CN102978693B - A kind of seed chuck structure - Google Patents
A kind of seed chuck structure Download PDFInfo
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- CN102978693B CN102978693B CN201210532876.1A CN201210532876A CN102978693B CN 102978693 B CN102978693 B CN 102978693B CN 201210532876 A CN201210532876 A CN 201210532876A CN 102978693 B CN102978693 B CN 102978693B
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- seed crystal
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Abstract
The invention provides a kind of seed chuck structure.It comprises connecting parts, seed crystal pitman shaft and seed chuck, and connecting parts top is band internal thread cylinder, and is connected with extraneous shift mechanism, and connecting parts bottom is tapped back taper, is connected with seed rod; Seed crystal pitman shaft is the externally threaded cylindrical molybdenum rod of two end band, and cylindrical molybdenum rod upper end is connected with connecting parts, and lower end is connected with seed chuck; Seed chuck comprises two portions.The present invention effectively can fix seed crystal, prevents seed crystal from coming off, and seed crystal and seed chuck, the coaxial growing large-size monocrystalline of seed crystal pitman shaft, can not produce eccentricity issues.In addition, its symmetrical structure be also conducive to seed crystal be heated evenly, reduce stress concentration.
Description
(1) technical field
The present invention relates to the seed chuck structure used in a kind of crystal growth equipment, the seed chuck structure particularly used in a kind of sapphire crystal growth equipment.
(2) background technology
Along with going deep into gradually of being familiar with material, people can pass through various diverse ways artificial-synthetic crystal, and have been widely used in a lot of aspects of human society life.Growing method has a lot, and for Sapphire Crystal Growth, method has crystal pulling method, kyropoulos, heat-exchanging method, EFG technique, falling crucible method etc.In the middle of these growth methods, most all need perfection of crystal is good, defect is few seed crystal as guiding, by the hereditary property that it is good, and then grow high quality, large-size sapphire single-crystal.
For crystal pulling method, kyropoulos, seed crystal is generally right cylinder or rectangular parallelepiped.Be fixed on seed chuck by seed crystal by certain way, seed holder is connected with shift mechanism.After melting sources, provide a condensate depression by cooling to melt liquid level center, melt continues periodic arrangement according to certain rules along seed crystal lower end, continuous crystal growth.Because crystal constantly upwards slowly lifts in necessary for growth, any larger disturbance all likely causes the destruction of atomic arrangement rule, forms lattice defect.Therefore, the connection of seed crystal must be very firm.In addition, due to the development of science and technology, the crystalline size of growth constantly increases, and crystal mass is corresponding increase also, and seed crystal and seed holder all need to bear larger pulling force.Therefore, for avoiding seed crystal in lift process rupture or pull, must design rational seed chuck structure, select applicable seed crystal shape and size, seed crystal finished surface is as far as possible smooth, avoids stress concentration.
Seed crystal is normally tied up in seed holder by current seed crystal mode of connection, but this mode make seed rod and seed crystal right alignment poor, not only can affect crystal mass, and seed crystal also easily comes off.
(3) summary of the invention
The object of the present invention is to provide one effectively can fix seed crystal, prevent seed crystal from coming off, the seed chuck structure of seed crystal and seed chuck, the coaxial growing large-size monocrystalline of seed crystal pitman shaft.
The object of the present invention is achieved like this: it comprises connecting parts, seed crystal pitman shaft and seed chuck, and connecting parts top is band internal thread cylinder, and is connected with extraneous shift mechanism, and connecting parts bottom is tapped back taper, is connected with seed rod, seed crystal pitman shaft is the externally threaded cylindrical molybdenum rod of two end band, and cylindrical molybdenum rod upper end is connected with connecting parts, and lower end is connected with seed chuck, seed chuck comprises two portions, first part's seed chuck top is the first cylinder of band internal thread hole, bottom is the first semicolumn of the special-shaped cavity of band clamping seed crystal, first semicolumn upper end is provided with groove, second section seed chuck is the semicolumn with the first semi-cylindrical in configuration symmetry of first part seed chuck, and the first semicolumn and the second semicolumn external-open have the annular recesses for firm bondage tungsten filament, second section seed chuck semicolumn upper end is provided with corresponding with first part seed chuck first semicolumn upper recess for coordinating the projection of fixing up and down.
The present invention also has some technical characteristics like this:
1, described connecting parts upper bands internal thread cylinder external diameter is 25 ~ 40mm, be highly 10 ~ 20mm, band internal thread cylinder be outside equipped with two relatively for screwing time the flat limit that is fixedly clamped, flat hem width degree is 5 ~ 10mm, band internal thread cylindrical inner wall is provided with screw thread, is connected with extraneous shift mechanism;
2, described back taper height is 25 ~ 35mm, and bottom is provided with through hole, and through-hole wall is provided with screw thread, is connected with seed rod, and bottom back taper, external diameter is 16 ~ 24mm, and internal diameter is 8 ~ 15mm;
3, described seed crystal pitman shaft diameter is the molybdenum rod of 8 ~ 15mm, and molybdenum rod top and bottom are all provided with outside screw;
4, described seed chuck profile is right cylinder, and diameter is 25 ~ 40mm, and overall length is 100 ~ 200mm;
5, the first described semicolumn and the clamping seed crystal of the second semicolumn are inverted trapezoidal hexahedron with special-shaped cavity top, bottom is rectangular parallelepiped, inverted trapezoidal height 5 ~ 20mm, rectangular parallelepiped height 25 ~ 40mm, therebetween inclination angle theta is 5 ~ 15o, rectangular parallelepiped face size 0.1 ~ 0.5mm larger than seed crystal face size;
6, the depth of groove on the first described semicolumn is 3 ~ 6mm, and second section seed chuck second semicolumn upper end is provided with corresponding projection;
7, have outside the first described semicolumn and the second semicolumn that 2 ~ 4 degree of depth for firm bondage tungsten filament are 1 ~ 3mm, width is the groove of 2 ~ 4mm.
Seed chuck structure of the present invention can grow the large size single crystal of weight within 200kg (supplementing large-sized scope and definition).Beneficial effect of the present invention is:
1. seed chuck structure divides three parts, between all adopt and be threaded, detachability is strong;
2. fixing point two portions of seed crystal, top is inverted trapezoidal, can be effectively fixing, prevents seed crystal from coming off; Bottom is the seed crystal of normal rectangle end face, can well fix in the horizontal direction;
If 3. seed crystal upper end inverted trapezoidal part and seed chuck inner hole are good not, can be rotated by seed rod lower thread, withstand seed crystal upper end, play effect fixing up and down;
4. seed chuck two portions have groove and the projection of cooperation, play auxiliary effect fixing up and down, prevent slippage.
5., compared with being strapped in seed chuck side with traditional seed crystal, seed crystal and seed chuck in this seed chuck structure, seed crystal pitman shaft are coaxial, can not produce eccentricity issues;
6. seed crystal is fixed on seed chuck center, be heated and stressed evenly, reduce thermal stresses and stress concentration.
(4) accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is seedchuck structure schematic diagram.
(5) embodiment
Below in conjunction with embodiment, the present invention is further illustrated:
Composition graphs 1-Fig. 2, the present embodiment comprises connecting parts 1, seed crystal pitman shaft 2 and seed chuck 3, connecting parts 1 top is band internal thread cylinder, band internal thread cylinder external diameter is 25 ~ 40mm, be highly 10 ~ 20mm, band internal thread cylinder be outside equipped with two relatively for screwing time the flat limit that is fixedly clamped, flat hem width degree is 5 ~ 10mm, band internal thread cylindrical inner wall is provided with screw thread, is connected with extraneous shift mechanism; Connecting parts 1 bottom is tapped back taper, is connected with seed crystal pitman shaft; Back taper height is 25 ~ 35mm, and bottom is provided with through hole, and through-hole wall is provided with screw thread, is connected with seed rod, and bottom back taper, external diameter is 16 ~ 24mm, and internal diameter is 8 ~ 15mm; Seed crystal pitman shaft 2 is the externally threaded cylindrical molybdenum rod of two end band, and cylindrical molybdenum rod upper end is connected with connecting parts 1, and lower end is connected with seed chuck, and molybdenum rod diameter is 8 ~ 15mm, and molybdenum rod top and bottom are all provided with outside screw; Seed chuck profile is right cylinder, diameter is 25 ~ 40mm, overall length is 100 ~ 200mm, seed chuck comprises two portions, first part's seed chuck top is the first cylinder 9 of band internal thread hole, bottom is the first semicolumn 8 of the special-shaped cavity 6 of band clamping seed crystal, clamping seed crystal is inverted trapezoidal hexahedron with special-shaped cavity 6 top, bottom is rectangular parallelepiped, inverted trapezoidal height 5 ~ 20mm, rectangular parallelepiped height 25 ~ 40mm, inclination angle theta is 5 ~ 15o therebetween, rectangular parallelepiped face size 0.1 ~ 0.5mm larger than seed crystal face size; First semicolumn upper end is provided with groove, depth of groove is 3 ~ 6mm, second section seed chuck and first part's seed chuck substructure are symmetrical arranged, and have 2 ~ 4 annular recessess 5 for firm bondage tungsten filament outside the first semicolumn and the second semicolumn, the degree of depth is 1 ~ 3mm, width is 2 ~ 4mm, and second section seed chuck second semicolumn upper end is provided with corresponding with first part seed chuck first semicolumn upper recess for coordinating the projection 7 of fixing up and down.
The present embodiment is for the square seed crystal of 18 × 18 × 140mm.Connecting parts Upper cylindrical shape cylinder external diameter is 30mm, is highly 15mm, and the outer two flat hem width degree of cylinder are 8mm.Back taper height is 30mm, and bottom back taper, external diameter is 20mm, and internal diameter is 12mm; Seed crystal pitman shaft diameter is the molybdenum rod of 12mm, and upper end is connected with connecting parts, and lower end is connected with seed chuck; Seed chuck diameter 35mm, overall length is 150mm.6 is the through hole of clamping seed crystal, top inverted trapezoidal hexahedron height 10mm, rectangular height 35mm, and between inverted trapezoidal and rectangular parallelepiped, inclination angle theta is 10o, and rectangular parallelepiped face size is the square of 18.2mm; Seed chuck groove-protrusions match place depth of groove is 5mm, is highly 15mm.Have three annular recessess outside seed chuck lower cylindrical, groove depth 2.5mm, wide 3.5mm, be repeatedly wound around bondage with diameter 0.5mm tungsten filament.
Claims (1)
1. a seed chuck structure, is characterized in that it comprises connecting parts, seed crystal pitman shaft and seed chuck, and connecting parts top is band internal thread cylinder, and is connected with extraneous shift mechanism, and connecting parts bottom is tapped back taper, is connected with seed rod, seed crystal pitman shaft is the externally threaded cylindrical molybdenum rod of two end band, and cylindrical molybdenum rod upper end is connected with connecting parts, and lower end is connected with seed chuck, seed chuck comprises two portions, first part's seed chuck top is the first cylinder of band internal thread hole, bottom is the first semicolumn of the special-shaped cavity of band clamping seed crystal, first semicolumn upper end is provided with groove, second section seed chuck is the semicolumn with the first semi-cylindrical in configuration symmetry of first part seed chuck, and the first semicolumn and the second semicolumn external-open have the annular recesses for firm bondage tungsten filament, second section seed chuck semicolumn upper end is provided with corresponding with first part seed chuck first semicolumn upper recess for coordinating the projection of fixing up and down, back taper bottom is provided with through hole, through-hole wall is provided with screw thread, be connected with seed rod, molybdenum rod top and bottom are all provided with outside screw, the clamping seed crystal of the first semicolumn and the second semicolumn is inverted trapezoidal hexahedron with special-shaped cavity top, therebetween inclination angle theta is 5 ~ 15o, and the depth of groove on the first semicolumn is 3 ~ 6mm, and second section seed chuck second semicolumn upper end is provided with corresponding projection, 2 ~ 4 grooves for firm bondage tungsten filament are had outside first semicolumn and the second semicolumn.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210532876.1A CN102978693B (en) | 2012-12-11 | 2012-12-11 | A kind of seed chuck structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210532876.1A CN102978693B (en) | 2012-12-11 | 2012-12-11 | A kind of seed chuck structure |
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| Publication Number | Publication Date |
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| CN102978693A CN102978693A (en) | 2013-03-20 |
| CN102978693B true CN102978693B (en) | 2015-10-28 |
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| CN201210532876.1A Active CN102978693B (en) | 2012-12-11 | 2012-12-11 | A kind of seed chuck structure |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103469297A (en) * | 2013-07-25 | 2013-12-25 | 浙江晶盛机电股份有限公司 | Sapphire seed chuck with double positioning pins |
| CN108203842A (en) * | 2016-12-20 | 2018-06-26 | 深圳市晶格材料科技有限公司 | A kind of crystal growth inexpensive seedholder of easily assembling |
| CN107779947A (en) * | 2017-11-28 | 2018-03-09 | 浙江晶盛机电股份有限公司 | A kind of single crystal furnace seed crystal chuck structure |
| CN111778558A (en) * | 2020-07-21 | 2020-10-16 | 哈尔滨秋硕半导体科技有限公司 | Conical seed crystal structure for growing sapphire single crystal |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2578342Y (en) * | 2002-10-15 | 2003-10-08 | 北京有色金属研究总院 | Seed crystal holder for monocrystal silicon growth by straight pull process |
| CN201301358Y (en) * | 2008-11-28 | 2009-09-02 | 北京有色金属研究总院 | A novel seed crystal chuck |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58208194A (en) * | 1982-05-28 | 1983-12-03 | Fujitsu Ltd | Method for holding seed crystal for growing single crystal |
| JPS59131596A (en) * | 1983-01-18 | 1984-07-28 | Hitachi Metals Ltd | Tool for supporting seed crystal |
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2012
- 2012-12-11 CN CN201210532876.1A patent/CN102978693B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2578342Y (en) * | 2002-10-15 | 2003-10-08 | 北京有色金属研究总院 | Seed crystal holder for monocrystal silicon growth by straight pull process |
| CN201301358Y (en) * | 2008-11-28 | 2009-09-02 | 北京有色金属研究总院 | A novel seed crystal chuck |
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| CN102978693A (en) | 2013-03-20 |
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