CN102928622B - Beam island tower shaped piezoresistive type three-axis micro-electro-mechanical system (MEMS) high-range acceleration sensor array - Google Patents
Beam island tower shaped piezoresistive type three-axis micro-electro-mechanical system (MEMS) high-range acceleration sensor array Download PDFInfo
- Publication number
- CN102928622B CN102928622B CN201210392440.7A CN201210392440A CN102928622B CN 102928622 B CN102928622 B CN 102928622B CN 201210392440 A CN201210392440 A CN 201210392440A CN 102928622 B CN102928622 B CN 102928622B
- Authority
- CN
- China
- Prior art keywords
- detected
- downside
- pressure
- detects
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The invention relates to a micro-electro-mechanical system (MEMS) sensor, in particular to a beam island tower shaped piezoresistive type three-axis MEMS high-range acceleration sensor array. By the beam island tower shaped piezoresistive type three-axis MEMS high-range acceleration sensor array, the problems of excessively large coupling, low mechanical precision and excessively large volume and quality of the traditional piezoresistive MEMS acceleration sensor are solved. The beam island tower shaped piezoresistive type three-axis MEMS high-range acceleration sensor array comprises a first six-beam double-island T-shaped structure sensor, a second six-beam double-island T-shaped structure sensor and a four-beam frustum structure sensor, wherein the first six-beam double-island T-shaped structure sensor comprises an X-axis acceleration sensor, a Z-axis low-range acceleration sensor and a first square silicon-based framework; and the second six-beam double-island T-shaped structure sensor comprises a Y-axis acceleration sensor, a Z-axis middle-range acceleration sensor and a second square silicon-based framework. The beam island tower shaped piezoresistive type three-axis MEMS high-range acceleration sensor array is suitable for measuring impact acceleration of high range.
Description
Technical field
The present invention relates to MEMS sensor, specifically a kind of beam island turriform pressure resistance type 3 axis MEMS high-range acceleration transducer array.
Background technology
MEMS(Micro-Electro-Mechanical Systems, MEMS (micro electro mechanical system)) acceleration transducer is widely used in the fields such as vehicle, test, Aero-Space.MEMS acceleration transducer is divided into the types such as piezoelectric type MEMS acceleration transducer, capacitor MEMS acceleration sensor, pressure resistance type MEMS acceleration transducer, tunnel type MEMS acceleration transducer conventionally.Wherein, pressure resistance type MEMS acceleration transducer because of its have size little, without sluggish, dynamic response characteristic and output property is good, wide frequency range, acceleration measurement wide ranges, direct voltage output signal, batch production cost are low, with the compatible series of advantages such as good of silicon integrated circuit planar technology, be most widely used.The types such as three-axis structure that the structure of existing pressure resistance type MEMS acceleration transducer is conventionally divided into single mass structure, monolithic tri-axial structure, is assembled by three single-axis acceleration sensors.Wherein, there is the excessive problem of coupling in single mass structure.There is mechanical precision low and volume and the excessive problem of quality in monolithic tri-axial structure and the three-axis structure being assembled by three single-axis acceleration sensors.Based on this, be necessary to invent a kind of brand-new MEMS acceleration transducer, to solve, existing pressure resistance type MEMS acceleration transducer coupling is excessive, mechanical precision is low and volume and the excessive problem of quality.
Summary of the invention
In order to solve, existing pressure resistance type MEMS acceleration transducer coupling is excessive, mechanical precision is low and volume and the excessive problem of quality, and a kind of beam island turriform pressure resistance type 3 axis MEMS high-range acceleration transducer array is provided in the present invention.
The present invention adopts following technical scheme to realize: beam island turriform pressure resistance type 3 axis MEMS high-range acceleration transducer array, comprises the one or six beam twin islet T shape structure sensor, the two or six beam twin islet T shape structure sensor and four beam frustum structure sensors; Described the one or six beam twin islet T shape structure sensor comprises X-axis acceleration transducer, Z axis low measurement range acceleration sensor and the first square silica-based framework; X-axis acceleration transducer comprises that right side rectangle mass, right side tie-beam, upper right side detect that beam, lower right side detect beam and by the first Wheatstone bridge of first-, tetra-pressure-active elements-form; Right side rectangle mass props up the inner chamber right side that is suspended from the first square silica-based framework; Right side tie-beam arranges along the Width center line of right side rectangle mass, and long limit, the right side of right side rectangle mass is fixed by the right side inwall of right side tie-beam and the first square silica-based framework; Beam is detected along the length direction center line setting of right side rectangle mass in upper right side, and the upper inside walls that the upside minor face of right side rectangle mass detects beam and the first square silica-based framework by upper right side is fixed; Beam is detected along the length direction center line setting of right side rectangle mass in lower right side, and the downside inwall that the downside minor face of right side rectangle mass detects beam and the first square silica-based framework by lower right side is fixed; The first pressure-active element is installed on the left side, upper end that beam is detected in upper right side; The second pressure-active element is installed on the right side, upper end that beam is detected in upper right side; The 3rd pressure-active element is installed on the left side, lower end that beam is detected in lower right side; The 4th pressure-active element is installed on the right side, lower end that beam is detected in lower right side; Z axis low measurement range acceleration sensor comprises that left side rectangle mass, left side tie-beam, upper left side detect that beam, lower-left side detect beam and by the second Wheatstone bridge of five-, eight pressure-active elements-form; Left side rectangle mass props up the inner chamber left side that is suspended from the first square silica-based framework; Left side tie-beam arranges along the Width center line of left side rectangle mass, and long limit, the left side of left side rectangle mass is fixed by the inner left wall of left side tie-beam and the first square silica-based framework; Beam is detected along the length direction center line setting of left side rectangle mass in upper left side, and the upper inside walls that the upside minor face of left side rectangle mass detects beam and the first square silica-based framework by upper left side is fixed; Lower-left side detects beam along the length direction center line setting of left side rectangle mass, and the downside inwall that the downside minor face of left side rectangle mass detects beam and the first square silica-based framework by lower-left side is fixed; The 5th pressure-active element is installed on the upper end central authorities that beam is detected in upper left side; The 6th pressure-active element is installed on the lower end central authorities that beam is detected in upper left side; The lower-left side that is installed on the 7th pressure-active element detects the upper end central authorities of beam; The lower-left side that is installed on the 8th pressure-active element detects the lower end central authorities of beam; Described the two or six beam twin islet T shape structure sensor comprises measuring range acceleration sensor and the second square silica-based framework in Y-axis acceleration transducer, Z axis; Y-axis acceleration transducer comprises that upside rectangle mass, upside tie-beam, upper left side detect that beam, upper right side detect beam and by the 3rd Wheatstone bridge of nine-, 12 pressure-active elements-form; Upside rectangle mass props up the inner chamber upside that is suspended from the second square silica-based framework; Upside tie-beam arranges along the Width center line of upside rectangle mass, and the long limit of the upside of upside rectangle mass is fixed by the upper inside walls of upside tie-beam and the second square silica-based framework; Upper left side detects beam along the length direction center line setting of upside rectangle mass, and the left side minor face of upside rectangle mass detects beam by upper left side and the second square silica-based frame left inwall is fixed; Beam is detected along the length direction center line setting of upside rectangle mass in upper right side, and the right side minor face of upside rectangle mass detects beam by upper right side and the second square silica-based frame right inwall is fixed; The 9th pressure-active element is installed on the left end downside that upper left side detects beam; The tenth pressure-active element is installed on the left end upside that upper left side detects beam; The 11 pressure-active element is installed on the right-hand member downside that beam is detected on right side; The 12 pressure-active element is installed on the right-hand member upside that beam is detected on right side; In Z axis, measuring range acceleration sensor comprises that downside rectangle mass, downside tie-beam, lower left side detect that beam, lower right side detect beam and by the 4th Wheatstone bridge of 13-, 16 pressure-active elements-form; Downside rectangle mass props up the inner chamber downside that is suspended from the second square silica-based framework; Downside tie-beam arranges along the Width center line of downside rectangle mass, and the long limit of the downside of downside rectangle mass is fixed by the downside inwall of downside tie-beam and the second square silica-based framework; Beam is detected along the length direction center line setting of downside rectangle mass in lower left side, and the left side minor face of downside rectangle mass detects beam by lower left side and the second square silica-based frame left inwall is fixed; Beam is detected along the length direction center line setting of downside rectangle mass in lower right side, and the right side minor face of downside rectangle mass detects beam by lower right side and the second square silica-based frame right inwall is fixed; The 13 pressure-active element is installed on the left end central authorities that beam is detected in lower left side; The 14 pressure-active element is installed on the right-hand member central authorities that beam is detected in lower left side; The 15 pressure-active element is installed on the left end central authorities that beam is detected on lower right side; The 16 pressure-active element is installed on the right-hand member central authorities that beam is detected on lower right side; Described four beam frustum structure sensors comprise Z axis high-range acceleration transducer and the 3rd square silica-based framework; Z axis high-range acceleration transducer comprises that square mass, upside detect that beam, downside detect that beam, left side detect that beam, right side detect beam and by the 5th Wheatstone bridge of the 17-the 20 pressure-active element-form; Square mass props up the inner chamber central authorities that are suspended from the 3rd square silica-based framework; Upside detects beam along the center line setting of square mass, and the upper inside walls that the upper side edge of square mass detects beam and the 3rd square silica-based framework by upside is fixed; Downside detects beam along the center line setting of square mass, and the downside inwall that the lower side of square mass detects beam and the 3rd square silica-based framework by downside is fixed; Beam is detected along the center line setting of square mass in left side, and the inner left wall that beam and the 3rd square silica-based framework are detected by left side in the limit, left side of square mass is fixed; Beam is detected along the center line setting of square mass in right side, and the right side inwall that the right edge of square mass detects beam and the 3rd square silica-based framework by right side is fixed; The 17 pressure-active element is installed on the upper end central authorities that upside detects beam; The 18 pressure-active element is installed on the right-hand member central authorities that beam is detected on right side; The 19 pressure-active element is installed on the lower end central authorities that downside detects beam; The 20 pressure-active element is installed on the left end central authorities that beam is detected in left side; The left side outer wall of the outer right wall of the first square silica-based framework and the second square silica-based framework is close to fixing; The left side outer wall of the outer right wall of the second square silica-based framework and the 3rd square silica-based framework is close to fixing.
During work, the first square silica-based framework, the second square silica-based framework, the 3rd square silica-based framework are all made in same silicon base.Specific works process comprises: one, the course of work of the one or six beam twin islet T shape structure sensor is as follows: when the right side rectangle mass sensitivity in X-axis acceleration transducer arrives acceleration, upper right side detects beam and lower right side detection beam is subject to the interior STRESS VARIATION along X-direction (detecting the length direction of beam) of silicon base, STRESS VARIATION signal is exported by the first Wheatstone bridge, realizes thus the acceleration of X-direction is detected.When the left side rectangle mass sensitivity in Z axis low measurement range acceleration sensor arrives acceleration, upper left side is detected beam and is subject to along the STRESS VARIATION of Z-direction (i.e. the direction vertical with silicon base) with lower-left side detection beam, STRESS VARIATION signal is exported by the second Wheatstone bridge, realizes thus the acceleration of Z-direction is detected.Two, the course of work of the two or six beam twin islet T shape structure sensor is as follows: when the upside rectangle mass sensitivity in Y-axis acceleration transducer arrives acceleration, upper left side detects beam and upper right side detection beam is subject to the interior STRESS VARIATION along Y direction (detecting the length direction of beam) of silicon base, STRESS VARIATION signal is exported by the 3rd Wheatstone bridge, realizes thus the acceleration of Y direction is detected.When the downside rectangle mass sensitivity in Z axis in measuring range acceleration sensor arrives acceleration, lower left side is detected beam and is subject to the interior STRESS VARIATION along Z-direction (i.e. the direction vertical with silicon base) of silicon base with lower right side detection beam, STRESS VARIATION signal is exported by the 4th Wheatstone bridge, realizes thus the acceleration of Z-direction is detected.Three, the course of work of four beam frustum structure sensors is as follows: when the square mass sensitivity in Z axis high-range acceleration transducer arrives acceleration, beam is detected in upside detection beam, downside detection beam, left side, right side is detected beam and is subject to the interior STRESS VARIATION along Z-direction (i.e. the direction vertical with silicon base) of silicon base, STRESS VARIATION signal is exported by the 5th Wheatstone bridge, realizes thus the acceleration of Z-direction is detected.Based on said process, beam of the present invention island turriform pressure resistance type 3 axis MEMS high-range acceleration transducer array has been realized the acceleration of X-axis, Y-axis, three directions of Z axis has been detected.Compare with existing pressure resistance type MEMS acceleration transducer, beam of the present invention island turriform pressure resistance type 3 axis MEMS high-range acceleration transducer array tool has the following advantages: compare with single mass structure, turriform pressure resistance type 3 axis MEMS high-range acceleration transducer array coupling in beam of the present invention island is less.Compare with the three-axis structure being assembled by three single-axis acceleration sensors with monolithic tri-axial structure, beam of the present invention island turriform pressure resistance type 3 axis MEMS high-range acceleration transducer array mechanical precision is higher, volume and quality less.In sum, beam of the present invention island turriform pressure resistance type 3 axis MEMS high-range acceleration transducer array is based on brand new, efficiently solves that existing pressure resistance type MEMS acceleration transducer coupling is excessive, mechanical precision is low and volume and the excessive problem of quality.
The present invention is rational in infrastructure, it is ingenious to design, and efficiently solves that existing pressure resistance type MEMS acceleration transducer coupling is excessive, mechanical precision is low and volume and the excessive problem of quality, is applicable to measure the impact acceleration of high range.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is the structural representation of X-axis acceleration transducer of the present invention.
Fig. 3 is the structural representation of Z axis low measurement range acceleration sensor of the present invention.
Fig. 4 is the structural representation of Y-axis acceleration transducer of the present invention.
Fig. 5 is the structural representation of measuring range acceleration sensor in Z axis of the present invention.
Fig. 6 is the structural representation of four beam frustum structure sensors of the present invention.
In figure: the square silica-based framework of 1-first, 2-right side rectangle mass, 3-right side tie-beam, beam is detected in 4-upper right side, beam is detected in 5-lower right side, 6-the first pressure-active element, 7-the second pressure-active element, 8-the 3rd pressure-active element, 9-the 4th pressure-active element, 10-left side rectangle mass, 11-left side tie-beam, beam is detected in 12-upper left side, 13-lower-left side detects beam, 14-the 5th pressure-active element, 15-the 6th pressure-active element, 16-the 7th pressure-active element, 17-the 8th pressure-active element, the square silica-based framework of 18-second, 19-upside rectangle mass, 20-upside tie-beam, 21-upper left side detects beam, 22-detects beam in upper right side, 23-the 9th pressure-active element, 24-the tenth pressure-active element, 25-the 11 pressure-active element, 26-the 12 pressure-active element, 27-downside rectangle mass, 28-downside tie-beam, under 29-, beam is detected in left side, under 30-, beam is detected on right side, 31-the 13 pressure-active element, 32-the 14 pressure-active element, 33-the 15 pressure-active element, 34-the 16 pressure-active element, the square silica-based framework of 35-the 3rd, 36-square mass, 37-upside detects beam, 38-downside detects beam, 39-detects beam in left side, beam is detected on 40-right side, 41-the 17 pressure-active element, 42-the 18 pressure-active element, 43-the 19 pressure-active element, 44-the 20 pressure-active element, the 45-hole of falling turriform.
Embodiment
Beam island turriform pressure resistance type 3 axis MEMS high-range acceleration transducer array, comprises the one or six beam twin islet T shape structure sensor, the two or six beam twin islet T shape structure sensor and four beam frustum structure sensors;
Described the one or six beam twin islet T shape structure sensor comprises X-axis acceleration transducer, Z axis low measurement range acceleration sensor and the first square silica-based framework 1;
X-axis acceleration transducer comprises the first Wheatstone bridge that right side rectangle mass 2, right side tie-beam 3, upper right side are detected beam 4, lower right side detection beam 5 and consisted of first-, tetra-pressure-active element 6-9; 2 of right side rectangle masses are suspended from the inner chamber right side of the first square silica-based framework 1; Right side tie-beam 3 arranges along the Width center line of right side rectangle mass 2, and long limit, the right side of right side rectangle mass 2 is fixed by the right side inwall of right side tie-beam 3 and the first square silica-based framework 1; Beam 4 is detected along the length direction center line setting of right side rectangle mass 2 in upper right side, and the upper inside walls that the upside minor face of right side rectangle mass 2 detects beam 4 and the first square silica-based framework 1 by upper right side is fixed; Beam 5 is detected along the length direction center line setting of right side rectangle mass 2 in lower right side, and the downside inwall that the downside minor face of right side rectangle mass 2 detects beam 5 and the first square silica-based framework 1 by lower right side is fixed; The first pressure-active element 6 is installed on the left side, upper end that beam 4 is detected in upper right side; The second pressure-active element 7 is installed on the right side, upper end that beam 4 is detected in upper right side; The 3rd pressure-active element 8 is installed on the left side, lower end that beam 5 is detected in lower right side; The 4th pressure-active element 9 is installed on the right side, lower end that beam 5 is detected in lower right side;
Z axis low measurement range acceleration sensor comprises the second Wheatstone bridge that left side rectangle mass 10, left side tie-beam 11, upper left side are detected beam 12, lower-left side detection beam 13 and consisted of five-, eight pressure-active element 14-17; 10 of left side rectangle masses are suspended from the inner chamber left side of the first square silica-based framework 1; Left side tie-beam 11 arranges along the Width center line of left side rectangle mass 10, and long limit, the left side of left side rectangle mass 10 is fixed by the inner left wall of left side tie-beam 11 and the first square silica-based framework 1; Beam 12 is detected along the length direction center line setting of left side rectangle mass 10 in upper left side, and the upper inside walls that the upside minor face of left side rectangle mass 10 detects beam 12 and the first square silica-based framework 1 by upper left side is fixed; Lower-left side detects beam 13 along the length direction center line setting of left side rectangle mass 10, and the downside inwall that the downside minor face of left side rectangle mass 10 detects beam 13 and the first square silica-based framework 1 by lower-left side is fixed; The 5th pressure-active element 14 is installed on the upper end central authorities that beam 12 is detected in upper left side; The 6th pressure-active element 15 is installed on the lower end central authorities that beam 12 is detected in upper left side; The lower-left side that is installed on the 7th pressure-active element 16 detects the upper end central authorities of beam 13; The lower-left side that is installed on the 8th pressure-active element 17 detects the lower end central authorities of beam 13;
Described the two or six beam twin islet T shape structure sensor comprises measuring range acceleration sensor and the second square silica-based framework 18 in Y-axis acceleration transducer, Z axis;
Y-axis acceleration transducer comprises the 3rd Wheatstone bridge that upside rectangle mass 19, upside tie-beam 20, upper left side detect beam 21, upper right side detection beam 22 and consist of nine-, 12 pressure-active element 23-26; 19 of upside rectangle masses are suspended from the inner chamber upside of the second square silica-based framework 18; Upside tie-beam 20 arranges along the Width center line of upside rectangle mass 19, and the long limit of the upside of upside rectangle mass 19 is fixed by the upper inside walls of upside tie-beam 20 and the second square silica-based framework 18; Upper left side detects beam 21 along the length direction center line setting of upside rectangle mass 19, and the left side minor face of upside rectangle mass 19 detects beam 21 by upper left side and the second square silica-based framework 18 inner left wall are fixed; Beam 22 is detected along the length direction center line setting of upside rectangle mass 19 in upper right side, and the right side minor face of upside rectangle mass 19 detects beam 22 by upper right side and the second square silica-based framework 18 right side inwalls are fixed; The 9th pressure-active element 23 is installed on the left end downside that upper left side detects beam 21; The tenth pressure-active element 24 is installed on the left end upside that upper left side detects beam 21; The 11 pressure-active element 25 is installed on the right-hand member downside that beam 22 is detected on right side; The 12 pressure-active element 26 is installed on the right-hand member upside that beam 22 is detected on right side;
In Z axis, measuring range acceleration sensor comprises the 4th Wheatstone bridge that downside rectangle mass 27, downside tie-beam 28, lower left side are detected beam 29, lower right side detection beam 30 and consisted of 13-, 16 pressure-active element 31-34; 27 of downside rectangle masses are suspended from the inner chamber downside of the second square silica-based framework 18; Downside tie-beam 28 arranges along the Width center line of downside rectangle mass 27, and the long limit of the downside of downside rectangle mass 27 is fixed by the downside inwall of downside tie-beam 28 and the second square silica-based framework 18; Beam 29 is detected along the length direction center line setting of downside rectangle mass 27 in lower left side, and the left side minor face of downside rectangle mass 27 detects beam 29 by lower left side and the second square silica-based framework 18 inner left wall are fixed; Beam 30 is detected along the length direction center line setting of downside rectangle mass 27 in lower right side, and the right side minor face of downside rectangle mass 27 detects beam 30 by lower right side and the second square silica-based framework 18 right side inwalls are fixed; The 13 pressure-active element 31 is installed on the left end central authorities that beam 25 is detected in lower left side; The 14 pressure-active element 32 is installed on the right-hand member central authorities that beam 25 is detected in lower left side; The 15 pressure-active element 33 is installed on the left end central authorities that beam 26 is detected on lower right side; The 16 pressure-active element 34 is installed on the right-hand member central authorities that beam 26 is detected on lower right side;
Described four beam frustum structure sensors comprise Z axis high-range acceleration transducer and the 3rd square silica-based framework 35;
Z axis high-range acceleration transducer comprises the 5th Wheatstone bridge that square mass 36, upside detect beam 37, downside detection beam 38, left side detection beam 39, right side detection beam 40 and consist of the 17-the 20 pressure-active element 41-44; 36 of masses of square are suspended from the inner chamber central authorities of the 3rd square silica-based framework 35; Upside detects beam 37 along the center line setting of square mass 36, and the upper inside walls that the upper side edge of square mass 36 detects beam 37 and the 3rd square silica-based framework 35 by upside is fixed; Downside detects beam 38 along the center line setting of square mass 36, and the downside inwall that the lower side of square mass 36 detects beam 38 and the 3rd square silica-based framework 35 by downside is fixed; Beam 39 is detected along the center line setting of square mass 36 in left side, and the inner left wall that beam 39 and the 3rd square silica-based framework 35 are detected by left side in the limit, left side of square mass 36 is fixed; Beam 40 is detected along the center line setting of square mass 36 in right side, and the right side inwall that the right edge of square mass 36 detects beam 40 and the 3rd square silica-based framework 35 by right side is fixed; The 17 pressure-active element 41 is installed on the upper end central authorities that upside detects beam 37; The 18 pressure-active element 42 is installed on the right-hand member central authorities that beam 40 is detected on right side; The 19 pressure-active element 43 is installed on the lower end central authorities that downside detects beam 38; The 20 pressure-active element 44 is installed on the left end central authorities that beam 39 is detected in left side;
The left side outer wall of the outer right wall of the first square silica-based framework 1 and the second square silica-based framework 18 is close to fixing; The left side outer wall of the outer right wall of the second square silica-based framework 18 and the 3rd square silica-based framework 35 is close to fixing.
Upper right side is detected length and the lower right side of beam 4 and is detected the equal in length of beam 5, and the length of upper right side detection beam 4 is greater than the length of right side tie-beam 3; The thickness that beam 4 is detected in upper right side equates with the thickness of lower right side detection beam 5, and the thickness of upper right side detection beam 4 is greater than the thickness of right side tie-beam 3; The width that beam 4 is detected in upper right side equates with the width of lower right side detection beam 5, and the width of upper right side detection beam 4 is greater than the width of right side tie-beam 3.
Length and lower-left side that beam 12 is detected in upper left side detect the equal in length of beam 13, and the length of upper left side detection beam 12 is greater than the length of left side tie-beam 11; Thickness, lower-left side that beam 12 is detected in upper left side detect the thickness of beam 13, the thickness of left side tie-beam 11 all equates; Width, lower-left side that beam 12 is detected in upper left side detect the width of beam 13, the width of left side tie-beam 11 all equates.
Upper left side detects length and the upper right side of beam 21 and detects the equal in length of beam 22, and the length of upper left side detection beam 21 is greater than the length of upside tie-beam 20; The thickness that upper left side detects beam 21 equates with the thickness of upper right side detection beam 22, and the thickness of upper left side detection beam 21 is greater than the thickness of upside tie-beam 20; The width that upper left side detects beam 21 equates with the width of upper right side detection beam 22, and the width of upper left side detection beam 21 is greater than the width of upside tie-beam 20.
Lower left side is detected length and the lower right side of beam 29 and is detected the equal in length of beam 30, and the length of lower left side detection beam 29 is greater than the length of downside tie-beam 28; The thickness of beam 29 is detected in lower left side, the thickness of beam 30 is detected, the thickness of downside tie-beam 28 all equates in lower right side; The width that beam 29 is detected in lower left side equates with the width of lower right side detection beam 30, and the width of downside tie-beam 28 equals the twice that the width of beam 29 is detected in lower left side.
Upside detects the thickness of beam 37, thickness, the thickness of left side detection beam 39, the thickness of right side detection beam 40 that downside detects beam 38 all equates; Upside detects the width of beam 37, width, the width of left side detection beam 39, the width of right side detection beam 40 that downside detects beam 38 all equates.
The surface central authorities of square mass 36 connect and offer the hole of falling turriform 45.
The length direction that the 17 pressure-active element 41 detects beam 37 along upside is installed on upside detection beam 37; The 18 pressure-active element 42 detects beam 40 Width along right side is installed on right side detection beam 40; The length direction that the 19 pressure-active element 43 detects beam 38 along downside is installed on downside detection beam 38; The 20 pressure-active element 44 detects beam 39 Width along left side is installed on left side detection beam 39.
During concrete enforcement, the thickness of beam 4 is detected in upper right side, the thickness that beam 5 is detected in lower right side is 100 microns.The thickness of right side tie-beam 3 is 30 microns.Thickness, lower-left side that beam 12 is detected in upper left side detect the thickness of beam 13, the thickness of left side tie-beam 11 is 100 microns.Width, lower-left side that beam 12 is detected in upper left side detect the width of beam 13, the width of left side tie-beam 11 is 60 microns.The thickness that upper left side detects the thickness of beam 21, upper right side detection beam 22 is 100 microns.The thickness of upside tie-beam 20 is 30 microns.The thickness of beam 29 is detected in lower left side, the thickness of beam 30 is detected, the thickness of downside tie-beam 28 is 100 microns in lower right side.The width of downside tie-beam 28 is 120 microns.Upside detects the thickness of beam 37, the thickness of the thickness of downside detection beam 38, left side detection beam 39 is 100 microns, the thickness of beam 40 is detected on right side.The range of X-axis acceleration transducer is 0-15 ten thousand g.The range of Y-axis acceleration transducer is 0-15 ten thousand g.The range of Z axis low measurement range acceleration sensor is 0-5 ten thousand g.In Z axis, the range of measuring range acceleration sensor is 0-10 ten thousand g.The range of Z axis high-range acceleration transducer is 0-15 ten thousand g.
Claims (8)
1.Yi Zhongliang island turriform pressure resistance type 3 axis MEMS high-range acceleration transducer array, is characterized in that: comprise the one or six beam twin islet T shape structure sensor, the two or six beam twin islet T shape structure sensor and four beam frustum structure sensors;
Described the one or six beam twin islet T shape structure sensor comprises X-axis acceleration transducer, Z axis low measurement range acceleration sensor and the first square silica-based framework (1);
X-axis acceleration transducer comprises the first Wheatstone bridge that right side rectangle mass (2), right side tie-beam (3), upper right side are detected beam (4), lower right side detection beam (5) and consisted of first-, tetra-pressure-active elements (6-9); Right side rectangle mass (2) is suspended from the inner chamber right side of the first square silica-based framework (1); Right side tie-beam (3) arranges along the Width center line of right side rectangle mass (2), and long limit, the right side of right side rectangle mass (2) is fixed by right side tie-beam (3) and the right side inwall of the first square silica-based framework (1); Beam (4) is detected along the length direction center line setting of right side rectangle mass (2) in upper right side, and the upper inside walls that the upside minor face of right side rectangle mass (2) detects beam (4) and the first square silica-based framework (1) by upper right side is fixed; Beam (5) is detected along the length direction center line setting of right side rectangle mass (2) in lower right side, and the downside inwall that the downside minor face of right side rectangle mass (2) detects beam (5) and the first square silica-based framework (1) by lower right side is fixed; The first pressure-active element (6) is installed on the left side, upper end that beam (4) is detected in upper right side; The second pressure-active element (7) is installed on the right side, upper end that beam (4) is detected in upper right side; The 3rd pressure-active element (8) is installed on the left side, lower end that beam (5) is detected in lower right side; The 4th pressure-active element (9) is installed on the right side, lower end that beam (5) is detected in lower right side;
Z axis low measurement range acceleration sensor comprises the second Wheatstone bridge that left side rectangle mass (10), left side tie-beam (11), upper left side are detected beam (12), lower-left side detection beam (13) and consisted of five-, eight pressure-active elements (14-17); Left side rectangle mass (10) is suspended from the inner chamber left side of the first square silica-based framework (1); Left side tie-beam (11) arranges along the Width center line of left side rectangle mass (10), and long limit, the left side of left side rectangle mass (10) is fixed by left side tie-beam (11) and the inner left wall of the first square silica-based framework (1); Beam (12) is detected along the length direction center line setting of left side rectangle mass (10) in upper left side, and the upper inside walls that the upside minor face of left side rectangle mass (10) detects beam (12) and the first square silica-based framework (1) by upper left side is fixed; Lower-left side detects beam (13) along the length direction center line setting of left side rectangle mass (10), and the downside inwall that the downside minor face of left side rectangle mass (10) detects beam (13) and the first square silica-based framework (1) by lower-left side is fixed; The 5th pressure-active element (14) is installed on the upper end central authorities that beam (12) is detected in upper left side; The 6th pressure-active element (15) is installed on the lower end central authorities that beam (12) is detected in upper left side; The lower-left side that is installed on the 7th pressure-active element (16) detects the upper end central authorities of beam (13); The lower-left side that is installed on the 8th pressure-active element (17) detects the lower end central authorities of beam (13);
Described the two or six beam twin islet T shape structure sensor comprises measuring range acceleration sensor and the second square silica-based framework (18) in Y-axis acceleration transducer, Z axis;
Y-axis acceleration transducer comprises the 3rd Wheatstone bridge that upside rectangle mass (19), upside tie-beam (20), upper left side detect beam (21), upper right side detection beam (22) and consist of nine-, 12 pressure-active elements (23-26); Upside rectangle mass (19) is suspended from the inner chamber upside of the second square silica-based framework (18); Upside tie-beam (20) arranges along the Width center line of upside rectangle mass (19), and the long limit of the upside of upside rectangle mass (19) is fixed by upside tie-beam (20) and the upper inside walls of the second square silica-based framework (18); Upper left side detects beam (21) along the length direction center line setting of upside rectangle mass (19), and the left side minor face of upside rectangle mass (19) detects beam (21) by upper left side and the second square silica-based framework (18) inner left wall is fixed; Beam (22) is detected along the length direction center line setting of upside rectangle mass (19) in upper right side, and the right side minor face of upside rectangle mass (19) detects beam (22) by upper right side and the second square silica-based framework (18) right side inwall is fixed; The 9th pressure-active element (23) is installed on the left end downside that upper left side detects beam (21); The tenth pressure-active element (24) is installed on the left end upside that upper left side detects beam (21); The 11 pressure-active element (25) is installed on the right-hand member downside that beam (22) is detected on right side; The 12 pressure-active element (26) is installed on the right-hand member upside that beam (22) is detected on right side;
In Z axis, measuring range acceleration sensor comprises the 4th Wheatstone bridge that downside rectangle mass (27), downside tie-beam (28), lower left side are detected beam (29), lower right side detection beam (30) and consisted of 13-, 16 pressure-active elements (31-34); Downside rectangle mass (27) is suspended from the inner chamber downside of the second square silica-based framework (18); Downside tie-beam (28) arranges along the Width center line of downside rectangle mass (27), and the long limit of the downside of downside rectangle mass (27) is fixed by downside tie-beam (28) and the downside inwall of the second square silica-based framework (18); Beam (29) is detected along the length direction center line setting of downside rectangle mass (27) in lower left side, and the left side minor face of downside rectangle mass (27) detects beam (29) by lower left side and the second square silica-based framework (18) inner left wall is fixed; Beam (30) is detected along the length direction center line setting of downside rectangle mass (27) in lower right side, and the right side minor face of downside rectangle mass (27) detects beam (30) by lower right side and the second square silica-based framework (18) right side inwall is fixed; The 13 pressure-active element (31) is installed on the left end central authorities that beam (25) is detected in lower left side; The 14 pressure-active element (32) is installed on the right-hand member central authorities that beam (25) is detected in lower left side; The 15 pressure-active element (33) is installed on the left end central authorities that beam (26) is detected on lower right side; The 16 pressure-active element (34) is installed on the right-hand member central authorities that beam (26) is detected on lower right side;
Described four beam frustum structure sensors comprise Z axis high-range acceleration transducer and the 3rd square silica-based framework (35);
Z axis high-range acceleration transducer comprises the 5th Wheatstone bridge that square mass (36), upside detect beam (37), downside detection beam (38), left side detection beam (39), right side detection beam (40) and consist of the 17-the 20 pressure-active element (41-44); Square mass (36) is suspended from the inner chamber central authorities of the 3rd square silica-based framework (35); Upside detects beam (37) along the center line setting of square mass (36), and the upper inside walls that the upper side edge of square mass (36) detects beam (37) and the 3rd square silica-based framework (35) by upside is fixed; Downside detects beam (38) along the center line setting of square mass (36), and the downside inwall that the lower side of square mass (36) detects beam (38) and the 3rd square silica-based framework (35) by downside is fixed; Beam (39) is detected along the center line setting of square mass (36) in left side, and the inner left wall that beam (39) and the 3rd square silica-based framework (35) are detected by left side in the limit, left side of square mass (36) is fixed; Beam (40) is detected along the center line setting of square mass (36) in right side, and the right side inwall that the right edge of square mass (36) detects beam (40) and the 3rd square silica-based framework (35) by right side is fixed; The 17 pressure-active element (41) is installed on the upper end central authorities that upside detects beam (37); The 18 pressure-active element (42) is installed on the right-hand member central authorities that beam (40) is detected on right side; The 19 pressure-active element (43) is installed on the lower end central authorities that downside detects beam (38); The 20 pressure-active element (44) is installed on the left end central authorities that beam (39) is detected in left side;
The left side outer wall of the outer right wall of the first square silica-based framework (1) and the second square silica-based framework (18) is close to fixing; The left side outer wall of the outer right wall of the second square silica-based framework (18) and the 3rd square silica-based framework (35) is close to fixing.
2. beam according to claim 1 island turriform pressure resistance type 3 axis MEMS high-range acceleration transducer array, it is characterized in that: upper right side is detected length and the lower right side of beam (4) and detected the equal in length of beam (5), and the length of upper right side detection beam (4) is greater than the length of right side tie-beam (3); The thickness that beam (4) is detected in upper right side equates with the thickness of lower right side detection beam (5), and the thickness of upper right side detection beam (4) is greater than the thickness of right side tie-beam (3); The width that beam (4) is detected in upper right side equates with the width of lower right side detection beam (5), and the width of upper right side detection beam (4) is greater than the width of right side tie-beam (3).
3. beam according to claim 1 island turriform pressure resistance type 3 axis MEMS high-range acceleration transducer array, it is characterized in that: length and lower-left side that beam (12) is detected in upper left side detect the equal in length of beam (13), and the length of upper left side detection beam (12) is greater than the length of left side tie-beam (11); Thickness, lower-left side that beam (12) is detected in upper left side detect the thickness of beam (13), the thickness of left side tie-beam (11) all equates; Width, lower-left side that beam (12) is detected in upper left side detect the width of beam (13), the width of left side tie-beam (11) all equates.
4. beam according to claim 1 island turriform pressure resistance type 3 axis MEMS high-range acceleration transducer array, it is characterized in that: upper left side detects length and the upper right side of beam (21) and detects the equal in length of beam (22), and the length of upper left side detection beam (21) is greater than the length of upside tie-beam (20); The thickness that upper left side detects beam (21) equates with the thickness of upper right side detection beam (22), and the thickness of upper left side detection beam (21) is greater than the thickness of upside tie-beam (20); The width that upper left side detects beam (21) equates with the width of upper right side detection beam (22), and the width of upper left side detection beam (21) is greater than the width of upside tie-beam (20).
5. beam according to claim 1 island turriform pressure resistance type 3 axis MEMS high-range acceleration transducer array, it is characterized in that: lower left side is detected length and the lower right side of beam (29) and detected the equal in length of beam (30), and the length of lower left side detection beam (29) is greater than the length of downside tie-beam (28); The thickness of beam (29) is detected in lower left side, the thickness of beam (30) is detected on lower right side, the thickness of downside tie-beam (28) all equates; The width that beam (29) is detected in lower left side equates with the width of lower right side detection beam (30), and the width of downside tie-beam (28) equals the twice that the width of beam (29) is detected in lower left side.
6. beam according to claim 1 island turriform pressure resistance type 3 axis MEMS high-range acceleration transducer array, is characterized in that: upside detects the thickness of beam (37), thickness, the thickness of left side detection beam (39), the thickness of right side detection beam (40) that downside detects beam (38) all equates; Upside detects the width of beam (37), width, the width of left side detection beam (39), the width of right side detection beam (40) that downside detects beam (38) all equates.
7. beam according to claim 1 island turriform pressure resistance type 3 axis MEMS high-range acceleration transducer array, is characterized in that: the surface central authorities of square mass (36) connect and offer the hole of falling turriform (45).
8. beam according to claim 1 island turriform pressure resistance type 3 axis MEMS high-range acceleration transducer array, is characterized in that: the length direction that the 17 pressure-active element (41) detects beam (37) along upside is installed on upside detection beam (37) upper end central authorities; The 18 pressure-active element (42) detects beam (40) Width along right side is installed on right side detection beam (40) right-hand member central authorities; The length direction that the 19 pressure-active element (43) detects beam (38) along downside is installed on downside detection beam (38) lower end central authorities; The 20 pressure-active element (44) detects beam (39) Width along left side is installed on left side detection beam (39) left end central authorities.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210392440.7A CN102928622B (en) | 2012-10-17 | 2012-10-17 | Beam island tower shaped piezoresistive type three-axis micro-electro-mechanical system (MEMS) high-range acceleration sensor array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210392440.7A CN102928622B (en) | 2012-10-17 | 2012-10-17 | Beam island tower shaped piezoresistive type three-axis micro-electro-mechanical system (MEMS) high-range acceleration sensor array |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102928622A CN102928622A (en) | 2013-02-13 |
| CN102928622B true CN102928622B (en) | 2014-03-05 |
Family
ID=47643468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210392440.7A Active CN102928622B (en) | 2012-10-17 | 2012-10-17 | Beam island tower shaped piezoresistive type three-axis micro-electro-mechanical system (MEMS) high-range acceleration sensor array |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102928622B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103969467B (en) * | 2014-01-22 | 2016-10-26 | 东南大学 | A kind of pressure resistance type MEMS high overload accelerometer |
| CN103994844B (en) * | 2014-05-21 | 2016-03-23 | 东南大学 | A kind of pressure-active element based on thermoplastic elastomer and face load diatibution measuring method |
| CN110531114B (en) * | 2019-07-26 | 2020-07-28 | 西安交通大学 | Pure axial deformation MEMS triaxial piezoresistive accelerometer chip and preparation method thereof |
| CN112379126B (en) * | 2020-11-02 | 2021-08-27 | 西安交通大学 | Quartz resonance acceleration sensor with composite measuring range |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0000619D0 (en) * | 2000-01-13 | 2000-03-01 | British Aerospace | Accelerometer |
| US7253079B2 (en) * | 2002-05-09 | 2007-08-07 | The Charles Stark Draper Laboratory, Inc. | Coplanar mounting member for a MEM sensor |
| US7287428B2 (en) * | 2004-04-14 | 2007-10-30 | Analog Devices, Inc. | Inertial sensor with a linear array of sensor elements |
| CN100520413C (en) * | 2007-03-06 | 2009-07-29 | 中北大学 | Combined micro-accelerometer |
| CN101118249A (en) * | 2007-08-25 | 2008-02-06 | 中北大学 | Piezoresistance type accelerometer with high g values |
-
2012
- 2012-10-17 CN CN201210392440.7A patent/CN102928622B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN102928622A (en) | 2013-02-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102928622B (en) | Beam island tower shaped piezoresistive type three-axis micro-electro-mechanical system (MEMS) high-range acceleration sensor array | |
| CN102768291B (en) | Piezoresistive monolithic integrated four-beam tri-axial accelerometer | |
| US7992443B2 (en) | Sensor element for capacitive differential-pressure sensing | |
| CN102128953B (en) | Capacitive micro-acceleration sensor with symmetrically inclined folded beam structure | |
| CN103941041B (en) | A kind of single mass three-shaft mems accelerometer of three-frame structure | |
| CN104121984B (en) | A kind of high-sensitivity resonance formula MEMS vector hydrophone structure | |
| CN207908539U (en) | A kind of comb capacitance type 3 axis MEMS acceleration transducer | |
| CN102927966A (en) | Method for improving monitoring accuracy of structural settlement | |
| CN110411615B (en) | High-sensitivity MEMS (micro-electromechanical systems) touch sensor structure | |
| CN103575932A (en) | MEMS piezoresistive accelerometer | |
| CN109782022B (en) | Graphene resonant optical fiber accelerometer based on pressure sensitivity | |
| CN102408089A (en) | Micro electronmechanical sensor capable of simultaneously measuring acceleration and pressure | |
| CN204188168U (en) | Micro electronmechanical annular variable capacitance and three axis microelectromechanicdevice gyroscopes | |
| CN101334422A (en) | Inertial sensor and method of manufacture | |
| KR20150101741A (en) | Micro Electro Mechanical Systems Sensor | |
| CN100449316C (en) | Arrangement structure of sensing elements of six-axle acceleration transducer | |
| CN102155944B (en) | Six-axis microtype inertial sensor integrating accelerometer and gyroscope and application method thereof | |
| US20110198711A1 (en) | System and method for an integrated electronic and optical mems based sensor | |
| CN203191141U (en) | Silicon piezoresistive MEMS pressure transducer for gas and liquid pressure measurement | |
| CN103454449A (en) | Three-axis micro-mechanical accelerometer | |
| CN104535797A (en) | Single-piece double-shaft butterfly wing type micromechanical accelerometer | |
| CN104181331A (en) | Piezoresistive acceleration sensor and manufacturing method thereof | |
| CN109270298B (en) | MEMS accelerometer | |
| CN201935780U (en) | Low-range piezoresistive pressure sensor for vacuum measurement | |
| CN203606386U (en) | MEMS piezoresistive accelerometer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |