CN102962743A - 一种可加工非标硅片的倒角机 - Google Patents
一种可加工非标硅片的倒角机 Download PDFInfo
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- CN102962743A CN102962743A CN201210497215XA CN201210497215A CN102962743A CN 102962743 A CN102962743 A CN 102962743A CN 201210497215X A CN201210497215X A CN 201210497215XA CN 201210497215 A CN201210497215 A CN 201210497215A CN 102962743 A CN102962743 A CN 102962743A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 16
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 16
- 239000010703 silicon Substances 0.000 title claims abstract description 16
- 238000000034 method Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000010521 absorption reaction Methods 0.000 abstract 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
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CN201210497215.XA CN102962743B (zh) | 2012-11-28 | 2012-11-28 | 一种可加工非标硅片的倒角机 |
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CN201210497215.XA CN102962743B (zh) | 2012-11-28 | 2012-11-28 | 一种可加工非标硅片的倒角机 |
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CN102962743A true CN102962743A (zh) | 2013-03-13 |
CN102962743B CN102962743B (zh) | 2015-06-24 |
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Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01177941A (ja) * | 1988-01-08 | 1989-07-14 | Kyushu Electron Metal Co Ltd | 薄円板状被加工物の加圧盤に対する位置決め装置 |
JPH0897133A (ja) * | 1994-09-28 | 1996-04-12 | Toshiba Mach Co Ltd | 試料保持装置 |
US20060084371A1 (en) * | 2004-10-14 | 2006-04-20 | Takashi Yoshida | Wafer chuck |
CN101138834A (zh) * | 2006-09-06 | 2008-03-12 | 财团法人工业技术研究院 | 负压真空吸附装置及使用该装置的磨边装置 |
CN101164148A (zh) * | 2005-04-19 | 2008-04-16 | 日本微涂料株式会社 | 半导体晶片周缘的研磨装置及方法 |
CN201788952U (zh) * | 2010-11-02 | 2011-04-06 | 宇骏(潍坊)新能源科技有限公司 | 一种硅片倒角承载装置 |
CN202037502U (zh) * | 2011-04-25 | 2011-11-16 | 宇骏(潍坊)新能源科技有限公司 | 生产太阳能硅片用磨床夹持装置 |
CN203045461U (zh) * | 2012-11-28 | 2013-07-10 | 天津市环欧半导体材料技术有限公司 | 一种可加工非标硅片的倒角机 |
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2012
- 2012-11-28 CN CN201210497215.XA patent/CN102962743B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01177941A (ja) * | 1988-01-08 | 1989-07-14 | Kyushu Electron Metal Co Ltd | 薄円板状被加工物の加圧盤に対する位置決め装置 |
JPH0897133A (ja) * | 1994-09-28 | 1996-04-12 | Toshiba Mach Co Ltd | 試料保持装置 |
US20060084371A1 (en) * | 2004-10-14 | 2006-04-20 | Takashi Yoshida | Wafer chuck |
CN101164148A (zh) * | 2005-04-19 | 2008-04-16 | 日本微涂料株式会社 | 半导体晶片周缘的研磨装置及方法 |
CN101138834A (zh) * | 2006-09-06 | 2008-03-12 | 财团法人工业技术研究院 | 负压真空吸附装置及使用该装置的磨边装置 |
CN201788952U (zh) * | 2010-11-02 | 2011-04-06 | 宇骏(潍坊)新能源科技有限公司 | 一种硅片倒角承载装置 |
CN202037502U (zh) * | 2011-04-25 | 2011-11-16 | 宇骏(潍坊)新能源科技有限公司 | 生产太阳能硅片用磨床夹持装置 |
CN203045461U (zh) * | 2012-11-28 | 2013-07-10 | 天津市环欧半导体材料技术有限公司 | 一种可加工非标硅片的倒角机 |
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CN102962743B (zh) | 2015-06-24 |
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Effective date of registration: 20181224 Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Park (outside the ring) Hai Tai Road 12 Patentee before: TIANJIN HUANOU SEMICONDUCTOR MATERIAL TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20191225 Address after: 214200 Dongfen Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Co-patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: 300384 in Tianjin Binhai high tech Zone Huayuan Industrial Zone (outer ring) Haitai Road No. 12 Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
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Address after: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Country or region after: China Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. Country or region before: China Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |