CN202869653U - Micro spectrograph based on diffraction hole array - Google Patents
Micro spectrograph based on diffraction hole array Download PDFInfo
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- CN202869653U CN202869653U CN 201220528123 CN201220528123U CN202869653U CN 202869653 U CN202869653 U CN 202869653U CN 201220528123 CN201220528123 CN 201220528123 CN 201220528123 U CN201220528123 U CN 201220528123U CN 202869653 U CN202869653 U CN 202869653U
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Abstract
The utility model discloses a micro spectrograph based on a diffraction hole array. The micro spectrograph comprises in sequence along an incident light direction an incident light collimation device, a layer of substrate made of transparent material, a diffraction hole two-dimensional array constructed on a light blocking layer on one surface of the substrate and a detection array chip comprising a plurality of detection pixel units, the light blocking layer is made of opaque material, the diffraction hole two-dimensional array includes a series of diffraction holes with different aperture sizes, the aperture size of each diffraction hole is close to the wavelength of the incident light, and the depth of each diffraction hole is the same as the thickness of the light blocking layer; a detection signal output end of the detection array chip is connected with a calculation and analysis component; and the diffraction holes in the diffraction hole two-dimensional array and the detection pixel units in the detection array chip are not in one-to-one correspondence in position. On the premise of ensuring performance comparable to that of an existing micro spectrograph with a diffraction hole array structure, the micro spectrograph based on the diffraction hole array is relatively easy to process, and the manufacturing cost is relatively low.
Description
Technical field
The utility model relates to a kind of spectrometer, relates in particular to a kind of micro spectrometer based on diffraction hole arrays, belongs to the spectral measurement methods field.
Background technology
Spectrometer is as a kind of surveying instrument of studying the spectral information of material, and along with the develop rapidly of science and technology, its range of application is also more and more wider.There are numerous defectives in conventional spectrometers, and is large such as the Fourier spectrometer volume, to vibration sensing, is not suitable for portable real-time measurement; And optical grating diffraction type spectrometer resolution is not high, and price is also high.
One piece of Chinese patent discloses a kind of diffraction hole arrays structure mini spectrometer (name is called " diffraction hole arrays structure mini spectrometer and high resolution restoration method thereof ", and publication number is CN102564586A, and open day is on July 11st, 2012).This micro spectrometer comprises:
One deck substrate adopts transparent material to make;
Opening diffracting two-dimensional array in light blocking layer that is structured in upper surface of substrate, this light blocking layer is made by opaque material, the pore size in each hole in this opening diffracting two-dimensional array does not wait, and aperture size and lambda1-wavelength approach, and the degree of depth of each opening diffracting is identical and all equal light blocking layer thickness;
The substrate below is provided with the detection array chip, this detection array chip adopts charge coupled cell CCD or cmos device CMOS, a corresponding pixel elements that arranges in the detection array chip under each opening diffracting, these pixel elements are through after calibrating, when the light that can guarantee identical wavelength, equal-wattage incided these pixel elements, the data of each pixel elements output were identical;
Substrate and detection array chip have two kinds of designs, and the one, between detection array chip and substrate, be provided with shadow shield to cover most of area of each pixel elements, to improve device sensitivity; This shadow shield is made by opaque material, and the shadow shield under the opening diffracting center leaves the identical printing opacity aperture in a series of apertures, and correspondence arranges a pixel elements under each printing opacity aperture, only gets the data of pixel elements under the printing opacity aperture during image data; The 2nd, do not establish shadow shield, but when image data, only get the data of the pixel elements under the opening diffracting center;
Be provided with two confocal lens above the opening diffracting two-dimensional array, an aperture is arranged in the shadow shield at the focus place between two confocal lens, this device is in order to collimate incident light;
One batch total calculation and Analysis parts are used for data that analysis and calculation detection array chip collects to carry out spectrum recovering.
Wavelength or the frequency range that the detection array chip can be surveyed according to the quantity of opening diffracting evenly are divided into n part, and every portion is got its centre wavelength or centre frequency; Record in advance in the detection array chip each pixel elements under each opening diffracting to the detectivity of each centre wavelength or centre frequency light, this detectivity is a ratio, its molecule is the power that one of them centre wavelength or centre frequency light are detected by one other pixel unit, and denominator is to incide diffraction hole arrays before this wavelength or frequencies of light power.Diffraction be through occuring behind the diffraction hole arrays in incident light, and the pixel elements that is positioned in the imaging array chip under each opening diffracting can receive corresponding diffraction power; With the detectivity of different pixels unit to different centre wavelengths or centre frequency light, each centre wavelength or the corresponding spectral power of centre frequency are respectively as matrix of coefficients in the received corresponding diffraction power of each pixel elements and the incident light, augmented matrix and unknown number matrix form a system of linear equations, adopt the Tikhonov regularization method to find the solution this system of linear equations, just can obtain normalization spectral power corresponding to each centre wavelength of incident light or centre frequency, then these spectral power values being carried out Linear Quasi merges through spectral radiometric calibration, obtain the spectrum of incident light, namely finish high-resolution spectroscopy and restore.
The core component of this spectrometer is the opening diffracting two-dimensional array that is structured on CCD or the CMOS detection array chip, after photometry incident, by measuring the diffraction power of respective pixel unit of institute under each opening diffracting, and utilize the method for finding the solution large linear systems to restore spectrum.This micro spectrometer has that antijamming capability is strong, resolution is high, measurement range is wide, and the advantage such as cost of manufacture is low.
Yet, above-mentioned diffraction hole arrays structure mini spectrometer requires " each opening diffracting under a corresponding pixel elements that arranges in the detection array chip ", satisfy this requirement, on the one hand, because the detection array of existing CCD or cmos detector comprises a large amount of pixel elements, therefore need the opening diffracting quantity of making too much; On the other hand, usually be provided with transparent cover plate before the detection array of existing CCD or cmos detector, and the cover plate before the dismounting detection pixel is easy to cause detection array to damage in the actual element manufacturing, more seriously removing the rear airborne dust of protection and impurity will exert an influence to the detection array performance, and finally affect the spectrum recovering effect.Therefore there is very large difficulty in this spectrometer actual doing in the making.
The utility model content
Technical problem to be solved in the utility model is to overcome the deficiency of existing diffraction hole arrays structure mini spectrometer actual fabrication difficulty, a kind of micro spectrometer based on diffraction hole arrays is provided, guaranteeing under the prerequisite suitable with existing diffraction hole arrays structure mini spectrometer performance, be easier to processing, cost of manufacture is lower.
Micro spectrometer based on diffraction hole arrays of the present utility model comprises successively along the incident light direction:
The incident light collimator apparatus;
One deck substrate adopts transparent material to make;
An opening diffracting two-dimensional array that is structured in one of them lip-deep light blocking layer of described substrate, described light blocking layer is made by opaque material, described opening diffracting two-dimensional array comprises a series of opening diffractings with different pore size size, and each opening diffracting aperture size and lambda1-wavelength approach, and the degree of depth of each opening diffracting is identical with light blocking layer thickness;
Comprise the detection array chip of a plurality of detected pixel unit, the detectable signal output terminal of described detection array chip is connected with computational analysis parts;
The position of the detected pixel unit in the described opening diffracting two-dimensional array in each opening diffracting and the described detection array chip is non-corresponding one by one.
Preferably, described detection array chip upper surface is equipped with the cover plate of layer of transparent, and the upper surface of described cover plate contacts with described opening diffracting two-dimensional array.
Preferably, the opening diffracting in the described opening diffracting two-dimensional array is arranged in such a way: aperture arrangement is in the centre and around macropore is arranged in.
Preferably, described incident light collimator apparatus comprises two confocal lens and is arranged on two shadow shields on the confocal plane of lens, is provided with a light hole corresponding to the common focus place between two lens on the shadow shield.
Compared to existing technology, micro spectrometer based on diffraction hole arrays of the present utility model does not need to satisfy under each opening diffracting all the requirement that accurate correspondence arranges a detection array chip pixel unit, thereby significantly reduced manufacture difficulty, be beneficial to and realize batch production; And when further contemplating direct employing on the market with the detector of cover plate, substrate thickness may be on the impact of accuracy of detection generation, adopt the inverted mode of diffraction hole arrays, be about to the opening diffracting two-dimensional array and directly place the cover plate upper surface, under the prerequisite that guarantees accuracy of detection, further reduced production cost.
Description of drawings
Fig. 1 is the perspective view of micro spectrometer of the present utility model;
Fig. 2 is the vertical view that the utility model micro spectrometer is removed the outer other parts of incident light collimator apparatus;
Each label implication is as follows among the figure:
1, opening diffracting, 2, light blocking layer, 3, substrate, 4, detection array chip cover plate, 5, the detection array chip, 6, lens, 7, aperture.
Embodiment
Below in conjunction with accompanying drawing the technical solution of the utility model is elaborated:
Micro spectrometer based on diffraction hole arrays of the present utility model comprises successively along the incident light direction: the incident light collimator apparatus;
The substrate that one deck adopts transparent material to make; An opening diffracting two-dimensional array that is structured in one of them lip-deep light blocking layer of described substrate, described light blocking layer is made by opaque material, described opening diffracting two-dimensional array comprises a series of opening diffractings with different pore size size, and each opening diffracting aperture size and lambda1-wavelength approach, and the degree of depth of each opening diffracting is identical with light blocking layer thickness; Comprise the detection array chip of a plurality of detected pixel unit, the detectable signal output terminal of described detection array chip is connected with computational analysis parts; Wherein, the position relationship of the detected pixel unit in the opening diffracting two-dimensional array in each opening diffracting and the described detection array chip can be such as the scheme among the document CN102564586A: a corresponding pixel elements that arranges in the detection array chip under each opening diffracting, but can bring very big difficulty to making so just as described in the background section.Find by lot of experiments and theoretical analysis, still can obtain same accuracy of detection when the position relationship of opening diffracting and pixel elements is non-one by one at once, and greatly reduce manufacture difficulty.This is because spectrum recovering is to adopt the described method of finding the solution large linear systems of document CN102564586A, and find the solution the system of equations full rank that large-scale system of equations need to obtain, that is to say that the luminous power that needs each detector pixel unit to collect is different as far as possible, the element in the augmented matrix of guarantee system of equations is different as far as possible like this.And because each opening diffracting aperture size is different, diffraction light intensity by these holes differs, therefore in opening diffracting and pixel elements position one to one in the situation, thereby wish each pixel elements only to receive the light that comes from its corresponding opening diffracting and avoid receiving the luminous power that light assurance that other opening diffractings penetrate collects and differ in size.And in fact owing to diffraction effect, the diffraction light that penetrates from each opening diffracting unavoidably can be mapped to a plurality of pixel elements; Also difficult of the position correction of opening diffracting and pixel elements meanwhile.In order to overcome and to avoid these problems, the diffraction light that utilizes conversely each opening diffracting to transmit is mapped to these characteristics of a plurality of pixel elements, only need to guarantee that the luminous power that each detector pixel unit collects is not quite similar, do not need opening diffracting and pixel elements locational corresponding one by one, the light that receives of each pixel elements will be the synthesis result of the mutual superposition of each opening diffracting transmission diffraction light like this.Because each opening diffracting is all relative fixing with quantity and the position of each pixel elements, so for a device that completes, each pixel elements is a definite value to the reception coefficient of each wavelength of incident light (or frequency), can record by experiment in advance.Therefore, in the utility model, the position of the detected pixel unit in the described opening diffracting two-dimensional array in each opening diffracting and the described detection array chip is non-corresponding one by one.
An embodiment of the present utility model as shown in Figure 1 and Figure 2, wherein Fig. 1 is perspective view, Fig. 2 is the vertical view of removing the outer other parts of incident light collimator apparatus.As shown in the figure, the two-dimensional array that comprises one group of opening diffracting 1 is structured in the substrate 3 surperficial light blocking layers 2, the aperture of each opening diffracting 1 is different, aperture size does not wait to several microns from hundreds of nanometers, the degree of depth of opening diffracting 1 is the thickness of light blocking layer 2, three pixel elements width in interval between each opening diffracting 1 in the opening diffracting two-dimensional array.Light blocking layer 2 can be arranged on the upper surface of substrate 3, also can be at lower surface.Directly adopt packaged CCD or the CMOS photo-detector of selling on the market in the present embodiment, transparent cover plate is installed above the detection array chip, consider for avoiding the impact that substrate thickness produces net result included in, in the present embodiment element of this two dimension diffraction hole arrays structure is upside down on the transparent cover plate 4 of detection array chip 5, is detection array chip 5 under this glass 4.
But but also lack of alignment of opening diffracting ordered arrangement in the opening diffracting two-dimensional array of the present utility model, an opening diffracting 1 is arranged in per nine pixel elements top in the present embodiment, and the number of opening diffracting 1 is 100, and its change in size scope is from hundreds of nanometers to several microns.Opening diffracting 1 is arranged in a certain way by its aperture size size, consider diffraction effect, luminous power that each pixel in each detection array chip 5 receives is real in each opening diffracting 1 produces the synthesis result of diffraction light, therefore with aperture arrangement in the centre and macropore be arranged in around to guarantee that the diffraction power that each pixel elements obtains varies in size.Owing to adopt the method for diffraction, and far away apart from the relative aperture size between the pixel elements of detection array chip and the opening diffracting 1, the light that sees through diffraction hole arrays will be radiated on a large amount of pixel elements of below detection array chip, also can obtain abundant data to carry out spectrum recovering even therefore make the opening diffracting 1 of lesser amt, so the length of diffraction hole arrays is within a hundreds of micron, the cross-sectional area of whole diffraction hole arrays will be less than a square millimeter.
Above-mentioned substrate 3 materials are transparent material, can use polymeric material, can adopt the spin coating method preparation.Light blocking layer 2 is light-proof material, can use crome metal, can adopt evaporation coating method to make.The making of opening diffracting 1 can be adopted the method for ion etching, and the ion beam focusing that namely sends with ion generator is on light blocking layer 2 surfaces, carries out etching by active position and the time of precision control ion beam, and photoetching also is one of optional method in addition.
Incident light collimator apparatus in the present embodiment, as shown in Figure 1, comprise two confocal lens 6 that are arranged on the opening diffracting two-dimensional array, and be arranged on the shadow shield on two lens, the 6 confocal planes, be provided with an aperture 7 corresponding to the common focus place between two lens 6 on the shadow shield.Incident light shines in the substrate 3 after collimating, and sees through when transparent substrates 3 arrives opening diffracting 1 diffraction occurs, and these diffraction lights continue each pixel elements that propagation arrives detection array chip 5.Because the size of each opening diffracting 1 differs, the diffraction intensity that produces thus is not identical yet, and the diffraction intensity that arbitrary pixel elements receives in the detection array chip 5 is the synthesis result of each opening diffracting 1 diffraction light that produces, so each pixel elements of detection array chip 5 will record a series of diffraction powers that differ in size.The computational analysis parts gather these luminous power data as the augmented matrix of system of equations, utilize early stage monochromator to select the light of different frequency to be radiated at respectively diffraction hole arrays, measure a certain frequencies of light power of each pixel elements gained, the ratio of the power before diffraction hole arrays is as the matrix of coefficients of system of equations with this power and the irradiation of this frequency incident light, the luminous power of each frequency of incident light adopts high resolution restoration method to solve an equation and carries out the data processing finally to obtain the spectrum of incident light as unknown number.Similar among spectrum recovering method of the present utility model and the document CN102564586A, repeat no more herein.
Claims (5)
1. micro spectrometer based on diffraction hole arrays comprises successively along the incident light direction:
The incident light collimator apparatus;
One deck substrate adopts transparent material to make;
An opening diffracting two-dimensional array that is structured in one of them lip-deep light blocking layer of described substrate, described light blocking layer is made by opaque material, described opening diffracting two-dimensional array comprises a series of opening diffractings with different pore size size, and each opening diffracting aperture size and lambda1-wavelength approach, and the degree of depth of each opening diffracting is identical with light blocking layer thickness;
Comprise the detection array chip of a plurality of detected pixel unit, the detectable signal output terminal of described detection array chip is connected with computational analysis parts;
It is characterized in that the position of the detected pixel unit in the described opening diffracting two-dimensional array in each opening diffracting and the described detection array chip is non-corresponding one by one.
2. as claimed in claim 1 based on the micro spectrometer of diffraction hole arrays, it is characterized in that described detection array chip upper surface is equipped with the cover plate of layer of transparent, the upper surface of described cover plate contacts with described opening diffracting two-dimensional array.
3. as claimed in claim 1 based on the micro spectrometer of diffraction hole arrays, it is characterized in that the opening diffracting in the described opening diffracting two-dimensional array is arranged in such a way: aperture arrangement is in the centre and around macropore is arranged in.
4. as claimed in claim 1 based on the micro spectrometer of diffraction hole arrays, it is characterized in that, described incident light collimator apparatus comprises two confocal lens and is arranged on two shadow shields on the confocal plane of lens, is provided with a light hole corresponding to the common focus place between two lens on the shadow shield.
5. as claimed in claim 1 based on the micro spectrometer of diffraction hole arrays, it is characterized in that described detection array chip is CCD or CMOS detection array chip.
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| CN 201220528123 CN202869653U (en) | 2012-10-16 | 2012-10-16 | Micro spectrograph based on diffraction hole array |
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| CN 201220528123 CN202869653U (en) | 2012-10-16 | 2012-10-16 | Micro spectrograph based on diffraction hole array |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102928079A (en) * | 2012-10-16 | 2013-02-13 | 南京邮电大学 | Miniature spectrograph based on diffraction aperture array |
| WO2014166268A1 (en) * | 2013-07-26 | 2014-10-16 | 中兴通讯股份有限公司 | Multiple-input and multiple-output visible light transmitting device and method and receiving device and method |
| CN105675131A (en) * | 2016-01-13 | 2016-06-15 | 南京邮电大学 | Terahertz wave spectrum measurement device and measurement method thereof based on diffraction effect |
| WO2021017052A1 (en) * | 2019-07-31 | 2021-02-04 | 清华大学 | Non-invasive blood glucometer and blood glucose detection method |
-
2012
- 2012-10-16 CN CN 201220528123 patent/CN202869653U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102928079A (en) * | 2012-10-16 | 2013-02-13 | 南京邮电大学 | Miniature spectrograph based on diffraction aperture array |
| WO2014166268A1 (en) * | 2013-07-26 | 2014-10-16 | 中兴通讯股份有限公司 | Multiple-input and multiple-output visible light transmitting device and method and receiving device and method |
| CN105675131A (en) * | 2016-01-13 | 2016-06-15 | 南京邮电大学 | Terahertz wave spectrum measurement device and measurement method thereof based on diffraction effect |
| WO2021017052A1 (en) * | 2019-07-31 | 2021-02-04 | 清华大学 | Non-invasive blood glucometer and blood glucose detection method |
| US11759129B2 (en) | 2019-07-31 | 2023-09-19 | Tsinghua University | Noninvasive glucometer and blood glucose detection method |
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