CN107436285A - Fast high-flux bloom spectrum detection device and detection method based on linear light source excitation - Google Patents

Fast high-flux bloom spectrum detection device and detection method based on linear light source excitation Download PDF

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CN107436285A
CN107436285A CN201710467446.9A CN201710467446A CN107436285A CN 107436285 A CN107436285 A CN 107436285A CN 201710467446 A CN201710467446 A CN 201710467446A CN 107436285 A CN107436285 A CN 107436285A
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light source
sample
spectrum
lens
flux
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何赛灵
李静伟
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Suzhou Youhan Information Science And Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited

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Abstract

The invention discloses a kind of fast high-flux bloom spectrum detection device and detection method based on linear light source excitation, including light source, object lens or lens, displacement platform, filter plate, condenser lens, imaging spectrometer, testing sample is placed on described displacement platform, the light that light source is sent passes sequentially through object lens or lens, displacement platform, testing sample, the light of testing sample radiation is entered in imaging spectrometer by filter plate, condenser lens.The present invention realizes the scanning to sample, imaging spectrometer gathers the spectral signal of sample emission, can be quickly obtained the spectrum and spatial positional information of sample using light source illumination sample using displacement platform.Present invention employs the mode of active illumination, the signal to noise ratio of system is higher, can be used for realizing the quantitative detection of object.

Description

Fast high-flux bloom spectrum detection device and detection method based on linear light source excitation
Technical field
It is more particularly to a kind of based on line source, push-broom type imaging spectrometer the invention belongs to EO-1 hyperion detection field, and The EO-1 hyperion detection and analysis device and method of precision displacement table.
Background technology
Imaging spectrometer, proposed in the 1980s by U.S. jet propulsion laboratory, its on the basis of spectrometer, Imaging technique is added, changes the shortcomings that conventional detection instrument can only obtain measured target single piece of information, object can be obtained Spectral information and space distribution information.Different by its scan mode, imaging spectrometer can be divided into sweep type, push-broom type, coagulate Depending on three kinds of type.Sweep type imaging spectrometer is completed to scan in x directions, with mechanical structure, on the y axis, complete using the movement of device Into scanning, instantaneous field of view angle is smaller, is readily available the image of high quality, but mechanical device is heavier.Gazing type imaging Spectrometer, typically it is divided using acousto-optic adjustable filtering piece or gradient filtering piece, two-dimensional field of view scanning, structure can be carried out simultaneously Simply, but spatial information and spectral information can not be extracted simultaneously, its spatial resolution and spectral resolution are also limited.Push-broom type Imaging spectrometer, typically by slit, collimation lens, spectral module, condenser lens, the high order diffraction optical filter that disappears, area array cameras group Into.The one-dimensional completion spacescan of area array cameras, another dimension are completed spectral scan, then moved by platform to form two-dimensional space Scanning.The advantages that it has small volume, and spectral composition is simple, high sensitivity, signal to noise ratio are high, spectral resolution is high, but it is swept It is smaller to retouch visual field.With the development of large area array camera technique and big visual field technology, push-broom type imaging spectrometer is imaging spectral The mainstream development direction of instrument.
Imaging spectrometer is commonly used in the observation systems such as aerospace, target observation over the ground is realized, for monitoring plant Growth, differential plant species, and differentiate camouflage etc..What it was mainly utilized is reflectance spectrum of the object to light source, light Source has a great influence, and because its spatial resolution is limited, the quantitative analysis to object is relatively difficult.Based on this, it is proposed that one Fast high-flux hyperspectral analysis detection dress of the kind based on linear light source excitation, push-broom type imaging spectrometer and precision displacement platform Put.
The content of the invention
1st, goal of the invention.
The present invention using line source excites sample, makes its generation fluorescence or Raman signal, then using push-broom type into As spectrometer is detected, so as to realize the identification to sample type.Precision displacement table is used for realizing the one-dimensional space to object Scanning, the identification being distributed to sample two-dimensional space is realized with reference to a dimension of planar array detector.
2nd, the technical solution adopted in the present invention.
A kind of fast high-flux bloom spectrum detection device based on linear light source excitation proposed by the present invention, including light source, thing Mirror or lens, displacement platform, filter plate, condenser lens, imaging spectrometer, testing sample are placed on described displacement platform, light The light that source is sent passes sequentially through object lens or lens, displacement platform, testing sample, and the light of testing sample radiation is gathered by filter plate Focus lens enter in imaging spectrometer.
In further embodiment, light source is wide spectrum light source or laser.
In further embodiment, in addition to the drive control device drive displacement platform that is connected with displacement platform moves.
A kind of fast high-flux hyperspectral detection method based on linear light source excitation proposed by the present invention, in accordance with the following steps Carry out:
1) data cube of the step number of the number * steppings of the number * area array cameras horizontal pixel point of band is changed into The number two-dimensional matrix of (data of the step number of the number * steppings of area array cameras horizontal pixel point are stood) * bands;
2) PCA decomposition is carried out to the two-dimensional matrix in described step 1);
3) loading matrix in PCA judges the spectral shape of abnormal structure, according to corresponding corresponding The spatial distribution of principal component can be with the spatial form of auxiliary judgment abnormal structure.
In further embodiment, including light source, displacement platform, filter plate, condenser lens, imaging spectrometer;Also Including dichroscope, lens;The side that described light source is located at imaging spectrometer is set, and the light beam sent is anti-by dichroscope Penetrate, then by lens focus to testing sample;Testing sample is secured in place in moving stage, passes through the movement pair of control bit moving stage Testing sample scans;The signal of testing sample radiation, successively by lens, dichroscope, filter plate, condenser lens, is focused on In imaging spectrometer.
In further embodiment, described light source is line source.
In further embodiment, the position by adjusting imaging spectrometer keep line source on sample or The signal wire of sample emission and the slit keeping parallelism of imaging spectrometer.
The present invention proposes the detection method of another fast high-flux bloom spectrum detection device based on linear light source excitation, light The data cube of the step number of the number * steppings of the number * area array cameras horizontal pixel point of bands of a spectrum utilizes spectral information divergence algorithm Data are analyzed:
1) to the spectrum of each point in data cube, it is normalized by its spectral maximum;
2) data cube after normalization is directed to, seeks the spectrum probability of each point;
3) by spectrum probability a little be added, then seek its spectrum probability average of each sample, calculate in data cube, Calculate the spectrum curl value for the spectrum mathematical expectation of probability that each sample is each put;
4) be directed to data cube in a more all kinds of samples of specific spatial point curl value and demarcate;
5) number of each demarcating element is counted, it is calculated and accounts for matrix ratio, certain a kind of sample in mixture is calculated according to ratio The mass fraction of product.;
9. the fast high-flux bloom spectrum detection device according to claim 1 based on linear light source excitation, its feature It is:The calculation formula of spectrum curl isWherein, SID (x | | y) is represented Vector x, relative to amount y curl value, pl,qlEach comfortable wavelength X of spectral vector x, y is represented respectivelylThe spectrum probable value at place.
3rd, technique effect caused by the present invention.
(1) present invention utilizes linear light source lighting sample, realizes the scanning to sample using displacement platform, imaging spectrometer is adopted Collect the spectral signal of sample emission, the spectrum and spatial positional information of sample can be quickly obtained.
(2) present invention employs the mode of active illumination, the signal to noise ratio of system is higher, can be used for realizing quantifying for object Detection.
(3) present invention is irradiated using line source, and compare other planar light sources, its optical element and damage to light source Consume relatively low, the life-span greatly prolongs.
Brief description of the drawings
Fig. 1 is transmitted light path structural representation of the present invention.
Fig. 2 is reflective light path construction schematic diagram of the present invention.
Fig. 3 is line source producing method one of the present invention.
Fig. 4 is line source producing method two of the present invention.
Fig. 5 is line source producing method three of the present invention.
Fig. 6 is that the present invention is the coordinate that sample coordinate pair answers area array cameras.
Description of reference numerals:
1 is excites line source, and 3 be displacement platform, and 4 be testing sample, and 5 be filter plate, and 6 be condenser lens, and 7 be imaging spectral Instrument, 9 be the controller of displacement platform, and 8 be computer, and 10 be dichroscope, and 11 be lens;1A is point-like laser device, and 1B is linear Laser generator, 1C are one-dimensional galvanometer, and 1D is beam expander, and 1E is post lens.
Embodiment
Embodiment 1
Illustrated with reference to Fig. 1.The biopsy tissues of no dyeing are detected, come auxiliary judgment cancerous issue and Its border.Now, push-broom type imaging spectrometer wavelength used is near infrared imaging spectrometer.Wide spectrum light source 1, by object lens or Person's lens 2 are focused in the section of tissue testing sample 4, and the section of testing sample 4 is secured in place in moving stage 3.Pass through displacement platform The one-dimensional scanning of the section of testing sample 4 is realized in 3 movement.Transmitted light filtered wave plate 5 successively, condenser lens 6, into As in spectrometer 7,8 be computer, and 9 be the drive control device of displacement platform 3.Line source now is logical to focus on wide spectrum light source Produced on slit.
The y of sample coordinate corresponds to the y1 of area array cameras, and the x1 of area array cameras is spectrum propagation direction.For sample space Signal light corresponding to each x coordinate, we can obtain corresponding p*s image.Utilize accurate displacement Platform is scanned to sample, it is assumed that the stepping of scanning is m, step number l, can obtain p*s*l data cube, the data are stood Fang Jinhang is analyzed, and can obtain the species and space distribution information of sample.Wherein p is the number of band, and s is that area array cameras is horizontal To the number of pixel, l is the step number of stepping.It is as follows to the processing procedure of the data cube:
1) by p*s*l data cube, it is changed into (s*l) * p two-dimensional matrix X;
2) carry out PCA (PCA) to matrix X to decompose, X=TPT+ E, wherein P are loading matrix, display Be variable (such as wavelength) distribution of weights information, carry out physics or explanation chemically available for the decomposition to matrix X.T For score matrix, the spatial distribution of corresponding corresponding principal component.
3) spectral shape of abnormal structure is may determine that according to P, can be with the space shape of auxiliary judgment abnormal structure according to T Shape.
Embodiment 2
The light channel structure of system is as shown in Figure 2.In Fig. 2,1 is excites line source, and 3 be displacement platform, and 4 be testing sample, and 5 are Filter plate, 6 be condenser lens, and 7 be imaging spectrometer, and 9 be the controller of displacement platform, and 8 be computer, and 10 be dichroscope, 11 For lens, the movement of the collection of imaging spectrometer data and displacement platform is controlled by computer.The light sent by line source 1 Reflect by dichroscope 10, then focused on by lens 11 in the section of testing sample 4.Testing sample 4 is fixed on displacement On platform 3, by the movement of control bit moving stage 3, the scanning to sample;The signal of sample emission, successively by condenser lens 11, two To Look mirror 10, filter plate 5, condenser lens 6, focus in push-broom type imaging spectrometer.One difficult point of system with order to protect Card collect the sensitivity of the efficiency and system of signal, it is necessary to make to impinge upon the signal wire of line source on sample or sample emission with The slit perfect parallelism of imaging spectrometer, this point are ensured by adjusting the position of imaging spectrometer.
In Fig. 3,1A is point-like laser device, and 1B is linear laser generator, irradiates linear laser with point-like laser device 1A Generator 1B produces line source.In Fig. 4,1C is one-dimensional galvanometer, and spot light irradiates one-dimensional galvanometer 1C, by controlling one-dimensional galvanometer Rotation produce line source.In Fig. 5,1A is point-like laser device, and 1D is beam expander, and 1E is post lens, and point-like laser 1A passes through Beam expander 1D, then produce line source by post lens 1E again.
The course of work of system is as follows:
To the Quantitative detection of mixture of powders.Assuming that now with a kind of powder mixture, it is known that the mixture by Powders A and B compositions, A and B fluorescence spectrum are variant, and the content of A in mixture can be quickly judged using the system.Specifically Process is as follows:
First, powders A is placed in the container of customization, secured the container on displacement platform.405nm line source warp Cross dichroscope 10 to reflect, impinge upon on sample A, form a laser rays, excite sample A fluorescence.The fluorescence of radiation sample, according to It is secondary to pass through dichroscope 10, filter plate 3, condenser lens 6, it is focused onto on the slit of imaging spectrometer, into imaging spectrometer In.It is visible ray/near infrared imaging spectrometer used herein of imaging spectrometer.In a gatherer process, we can obtain To the image of a width p*s.Scanning to sample is realized by moving displacement platform, if the stepping of displacement platform is m1, step number For l1, so we can obtain p*s*l1 data cube.In fact, s*l1 represent be sample A spatial information, What we obtained is the spectrum of s*l1 point, and the spectral Dimensions each put are p.Next utilize and proposed by Chein-I Chang Spectral information divergence algorithm data are analyzed.Process is as follows:
1) to the spectrum of each point in data cube, it is normalized by its spectral maximum.
2) data cube after normalization is directed to, seeks the spectrum probability of each point.λjRepresent The intensity level of one wavelength of spatial point, P ({ λj}),pjRepresent wavelength XjProbability.Then come for a specific spatial point Say, its spectrum probability can be expressed as vector (p1,p2,…,pp)。
3) by spectrum probability a little be added, be then averaged, the spectrum mathematical expectation of probability as sample A.
Similarly, we can obtain sample B spectrum mathematical expectation of probability Pmean (B)=(pB1, pB2,…pBp)。
Next, the mass fraction that A is respectively configured is 5%, 10%, 20%, 50% A and B mixture, will mix Thing is placed sequentially in the container of customization, and using the system shown in Fig. 1, scanning obtains p*s*l2, p*s*l3, p*s*l4, p*s* L5, p*s*l6 data cube.Below by taking the data cube p*s*l2 for the mixture that mass fraction containing A is 5% as an example, illustrate pair The processing procedure of mixture data cube.
1) to the spectrum of each point in data cube, it is normalized by its spectral maximum.
2) data cube after normalization is directed to, seeks the spectrum probability of each point.
3) calculate in data cube, spectrum curl value of the spectrum probability each put on Pmean (A) and Pmean (B). The calculation formula of spectrum curl isWherein, SID (x | | y) represents vector X, relative to amount y curl value, pl,qlEach comfortable wavelength X of spectral vector x, y is represented respectivelylThe spectrum probable value at place.
4) be directed in data cube a specific spatial point data (:, s, l2), compare SID (data (:,s,l2)| | Pmean (A)) and SID (data (:, s, l2) | | Pmean (B)) size, if the former is less than the latter, make spa_data (s, l2) is equal to 0, on the contrary then make spa_data (s, l2)=1.
5) number for the element that spa_data (s, l2) intermediate value is 0 is counted, it is calculated and accounts for matrix spa_data's (s, l2) Ratio ratio1.
6) mass fraction for A is 10%, 20%, 50% A and B mixture, with reference to step 1) -5), calculate ratio2,ratio3,ratio4。
7) ratio1, ratio2, ratio3, ratio4 and 5%, 10%, 20%, 50% functional relation are fitted.
8) A of unknown mass fraction and B mixture is placed in the container of customization, be scanned using system, obtained Dimension is p*s*lmixData cube, with reference to step 1) -5), statistics spa_data (s, lmix) in element 0 it is shared ratio.
9) according to the 8) mass fraction with A in 7) calculating mixture.
Embodiment in foregoing description can be further combined or replace, and embodiment is only special to the present invention The preferred embodiment of profit is described, and not the spirit and scope of patent of the present invention are defined, of the invention special not departing from On the premise of sharp design philosophy, various change that professional and technical personnel in the art make to the technical scheme of patent of the present invention and Improve, belong to protection scope of the present invention.

Claims (9)

  1. A kind of 1. fast high-flux bloom spectrum detection device based on linear light source excitation, it is characterised in that:Including light source (1), thing Mirror or lens (2), displacement platform (3), filter plate (5), condenser lens (6), imaging spectrometer (7), testing sample (4) are placed on On described displacement platform (3), the light that light source (1) is sent passes sequentially through object lens or lens (2), displacement platform (3), testing sample (4), the light of testing sample (4) radiation is entered in imaging spectrometer (7) by filter plate (5), condenser lens (6).
  2. 2. the fast high-flux bloom spectrum detection device according to claim 1 based on linear light source excitation, it is characterised in that: Light source (1) is wide spectrum light source or laser.
  3. 3. the fast high-flux bloom spectrum detection device according to claim 1 based on linear light source excitation, it is characterised in that: It is also mobile including drive control device (9) the drive displacement platform (3) that is connected with displacement platform (3).
  4. A kind of 4. detection side of the fast high-flux bloom spectrum detection device based on linear light source excitation described in usage right requirement 1 Method, it is characterised in that carry out in accordance with the following steps:
    1) data cube of the step number of the number * steppings of the number * area array cameras horizontal pixel point of band is changed into (face battle array The data of the step number of the number * steppings of camera horizontal pixel point) * bands number two-dimensional matrix;
    2) PCA decomposition is carried out to the two-dimensional matrix in described step 1);
    3) loading matrix in PCA judges the spectral shape of abnormal structure, according to it is corresponding corresponding it is main into The spatial distribution divided can be with the spatial form of auxiliary judgment abnormal structure.
  5. A kind of 5. fast high-flux bloom spectrum detection device based on linear light source excitation, it is characterised in that:Including light source (1), position Moving stage (3), filter plate (5), condenser lens (6), imaging spectrometer (7);Also include dichroscope (10), lens (11);It is described Light source (1) be located at imaging spectrometer side set, the light beam sent by dichroscope (10) reflection, then by lens (11) focus on testing sample (4);Testing sample (4) is secured in place in moving stage (3), is treated by the movement of control bit moving stage Test sample product (4) scan;The signal of testing sample (4) radiation, successively by lens (11), dichroscope (10), filter plate (5), Condenser lens (6), focus in imaging spectrometer (7).
  6. 6. the fast high-flux bloom spectrum detection device according to claim 5 based on linear light source excitation, it is characterised in that: Described light source is line source (1).
  7. 7. the fast high-flux bloom spectrum detection device according to claim 5 based on linear light source excitation, it is characterised in that: Position by adjusting imaging spectrometer keeps the signal wire and imaging spectrometer of the line source or sample emission on sample Slit keeping parallelism.
  8. A kind of 8. detection using the fast high-flux bloom spectrum detection device based on linear light source excitation as claimed in claim 5 Method, it is characterised in that the data cube of the step number of the number * steppings of the number * area array cameras horizontal pixel point of band utilizes Spectral information divergence algorithm is analyzed data:
    1) to the spectrum of each point in data cube, it is normalized by its spectral maximum;
    2) data cube after normalization is directed to, seeks the spectrum probability of each point;
    3) by spectrum probability a little be added, then seek its spectrum probability average of each sample, in described data cube, Calculate the spectrum curl value for the spectrum mathematical expectation of probability that each sample is each put;
    4) be directed to data cube in a more all kinds of samples of specific spatial point curl value and demarcate;
    5) number of each demarcating element is counted, it is calculated and accounts for matrix ratio, certain a kind of sample in mixture is calculated according to ratio Mass fraction.
  9. 9. the detection method of the fast high-flux bloom spectrum detection device according to claim 8 based on linear light source excitation, It is characterized in that:The calculation formula of spectrum curl in described step (4) isWherein, SID (x | | y) represents vector x, relative to amount y curl value, pl,qlEach comfortable wavelength X of spectral vector x, y is represented respectivelylThe spectrum probable value at place.
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CN109799222A (en) * 2019-01-17 2019-05-24 华东师范大学 A kind of image-pickup method of Raman face battle array EO-1 hyperion
CN111982279A (en) * 2019-05-21 2020-11-24 罗伯特·博世有限公司 Optical illumination device for illuminating a sample, optical analysis device for illuminating and analyzing a sample, and method for operating the same
CN111521561A (en) * 2020-06-16 2020-08-11 苏州优函信息科技有限公司 Multi-mode microscopic hyperspectral imager

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