CN102976123A - Feeding mechanism of chamfering device - Google Patents

Feeding mechanism of chamfering device Download PDF

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Publication number
CN102976123A
CN102976123A CN2012104956833A CN201210495683A CN102976123A CN 102976123 A CN102976123 A CN 102976123A CN 2012104956833 A CN2012104956833 A CN 2012104956833A CN 201210495683 A CN201210495683 A CN 201210495683A CN 102976123 A CN102976123 A CN 102976123A
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China
Prior art keywords
magazine
supporting plate
ball
optical fiber
lift
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Granted
Application number
CN2012104956833A
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Chinese (zh)
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CN102976123B (en
Inventor
耿辉
雷海云
张雪囡
古元甲
刘顺玲
邢玉军
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Zhonghuan Leading Semiconductor Technology Co ltd
Tianjin Zhonghuan Advanced Material Technology Co Ltd
Original Assignee
Tianjin Huanou Semiconductor Material Technology Co Ltd
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Publication date
Application filed by Tianjin Huanou Semiconductor Material Technology Co Ltd filed Critical Tianjin Huanou Semiconductor Material Technology Co Ltd
Priority to CN201210495683.3A priority Critical patent/CN102976123B/en
Publication of CN102976123A publication Critical patent/CN102976123A/en
Application granted granted Critical
Publication of CN102976123B publication Critical patent/CN102976123B/en
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Abstract

The invention provides a feeding mechanism of a chamfering device. The feeding mechanism comprises four material boxes, a supporting board, a rotating bracket, a rotating motor, guide rods, a lifting platform, a ball screw, a stepping motor and optical fiber photoelectric induction switches, wherein the four material boxes are all arranged on the supporting board, the material boxes are provided with the optical fiber photoelectric induction switches, the rotating bracket and the rotating motor are arranged under the supporting board, the rotating bracket is connected with the rotating motor, three guide rods are also arranged under the supporting board, the lower ends of the guide rods are all fixedly arranged on the lifting platform, the lifting platform and the ball screw are connected through ball nuts, and the ball screw is connected with the stepping motor. The feeding mechanism provided by the invention has the beneficial effects that the accuracy and the automation degree of a device are increased, and the purposes of increasing the production efficiency and reducing the labor cost are realized.

Description

A kind of feed mechanism of chamfering device
Technical field
The invention belongs to the semi-conducting material production technical field, especially relate to a kind of feed mechanism of chamfering device.
Background technology
The processing of semi-conducting material all needs to use chamfering device, the feed mechanism of chamfering device generally all adopts single box feeding style in the existing technology, the method that silicon chip in the magazine is delivered to load-transfer device is: spacing of magazine decline, the spacing size is relevant with the every interlamellar spacing of magazine, measure in advance, data input touch-screen; Capacitive approach switch detects confirms whether silicon chip puts in place, if do not put in place, and the spacing that then descends again, if put in place, silicon chip is sent in the load-transfer device running.There is following problem in this material-uploading style: the precision that silicon chip is delivered on the load-transfer device is lower, its reason has: precision is subjected to the impact of silicon box interlamellar spacing, the impact of receiving cassette oad, affected by the silicon chip shape, also be subjected to simultaneously the impact of capacitive approach switch characteristic, the condenser proximity switch is when detecting silicon chip, because factors, accuracy of detection is greatly about about 2mm, precision is low, silicon chip occurring easily carries not happy, silicon chip damages, need the problems such as the human intervention probability is more, so that artificial loading is frequent, operate simultaneously multiple devices such as operating personal, the untimely situation of material loading also occurs easily.
Summary of the invention
The problem to be solved in the present invention provides a kind of chamfering feed mechanism that can realize the feeding of many boxes on-line storage.
For solving the problems of the technologies described above, the technical solution used in the present invention is: a kind of feed mechanism of chamfering device, comprise magazine, supporting plate, rotary bracket, rotating machine, guide rod, bay-lift, ball-screw, stepping motor and optical fiber type photoelectric inductive switch, described magazine has four, all be positioned on the described supporting plate, described magazine is provided with described optical fiber type photoelectric inductive switch, and described supporting plate has described rotary bracket and rotating machine, and described rotary bracket links to each other with described rotating machine; Also be provided with three described guide rods under the described supporting plate, described lower end of the guide rod all is fixed on the described bay-lift, and described bay-lift is connected by ball nut with described ball-screw, and described ball-screw links to each other with described stepping motor.
Further, described magazine is rectangular, one side of each described rectangle magazine has one and transmits mouth, the described opposite side that has the rectangular edges that transmits mouth is the base, all the other both sides are adjacent side, the base of described each magazine is adjacent with the adjacent side of another magazine, and the transmission mouth opening direction of per two adjacent magazines differs 90 degree.
Preferably, described optical fiber type photoelectric inductive switch is the CMOS laser sensor.
Advantage and good effect that the present invention has are: owing to adopt technique scheme, can make chamfering machine realize four magazine feeding functions, be not subjected to the impact of silicon box interlamellar spacing, not receiving cassette oad impact, not affected by the silicon chip shape, whether the high precision CMOS laser sensor can both accurately be measured silicon chip and put in place, survey precision error<0.2MM, because precision improves, so that the silicon chip conveying is more happy, stop because the low silicon chip damaging problem that causes of accuracy of detection, greatly reduced the human intervention probability, thereby raising equipment precision, automation degree of equipment reaches and enhances productivity, reduce the purpose of cost of labor.
Description of drawings
Fig. 1 is structural representation of the present invention
Among the figure:
1, magazine 2, transmission mouth 3, CMOS laser sensor
4, supporting plate 5, rotary bracket 6, rotating machine
7, ball-screw 8, stepping motor 9, guide rod
10, bay-lift
The specific embodiment
As shown in Figure 1, the present invention includes magazine 1, supporting plate 4, rotary bracket 5, rotating machine 6, guide rod 9, bay-lift 10, ball-screw 7, stepping motor 8 and optical fiber type photoelectric inductive switch 3, magazine 1 has four, all is positioned on the supporting plate 4.
Magazine 1 is rectangular, one side of each rectangle magazine 1 has one and transmits mouth 2, and the opposite side that has the rectangular edges that transmits mouth 2 is the base, and all the other both sides are adjacent side, the adjacent side of the base of each magazine 1 and another magazine 1 is adjacent, and transmission mouth 2 opening directions of per two adjacent magazines 1 differ 90 degree.
Also be provided with CMOS laser sensor 3 on the magazine 1, supporting plate 4 has rotary bracket 5 and rotating machine 6, and rotary bracket 5 links to each other with rotating machine 6; Supporting plate also is provided with three guide rods 9 for 4 times, and guide rod 9 lower ends all are fixed on the bay-lift 10, and bay-lift 10 and ball-screw 7 are connected by ball nut, and ball-screw 7 links to each other with described stepping motor 8.
The working process of this example: four silicon chip magazines 1 are put on the supporting plate 4, one of them magazine 1 is aimed at the belt conveyor line, at first rotating machine 6 accurately rotates to the material loading position with magazine 1, accuracy of positioning error<0.09 degree, repeatable accuracy error=0, behind the rotation location, stepping motor 8 drives ball-screw 7 transmissions, drive guide rod 9 by bay-lift 10, rotary bracket 5, supporting plate 4 descends magazine 1 continuously, and high precision CMOS laser sensor 3 detects confirms whether silicon chip puts in place, and the rear deceleration that puts in place is descending, reliable, accurately be put on the load-transfer device, the load-transfer device running is sent silicon chip, until the silicon chip of this magazine 1 is all sent; After working position magazine 1 was got sky, CMOS laser sensor 3 sent signal, and supporting plate 4 is risen to a high position, and rotating machine 6 rotates supporting plate 4 half-twists to working position with another magazine 1 at this moment, and the conveying silicon chip continues to descend; So repeatedly, until after four magazines 1 all get sky, send alerting signal, alert is changed magazine 1.
In addition, the present invention also is provided with 4 of magazine safety switchs, guarantees magazine because certain accidental cause stopping alarm when causing tilting, effectively to protect silicon chip in the box.
Motor control assembly of the present invention: the electric machine control part mainly is the control method that has adopted digital motion controller, Programmable Logic Controller, motor servo driver, servomotor to combine, digital control implement is controlled simultaneously the stroke, speed, delay of a plurality of axles such as carriage, guide rod, ball-screw etc. and is realized various control by program, cooperate the use of motor servo driver and servomotor, so that the Stability and veracity of magazine operation is well ensured.
Debugging software program of the present invention: increase magazine rotation and rotation locate statement, the simultaneously each several part of equipment control has manually and automatic function, and there is state to show, silicon slice rotating chamfer machining initial sum stop position can be adjusted arbitrarily, speed is adjustable, realize as required speed change, a week (360 °) processing can realize friction speed in different intervals.Secondly, when operation went wrong, indicator lamp and buzzer warning reminded operating personal to process, and equipment is out of service, simultaneously alarm content indication warning content and fault on the industry control screen.
More than one embodiment of the present of invention are had been described in detail, but described content only is preferred embodiment of the present invention, can not be considered to be used to limiting practical range of the present invention.All equalizations of doing according to the present patent application scope change and improve etc., all should still belong within the patent covering scope of the present invention.

Claims (3)

1. the feed mechanism of a chamfering device, it is characterized in that: comprise magazine, supporting plate, rotary bracket, rotating machine, guide rod, bay-lift, ball-screw, stepping motor and optical fiber type photoelectric inductive switch, described magazine has four, all be positioned on the described supporting plate, described magazine is provided with described optical fiber type photoelectric inductive switch, described supporting plate has described rotary bracket and rotating machine, and described rotary bracket links to each other with described rotating machine; Also be provided with three described guide rods under the described supporting plate, described lower end of the guide rod all is fixed on the described bay-lift, and described bay-lift is connected by ball nut with described ball-screw, and described ball-screw links to each other with described stepping motor.
2. feed mechanism according to claim 1, it is characterized in that: described magazine is rectangular, one side of each described rectangle magazine has one and transmits mouth, the described opposite side that has the rectangular edges that transmits mouth is the base, all the other both sides are adjacent side, the base of described each magazine is adjacent with the adjacent side of another magazine, and the transmission mouth opening direction of per two adjacent magazines differs 90 degree.
3. feed mechanism according to claim 1, it is characterized in that: described optical fiber type photoelectric inductive switch is the CMOS laser sensor.
CN201210495683.3A 2012-11-28 2012-11-28 A kind of feed mechanism of chamfering device Active CN102976123B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210495683.3A CN102976123B (en) 2012-11-28 2012-11-28 A kind of feed mechanism of chamfering device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210495683.3A CN102976123B (en) 2012-11-28 2012-11-28 A kind of feed mechanism of chamfering device

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CN102976123A true CN102976123A (en) 2013-03-20
CN102976123B CN102976123B (en) 2015-09-02

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111785908A (en) * 2020-06-23 2020-10-16 合肥国轩高科动力能源有限公司 C-shaped rotating platform for taking battery liquid injection shifting fork

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57166250A (en) * 1981-04-03 1982-10-13 Dainippon Screen Mfg Co Ltd Conveyance positioning device of sheet material
US5052540A (en) * 1988-07-26 1991-10-01 Honda Giken Kogyo Kabushiki Kaisha Rotary transfer system
EP1516699B1 (en) * 2003-09-19 2008-10-08 Feintool International Holding Production and/or assembly device
CN101316677A (en) * 2005-11-26 2008-12-03 阿尔冯·凯斯勒专用机械制造有限公司 Workholding device and processing machine equipped with it
CN201195639Y (en) * 2008-04-14 2009-02-18 无锡市易控系统工程有限公司 Full-automatic transmission apparatus for wafer
CN201610323U (en) * 2010-02-10 2010-10-20 无锡先导自动化设备有限公司 Takeout mechanism of silicon chips in box
CN201681805U (en) * 2010-05-14 2010-12-22 常州捷佳创精密机械有限公司 Device automatically lifting and rotating silicon chips
CN102717298A (en) * 2012-06-28 2012-10-10 杜桂林 Intermittently rotational multi-station feeding device
CN203048231U (en) * 2012-11-28 2013-07-10 天津市环欧半导体材料技术有限公司 Feeding mechanism for chamfering equipment

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57166250A (en) * 1981-04-03 1982-10-13 Dainippon Screen Mfg Co Ltd Conveyance positioning device of sheet material
US5052540A (en) * 1988-07-26 1991-10-01 Honda Giken Kogyo Kabushiki Kaisha Rotary transfer system
EP1516699B1 (en) * 2003-09-19 2008-10-08 Feintool International Holding Production and/or assembly device
CN101316677A (en) * 2005-11-26 2008-12-03 阿尔冯·凯斯勒专用机械制造有限公司 Workholding device and processing machine equipped with it
CN201195639Y (en) * 2008-04-14 2009-02-18 无锡市易控系统工程有限公司 Full-automatic transmission apparatus for wafer
CN201610323U (en) * 2010-02-10 2010-10-20 无锡先导自动化设备有限公司 Takeout mechanism of silicon chips in box
CN201681805U (en) * 2010-05-14 2010-12-22 常州捷佳创精密机械有限公司 Device automatically lifting and rotating silicon chips
CN102717298A (en) * 2012-06-28 2012-10-10 杜桂林 Intermittently rotational multi-station feeding device
CN203048231U (en) * 2012-11-28 2013-07-10 天津市环欧半导体材料技术有限公司 Feeding mechanism for chamfering equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111785908A (en) * 2020-06-23 2020-10-16 合肥国轩高科动力能源有限公司 C-shaped rotating platform for taking battery liquid injection shifting fork
CN111785908B (en) * 2020-06-23 2022-02-18 合肥国轩高科动力能源有限公司 C-shaped rotating platform for taking battery liquid injection shifting fork

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Effective date of registration: 20181105

Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12

Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd.

Address before: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Park (outside the ring) Hai Tai Road 12

Patentee before: TIANJIN HUANOU SEMICONDUCTOR MATERIAL TECHNOLOGY Co.,Ltd.

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Effective date of registration: 20191210

Address after: 214200 Dongfen Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province

Co-patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd.

Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd.

Address before: 300384 in Tianjin Binhai high tech Zone Huayuan Industrial Zone (outer ring) Haitai Road No. 12

Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd.

CP03 Change of name, title or address
CP03 Change of name, title or address

Address after: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province

Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd.

Country or region after: China

Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd.

Address before: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province

Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd.

Country or region before: China

Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd.