JP5424108B2 - Raman imaging equipment - Google Patents

Description

  The present invention relates to a Raman imaging apparatus that inspects a part to be inspected by irradiating the part to be inspected with inspection light such as Raman excitation laser light, and spectroscopically analyzing the reflected or scattered light.

In murals and paintings, or in cultural assets such as temples and shrines, historical cultural assets have been repaired as necessary due to corruption and damage over time. When restoring, it is desirable to use the same materials and paints as at the time of creation of the cultural property because of the historical background of the cultural property to be restored. Therefore, when restoring cultural properties, it is necessary to inspect, analyze, and identify the materials and paints used. In addition, when conducting research on cultural property preservation methods, research on cultural history such as the origin of materials (production areas), distribution channels, etc. ing.
When performing analysis of such cultural properties, in order to collect samples for analysis, it is often strictly limited to damage some of the valuable cultural properties. Moreover, it is desirable to perform the inspection at a place where the cultural property is installed, that is, without moving the cultural property.

Conventionally, non-destructive inspection of cultural properties has been performed using a fluorescent X-ray analysis method that performs elemental analysis using fluorescent X-rays generated when the cultural properties are irradiated with X-rays. As such a technique, for example, a technique described in Patent Document 1 (Japanese Patent Laid-Open No. 2004-340750) is known.
In Patent Document 1 (Japanese Patent Application Laid-Open No. 2004-340750), in a measurement object constituting a cultural property, a Raman spectrum obtained by performing a Raman spectroscopic analysis on the measurement object that has been artificially altered is altered. A technique is described in which a Raman spectrum obtained by performing a Raman spectroscopic analysis on a non-measured object is evaluated for alteration. In the technique described in Patent Document 1, when confirming the material of the object of the alteration evaluation of the cultural property itself, the material is identified by the fluorescent X-ray method or the X-ray diffraction method.

JP 2004-340750 A (“0023” to “0025”, “0035”)

  In the X-ray fluorescence analysis method as in the prior art, it is possible to perform elemental analysis of substances constituting cultural assets, but only to analyze what elements (carbon, oxygen, nitrogen, etc.) are contained. There is a problem that the structural information regarding the structure, composition, and compound of the element is poor. That is, there is a problem that it is difficult to identify pigments and the like which are constituents of cultural properties, and it is therefore very difficult to collect sufficient information regarding the origin of materials required for restoration or the like.

Two methods are known for Raman imaging measurement. First, after measuring Raman image data of a specific wavelength for a two-dimensional measurement target region, the wavelength is changed by controlling a filter or the like, and the same region is measured in the same manner. Therefore, when the wavelength region to be measured is widened, there is a problem that it takes a long time for the measurement.
The second is a measurement method called a mapping method, where the region to be inspected is divided into strips (slit, one-dimensional line), the Raman spectrum of the region is measured simultaneously, and then the measurement region is moved. Measure in the same way. In this method, since the measurement site is moved and sequentially measured, there is a problem that it takes a long time to measure the entire region of the examination target region.

  In view of the circumstances described above, the present invention has a first technical problem of increasing the measurement speed.

In order to solve the technical problem, the Raman imaging apparatus according to claim 1 comprises:
A laser light source that generates a laser beam to be irradiated on the inspected part;
A dimension conversion unit having a plurality of optical fibers capable of transmitting light therein, wherein one end of the optical fiber is arranged on a two-dimensional plane on an incident unit side on which Raman light scattered from the inspection target part is incident And the other end of the optical fiber at the emission part where the light transmitted through the optical fiber is emitted is on an arc-shaped one-dimensional line based on the elevation angle of the light incident on the spectroscopic part. The dimension conversion unit arranged along
A spectroscopic unit that divides the light emitted from the other end of each optical fiber into spectral components of each wavelength included in the light along a direction intersecting the one-dimensional line;
When the direction of the one-dimensional line is the first axis direction and the direction intersecting the one-dimensional line is the second axis direction, the two-dimensional array is arranged in a plane along the first axis direction and the second axis direction. A plurality of light receiving elements, each light receiving element receiving light of each wavelength split by the light splitting unit,
A position on the one-dimensional line of the dimension conversion unit specified as the position of the light receiving element in the first axis direction, a wavelength component of Raman light specified as the position of the light receiving element in the second axis direction, Spectrum storage means for storing the spectrum intensity received by the light receiving element at the two-dimensional position specified by the position on the one-dimensional line and the wavelength component of Raman light in association with each other;
It is provided with.

The invention according to claim 2 is the Raman imaging apparatus according to claim 1,
In the two-dimensional plane, the dimension conversion unit is arranged in a state where the one ends of the optical fibers are adjacent to each other, and arranged in a state where the other ends of the optical fibers are adjacent to each other on the one-dimensional line,
It is provided with.

The invention according to claim 3 is the Raman imaging apparatus according to claim 2,
When m and n are positive numbers larger than 3, one end of the optical fiber is arranged on a grid-like two-dimensional plane of m rows and n columns, and 1 row 1 column, 2 rows 1 column,. The other end of the optical fiber is one-dimensional in the order of m row 1 column, m row 2 column, (m-1) row 2 column, ... 1 row 2 column, 1 row 3 column, 2 row 3 column, ... The dimension converter arranged along the line;
It is provided with.

In order to solve the technical problem, the Raman imaging apparatus according to claim 4 comprises :
A laser light source that generates a laser beam to be irradiated on the inspected part;
A dimension conversion unit having a plurality of optical fibers capable of transmitting light therein, wherein one end of the optical fiber is arranged on a two-dimensional plane on an incident unit side on which Raman light scattered from the inspection target part is incident And the dimension conversion unit in which the other end of the optical fiber is arranged along a one-dimensional line in the emitting unit from which the light transmitted through the optical fiber is emitted, and
A spectroscopic unit that divides the light emitted from the other end of each optical fiber into spectral components of each wavelength included in the light along a direction intersecting the one-dimensional line;
When the direction of the one-dimensional line is the first axis direction and the direction intersecting the one-dimensional line is the second axis direction, the two-dimensional array is arranged in a plane along the first axis direction and the second axis direction. A plurality of light receiving elements, each light receiving element receiving light of each wavelength split by the light splitting unit,
A position on the one-dimensional line of the dimension conversion unit specified as the position of the light receiving element in the first axis direction, a wavelength component of Raman light specified as the position of the light receiving element in the second axis direction, Spectrum storage means for storing the spectrum intensity received by the light receiving element at the two-dimensional position specified by the position on the one-dimensional line and the wavelength component of Raman light in association with each other;
In the two-dimensional plane, one ends of the optical fibers are arranged adjacent to each other, and the other ends of the optical fibers are arranged adjacent to each other on the one-dimensional line, and m, n Is a positive number greater than 3, one end of the optical fiber is arranged on a grid-like two-dimensional plane of m rows and n columns, and 1 row 1 column, 2 rows 1 column, ..., m row 1 Column, m rows and 2 columns, (m−1) rows and 2 columns,..., 1 row, 2 columns, 1 row, 3 columns, 2 rows, 3 columns,. The dimension conversion unit arranged in a row,
It is provided with.

According to the first and fourth aspects of the present invention, the light that has been dimension-converted from two-dimensional to one-dimensional by the dimension converter is split into spectral components of a plurality of wavelengths, the position of the part to be inspected is the first axis direction, and Since the spectral component can be measured at the same time with the light receiving unit as the second axis direction, the measurement speed can be increased compared to the conventional configuration in which the wavelength needs to be scanned and the conventional configuration in which the measurement site needs to be moved. The speed can be increased. In addition, since a Raman image is obtained based on the laser light applied to the inspected part, the material of the inspected part is not contacted with the inspected part, nondestructive, and without moving the inspection object. Inspect and analyze chemical properties and structural information.
According to the first aspect of the present invention, compared to the case where the other end of the optical fiber is arranged without being based on the elevation angle, it is possible to reduce the influence of the bending of the image due to the diffraction grating used in the spectroscopic unit. .

According to the second and fourth aspects of the invention, the adverse effect of distortion due to the optical system used in the spectroscopic unit is reduced as compared with the case where the other ends of the optical fibers are not adjacent to each other. Can improve the accuracy of inspection and analysis.
According to the third and fourth aspects of the present invention, it is possible to reduce the adverse effect of distortion as compared with the case where the arrangement along the locus of one stroke is not performed in a zigzag pattern in the two-dimensional plane .

FIG. 1 is an overall explanatory view of a cultural property inspection apparatus according to a first embodiment of the present invention. 2A and 2B are schematic explanatory views of the spectroscopic analysis apparatus of the cultural property inspection apparatus according to the first embodiment of the present invention. FIG. 2A is a schematic explanatory view seen from above, and FIG. 2B is a schematic explanatory view seen from the side. FIG. 3 is an explanatory diagram of a mural and an inspected part as an example of a cultural property. FIG. 4 is an explanatory diagram of main parts of the dimension converting unit, the spectroscopic unit, and the light receiving unit of the first embodiment. FIG. 5 is a block diagram of the control unit of the cultural property inspection apparatus 1 according to the first embodiment of the present invention. FIG. 6 is an explanatory diagram of a main image according to the first embodiment, FIG. 6A is an explanatory diagram of a main image before position adjustment work and Raman image capturing, and FIG. 6B is an explanatory diagram of a result image after Raman image capturing. FIG. 7 is an explanatory diagram of an example of a Raman image image according to the first embodiment. FIG. 8 is an explanatory diagram of a main part of the dimension conversion unit of the second embodiment, FIG. 8A is an overall view, FIG. 8B is a diagram viewed from the direction of arrow VIIIB in FIG. 8A, FIG. 8D is a view seen from the direction of the arrow VIIID in FIG. 8A, and FIG. 8E is an explanatory view of the injection section in FIG. 8D. FIG. 9 is an explanatory diagram for comparing and explaining the operation of the second embodiment, FIG. 9A is an explanatory diagram of an incident portion of the dimension conversion section of the first embodiment, and FIG. 9B is an emission of the dimension conversion section of the first embodiment. 9C is an explanatory diagram of an image obtained by separating light emitted from the dimension conversion unit of Example 1, FIG. 9D is an explanatory diagram when the image of FIG. 9C has distortion aberration, and FIG. 9E is a diagram. 9D is an enlarged view of a main part, and FIG. 9F is an explanatory diagram for explaining a position corresponding to the inspected part of the shift cultural property in FIG. 9E. FIG. 10 is an explanatory diagram for comparing and explaining the operation of the second embodiment. FIG. 10A is an explanatory diagram of an incident portion of the dimension conversion unit of the second embodiment. FIG. 10B is an emission of the dimension conversion unit of the second embodiment. FIG. 10C is an explanatory diagram of an image obtained by splitting light emitted from the dimension conversion unit of Example 2, FIG. 10D is an explanatory diagram when the image of FIG. 10C has distortion aberration, and FIG. 10E is a diagram. 10D is an enlarged view of the main part, and FIG. 10F is an explanatory view for explaining the position corresponding to the inspected part of the shift cultural property in FIG. 10E. 11 is an explanatory diagram of a modification of the second embodiment, FIG. 11A is a diagram corresponding to FIG. 10A, and FIG. 11B is a diagram corresponding to FIG. 10B. 12A and 12B are explanatory diagrams of a main part of the dimension conversion unit of the third embodiment, in which FIG. 12A is an overall view, FIG. 12B is a diagram viewed from the direction of arrow XIIB in FIG. 12A, and FIG. 12D is a diagram viewed from the direction of the arrow XIID in FIG. 12A, and FIG. 12E is an explanatory diagram of the injection unit in FIG. 12D.

Next, embodiments of the present invention will be described with reference to the drawings. However, the present invention is not limited to the following embodiments.
In the following description using the drawings, illustrations other than members necessary for the description are omitted as appropriate for easy understanding.

FIG. 1 is an overall explanatory view of a cultural property inspection apparatus according to a first embodiment of the present invention.
In the following description, in order to facilitate understanding, the horizontal direction along the surface of the cultural property as an example of the inspection object is the X direction (left and right direction), and the vertical direction along the surface of the cultural property is the Y direction. (Up and down direction), the direction of approaching and separating from the cultural property will be described as the Z direction (front and back direction).
In FIG. 1, a cultural property inspection apparatus 1 of Example 1 as an example of the Raman imaging apparatus of the present invention has a movable gantry 2. The movable gantry 2 has a plurality of leg portions 2a, and a moving caster 2b with a stopper is supported at the lower end of the leg portion 2a. A handle portion 2c is supported at the upper end of the leg portion 2a so as to be movable up and down. The movable gantry 2 moves the handle portion 2c in the vertical direction (height direction) by a hydraulic lifting device (not shown). The position is adjustable. A rotation mechanism and a tilt mechanism (not shown) are supported on the upper portion of the handle portion 2c. Note that a conventionally known mobile gantry can be used as the mobile gantry 2. For example, a mobile gantry for moving a camera for television photography can be used.
Therefore, the movable gantry 2 can be roughly adjusted by moving the cultural property inspection apparatus 1 in the horizontal direction with respect to the fixed cultural property by moving it with the caster 2b. In addition, the height of the cultural property can be roughly adjusted by adjusting the height in the vertical direction, and the rotation position and tilt can be adjusted by the rotation mechanism and the tilt mechanism.

2A and 2B are schematic explanatory views of the spectroscopic analysis apparatus of the cultural property inspection apparatus according to the first embodiment of the present invention. FIG. 2A is a schematic explanatory view seen from above, and FIG. 2B is a schematic explanatory view seen from the side.
In FIG. 1, a position adjusting device 3 is supported on the rotating mechanism and the tilting mechanism of the movable gantry 2. The position adjusting device 3 is supported on the XZ stage 3a, which can be adjusted in the X-axis direction and the Z-axis direction by a motor (not shown), and the XZ stage 3a, and is adjusted in the Y-axis direction (height direction). Possible Y stage 3b. The position adjusting device 3 according to the first embodiment has a movable range of 200 mm in the X direction, 100 mm in the Y direction, and 100 mm in the Z direction. However, the movable range is not limited to this range, and the design and specifications are not limited. It can be arbitrarily changed according to the above.
A spectroscopic analyzer 4 is supported on the Y stage 3b. 1 and 2, the spectroscopic analyzer 4 has a case 4a. An excitation laser input port 4b is formed at the upper end of the case 4a, and a lens opening 4c is formed on the cultural property B side of the case 4a. An optical fiber (not shown) is connected to the excitation laser input port 4b, and an excitation laser for Raman spectroscopy is input from an external laser light source (not shown) via the optical fiber. In Example 1, a laser beam having a wavelength of 785 nm is used as the excitation laser beam, but an excitation laser beam having a wavelength of visible to near infrared can be used, and may be arbitrarily selected depending on the design, specifications, and the like. Can be changed.

  In FIG. 2, an excitation laser collimator 6 for making the excitation laser beam parallel light is disposed below the excitation laser input port 4b. A reflection optical system 7 that reflects the collimated excitation laser is disposed below the excitation laser collimator 6. An edge filter 8 is disposed behind and obliquely above the reflection optical system 7. The edge filter 8 reflects light having the wavelength of the excitation laser light reflected by the reflection optical system 7 and transmits light having a wavelength shifted from the wavelength of the excitation laser light to the longer wavelength side due to the Raman effect or the like. It is a conventionally well-known filter. Instead of the edge filter, it is also possible to use a notch filter having a property of transmitting light having a wavelength shifted from the wavelength of the excitation laser light in either the long wavelength side or the short wavelength side.

FIG. 3 is an explanatory diagram of a mural and an inspected part as an example of a cultural property.
2 and 3, in front of the edge filter 8, the excitation laser beam reflected by the edge filter 8 is condensed and irradiated on the inspected part B1 of the cultural property B, and the Raman from the inspected part B1. A macro measurement objective lens 9 through which light passes is arranged. In FIG. 2A, a micro measurement objective lens 11 having a narrower inspection area than the macro measurement objective lens 9 is disposed on the side of the objective lens 9, and the macro measurement objective lens 9 is manually or automatically. By moving the micro measurement objective lens 11 to the position (sliding in the left-right direction), the inspection target region can be changed.

  On the side of the reflective optical system 7 and the edge filter 8, a color CCD camera 12 for measuring area monitoring, which is an example of a visible image capturing device, is disposed. A measurement area monitoring optical system 13 having a half mirror 13a and a half mirror 13b is disposed between the measurement area monitoring CCD camera 12 and the edge filter 8 and the like. Is irradiated with illumination light from the illumination 14 composed of white LEDs. The measurement area monitoring optical system 13 is moved manually or automatically so as to be interrupted between the edge filter 8 and the macro measurement objective lens 9, whereby the light of the illumination 14 is transmitted by the half mirror 13a and the half mirror 13b. The reflected image is irradiated onto the inspected part B1, reflected light is reflected by the half mirror 13b, transmitted through the half mirror 13a, and imaged by the color CCD camera 12 for measurement area monitoring, so that a visible image of the inspected part B1 is obtained. In addition, the Raman excitation area of the laser beam can be imaged in color. In Example 1, a 3.33 mm square area is set as the inspected part B1, and the color CCD camera 12 for measuring area monitoring has a size of 7.11 mm × 5.35 mm with the inspected part B1 as the center. It is set so that a visible image of the area can be captured.

FIG. 4 is an explanatory diagram of main parts of the dimension converting unit, the spectroscopic unit, and the light receiving unit of the first embodiment.
In FIG. 2, a dimension conversion unit 15 having a plurality of optical fibers capable of transmitting light is disposed behind the edge filter 8. 2 and 4, the dimension conversion unit 15 of the first embodiment has a configuration in which optical fibers are bundled, and one end of the optical fiber is incident on the incident unit 15a side on which the Raman light that has passed through the edge filter 8 is incident. Are arranged in a lattice shape, that is, on a two-dimensional plane. In addition, on the side of the emitting portion 15b of the dimension converting portion 15 where the light passing through the optical fiber is emitted, the other end of the optical fiber is arranged along a straight line extending in the vertical direction, that is, along a one-dimensional straight line. In the dimension conversion unit 15 of the first embodiment, as illustrated in FIG. 4, the incident unit 15 a is virtually arranged in a 4 × 4 plane in which the numbers for specifying the positions P <b> 1 to P <b> 16 are allocated. In 15b, the optical fibers corresponding to the numbers P1 to P16 are arranged side by side on a straight line extending in the vertical direction.
Therefore, the Raman light input to the dimension converting unit 15 is incident on the incident part 15a of each optical fiber corresponding to the position numbers P1 to P16, and is output as Raman light L1 to L16 from the emitting part 15b of each optical fiber. .
In addition, in order to facilitate understanding of the present invention, the dimension conversion unit 15 is exemplified as an optical fiber assigned with the numbers P1 to P16, but the number of optical fibers is not limited to the exemplified number, any number, That is, the number can be 15 or less or 16 or more.

Behind the dimension converter 15 is a spectroscope 16 on which light that has passed through the dimension converter 15 is incident. The spectroscope 16 has a slit 16 a formed along the vertical direction corresponding to the emission part 15 b of the dimension conversion part 15. In FIG. 2, an optical system 17 is accommodated in the spectroscope 16. The optical system 17 includes a first reflecting mirror 17a that reflects the lights L1 to L16 that have passed through the slit 16a, a collimator 17b that converts the light reflected by the reflecting mirror 17a into parallel light (collimated light), and a collimator 17b It has a grating (or diffraction grating) 17c that splits the collimated light, and a condensing mirror 17d and a second reflecting mirror 17e that reflect the light split by the grating 17c. Therefore, the Raman light L1~L16 from the optical fiber of the position number P1~P16 inputted to the optical system 17 of the spectroscope 16, a wavelength lambda ₁ in grading 17c _{respectively, λ 2, ..., λ n} (n is Integer L greater than 1, for example, n = 100), light L1 (λ ₁ ), L1 (λ ₂ ),..., L1 (λ _n ), L2 (λ ₁ ), ..., L2 (λ _n ),. λ ₁ ),..., L16 (λ _n ) is dispersed and output.
2 and 4, in the actual optical system, the collimator 17b and the condensing mirror 17d are constituted by spherical mirrors or parabolic mirrors, and the Raman lights L1 to L16 from the entrance slit 16a are halfway. Crossed and turned upside down at the light receiving unit (22), but for ease of explanation and understanding, it was shown with a cylindrical mirror or cylindrical mirror instead of a spherical mirror or the like, and the Raman light was also shown without being turned upside down. .

Behind the spectroscope 16, a high-sensitivity CCD camera 22 for Raman measurement, which is an example of a light receiving unit and an example of a Raman image pickup device, is supported on the rear surface of the case 4 a and is output from the spectroscope 16. The received lights L1 (λ ₁ ) to L16 (λ _n ) are received and imaged. The high-sensitivity CCD camera 22 for Raman measurement according to the first embodiment has a light receiving element of 16 pixels corresponding to the position numbers P1 to P16 in the first axis direction along the vertical direction, and the second along the left-right direction. In the axial direction, there are n pixels of light receiving elements according to the number n of the wavelengths λ _{1 to} λ _n that are dispersed. Therefore, the high-sensitivity CCD camera 22 for Raman measurement according to the first embodiment is configured by a CCD camera having light receiving elements arranged in a plane of 16 pixels × n pixels, and the light output from the spectroscope 16. L1 (λ ₁ ) to L16 (λ _n ) are received by each light receiving element.
In the first embodiment, the high-sensitivity CCD camera 22 for Raman measurement includes a region of the inspected part B1 in which a Raman image can be taken because of the focal length of the macro measurement objective lens 9 and other optical system 17. An area of 3.33 mm square is set. The area of the inspected part B1 is not limited to the illustrated area, and can be changed as appropriate according to design, specifications, and the like.

  1 and 2A, a high resolution color CCD camera 26 as an example of a visible image pickup device is fixedly supported on the side surface of the case 4a. The high resolution color CCD camera 26 includes a high resolution zoom lens 27 for enlarging a visible image, and an illumination 28 composed of a white LED provided at the tip of the zoom lens 27. The high-resolution color CCD camera 26 can capture a visible image of an area including the inspected part B1 irradiated with light from the illumination 28. In FIG. 3, the high-resolution color CCD camera 26 according to the first embodiment is set to be capable of capturing a visible image in the visible image capturing area B2 of 10.5 mm × 7.9 mm. Note that the width of the visible image capturing region B2 is not limited to the illustrated width, and can be changed as appropriate according to design, specifications, and the like.

  In FIG. 2A, the center between the center of the visible image photographing area B1b of the high-resolution color CCD camera 26 and the center of the photographable area B1a of the macro measurement objective lens 9 is centered in the horizontal direction (X direction). It is separated by a distance L1. Therefore, after the visible image is captured by the high resolution color CCD camera 26, the region captured by the high resolution color CCD camera 26 and the region captured by the macro measurement objective lens 9 are moved by the distance L1 between the centers. Can be combined. In addition, by moving the XY stage further in the X, -X or Y, -Y directions by the 3.33 mm square shooting area of the Raman image, a wider area was shot with the high resolution color CCD camera 26. It is possible to make the area correspond to the area photographed by the macro measurement objective lens 9.

In FIG. 1, the spectroscopic analysis device 4 and the position adjustment device 3 are controlled by a controller, and a cable 29 extending from the controller and the high-resolution color CCD camera 26 is connected to a notebook personal computer PC as an example of an information processing device. Yes. The notebook personal computer PC includes a main body H1, a display (information display unit) H2, and a keyboard H3 and a mouse H4 as examples of an input device.
The movable gantry 2, the position adjustment device 3, the spectroscopic analysis device 4, the high-resolution color CCD camera 26, the notebook personal computer PC, and the like constitute the cultural property inspection device 1 according to the first embodiment.

(Description of control unit)
FIG. 5 is a block diagram of the control unit of the cultural property inspection apparatus 1 according to the first embodiment of the present invention.
In FIG. 5, the controller and notebook PC, an input / output interface for input / output of signals to / from the outside and adjustment of input / output signal levels, a ROM (read) for storing programs and data for performing necessary processing, and the like. Only memory), a RAM (random access memory) for temporarily storing necessary data, a central processing unit (CPU) that performs processing in accordance with a program stored in the ROM, and a computer having a clock oscillator, etc. Various functions can be realized by executing a program stored in the ROM.

(Control elements connected to the notebook PC)
The main body H1 of the notebook personal computer PC receives signals from input devices such as a keyboard H3 and a mouse H4 and other signal input elements.
Input devices such as a keyboard H3 and a mouse H4 output a signal corresponding to a user input to the main body H1.

(Control element connected to controller C)
The controller C is connected to the XZ stage 3a and Y stage 3b of the position adjusting device 3, the high-sensitivity CCD camera 22 for Raman measurement, the color CCD camera 12 for measurement area monitoring, and other control elements. A signal is being output.
The XZ stage 3a finely adjusts the horizontal positions (X and Z positions) of the spectroscopic analyzer 4 and the high resolution color CCD camera 26.
The Y stage 3 b finely adjusts the position in the height direction (Y direction) of the spectroscopic analyzer 4 and the high resolution color CCD camera 26.
The high sensitivity CCD camera 22 for Raman measurement measures the light output from the spectroscope 16.
The measurement area monitor color CCD camera 12 captures a visible image of the inspected part B1 in accordance with the input.

(Control elements connected to the main body H1 of the notebook personal computer PC)
The main body H1 is connected to the controller C, the high-resolution color CCD camera 26, the display H2, and other control elements, and outputs their operation control signals.
The controller C controls the XZ stage 3a and Y stage 3b of the position adjusting device 3, the high sensitivity CCD camera 22 for Raman measurement, and the color CCD camera 12 for measurement area monitoring in accordance with a control signal from the notebook personal computer PC.
The high resolution color CCD camera 26 captures a visible image of the part B1 to be inspected.
The display H2 displays image information from the notebook personal computer PC.

(Function of controller C)
The controller C has a function of executing processing according to an input signal from the notebook personal computer PC and outputting a control signal to each control element.
That is, the controller C has the following functions.
C1: Position adjusting device control means The position adjusting device control means C1 includes an XZ stage control means C1a for controlling the position of the XZ stage 3a and a Y stage control means C1b for controlling the position of the Y stage 3b. The apparatus 3 is controlled to adjust the positions of the spectroscopic analyzer 4 and the high resolution color CCD camera 26 in the XYZ directions.

C2: Raman measurement camera control means The Raman measurement camera control means C2 controls the Raman measurement high-sensitivity CCD camera 22 to capture a Raman image.
C3: Measurement area monitor camera control means The measurement area monitor camera control means C3 measures the measurement area when the measurement area monitor color CCD camera 12 is used to measure the measurement area of the inspected part B1. The monitor color CCD camera 12 is controlled to capture a visible image of the measurement region.

(Notebook PC function)
The cultural property inspection program AP1 incorporated in the main body H1 of the notebook personal computer PC has a function of executing processing according to input signals from the input devices H3 and H4 and outputting control signals to the control elements C and 26. Have.
The cultural property inspection program AP1 has the following functional means (program modules).

FIG. 6 is an explanatory diagram of a main image according to the first embodiment, FIG. 6A is an explanatory diagram of a main image before position adjustment work and Raman image capturing, and FIG. 6B is an explanatory diagram of a result image after the start of Raman image capturing.
C11: Main Image Display Unit The main image display unit C11 displays the main image G1 (see FIG. 6) on the display H2 serving as a display unit. In FIG. 6A, a main image G1 is a visual image display unit G1a that displays an image taken by the high-resolution color CCD camera 26 and an XZ stage 3a of the position adjusting device 3 for moving in the X direction (lateral direction). X-direction position adjustment button G1b, Y-direction position adjustment button G1c for moving the Y stage 3b in the Y direction (height direction), and XZ stage 3a in the Z direction (front and rear direction, approaching and separating from the inspected part B1) A Z direction position adjustment button G1d for moving the image in the direction to move), a shooting start button G1e for starting shooting of a Raman image, and an end button G1f for ending the cultural property inspection program AP1.
In FIG. 6A, the visible image display section G1a displays an image of the visible image capturing area B2 captured by the high-resolution color CCD camera 26, and a section to be inspected in which a Raman image is captured in the center. A Raman image photographing region display image G1g indicating the region B1 is displayed. As the display image of the visible image display unit G1a, the image (still image) is updated as the position moves.

C12: Imaging position adjusting means The imaging position adjusting means C12 drives the position adjusting device 3 via the controller C in response to an input to the position adjustment buttons G1b to G1d of the main image G1, and thereby the spectral analysis device 4 or The position of the high resolution color CCD camera 26 in the XYZ directions is adjusted.
C13: Camera image photographing means The camera image photographing means C13 receives the position determination button G1e in response to an input from the controller C via the high resolution CCD camera control means C21 of the high resolution color CCD camera 26. A stop image in the visible image capturing area B2 including B1 is captured.

FIG. 7 is an explanatory diagram of an example of a Raman image according to the first embodiment.
C14: Raman image photographing means The Raman image photographing means C14 controls the Raman measurement high-sensitivity CCD camera 22 via the controller C, and the Raman image R1 (FIG. 7). Therefore, in Example 1, Raman light L1 received by each pixel on a plane in which the vertical direction (first axis direction) is positions P1 to P16 and the horizontal direction (second axis direction) is wavelengths λ ₁ to λ _n. A Raman image R <b> _{1 including} values of intensities (spectral intensities) from (λ ₁ ) to L <b> 16 (λ _n ) is captured.

C15: Photographed image storage means The photographed image storage means C15 is a visible still image storage means C15a for storing a visible still image (G1) photographed by the camera image photographing means C13, and a Raman image photographed by the Raman image photographing means C14. And a Raman image storage means (spectrum storage means) C15b for storing the image R1.
The Raman image image storage means C15b includes positions P1 to P16 on the one-dimensional straight line of the dimension conversion unit 15 specified as the position in the first axis direction of each light receiving element of the high sensitivity CCD camera 22 for Raman measurement, It is specified by wavelength components λ _{1 to} λ _{n of} Raman light specified as the position of the light receiving element in the second axis direction, positions P _{1 to} P 16 on a one-dimensional straight line, and wavelength components λ _{1 to} λ _{n of} Raman light. And the spectral intensity received by the light receiving element at a two-dimensional position are stored in association with each other. That is, the vertical direction (first axis direction) is received by the positions P1 to P16, the horizontal direction (second axis direction) is the wavelength λ ₁ to λ _n , and the height direction (third axis direction) is received by each pixel (light receiving element). A three-dimensional Raman image R1 having the spectral intensities of the Raman lights L1 (λ ₁ ) to L16 (λ _n ) is stored.
The photographed image storage means C15 of Example 1 includes a visible still image G1 in the visible image photographing region B2 including information on the Raman image photographing region display image G1g, and a Raman image R1 in the Raman image photographing region display image G1g. Are stored in association with each other.

C16: Result Image Display Unit The result image display unit C16 includes a pixel rearrangement unit C16a, is captured by the Raman image capturing unit C14, and is stored in the captured image storage unit C15 and the Raman image R1 and the visible still image G1. Based on, the result image G2 of the imaging result (inspection result) is displayed on the display H2. In FIG. 6B, the result image G2 of the first embodiment includes a specific wavelength λ _i (1 from the visible image display unit G2a on which the visible still image R2 is displayed and the Raman image R1 stored in the captured image storage unit C15. ≦ i ≦ n) for performing an input for changing the wavelength λ _{i of the} intensity distribution, and an intensity distribution display unit G2b for displaying an intensity distribution image obtained by extracting and calculating the intensity distribution of the Raman light in the region of the inspected part B1 Wavelength change input button G2c and a spectral waveform R2 of wavelengths λ _{1 to} λ _{n at} a specific position Pj (1 ≦ j ≦ 16) from the Raman image R1 stored in the captured image storage means C15 (see FIG. 7). A waveform display part G2d for displaying the extracted and calculated waveform image, a position change input button G2e for performing an input for changing the position Pj for displaying the spectrum waveform R2, and a photographing position again. Having a photographing position resetting button G2f for displaying the main image G1 to constant. In the visible image display unit G2a of the first embodiment, a Raman image photographing region display image G2g indicating the region of the inspected part B1 corresponding to the visible still image G1 is displayed in the center. Further, the frame line of the image corresponding to the specific position Pj in the Raman image photographing region display image G2g is displayed in a highlighted manner (thick line display), and the highlighted frame line is displayed according to the input to the position change input button G2e. The position of is updated. In the first embodiment, the intensity distribution image displayed on the intensity distribution display unit G2b displays a region where the intensity of Raman light is strong in red and a region where the intensity is weak in blue, and the intensity therebetween depends on the intensity. Thus, an image displayed with a color distribution that is displayed in halftone is adopted. The intensity display is not limited to the illustrated color coding, and any display method such as using other colors or displaying in monochrome shades is possible.

C16a: Pixel rearrangement means The pixel rearrangement means C16a displays the Raman image R1 stored in a one-dimensional arrangement based on the Raman image R1 in order to display the intensity distribution image G2b. The data of the positions P1 to P16 are rearranged two-dimensionally in correspondence with the position of the inspected part B1 on the two-dimensional plane, that is, the position of the incident part 15a. That is, the one converted from the two-dimensional to the one-dimensional by the dimension converting unit 15 is inversely converted and returned to the two-dimensional array again.

(Operation of Example 1)
In the cultural property inspection apparatus 1 according to the first embodiment having the above-described configuration, the cultural property inspection apparatus 1 can be moved to the place where the cultural property B is installed by the movable mount 2. And the position of the spectroscopic analyzer 4 can be roughly adjusted with respect to the to-be-inspected part B1 which wants to test | inspect the cultural property B with the movable mount frame 2. FIG.
In a state where the position of the spectroscopic analyzer 4 is roughly adjusted, the cultural property inspection program AP1 is started, and the position adjusting device 3 is controlled while viewing the visible image display portion G1a, and the spectroscopic analyzer 4 for the inspected portion B1. Can be fine-tuned. At this time, the Raman image shooting area display image G1g is displayed in a square frame on the visible image display portion G1a of the main image G1, and the position where the user wants to take a Raman image is adjusted. The user can easily determine whether or not they match.

  In addition, when the imaging of the Raman image R1 is started and the excitation laser beam is irradiated to the inspected part B1, Raman scattered light is generated based on the vibration of molecules such as the material, paint, and attached matter of the inspected part B1. To do. When the light from the part B1 to be inspected passes through the edge filter 8, the reflected light of the excitation laser light is blocked, and only the Raman light passes through and enters the dimension converting unit 15. On the input unit 15 a side of the dimension conversion unit 15, one end of the optical fiber is arranged in a planar shape corresponding to the pixels obtained by virtually dividing the planar inspection target part B 1, and the output unit 15 b of the dimension conversion unit 15. On the side, the other end of the optical fiber is arranged on a one-dimensional straight line. Therefore, the dimension conversion unit 15 converts the two-dimensional data on the input unit 15a side into the one-dimensional data on the output unit 15b side.

Lights L1 to L16 at position numbers P1 to P16 from the optical fibers arranged on a one-dimensional straight line are incident on the spectroscope 17, and light L1 (λ ₁ ) having wavelengths λ _{1 to} λ _{n by} the grating 17c, respectively. To L16 (λ _n ). The split light beams L1 (λ ₁ ) to L16 (λ _n ) are received by the high sensitivity CCD camera 22 for Raman measurement, and a Raman image image R1 is captured. The photographed Raman image R1 is stored in correspondence with the visible still image G1.
Therefore, the Raman spectra of the wavelengths λ _{1 to} λ _{n at} the positions of the position numbers P _{1 to} P 16 can be measured at once by the high sensitivity CCD camera 22 for Raman measurement. As a result, by using a filter or the like, after measuring the spectral intensity of the position of the position number P1~P16 for the wavelength lambda _1, the spectral intensity of the position of the position number P1~P16 for another wavelength lambda ₂ by changing the filter Compared to the conventional configuration in which all the spectral intensities of the wavelengths λ _{1 to} λ _n are measured by repeating the measurement process, the spectral intensities at the positions of the position numbers P _{1 to} P 16 for the wavelengths λ _{1 to} λ _n are measured at a time. With the configuration of Example 1 that can be measured, measurement can be performed in a short time, and the measurement speed can be increased.

Further, the captured Raman image R1 is subjected to data processing, and the spectral intensity distribution image G2b of the part B1 to be inspected at a specific wavelength λ _i (i is any one of 1 to n) to be displayed, or position numbers P1 to P1. An image G2d of the Raman spectrum waveform R2 at a specific position Pj (j is one of 1 to 16) of the cultural property B in P16 can be obtained and displayed on the display H2, and at this time, the correspondence is made. By referring to the visible still image G1, the position of the cultural property B can be easily determined and recognized. As a result, the chemical property of the cultural property B can be determined by using the Raman spectrum R2 as compared with the case of performing elemental analysis using X-rays. For example, the surface of the inspected part B1 of the cultural property B can be identified. The amount of moisture and impurities contained in the material can also be specified.
Thereby, for example, by collecting Raman spectrum data in advance for each material type and production area, storing it in a database, and comparing it with the obtained Raman spectrum R2, a mural as an example of the cultural property B can be obtained. It is possible to specify the type and place of production of the drawn material. When conducting research, restoration, or preservation of cultural history such as the origin of cultural property B, it is possible to use any material paint, even if it is the same color paint. It can be judged whether it is desirable to use it. Similarly, regarding the cultural property B other than the mural, for example, the Raman spectrum R2 of a pillar such as a shrine or a Buddhist temple is obtained and compared, whereby the material and the period can be specified.

FIG. 8 is an explanatory diagram of a main part of the dimension conversion unit of the second embodiment, FIG. 8A is an overall view, FIG. 8B is a diagram viewed from the direction of arrow VIIIB in FIG. 8A, FIG. 8D is a view seen from the direction of the arrow VIIID in FIG. 8A, and FIG. 8E is an explanatory view of the injection section in FIG. 8D.
In the description of the second embodiment, components corresponding to those of the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.
The second embodiment is different from the first embodiment in the following points, but is configured in the same manner as the first embodiment in other points.

In FIG. 8, as shown in FIG. 8C, the incident part 31a of the dimension converting part 31 of Example 2 has one end 32 of an optical fiber arranged on a 16-by-16 grid on a two-dimensional plane. That is, the dimension conversion unit 31 of the second embodiment includes 256 optical fibers of 16 × 16. As shown in FIG. 8C, in the emission unit 31 b of the dimension conversion unit 31, the other end 33 of each optical fiber is arranged along a one-dimensional line of 1 row × 256 columns. 8C and 8E, when the arrangement position of one end 32 of each optical fiber in the two-dimensional plane is set to m rows and n columns, the other end 33 has one row and one column, two rows and one as shown in FIG. 8E. .., 16 rows and 1 column, 16 rows and 2 columns, 15 rows and 2 columns,..., 1 row and 2 columns, 1 row and 3 columns,.
Therefore, on the one end 32 side corresponding to the arrangement on the other end 33 side, the first column is arranged in order from the first row and the first column to the 16th row and the first column on the two-dimensional plane, and then the second column is the first row and the second column. It is arranged in order from 16 rows and 2 columns to 1 row and 2 columns, not from. In the third and subsequent columns, the odd columns are arranged in the same manner as the first column, and the even columns are arranged in the same manner as the second column. That is, in the second embodiment, unlike the first embodiment, the two-dimensional plane is arranged along a trajectory written in a zigzag manner. Therefore, as in the first embodiment, for example, the one end 32 side of the optical fiber is not adjacent to each other in a two-dimensional plane such as 1 row 1 column,..., 16 rows 1 column, 1 row 2 columns,. ,..., 16 rows and 1 column, 16 rows and 2 columns,..., Are arranged adjacent to each other on the two-dimensional plane and also adjacent to the other end 33 side of the optical fiber.

(Operation of Example 2)
FIG. 9 is an explanatory diagram for comparing and explaining the operation of the second embodiment, FIG. 9A is an explanatory diagram of an incident portion of the dimension conversion section of the first embodiment, and FIG. 9B is an emission of the dimension conversion section of the first embodiment. 9C is an explanatory diagram of an image obtained by separating light emitted from the dimension conversion unit of Example 1, FIG. 9D is an explanatory diagram when the image of FIG. 9C has distortion aberration, and FIG. 9E is a diagram. 9D is an enlarged view of a main part, and FIG. 9F is an explanatory diagram for explaining a position corresponding to the inspected part of the shift cultural property in FIG. 9E.
FIG. 10 is an explanatory diagram for comparing and explaining the operation of the second embodiment. FIG. 10A is an explanatory diagram of an incident portion of the dimension conversion unit of the second embodiment. FIG. 10B is an emission of the dimension conversion unit of the second embodiment. FIG. 10C is an explanatory diagram of an image obtained by splitting light emitted from the dimension conversion unit of Example 2, FIG. 10D is an explanatory diagram when the image of FIG. 10C has distortion aberration, and FIG. 10E is a diagram. 10D is an enlarged view of the main part, and FIG. 10F is an explanatory view for explaining the position corresponding to the inspected part of the shift cultural property in FIG. 10E.
In FIGS. 9 and 10, the ends of the optical fibers are described not in a circular form but in a lattice form in order to simplify the description of the drawings.

In the cultural property inspection apparatus 1 according to the second embodiment having the above-described configuration, the light from the inspected part B1 of the cultural property B is incident on the dimension converting unit 31, and the light emitted from the emitting unit 31b of the dimension converting unit 31 is , Passing through the optical system 17.
In FIG. 9, as in the first embodiment, the injection unit 15 b has 1 row, 1 column, 2 rows, 1 column, 3 rows, 1 column,..., 16 rows, 1 column, 1 row, 2 columns, 2 as shown in FIG. In a configuration in which rows 2 columns,..., 16 rows 2 columns, 1 rows 3 columns,... Are arranged in this order, the image after spectroscopy becomes a Raman image image R1 having a lattice arrangement as shown in FIG. At this time, when passing through the optical system 17, depending on the performance and characteristics of the optical system 17, a pincushion type or barrel-shaped distortion (not shown) as shown in FIG. 9D may occur in the image. When distortion occurs, a Raman image R1 ′ in which an example of the distortion indicated by the solid lines in FIGS. 9D and 9E is generated is shown in the Raman measurement high-sensitivity CCD camera 22 as indicated by the broken lines in FIGS. 9D and 9E. There may be a shift with respect to the position of each light receiving element. As shown in FIG. 9E, for example, light having a wavelength λ2 of 1 row and 2 columns may be observed in a light receiving element that should originally receive light of wavelength λ1 of 16 rows and 1 column. In this case, as shown in FIG. 9F, in the inspected part B1 of the original cultural property B, the measurement data at the position of the first row and the second column are measured as the measurement data of the first row and the second column that are greatly displaced. .

On the other hand, in Example 2, as shown in FIG. 10, in the configuration in which the optical fibers are arranged adjacent to each other on both the one end side 32 and the other end side 33, as shown in FIG. For example, in the light receiving element in which light having a wavelength λ1 of 16 rows and 1 column is supposed to be observed, light having a wavelength λ2 of 16 rows and 2 columns is observed. Therefore, as shown in FIG. 10F, in the inspected part B1 of the original cultural property B, measurement data of 16 rows and 2 columns is measured as measurement data of adjacent 16 rows and 1 column.
Therefore, even if distortion occurs, the measurement data observed by each light receiving element of the high sensitivity CCD camera 22 for Raman measurement is observed at the position B1 of the cultural property B in the vicinity. . Therefore, compared to the case where distortion is generated in the configuration of the first embodiment and data at significantly different positions are measured, in the configuration of the second embodiment, even if distortion occurs, measurement data at nearby positions is measured. Therefore, it is possible to reduce the observation of data that are too far apart.

For example, when the position corresponding to 1 row and 2 columns of the cultural property B is blue and the positions corresponding to 16 rows and 1 columns and 16 rows and 2 columns are continuous red, in the configuration of Example 1, the blue observation data is However, in the configuration of Example 2, the red data in the vicinity is measured, and the observation data of each light receiving element is far from the actual observation data of the inspected part B1. Can be reduced.
Therefore, in the dimension conversion unit 31 of the second embodiment, the observation data and the actual inspected part B1 in particular about the direction along the linear direction of the emitting part 31b, that is, the vertical deviation of the image in FIGS. 10D and 10E. Deviation from the position can be reduced.

  In particular, when the wavelength of an excitation laser for Raman spectroscopy is in the visible light region (approximately 400 nm to 800 nm), a high-precision optical system 17 that hardly shows distortion is sold at a relatively low price, and the visible light region. In the case of using the excitation laser beam, the observation of the configuration of Example 1 is possible without much adverse effects of distortion. On the other hand, when the wavelength of the excitation laser light is in the near-infrared region (approximately 800 nm or more), the optical system corresponding to the commercially available near-infrared light has distortion aberration compared to the optical system corresponding to the visible light region. stand out. Therefore, if an optical system with small distortion is used, there is a problem that it becomes a custom-made product and becomes expensive. On the other hand, in Example 2, even when a commercially available low-cost optical system is used, the adverse effect of distortion can be reduced by the configuration of the dimension conversion unit 31.

(Modification of Example 2)
11 is an explanatory diagram of a modification of the second embodiment, FIG. 11A is a diagram corresponding to FIG. 10A, and FIG. 11B is a diagram corresponding to FIG. 10B.
In FIG. 11, in the modified example of the second embodiment, the dimension converting unit 31 ′ is configured so that the other end 33 ′ has 1 row and 1 column, 2 rows and 1 column, 3 rows and 1 column,. ..., 16 rows and 3 columns, ..., 16 rows and 16 columns, 15 rows and 16 columns, ..., 1 row and 16 columns, ... in a two-dimensional plane, one end 32 'spirals from the outer periphery toward the center. Are arranged along the trajectory written in a stroke.
Therefore, in both the modified example of the second embodiment and the second embodiment, the ends of the optical fibers are arranged adjacent to each other on both the one end 32 'side and the other end 33' side.
Therefore, the modified example of the second embodiment has the same operations and effects as the second embodiment.

12A and 12B are explanatory diagrams of a main part of the dimension conversion unit of the third embodiment, in which FIG. 12A is an overall view, FIG. 12B is a diagram viewed from the direction of arrow XIIB in FIG. 12A, and FIG. 12D is a diagram viewed from the direction of the arrow XIID in FIG. 12A, and FIG. 12E is an explanatory diagram of the injection unit in FIG. 12D.
In the description of the third embodiment, components corresponding to those of the first and second embodiments are denoted by the same reference numerals, and detailed description thereof is omitted.
The third embodiment is different from the first and second embodiments in the following points, but is configured in the same manner as the first and second embodiments in other points.

  In FIG. 12, as shown in FIG. 12B and FIG. 12C, the incident portion 41a of the dimension converting unit 41 of the third embodiment has an end 42 of an optical fiber in a two-dimensional plane of 16 rows and 16 columns, as in the second embodiment. Arranged on a grid. Then, as shown in FIGS. 12D and 12E, in the emitting unit 41 b of the dimension converting unit 41, the other end 43 of each optical fiber is arranged along a one-dimensional line of 255 × 1-dimensional straight line S <b> 1. Unlike Example 2, it is arranged along a one-dimensional arcuate curve S2 of 1 × 255 rows. As shown in FIG. 12C, the correspondence between the one end 42 and the other end 43 of each optical fiber is as shown in FIG. 12C: 1 row, 1 column, 2 rows, 1 column, 3 rows, 1 column,. 1 column, 16 rows and 2 columns, 15 rows and 2 columns,..., 1 row and 2 columns, 1 row and 3 columns,.

In FIG. 12B, the radius of curvature R of the arcuate curve S2 on which the other end 43 is arranged is set based on the elevation angle (the depression angle) of the light incident on the grating 17c of the optical system 17. That is, in a general grating (diffraction grating), when the incident angle of light to the grating is α, the diffraction angle is β, the grating constant is σ, the wavelength is λ, and the order is m, the following grating equation (1) ) Holds.
sin α + sin β = m × λ / σ (1)
Here, in the configuration in which the incident light is incident with an elevation angle (or depression angle) with respect to the surface of the grating, when the elevation angle (depression angle) is γ, the following equation (2) is obtained.
cos γ × (sin α + sin β) = m × λ / σ Equation (2)

  Therefore, it can be seen from the equations (1) and (2) that the value of the wavelength λ of the light diffracted at the same diffraction angle β decreases as the value of the elevation angle γ increases from 0 [°]. Therefore, the shift of the value of the wavelength λ in FIGS. 10D and 10E, that is, the shift in the horizontal direction in FIGS. 10D and 10E is likely to occur. Accordingly, in the third embodiment, in order to suppress the shift in the wavelength direction, it is arranged along an arcuate curve having a radius of curvature R according to the elevation angle γ based on the characteristics of the optical system 17 including the grating 17c. Yes. The curvature radius R is observed and derived through experiments or the like and is set in advance.

(Operation of Example 3)
In the cultural property inspection apparatus 1 of Example 3 having the above-described configuration, the other end 43 of the optical fiber is arranged along the arcuate curve S2 corresponding to the elevation angle γ in the emission unit 41b of the dimension conversion unit 41. . Therefore, as compared with the case where the other end 43 of the optical fiber is arranged along the straight line S1, the shift in the wavelength direction due to the grating 17c in distortion is reduced, and the data observed by the high sensitivity CCD camera 22 for Raman measurement is reduced. The shift in the wavelength direction is reduced.
Therefore, even if a low-cost optical system is used, it is possible to perform observation with little adverse effect of the bending of the slit image due to the grating.

(Example of change)
As mentioned above, although the Example of this invention was explained in full detail, this invention is not limited to the said Example, A various change is performed within the range of the summary of this invention described in the claim. It is possible. Modification examples (H01) to (H015) of the present invention are exemplified below.
(H01) In the above embodiment, the color CCD camera 12 for measurement area monitoring and the high-resolution color CCD camera 26 can be shared, and either one can be omitted.
(H02) In the above-described embodiment, the configuration includes the two reflecting mirrors 17a and 17e, the collimator 17b, the grating 17c, and the collecting mirror 17d as an example of the spectroscope. Accordingly, any conventionally known configuration such as increasing or decreasing the number of reflecting mirrors or adding an aperture or a filter can be adopted. In addition, as the collimator 17b and the condensing mirror 17d, it is possible to use a lens that transmits light instead of the reflecting mirror.

(H03) In the above-described embodiment, the configuration in which the grating 17c is fixed has been illustrated. However, the wavelength to be measured is changed by controlling the rotation angle, with the grating 17c being configured to be rotatable about a rotation axis extending in the vertical direction. It is also possible to make it. Thus, for example, first, the rotation after the imaging Raman image of the region of the wavelength lambda ₁ to [lambda] _n, to rotate the grating 17c captures a Raman image of the region of the wavelength λ _{n + 1} ~λ _2n, a further grating 17c As a result, it is possible to capture a Raman image image in the region of wavelengths λ _{2n + 1 to} λ _3n , and a Raman image image in the region of λ ₁ to λ _3n can be captured in three times. Compared to the required conventional configuration, the speed can be greatly increased.

(H04) In the above embodiment, the movable gantry 2 and the position adjusting device 3 are not limited to the configurations exemplified in the embodiment, and any conventionally known configuration can be adopted.
(H05) In the above-described embodiment, the size of the region where the Raman image is captured can be changed according to the design, specifications, etc., and can be a region close to a point.
(H06) In the above embodiment, when capturing a Raman image, the wavelength of the input laser beam is a specific wavelength, but is not limited to this, for example, a light source unit having a different excitation wavelength. Can be used side by side.

(H07) In the above-described embodiment, a high-resolution color CCD camera is used to capture a visible image. However, the present invention is not limited to this. For example, it is shared with a high-sensitivity CCD for Raman measurement and has a dimension on the optical axis. When the conversion unit 15 and the spectroscope 17 and the RGB color filter can be moved in and out, and when capturing a Raman image, the dimension conversion unit 15 or the like is moved on the optical axis to capture a visible image. It is also possible to configure so that a color filter enters.
(H08) In the above-described embodiment, it is desirable to use a high-sensitivity color CCD camera that captures a visible image. However, if only a Raman spectrum or a Raman image is sufficient, it can be omitted.

(H09) In the above-described embodiment, the spectroscopic analyzer 4 is configured by the box-shaped case 4a, and the lens opening 4c is formed to irradiate light and enter reflected light. However, the present invention is limited to this configuration. Instead, for example, one end side of the dimension converting unit 15 configured by a bundle of optical fibers is extended to form a flexible wire-like probe, and measurement is performed by making the tip of the probe face the part to be inspected. It is also possible to configure.
(H010) In the above-described embodiment, the number of light receiving elements of the high sensitivity CCD camera 22 for Raman measurement is set to the same number as the position number and the number of wavelengths. However, the present invention is not limited to this configuration. It is also possible to adopt a configuration in which, for example, light receiving elements for 32 pixels double in the vertical direction are arranged with respect to 16 optical fibers, and one optical fiber is formed by two light receiving elements. It is also possible to configure to measure the light.

(H011) In the above embodiment, the cultural property is exemplified as the inspection object, but the material is not limited to the cultural property, and any substance can be inspected. For example, polymer materials (examination of polymer crystallinity and crystal distribution), chemicals (examination of constituents and impurities), minerals (examination of composition and impurities), living organisms (normal It can also be used for examination of cells and abnormal cells such as cancer cells).
(H012) In the above embodiment, the diffraction grating (grating) is exemplified as the spectroscopic unit. However, the spectroscopic unit is not limited to the grating, and any conventionally known spectroscopic member such as a prism can be used.

(H013) In the embodiment, the configuration of the embodiment 3 can be applied to the embodiment 1.
(H014) In the above-described embodiment, an optical system using a reflective grating, a collimator, and a reflecting mirror has been exemplified. However, the present invention is not limited to this configuration, and an optical system using a transmissive grating, a transmissive lens, or the like is used. It is also possible to adopt. Even when a transmission type grating is used, the diffraction grating equation (2) is satisfied, and the dimension conversion unit 41 can be configured under the same conditions.
(H015) In the above embodiment, the arrangement of the one end 32, 42 and the other end 33, 43 of the optical fiber of the second and third embodiments is not limited to the arrangement illustrated in the embodiment, and can be any arrangement. However, as illustrated in the second embodiment and the modified example of the second embodiment, the two ends 32, 33, 42, and 43 are arranged so as to be adjacent to each other by being arranged along a single stroke trajectory. Is desirable.

1 ... Cultural property inspection equipment,
15, 31, 41 ... dimension conversion unit,
15a, 31a, 41a ... incidence part,
15b, 31b, 41b ... injection part,
17: Spectroscopic part,
22. Light receiving part,
B ... Cultural property,
B1 ... inspected part,
C15b: Spectrum storage means.

Claims (4)

A laser light source that generates a laser beam to be irradiated on the inspected part;
A dimension conversion unit having a plurality of optical fibers capable of transmitting light therein, wherein one end of the optical fiber is arranged on a two-dimensional plane on an incident unit side on which Raman light scattered from the inspection target part is incident And the other end of the optical fiber at the emission part where the light transmitted through the optical fiber is emitted is on an arc-shaped one-dimensional line based on the elevation angle of the light incident on the spectroscopic part. The dimension conversion unit arranged along
A spectroscopic unit that divides the light emitted from the other end of each optical fiber into spectral components of each wavelength included in the light along a direction intersecting the one-dimensional line;
When the direction of the one-dimensional line is the first axis direction and the direction intersecting the one-dimensional line is the second axis direction, the two-dimensional array is arranged in a plane along the first axis direction and the second axis direction. A plurality of light receiving elements, each light receiving element receiving light of each wavelength split by the light splitting unit,
A position on the one-dimensional line of the dimension conversion unit specified as the position of the light receiving element in the first axis direction, a wavelength component of Raman light specified as the position of the light receiving element in the second axis direction, Spectrum storage means for storing the spectrum intensity received by the light receiving element at the two-dimensional position specified by the position on the one-dimensional line and the wavelength component of Raman light in association with each other;
A Raman imaging apparatus comprising: In the two-dimensional plane, the dimension conversion unit is arranged in a state where the one ends of the optical fibers are adjacent to each other, and arranged in a state where the other ends of the optical fibers are adjacent to each other on the one-dimensional line,
The Raman imaging apparatus according to claim 1, further comprising: When m and n are positive numbers larger than 3, one end of the optical fiber is arranged on a grid-like two-dimensional plane of m rows and n columns, and 1 row 1 column, 2 rows 1 column,. The other end of the optical fiber is one-dimensional in the order of m row 1 column, m row 2 column, (m-1) row 2 column, ... 1 row 2 column, 1 row 3 column, 2 row 3 column, ... The dimension converter arranged along the line;
The Raman imaging apparatus according to claim 2, further comprising:   A laser light source that generates a laser beam to be irradiated on the inspected part;
  A dimension conversion unit having a plurality of optical fibers capable of transmitting light therein, wherein one end of the optical fiber is arranged on a two-dimensional plane on an incident unit side on which Raman light scattered from the inspection target part is incident And the dimension conversion unit in which the other end of the optical fiber is arranged along a one-dimensional line in the emitting unit from which the light transmitted through the optical fiber is emitted, and
  A spectroscopic unit that divides the light emitted from the other end of each optical fiber into spectral components of each wavelength included in the light along a direction intersecting the one-dimensional line;
  When the direction of the one-dimensional line is the first axis direction and the direction intersecting the one-dimensional line is the second axis direction, the two-dimensional array is arranged in a plane along the first axis direction and the second axis direction. A plurality of light receiving elements, each light receiving element receiving light of each wavelength split by the light splitting unit,
  A position on the one-dimensional line of the dimension conversion unit specified as the position of the light receiving element in the first axis direction, a wavelength component of Raman light specified as the position of the light receiving element in the second axis direction, Spectrum storage means for storing the spectrum intensity received by the light receiving element at the two-dimensional position specified by the position on the one-dimensional line and the wavelength component of Raman light in association with each other;
  In the two-dimensional plane, one ends of the optical fibers are arranged adjacent to each other, and the other ends of the optical fibers are arranged adjacent to each other on the one-dimensional line, and m, n Is a positive number greater than 3, one end of the optical fiber is arranged on a grid-like two-dimensional plane of m rows and n columns, and 1 row 1 column, 2 rows 1 column, ..., m row 1 Column, m rows and 2 columns, (m−1) rows and 2 columns,..., 1 row, 2 columns, 1 row, 3 columns, 2 rows, 3 columns,. The dimension conversion unit arranged in a row,
  A Raman imaging apparatus comprising: