by the voltage between bottom crown on control grating and different wave length is glittered, so as to realize light spectrum image-forming.
Described measuring cell 5 is fixed in substrate 6, using planar array detector.
Described upper substrate 6, intermediate layer 7, lower substrate 8 for system structural framing, material adopts glass.Intermediate layer 7 is thick
Degree can be adjusted according to being actually needed for optical system.
The operation principle of the integrated spectrum imaging system that the present embodiment is proposed includes following basic step：
Step 1：With reference to Fig. 4, by controlling the voltage on grating between bottom crown, grating is made in driving voltage U1Under=50V
Blaze angle be θ1=0.3781 °；
Step 2：With reference to Fig. 5, when light beam I is with incidence angle θiIncide on top crown 11, now blaze angle is θ1=
0.3781 °, according to grating equation d (sin θsi+sinθm)=k λ1Understand, work as incidence angle θiAnd diffraction anglemWith respect to grating cutting face
When meeting reflection law, the condition of glittering is reached, now grating equation is changed into d (2cos θisinθ1)=k λ1, it can thus be appreciated that blaze angle
θ and blaze wavelength λ are corresponded, and the angle of diffraction of diffraction primary maximum M obtained from entering is θm, blaze wavelength is λ1=0.3563 μm,
θiWith θm、λ1Meet grating equation, and diffraction light overwhelming majority energy (more than 90%) converges to blaze wavelength λ1On, and remove λ1Outward
The energy of other wavelength pictures is relatively low, therefore the main wavelength that presents is λ on detector 51Picture.
Step 3：With reference to Fig. 6, blaze wavelength λ1=0.3563 μm focuses on planar array detector 5 by concave mirror 4；
Step 4：With reference to Fig. 7, by controlling the voltage on grating between bottom crown, grating is made in driving voltage U2Under=60V
Blaze angle be θ2=0.5844 °；
Step 5：With reference to Fig. 8, when light beam I is with incidence angle θiIncide on top crown 8, now blaze angle is θ2=
0.5844 °, according to grating equation d (sin θsi+sinθ'm)=k λ2Understand, as incident light θiWith diffraction light θ 'mWith respect to grating cutting
When face meets reflection law, the condition of glittering is reached, now grating equation is changed into d (2cos θisinθ2)=k λ2, it can thus be appreciated that glittering
Angle θ and blaze wavelength λ are corresponded, and the angle of diffraction of diffraction primary maximum M obtained from entering is θ 'm, diffraction wavelength is λ2=0.5508
μm, θiWith θ 'm、λ2Meet grating equation, and diffraction light overwhelming majority energy (more than 90%) converges to blaze wavelength λ2On, and
Except λ2The energy of outer other wavelength pictures is relatively low, therefore the main wavelength that presents is λ on detector 52Picture.
Step 6：With reference to Fig. 9, blaze wavelength λ2=0.5508 μm focuses on planar array detector 5 by concave mirror 4；
Step 7：With reference to Figure 10, it is x-axis direction to define spectral dispersion direction, and vertical with x-axis is y-axis direction.Due to glittering
Operationally, blaze wavelength and the angle of diffraction are corresponded for angle is adjustable micro programmable gratings 3, and diffraction intensity (more than 90%) collection
In in blaze wavelength, so the picture of corresponding blaze wavelength is only existed under specific blaze angle on detector 5；When blaze angle is from θ1
=0.3781 ° changes to θ2When=0.5844 °, the angle of diffraction also accordingly changes, different blaze wavelengths λ on planar array detector 51、
λ2Picture corresponding skew can occur in the x direction.
Claims (5)
1. chip type spectrum imaging system, it is characterised in that mainly include entrance slit 1, concave mirror 2, blaze angle is adjustable
Micro programmable gratings 3, concave mirror 4, planar array detector 5, upper substrate 6, intermediate layer 7, lower substrate 8；
The intermediate layer 7 causes upper substrate 6 and lower substrate 8 to be fixed into a certain specific distance；The entrance slit 1, blaze angle can
Micro programmable gratings 3 and planar array detector 5 is adjusted to be fixed in substrate 6；The concave mirror 2 and concave mirror 4 are then
It is fixed in lower substrate 8；
Incident light by after the entrance slit 1, become Jing after concave mirror 2 is collimated directional light be irradiated to the blaze angle can
Adjust on micro programmable gratings 3, by changing the blaze angle of the adjustable micro programmable gratings of blaze angle 3, realize to difraction spectrum
The spatial modulation of intensity, the difraction spectrum after modulation are focused on measuring cell 5 by concave mirror 4.
2. chip type spectrum imaging system as claimed in claim 1, it is characterised in that described blaze angle is adjustable miniature to be compiled
Journey grating 3 is made up of the adjustable micro programmable gratings cellular construction of some blaze angles, using electrostatic drive working method, the list
Meta structure is made up of support beam 9, bottom electrode 10 and top crown 11, and the end face of support beam 9 is fixed on top base 6, the upper pole
11 one side of plate is fixed on support beam 9 and can reverse around which；The bottom crown 10 is fixed on base 6, as bottom electrode；Under described
Electrode 10 constitutes a plate condenser with top crown 11, and the bottom crown 10 is flat with upper substrate 6 with the initial plane of top crown 11
Face is parallel；The support beam 9, bottom electrode 10 and top crown 11 are made of electrically conductive material.
3. chip type spectrum imaging system as claimed in claim 1, it is characterised in that the entrance slit 1 is used as light hole
It is square, rectangle or circle.
4. chip type spectrum imaging system as claimed in claim 1, it is characterised in that described concave mirror 2 and concave surface
Speculum 4 is processed by high-accuracy MEMS technology by glass.
5. chip type spectrum imaging system as claimed in claim 1, it is characterised in that described measuring cell 5 is that linear array is visited
Survey device or planar array detector.
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| CN201610871427.8A CN106525235A (en) | 2016-09-30 | 2016-09-30 | Chip type spectral imaging system |
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| CN201610871427.8A CN106525235A (en) | 2016-09-30 | 2016-09-30 | Chip type spectral imaging system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110940641A (en) * | 2019-12-20 | 2020-03-31 | 吉林求是光谱数据科技有限公司 | System and method for identifying clothes material based on imaging spectrum chip technology |
| CN111007026A (en) * | 2019-12-27 | 2020-04-14 | 吉林求是光谱数据科技有限公司 | Food freshness detection system and detection method based on spectrum chip |
| CN111044466A (en) * | 2019-12-27 | 2020-04-21 | 吉林求是光谱数据科技有限公司 | Spectrum detection system and method for freshness of fruits and vegetables |
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| CN101548162A (en) * | 2006-07-20 | 2009-09-30 | 特瑞恩股份有限公司 | Compact catadioptric spectrometer |
| CN103076676A (en) * | 2013-01-21 | 2013-05-01 | 西北工业大学 | Manufacturing methods of micromechanical optical grating with adjustable blazing angle |
| CN103901609A (en) * | 2014-03-26 | 2014-07-02 | 重庆大学 | Movable MEMS large turning angle blazed grating light modulator based on double-layer comb drive |
| CN103901610A (en) * | 2014-03-26 | 2014-07-02 | 重庆大学 | Shutter type MEMS large-rotation-corner adjustable blazed grating light modulator and array thereof |
| CN105960578A (en) * | 2014-02-05 | 2016-09-21 | 浜松光子学株式会社 | Spectroscope and method for producing spectroscope |
-
2016
- 2016-09-30 CN CN201610871427.8A patent/CN106525235A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101548162A (en) * | 2006-07-20 | 2009-09-30 | 特瑞恩股份有限公司 | Compact catadioptric spectrometer |
| CN103076676A (en) * | 2013-01-21 | 2013-05-01 | 西北工业大学 | Manufacturing methods of micromechanical optical grating with adjustable blazing angle |
| CN105960578A (en) * | 2014-02-05 | 2016-09-21 | 浜松光子学株式会社 | Spectroscope and method for producing spectroscope |
| CN103901609A (en) * | 2014-03-26 | 2014-07-02 | 重庆大学 | Movable MEMS large turning angle blazed grating light modulator based on double-layer comb drive |
| CN103901610A (en) * | 2014-03-26 | 2014-07-02 | 重庆大学 | Shutter type MEMS large-rotation-corner adjustable blazed grating light modulator and array thereof |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110940641A (en) * | 2019-12-20 | 2020-03-31 | 吉林求是光谱数据科技有限公司 | System and method for identifying clothes material based on imaging spectrum chip technology |
| CN111007026A (en) * | 2019-12-27 | 2020-04-14 | 吉林求是光谱数据科技有限公司 | Food freshness detection system and detection method based on spectrum chip |
| CN111044466A (en) * | 2019-12-27 | 2020-04-21 | 吉林求是光谱数据科技有限公司 | Spectrum detection system and method for freshness of fruits and vegetables |
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