CN102959876A - 用于固化移动基板上的薄膜的装置 - Google Patents
用于固化移动基板上的薄膜的装置 Download PDFInfo
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Abstract
本发明公开了一种用于固化薄膜的装置。所述装置包括:计算机控制系统、传送系统、闪光灯控制器以及闪光灯。所述固化装置还包括连接在所述闪光灯和所述闪光灯控制器之间的高平均功率、低电感电缆。所述低电感电缆直径较小并且比现有技术更具有挠性,并且包括:以常规六方密堆配置交织的至少一个液体冷却线路和多个前向和返回路径线缆,使得每个线缆邻接到至少一个冷却线路和相反极性的至少一个线缆。
Description
优先权利
本申请根据35U.S.C第119(e)(1)要求在2010年4月8日提交的序号为61/321,910的临时申请的优先权,此处通过引用将其内容并入。
技术领域
本发明一般地涉及固化系统,并且更具体地,涉及用于固化低温基板上的薄膜的装置。
背景技术
通常基板的特性限制薄膜的热处理。由于基板的成本可能是最终产品的整个成本的重要部分,通常优选廉价基板。廉价基板,例如聚合物或纤维素,趋于比更昂贵的基板(例如,玻璃或陶瓷)具有更低的最大处理温度。因此,当在低温度基板上热处理薄膜时,典型地将整个基板叠层加热到基板的最大处理温度,以使处理时间最小化。
一些薄膜材料要求与低温度基板不兼容的更高等级的热处理。解决方案可以是增加处理时间或增加温度的形式。前一解决方案通过降低吞吐量而增加了成本并且对于许多类型的薄膜仍然可能是不足的。后一解决方案通常要求使用能够经受更高处理温度的更为昂贵的基板。因此,从经济的角度来看,两种解决方案都不是所期望的。
发明内容
根据本发明的优选实施方式,一种固化装置包括:计算机控制系统、传送系统、闪光灯驱动器以及闪光灯。所述固化装置还包括连接在所述闪光灯和所述闪光灯驱动器之间的低电感电缆。所述低电感电缆包括:以常规六方密堆配置交织的至少一个液体冷却线路和多个前向和返回路径线缆,使得每个线缆邻接至少一个冷却线路和相反极性的至少一个线缆。
在下面详细书写的说明书中,将会更加了解本发明的所有特征和优点。
附图说明
当结合附图进行阅读时,通过参考下面对示例性实施方式的详细说明可以更好地理解本发明自身,以及优选的使用模式、其他目的和本发明的优点,其中:
图1是根据本发明优选实施方式的固化装置的示意图;
图2是来自图1的固化装置中的闪光灯控制器的框图;
图3a是根据本发明的优选实施方式的在来自图1的固化装置中的低电感电缆的基础电缆单元的横截面示意图;以及
图3b至3d是根据本发明的优选实施方式的由来自图3a基础电缆单元形成的低电感电缆的横截面示意图。
具体实施方式
现在,参照附图并且特别地参照图1,图1描述了根据本发明优选实施方式的固化装置的示意图。如图所示,固化装置100包括传送系统110、具有闪光灯150的闪光灯头120和闪光灯控制器130。低电感电缆125连接在闪光灯控制器130和闪光灯头120之间。传送系统110移动薄膜叠层140通过闪光灯头120,同时闪光灯控制器130将使用脉宽调制(PWM)的电流整形脉冲提供给闪光灯头150,以便整形的脉冲与传送系统110上薄膜的传送速度同步。薄膜叠层140包括设置在诸如聚合物或纸的低温基板上的薄膜。优选地,闪光灯150是利用诸如氙、氪、氩的气体填充的密封闪光灯。闪光灯150还可以是水冷壁闪光灯,有时被称为定向等离子体电弧(DPA)灯。
计算机控制系统160用于控制闪光灯控制器130的功能。计算机控制系统160优选地包括:处理单元、输入设备(例如键盘、鼠标、触摸屏)以及输出设备(例如,监视器),上述设备是所属领域的技术人员所熟知的。
现在参照图2,图2描述了闪光灯控制器30的框图。如图所示,闪光灯控制器130包括编码器210、任意波形生成器220和闪光灯驱动器230。在从传送系统100(从图1)接收到输入(例如传送速度)之后,编码器210在适当时间提供触发信号给任意波形生成器220,用于对位于传送系统110上的薄膜进行固化。利用触发信号,任意波形生成器220能够基于用户输入生成各种形状和时序的波形。任意波形生成器220将波形信号发送给闪光灯驱动器230,其中所述闪光灯驱动器230将波形信号放大以用于驱动闪光灯150(从图1)。
为了响应于输入实时改变由闪光灯系统发射的脉冲序列的形状以影响移动薄膜叠层中产生的热梯度的输入,优选地脉宽调制到闪光灯150的功率。为了执行PWM,需要低电感(至少小于100nH/m并且优选地小于50nH/m)电缆将功率从闪光灯驱动器230传送到闪光灯150。附加地,低电感电缆应当是水冷的,但是具有足够,使得人能够收集且具有小于1英尺的最小弯曲半径,使得其能够被集成到工厂环境中。
理论上,对于本申请,优化的现货供应同轴电缆的电感能够足够低,但是由于同轴终端连接器必须被焊接到防水组件中的内部和外部导体,其难以制造。此外,现货供应同轴电缆的电感和弯曲半径均大于优选情况。
对本申请而言双绞线电缆具有小的电感。此外,双绞线电缆中的缠绕特性使得它们难以为各个线缆提供可靠的冷却。由于线缆是缠绕的,当捆绑在一起时被低效率地打包,这使得外径更大并且因此弯曲半径大于期望。包含交替前向和返回路径线缆的带状电缆具有对于本申请来说过高的电感。
可以被称为低电感多股(LIMS)电缆的低电感电缆125,包括多个前向线缆、返回(return)线缆、和冷却线路,其全部彼此交织形成六方密堆模式。LIMS电缆125具有非常低的电缆(~16nH/m)。LIMS电缆125增加小于200nH的电感到整个系统。LIMS电缆125能够处理最多20kA的电流,具有大于10MW的峰值功率输送以及大于10kW的平均功率输送。LIMS电缆125的直径优选小于5.0cm,并且LIMS电缆125可以小半径(小于0.3米)弯曲。
为了脉宽调制给定总持续时间的脉冲序列,需要每个单独脉冲(即微脉冲)比脉冲序列更短,以提供脉冲整形。此外,由于对于部分时间PWM系统不开启,脉冲需要比提供与脉冲序列同样长度的单个脉冲的源具有更高的强度。因此,固化装置110能够以超过100kW/cm2的峰值功率提供短至10微秒的脉冲长度。此外,用于脉冲的PWM频率可以快至50kHz。
每个脉冲序列包括形成整形脉冲的至少两个微脉冲。对脉冲整形允许为最佳固化定制薄膜叠层150的温度分布。在其最简单的形式中,包括均匀微脉冲的整形脉冲具有六个变量或控制参数:强度(电压)、脉冲长度、在薄膜叠层上任意给定区域中在基板上入射的整形脉冲的平均数量、脉冲重复频率,整形脉冲中微脉冲的数量以及微脉冲的占空比。当微脉冲不均匀时,还应当规定每个微脉冲的持续时间和延迟。这允许任意整形的脉冲的形成。初始地,将控制参数输入到热模拟中,并且这些参数随后用作到闪光灯控制器130的输入。
当整个脉冲功率输送系统的电感小于约2μH时,来自闪光灯150的发射的上升时间变为受限于通过闪光灯150的电流电阻加热等离子体的速率。类似地,来自闪光灯150的发射下降速率变为受限于闪光灯150中等离子体的辐射冷却速率。当整个脉冲功率输送系统的电感大于约2μH,电感开始增加发射的最小上升和下降速率,由此限制用以脉宽调制发射的频率。本申请中的脉冲功率输送系统具有总共约1.2μH的电感,其中约0.2mH来自LIMS电缆125,意味着最大PMW不受电感的限制。用于固化装置100的LIMS电缆125具有下面的要求:
1.低的每单位长度电感(小于50nH/m);
2.低的每单位长度电阻(小于1.0mΩ/m);
3.长的长度(高至10米);
4.适度的额定电压(高至约1200V);
5.激活的液体冷却;
6.高电流容量(高至约20kA);以及
7.用于处理的小弯曲半径(小于0.3m)。
现在,参照图3a,示例了根据本发明优选实施方式的用于形成LIMS电缆125的基础电缆单元的横截面图。如图所示,基础电缆单元300包括:冷却通道313、前向路径电缆311和返回路径电缆312。优选地,前向路径电缆311和返回路径电缆312由铜制成。
图3b示出了可通过组合多个基础电缆单元300形成的三对圆电缆。如图所示,三对圆电缆320包括:形成在冷却通道323周围的前向路径电缆321a-321c以及返回路径电缆322a-322c。此外,前向路径电缆321a-321c彼此与返回路径电缆322a-322c交织且耦合至返回路径电缆322a-322c。
为了响应于输入实时改变由闪光灯150发射的脉冲序列的形状以影响高至300米每分钟的速度的移动基板上的薄膜叠层固化材料中创建的热梯度,低电感、水冷却的电缆组件,例如图3c中示出的12对圆LIMS电缆330和/或图3d中示出的8对平LIMS电缆340,是提供精确时间控制所必要的。
当基板移动并且闪光灯150的整形脉冲频率与传送速度同步时,通过下式来给出频率:
其中:
f=闪光灯整形脉冲速率[Hz]
S=网速度[米/分钟]
O=重叠因子(即,在任意给定点处,由基板接收的闪光灯脉冲的平均数量)
W=在传送方向上的固化头宽度[厘米]
例如,通过100米/分钟的传送速度以及4的重叠因子,以及7厘米的固化头宽度,频闪的整形脉冲速率是95.4Hz。
由于闪光灯150的闪光速率与基板传送速度同步,速度上较小的改变不会明显地改变薄膜的固化。
可以连续地且即时改变到闪光灯150的功率输送系统的8个变量。这允许响应于在固化之前或之后的传感器数据,固化参数实时地适应于在膜或基板的改变。这两个量产生具有优化且一致结果的固化膜,并且具有比现有技术显著更高的产量,其中现有技术要求系统断电(power down)几分钟以改变任意脉冲特性。此外,可以在约0.1%分辨率内连续改变脉冲特性,其导致对固化的更为紧凑的优化控制。现有技术具有离散的改变。
如所介绍的,本发明提供用于固化移动基板上的薄膜的固化装置。
虽然通过参考优选的实施方式来特别地示出和介绍了本发明,所属领域的普通技术人员容易了解,在不脱离本发明的精神和范围的情况下,可以做出形式和细节上的各种改变。
Claims (8)
1.一种用于固化移动基板上的薄膜的装置,所述装置包括:
传送系统,用于移动在基板上设置的薄膜的层;
闪光灯,用于在相对于所述闪光灯移动所述薄膜时将电磁脉冲提供给所述薄膜;
闪光灯控制器,用于调制所述电磁脉冲的脉冲宽度;以及
低电感电缆,连接在所述闪光灯和所述闪光灯控制器之间,其中所述低电感电缆包括:
冷却芯;
多个耦合到所述冷却芯的返回路径电缆;以及
多个耦合到所述冷却芯的前向路径电缆,其中所述前向路径电缆交织地耦合到所述返回路径电缆。
2.根据权利要求1所述的装置,其中以六方密堆配置交织所述冷却芯、所述返回路径电缆和所述前向路径电缆。
3.根据权利要求1所述的装置,其中所述返回路径电缆中的一个邻接冷却芯和所述前向路径电缆中的一个。
4.根据权利要求1所述的装置,其中所述前向路径电缆中的一个邻接冷却芯和所述返回路径电缆中的一个。
5.一种低电感电缆,包括:
冷却芯;
多个耦合到所述冷却芯的返回路径电缆;以及
多个耦合到所述冷却芯的前向路径电缆,其中所述前向路径电缆交织地耦合到所述返回路径电缆。
6.根据权利要求5所述的电缆,其中以六方密堆配置交织所述冷却芯、所述返回路径电缆和所述前向路径电缆。
7.根据权利要求5所述的电缆,其中所述返回路径电缆中的一个邻接所述冷却芯和所述前向路径电缆中的一个。
8.根据权利要求5所述的电缆,其中所述前向路径电缆中的一个邻接所述冷却芯和所述返回路径电缆中的一个。
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JP6168989B2 (ja) | 2017-07-26 |
CN102947013A (zh) | 2013-02-27 |
EP2555879A1 (en) | 2013-02-13 |
WO2011127248A1 (en) | 2011-10-13 |
ES2819216T3 (es) | 2021-04-15 |
KR101893459B1 (ko) | 2018-08-30 |
JP5802739B2 (ja) | 2015-11-04 |
US20110247851A1 (en) | 2011-10-13 |
CA2787451A1 (en) | 2011-10-13 |
CN102947013B (zh) | 2018-02-13 |
EP2555879A4 (en) | 2015-03-25 |
JP2013528768A (ja) | 2013-07-11 |
CA2787451C (en) | 2018-01-02 |
KR101742772B1 (ko) | 2017-06-01 |
EP2556594B1 (en) | 2020-08-12 |
EP2555879B1 (en) | 2017-02-22 |
JP2017041660A (ja) | 2017-02-23 |
WO2011127335A1 (en) | 2011-10-13 |
JP6055051B2 (ja) | 2016-12-27 |
JP2013523499A (ja) | 2013-06-17 |
EP2556594A4 (en) | 2015-03-25 |
JP2016005841A (ja) | 2016-01-14 |
JP6277253B2 (ja) | 2018-02-07 |
KR20130036223A (ko) | 2013-04-11 |
CA2787430A1 (en) | 2011-10-13 |
EP2556594A1 (en) | 2013-02-13 |
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