CN101334422A - Inertial sensor and method of manufacture - Google Patents
Inertial sensor and method of manufacture Download PDFInfo
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- CN101334422A CN101334422A CNA2007101126844A CN200710112684A CN101334422A CN 101334422 A CN101334422 A CN 101334422A CN A2007101126844 A CNA2007101126844 A CN A2007101126844A CN 200710112684 A CN200710112684 A CN 200710112684A CN 101334422 A CN101334422 A CN 101334422A
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Abstract
The invention provides an inertial sensor and a manufacturing method thereof, and the inertial sensor utilizes the pressure difference (pressure gradient) to measure the acceleration or angular acceleration of the motion of an object. The inertial sensor comprises a substrate, a circuit arranged on the substrate and a pressure device comprising an annular cavity with a first end and a second end, a channel with the first end and the second end, the second end is connected with the second end of the annular cavity, a pressure gauge respectively connected with the first end of the annular cavity and the first end of the channel, and the pressure gauge is electrically connected with the circuit, and fluid filled in the annular cavity. Therefore, the invention provides the inertial sensor with the high sensitivity and the planar structure, thereby achieving the purposes of simple structure, simple process and low cost. The inertial sensor of the invention can measure the acceleration or the angular acceleration of the object during the movement or the rotation, and the inertial sensor can be further mutually integrated to carry out the multi-axis measurement.
Description
Technical field
The present invention is about a kind of inertial sensor and manufacture method thereof, especially about a kind of inertial sensor and manufacture method thereof that improves sensitivity plane formula structure.
Background technology
Known inertial sensor principal series is applied to accelerometer or micro-acceleration gauge, has following four kinds of representatives to implement structure approximately:
Announce the 6th, 713 as United States Patent (USP), " single cell position sensor (the SingleUnit Position Sensor) " of No. 829 patents, this patent is made a mass, is connected on the silicon substrate with elastic construction, and makes capacitor; When mass produces acceleration because of moving,, extrapolate acceleration according to the elasticity coefficient of elastic construction.
Announce the 2nd as United States Patent (USP), 440, " the fluid convection response instrument (ConvectionCurrent Responsive Instrument) " of No. 189 patents, this patent is made an air chamber, and a heating element is inserted in the centre, gas in the heat air body cavity, make gas density change in the chamber, the principle of utilizing buoyancy changed by acceleration detects the Temperature Distribution that causes because of change, utilize resistance bridge to read heating wire temperature contrast amount, calculate acceleration.
Announce the 7th as United States Patent (USP), 069, " thermal type micro-inertia sensor (the ThermalBubble Type Micro Inertial Sensor) " of No. 785 patents, this patent is made a fluid chamber, and a heating element is inserted in the centre, the liquid in the heat air body cavity, make its local gasification and form bubble, the measurement principle of utilizing bubble position changed by acceleration detects the Temperature Distribution that causes because of change, calculates acceleration.
Announce the 2nd, 650 as United States Patent (USP), " accelerometer (the Accel erometer) " of No. 991 patents, it makes a fluid chamber, at its cavity wall pressure sensing element is set, and experiences the mean pressure of liquid inertia, estimates its acceleration.Acceleration is calculated in the measurement of average (always) pressure of this patent utilization.In fact, the mean pressure of liquid is uninevitable in the closed container has direct correlativity with acceleration.
Announce the 2nd for another United States Patent (USP), 728, " liquid filling accelerometer (the Liquidfilled accelerometer) " of No. 868 patents, it makes a fluid chamber, corresponding its cavity wall is provided with pressure sensing element, this patent exposure liquid puts on acceleration and the reacting force on the cavity wall, and what the working pressure sensing element measured is reacting force, does not disclose the sensing to pressure gradient.
Summary of the invention
Purpose of the present invention is for providing a kind of inertial sensor of high sensitivity plane formula structure, the inertial sensor and the manufacture method thereof of the angular acceleration when it utilizes pressure differential (pressure gradient) to measure the object rotation.
A further object of the present invention provides a kind of inertial sensor cheaply and manufacture method thereof.
For achieving the above object, the invention provides a kind of inertial sensor, described inertial sensor comprises: substrate, circuit, pressure apparatus and fluid; Described circuit is positioned on the substrate; Described pressure apparatus comprises: annular housing, passage and pressure gauge; Described annular housing has annular housing first end and annular housing second end; Described passage has passage first end and passage second end, and described passage second end connects described annular housing second end; Described pressure gauge connects described annular housing one end and described passage first end respectively, and described pressure gauge is electrically connected described circuit; Described fluid-filled in described annular housing.Therefore, by said structure, it is simple in structure that the present invention can reach, and technology is simple and easy, reduces cost.
Described substrate can be silicon (silicon wafer), integrated circuit (integrated circuitwafer), printed circuit board (PCB) (printed circuit board), glass substrate (glasssubstrate), plastic base (plastic substrate) or ceramic substrate (ceramicsubstrate).
Described pressure gauge can be condenser type (capacitive) pressure gauge or piezoelectric type (piezoelectric) or pressure resistance type (piezoresistive) pressure gauge.
Described fluid can be water, oil, liquid crystal or its potpourri.
Described inertial sensor is obtained angular acceleration sensitivity by the pressure differential of described pressure gauge and described reference pressure, and described angular acceleration is obtained by following formula:
α＝P/(2πdR
2)；
P is the force value that pressure gauge measures;
D is a specific gravity;
α is an angular acceleration; And
R is the annular housing radius.
For achieving the above object, the present invention has gone back a kind of inertial sensor, the angular acceleration when described inertial sensor utilizes pressure differential (pressure gradient) to measure the object rotation, and described inertial sensor comprises: substrate, circuit, pressure apparatus, and fluid; Described circuit is positioned on the described substrate; Described pressure apparatus comprises: annular housing, pedestal, first pressure gauge and second pressure gauge, described annular housing have annular housing first end and annular housing second end; Have passage in the described pedestal, described passage has passage first end and passage second end; Described first pressure gauge connects described annular housing first end and described passage first end respectively, and described first pressure gauge is electrically connected described circuit; Described second pressure gauge connects described annular housing second end and described passage second end respectively, and described second pressure gauge is electrically connected described circuit; Described fluid-filled in described annular housing.
Described substrate can be silicon, integrated circuit, printed circuit board (PCB), glass substrate or ceramic substrate.
Described passage can be arranged on the substrate or extend into substrate, and can be air in the described passage or be vacuum state.In addition, described passage can be airtight or connects external environment.
Described first pressure is taken into account described second pressure gauge and be can be capacitance-type pressure gage or piezoelectric type or piezoresistive pressure gage.
Described fluid can be water, oil, liquid crystal or its potpourri.
Inertial sensor is also obtained angular acceleration sensitivity by described first pressure gauge and the described second manometric pressure differential, and described angular acceleration is obtained by following formula:
α＝(P
2-P
1)/(2πdR
2)；
P
1It is the force value that first pressure gauge measures;
P
2It is the force value that second pressure gauge measures;
D is a specific gravity;
α is an angular acceleration; And
R is the annular housing radius.
For achieving the above object, the present invention also provides a kind of inertial sensor, the difference of described inertial sensor and above-mentioned second inertial sensor provided by the invention only may extend in the described substrate for described passage, and the configuration of all the other elements and second embodiment are together.
Among the embodiment of inertial sensor of the present invention, the inertial sensor of the acceleration when utilizing pressure differential (pressure gradient) to measure movement of objects.Described inertial sensor comprises: circuit, pressure apparatus, housing, and fluid; Described pressure apparatus comprises pedestal, first pressure gauge and second pressure gauge; Have passage in the described pedestal, described passage has passage first end and passage second end; Described first pressure gauge connects described passage first end, and described first pressure gauge is electrically connected described circuit; Described second pressure gauge connects described passage second end, and described second pressure gauge is electrically connected described circuit; Described pressure apparatus is positioned at enclosure interior; Described fluid, filling is in described housing.
Described housing comprises that substrate is positioned at its bottom, and described circuit and described pressure apparatus are positioned on the described substrate.
Described passage also comprises passage the 3rd end, and the L-shaped in the plane distribution of described passage; Described pressure apparatus also comprises the 3rd pressure gauge, and described the 3rd pressure gauge connects described passage the 3rd end, and described the 3rd pressure gauge is electrically connected described circuit.
Described substrate can be silicon, integrated circuit, printed circuit board (PCB), glass substrate, plastic base or ceramic substrate.
Described passage can be arranged on the substrate or extend into described substrate, and can be air in the described passage or be vacuum state.In addition, described passage can be airtight or connects external environment.
Described first pressure gauge, second pressure are taken into account the 3rd pressure gauge and be can be capacitance-type pressure gage or piezoelectric type or piezoresistive pressure gage.
Fluid can be water, oil, liquid crystal or its potpourri.
Inertial sensor is also obtained linear acceleration sensitivity by described first pressure gauge and the described second manometric pressure differential, and described linear acceleration is obtained by following formula:
a＝(P
2-P
1)/(d×S)；
P
1It is the force value that first pressure gauge measures;
P
2It is the force value that second pressure gauge measures;
D is a specific gravity;
A is an acceleration; And
S is the distance of pressure gauge center, the first pressure gauge center to the second.
For achieving the above object, the invention provides a kind of inertial sensor manufacture method, comprising: housing is provided; Form the described again enclosure interior of circuit; Form pressure apparatus in described enclosure interior; And the filling fluid is in housing.Therefore, the present invention makes inertial sensor by utilizing the microstructure process, the size that can dwindle inertial sensor, the range of application of increase product.
Described housing can comprise that substrate is positioned at its bottom, and described circuit and described pressure apparatus are positioned on the described substrate.
Described substrate can be silicon, integrated circuit, printed circuit board (PCB), glass substrate, plastic base or ceramic substrate.
Described pressure apparatus can comprise: pedestal, and first pressure gauge, and second pressure gauge have passage in the described pedestal, and described passage has passage first end and passage second end; Described first pressure gauge connects described passage first end, and described first pressure gauge is electrically connected described circuit; Described second pressure gauge connects described passage second end, and described second pressure gauge is electrically connected described circuit.
Described passage can also comprise passage the 3rd end, and the L-shaped in the plane distribution of described passage; Described pressure apparatus also comprises the 3rd pressure gauge, and described the 3rd pressure gauge connects described passage the 3rd end, and described the 3rd pressure gauge is electrically connected described circuit.
Described passage can be arranged on the described substrate or extend into described substrate, and can be air in the described passage or be vacuum state.In addition, described passage can be airtight or connects external environment.
Described first pressure gauge, described second pressure are taken into account described the 3rd pressure gauge and be can be capacitance-type pressure gage or piezoelectric type or piezoresistive pressure gage.
The fluid that injects can be water, oil, liquid crystal or its potpourri.
For achieving the above object, the invention provides another inertial sensor, the inertial sensor of the acceleration when utilizing pressure differential (pressure gradient) to measure movement of objects.Described inertial sensor comprises: circuit, pressure apparatus, fluid; Described pressure apparatus comprises: pedestal, first pressure gauge, second pressure gauge; Have passage in the described pedestal in wherein, described passage has passage first end and passage second end; Described first pressure gauge connects described passage first end, and described first pressure gauge is electrically connected described circuit; Described second pressure gauge connects described passage second end, and described second pressure gauge is electrically connected described circuit; Described fluid-filled in described passage.
Present embodiment and described embodiment can utilize substrate channel itself to be used as housing, inject fluid, wherein can be with ambient pressure environment when pressure for referencial use, and its structure more shape is simple and easy.Because the formation of fluid internal pressure gradient and hull shape are irrelevant,, the design of passage just can so only need allowing fluid freely be communicated with.
The present invention utilizes the microstructure process to make inertial sensor, the acceleration when utilizing pressure differential to measure movement of objects or rotation or the inertial sensor of angular acceleration.The invention provides the inertial sensor of high sensitivity plane formula structure, have simple in structure, technology is simple and easy, and can measure movement of objects or the acceleration when rotating or the advantage of angular acceleration, and can further integrate mutually and carry out multiaxis and measure.
Description of drawings
Fig. 1 is the front sectional elevation of first embodiment of inertial sensor of the present invention.
Fig. 2 is the vertical view of first embodiment of inertial sensor of the present invention.
Fig. 3 is the pressure gauge structure of inertial sensor of the present invention.
Fig. 4 is another pressure gauge structure of inertial sensor of the present invention.
Fig. 5 is another pressure gauge structure of inertial sensor of the present invention.
Fig. 6 is the front sectional elevation of second embodiment of inertial sensor of the present invention.
Fig. 7 is the vertical view of second embodiment of inertial sensor of the present invention.
Fig. 8 is the front sectional elevation of the 3rd embodiment of inertial sensor of the present invention.
Fig. 9 is the front sectional elevation of the 4th embodiment of inertial sensor of the present invention.
Figure 10 is the front sectional elevation of the 5th embodiment of inertial sensor of the present invention.
Figure 11 is the front sectional elevation of the 6th embodiment of inertial sensor of the present invention.
Figure 12 is the front sectional elevation of the 7th embodiment of inertial sensor of the present invention.
Figure 13 is the vertical view of the 7th embodiment of inertial sensor of the present invention.
Figure 14 is the vertical view of the 7th embodiment of inertial sensor of the present invention.
Figure 15 is the front sectional elevation of the 8th embodiment of inertial sensor of the present invention.
Figure 16 is the vertical view of the 9th embodiment of inertial sensor structure of the present invention.
Figure 17 is the front sectional elevation of the tenth embodiment of inertial sensor of the present invention.
Figure 18 is the front sectional elevation of the 11 embodiment of inertial sensor of the present invention.
Figure 19 is the vertical view of the 12 embodiment of inertial sensor of the present invention.
Figure 20 is the front sectional elevation of the 13 embodiment of inertial sensor of the present invention.
Figure 21 is the front sectional elevation of the 14 embodiment of inertial sensor of the present invention.
Figure 22 is the front sectional elevation of the 15 embodiment of inertial sensor of the present invention.
Figure 23 is the front sectional elevation of the 16 embodiment of inertial sensor of the present invention.
Embodiment
Inertial sensor mainly contains acceleration and takes into account gyrostat, and accelerometer can detect concussion, impact, tilt, and sensitivity determines its application market, highly sensitive national defence and the earthquake detection of being used in, general sensitivity be used in automobile and consumption market.Accelerometer 80% is used in automobile market.Two significantly are respectively, the accelerometer of high gravity acceleration g is used in air bag and other safety control system, the accelerometer of low gravity acceleration g be used in Electronic Control systems stabilisation, anti-deadlock braking system, Electronic Control suspension system, electronic-parking backup system, automobile warning system, navigational system.Inertial sensor is commonly used in patient's monitoring, for example pacemaker and fall detection on medical applications.On national defense safety, be commonly used in fly bomb guiding, intelligent munitions.On commercial Application, be commonly used in delivery vehicle and the building machinery, can be used in the Spin Control of delivery vehicle inclination, monitoring position, delivery vehicle in the delivery vehicle, the maintenance of platform level for example keeps the steady of high-speed train.In addition, inertial sensor still can be used on the monitoring of earthquake and structure monitoring, determination of tilt instrument, displacement and vibrations.
Please also refer to Fig. 1, Fig. 2 front sectional elevation and vertical view, the angular acceleration when inertial sensor 100 of the present invention utilizes pressure differential (pressure gradient) to measure the object rotation for first embodiment of inertial sensor 100 of the present invention.This inertial sensor 100 includes that substrate 110, circuit 120 are formed on this substrate 110, pressure apparatus 130 and fluid L.This pressure apparatus 130 comprises annular housing 131 with the first end 131A and second end 131B, have the passage 133 of the first end 133A and the second end 133B and connect the first end 131A of this annular housing 131 and the pressure gauge 135 of the first end 133A of this passage 133, wherein, the second end 133B of this passage 133 connects the second end 131B of this annular housing 131, this pressure gauge 135 is electrically connected this circuit 120, and this fluid L filling is in this annular housing.Preferably, this fluid L is water, oil, liquid crystal or its potpourri.
The structure of pressure gauge 135 can be as Fig. 3, Fig. 4 and shown in Figure 5.Pressure gauge 135 among Fig. 3 can adhere to pressure resistance type strain gauge or similar sensor on pressure gauge 135 tops, and forms a chamber 135C in the lower end, and this chamber is communicated with this passage 133.Above-mentioned pressure gauge 135 structures also can be as Fig. 4 and shown in Figure 5, and are similar to the pressure gauge 135 of Fig. 3 on its structure, but pressure gauge 135 bottoms among Fig. 4 have glass substrate 135G, and this glass substrate has opening, makes this chamber 135C be communicated with this passage 133.Pressure gauge 135 bottoms of Fig. 5 have glass substrate 135G, and chamber 135C is sealed.The force value that common pressure gauge 135 measures is to be reference pressure with manometric chamber 135C, removes the testing pressure of induction pressure meter 135 tops.If with pressure gauge 135 tops is reference pressure, induction chamber 135C pressure is another embodiment.If with chamber 135C sealing, then chamber 135C reference pressure does not change with environmental pressure, is another embodiment, practise the title absolute manometer.
The sensitivity of the angular acceleration of inertial sensor is by the pressure value P of these pressure gauge 135 measurements and the reference pressure P in this passage
0Pressure differential obtain, this angular acceleration is obtained by following formula (1):
α＝P/(2πdR
2) (1)
Wherein, d is a fluid L proportion;
α is an angular acceleration; And
R is the annular housing radius.
For example, as fluid L proportion d=1g/cm
3, annular housing radius R=5mm and pressure value P=0.157Nt/m
2The time, angular acceleration=1rad/s
2
Preferably, this substrate can be selected silicon, integrated circuit, printed circuit board (PCB), glass substrate, plastic base or ceramic substrate for use.
Preferably, this pressure gauge 135 is optional with capacitance-type pressure gage or piezoelectric type or piezoresistive pressure gage.
Please also refer to Fig. 6, Fig. 7 front sectional elevation and vertical view, the angular acceleration when inertial sensor 200 of the present invention utilizes pressure differential (pressure gradient) to measure the object rotation for second embodiment of inertial sensor 200 of the present invention.Inertial sensor 200 of the present invention comprises: substrate 210, circuit 220 are formed on this substrate 210, pressure apparatus 230, fluid L and gas A.This pressure apparatus 230 comprises the annular housing 231 with the first end 231A and second end 231B; Pedestal 232 with passage 233, and this passage 233 has the first end 233A and the second end 233B; First pressure gauge 235 that connects the first end 233A of the first end 231A of this annular housing 231 and this passage 233 respectively; Connect second pressure gauge 237 of the second end 233B of the second end 231B of this annular housing 231 and this passage 233 respectively, wherein this first pressure gauge 235 and this second pressure gauge 237 all are electrically connected to this circuit 220.This fluid L filling is in this annular housing 231, and this gas A filling is in this passage 233.When first pressure gauge 235 of this pressure apparatus 130 and second pressure gauge 237 detect pressure and change, be about to that this signal passes to computing in this circuit 220 and angular acceleration when obtaining object and rotating.
The pressure value P that the sensitivity of the angular acceleration of inertial sensor is measured by this first pressure gauge 235
1Pressure value P with these second pressure gauge, 237 measurements
2Pressure differential obtain, this angular acceleration system is obtained by following formula (2):
α＝(P
2-P
1)/(2πdR
2) (2)
Wherein, d is a fluid L proportion;
α is an angular acceleration; And
R is the annular housing radius.
For example, as fluid L proportion d=1g/cm
3, annular housing radius R=5mm and pressure differential (P
2-P
1)=0.157Nt/m
2The time, angular acceleration=1rad/s
2
Preferably, first pressure gauge 235 and second pressure gauge 237 can be capacitance-type pressure gage or piezoelectric type or piezoresistive pressure gage.
Preferably, this substrate can be selected silicon, integrated circuit, printed circuit board (PCB), glass substrate, plastic base or ceramic substrate for use.
Above-mentioned first embodiment and second embodiment are used to measure the inertial sensor of the high sensitivity plane formula structure of angular acceleration for the present invention, and it is simple in structure, technology is simple and easy, thus can reduce production costs, and be easy to and dissimilar product integrations.
Please refer to the front sectional elevation of Fig. 8 for the 3rd embodiment of inertial sensor 300 of the present invention, the difference of the inertial sensor 200 of the present embodiment and second embodiment only may extend in this substrate 310 for this passage 333, and the configuration of all the other elements and second embodiment are together.
Please refer to Fig. 9, Figure 10 and Figure 11 front sectional elevation for fourth, fifth and six embodiment of inertial sensor 400,500 of the present invention and 600, the difference of the inertial sensor 200 of fourth, fifth and six embodiment and second embodiment only is respectively passage 433,533 and 633 and penetrates this substrate 410,510 and 610 by different way respectively, and then the connection external environment, the configuration of all the other elements and second embodiment are together.
Please also refer to Figure 12 and Figure 13 front sectional elevation and vertical view for the 7th embodiment of inertial sensor 700 of the present invention, inertial sensor 700 of the present invention utilizes pressure differential (pressure gradient) to measure the linear acceleration of object when a direction moves.Inertial sensor 700 of the present invention includes circuit 720, pressure apparatus 730, housing 740, fluid L.Wherein, this housing 740 comprises that substrate 710 is in this housing bottom.This pressure apparatus 730 comprises: have the pedestal 732 of passage 733, and this passage 733 has the first end 733A and the second end 733B; First pressure gauge 735 that connects the first end 733A of this passage 733; Second pressure gauge 737 that connects the second end 733B of this passage 733, wherein this first pressure gauge 735 and this second pressure gauge 737 all are electrically connected to this circuit 720.Wherein, this housing 740 is positioned on the aforesaid substrate, and in order to cover this circuit 720 and this pressure apparatus 730, this fluid L filling is in this housing 740, and this gas A filling is in this passage 733.When first pressure gauge 735 of this pressure apparatus 730 and second pressure gauge 737 detect pressure and change, be about to this signal and pass to computing in this circuit 720 and obtain the linear acceleration of object when a direction moves.
Preferably, this first pressure gauge 735 and this second pressure gauge 737 can be capacitance-type pressure gage or piezoelectric type or piezoresistive pressure gage.
Preferably, this substrate can be selected silicon, integrated circuit, printed circuit board (PCB), glass substrate, plastic base or ceramic substrate for use.
The pressure value P that the linear acceleration sensitivity of inertial sensor is measured by this first pressure gauge 735
1Pressure value P with these second pressure gauge, 737 measurements
2Pressure differential obtain, this acceleration is obtained by following formula (3):
a＝(P
2-P
1)/(d×S) (3)
Wherein,
D is a specific gravity;
A is an acceleration; And
S is the distance of pressure gauge center, the first pressure gauge center to the second.
For example, as fluid L proportion d=1g/cm
3, pressure gauge center, the first pressure gauge center to the second apart from S=5mm and pressure differential (P
2-P
1)=49Nt/m
2The time, (g is that the acceleration of gravity on the face of land is about 9.8m/s to acceleration a=1g
2).Inserting gas A in the passage 733, is because the proportion of gas A is very light, so ignore in aforementioned calculation.In the present invention, the effect of passage only provides pressure gauge and adopts identical reference pressure, and using gases only for convenience of explanation in the passage, in fact, according to principle of the present invention, can be vacuum state in the passage, or gas can be made a general reference the lower fluid of proportion in the passage.So, if insert other fluid in the passage 733, this fluid is subjected to the acceleration action also can the build-up pressure gradient, if this moment fluid L and the proportion of two kinds of fluids of fluid A different, above-mentioned formula is still set up, and at this moment needs only the difference in specific gravity with two fluids of proportion d substitution in original formula.
Because of the centrifugal force that circular motion produces also can the build-up of pressure gradient.This inertial sensor is the pressure value P that is measured by this first pressure gauge 735 to the sensitivity of centrifugal force
1Pressure value P with these second pressure gauge, 737 measurements
2Pressure differential obtain, this pressure differential is obtained by following formula (4):
Wherein,
D is a specific gravity;
ω is an angular velocity;
R
1Distance for rotation center C to the first pressure gauge 735 centers; And
R
2Distance for rotation center C to the second pressure gauge 737 centers.
Generally speaking, when slewing rate is not very fast, the influence of centrifugal force roughly can be ignored.
Please refer to the 14th figure, when rotation center C and first pressure gauge 735 and second pressure gauge 737 not during conllinear, above-mentioned formula (4) stands good.
Please refer to the front sectional elevation of Figure 15 for the 8th embodiment of inertial sensor 800 of the present invention, the difference of the inertial sensor 700 of present embodiment and the 7th embodiment only may extend in this substrate 810 for this passage 833, and the configuration of all the other elements and the 7th embodiment are together.
Please refer to the 9th embodiment, the tenth embodiment of Figure 16, Figure 17 and Figure 18 inertial sensor 900,1000 of the present invention and 1100 and the front sectional elevation of the 11 embodiment, the difference of these three embodiment and the 7th and the 8th embodiment only is no base element, and nine, the inertial sensor 900,1000 of ten and 11 embodiment and 1100 difference only penetrate this substrate 910,1010 and 1110 respectively by different way for this passage 933,1033 and 1133, and then the connection external environment, all the other elements and the 7th embodiment are together.
Please refer to the vertical view of Figure 19, directions X acceleration and Y directional acceleration when inertial sensor 1200 of the present invention utilizes pressure differential (pressure gradient) measurement object X-Y direction to move for the 12 embodiment of inertial sensor 1200 of the present invention.Inertial sensor 1200 of the present invention includes that substrate 1210, circuit 1220 are formed on this substrate 1210, pressure apparatus 1230, housing 1240, fluid L and gas A.This pressure apparatus 1230 comprises the pedestal 1232 with L shaped passage 1233, and this L shaped passage 1233 has the first end 1233A, the second end 1233B and the 3rd end 1233C; First pressure gauge 1235 that connects the first end 1233A of this L shaped passage 1233; Second pressure gauge 1237 that connects the second end 1233B of this L shaped passage 1233; The 3rd pressure gauge 1239 that connects the 3rd end 1233C of this L shaped passage 1233; Wherein this first pressure gauge 1235, this second pressure gauge 1237 and the 3rd pressure gauge 1239 all are electrically connected to this circuit 1220.In addition, this housing 1240 is positioned on this substrate 1210, and in order to cover this circuit 1220 and this pressure apparatus 1230, this fluid L filling is in this housing 1240, and this gas A filling is in this passage 1233.When first pressure gauge 1235, second pressure gauge 1237 and the 3rd pressure gauge 1239 of this pressure apparatus 1230 detects pressure and change, be about to that this signal passes to computing in this circuit 1220 and directions X acceleration and Y directional acceleration when obtaining object X-Y direction and moving.
L shaped pedestal herein and L shaped passage, only be the embodiment explanation, in fact, the moulding of pedestal does not influence function, and the reference pressure that provides each pressure gauge common only is provided the purpose of gas passage, sees through external environment condition UNICOM even passage also can be connected to external environment condition.As long as three pressure gauges with triangular arrangement (not conllinear), can obtain the sensitive information of the acceleration of X-Y direction.
Preferably, this first pressure gauge 1235, this second pressure gauge 1237 and the 3rd pressure gauge 1239 can be capacitance-type pressure gage or piezoelectric type or piezoresistive pressure gage.
Preferably, this substrate can be selected silicon, integrated circuit, printed circuit board (PCB), glass substrate, plastic base or ceramic substrate for use.
Referring to figures 20 through the inertial sensor 1300,1400,1500 of Figure 23 and 1600 the 13 embodiment to the 16 embodiment, the principle of these embodiment is all the same with formula and the 7th embodiment, difference only is to utilize passage 1333,1433,1533 and 1633 itself to be used as housing, inject fluid L, and external environment A is worked as pressure for referencial use, its structure more shape is simple and easy.Because the formation of fluid L internal pressure gradient and hull shape are irrelevant,, the design of passage 1333,1433,1533 and 1633 just can so only need allowing fluid L freely be communicated with.
Therefore, the present invention possesses following advantage is arranged:
1. planar design simplified structure does not significantly almost have moving part.
2. use the pressure of fluid itself, sensitivity promotes.
3. need not heat, low power consuming need be flowed hardly, and reaction velocity is fast.
4. planar structure is fit to modern PCB based SIP processing procedure, perhaps also many pressure gauges can be made on same the crystal grain, simply accomplishes 2.5, " almost " no moving part.
5. the inertial mass that measures usefulness basically is equivalent to (area) of pressure transducer * (distance) * (fluid density), can accomplish high sensitivity easily.
6. can use capacitance pressure transducer,, the electric capacity height of the more traditional comb electrode of capacitance.
7. for desirable incompressible fluid, the foundation of pressure gradient and change must not need to follow mobile, and system response can be very fast.
In sum, the present invention utilizes the microstructure process to make the inertial sensor of high sensitivity plane formula structure, can dwindle the size of inertial sensor, increase the range of application of product, and because of inertial sensor of the present invention has simple in structure, so during a large amount of production, its technology is simple and easy can significantly to reduce the technology cost.In addition, acceleration or angular acceleration when inertial sensor of the present invention utilizes pressure differential (pressure gradient) to measure movement of objects or rotation, and further can integrate mutually and carry out the advantage that multiaxis measures.
Above though the present invention has been undertaken in detail by above-mentioned preferred embodiment; yet above-mentioned preferred embodiment is not in order to limit protection scope of the present invention; any those skilled in the art; without departing from the spirit and scope of the present invention; when doing various changes and modification; therefore, protection scope of the present invention, the scope that defines with claims is as the criterion.
Claims (62)
1. an inertial sensor is characterized in that, described inertial sensor comprises: substrate, circuit, pressure apparatus meter, and fluid;
Described pressure apparatus comprises annular housing, passage and pressure gauge; Wherein, described annular housing has annular housing first end and annular housing second end; Described passage has passage first end and passage second end, and described passage second end connects described annular housing second end;
Described pressure gauge connects described annular housing first end and described passage first end respectively, and described pressure gauge is electrically connected described circuit;
Described fluid-filled in described annular housing.
2. inertial sensor as claimed in claim 1 is characterized in that, described substrate is silicon, integrated circuit, printed circuit board (PCB), glass substrate, plastic base or ceramic substrate.
3. inertial sensor as claimed in claim 1 is characterized in that described pressure is counted capacitance-type pressure gage, piezoelectric pressure gauge or piezoresistive pressure gage.
4. inertial sensor as claimed in claim 1 is characterized in that, described fluid is a liquid.
5. inertial sensor as claimed in claim 4 is characterized in that, described liquid is the composition of water, oil, liquid crystal or water, oil, liquid crystal.
6. inertial sensor as claimed in claim 1 is characterized in that described circuit is arranged on the described substrate.
7. inertial sensor as claimed in claim 1 is characterized in that described circuit places the outside of inertial sensor.
8. inertial sensor as claimed in claim 1 is characterized in that, obtains the sensitivity of angular acceleration by described manometric force value, and described angular acceleration is obtained by following formula:
α＝P/(2πd?R
2)；
P is the force value that pressure gauge measures;
D is a specific gravity;
α is an angular acceleration; And
R is the annular housing radius.
9. an inertial sensor is characterized in that, comprising:
Substrate; Circuit; Pressure apparatus, and fluid;
Described pressure apparatus comprises annular housing, pedestal, first pressure gauge and second pressure gauge; Wherein said annular housing has annular housing first end and annular housing second end;
Described first pressure gauge connects described annular housing first end, and described first pressure gauge is electrically connected described circuit;
Described second pressure gauge connects described annular housing second end, and described second pressure gauge is electrically connected described circuit;
Described fluid, filling is in described annular housing.
10. inertial sensor as claimed in claim 9, it is characterized in that having passage in the described pedestal, described passage has passage first end and passage second end, and described passage first end connects the described first pressure gauge chamber, and described passage second end connects the described second pressure gauge chamber.
11. inertial sensor as claimed in claim 9 is characterized in that, described substrate is silicon, integrated circuit, printed circuit board (PCB), glass substrate, plastic base or ceramic substrate.
12. inertial sensor as claimed in claim 10 is characterized in that, described passage is positioned on the described substrate.
13. inertial sensor as claimed in claim 10 is characterized in that, described passage extends in the described substrate.
14. inertial sensor as claimed in claim 10 is characterized in that, is air in the described passage.
15. inertial sensor as claimed in claim 10 is characterized in that, is vacuum state in the described passage.
16. inertial sensor as claimed in claim 9 is characterized in that, described first pressure is taken into account second pressure and is counted capacitance-type pressure gage, piezoelectric pressure gauge or piezoresistive pressure gage.
17. inertial sensor as claimed in claim 9 is characterized in that, described circuit is arranged on the described substrate.
18. inertial sensor as claimed in claim 9 is characterized in that, described circuit places the outside of inertial sensor.
19. inertial sensor as claimed in claim 9 is characterized in that, described fluid is a liquid.
20. inertial sensor as claimed in claim 19 is characterized in that, described liquid is the potpourri of water, oil, liquid crystal or water, oil, liquid crystal.
21. inertial sensor as claimed in claim 9 is characterized in that, obtains the sensitivity of angular acceleration by described first pressure gauge and the described second manometric pressure differential, described angular acceleration is obtained by following formula:
α＝(P
2-P
1)/(2πd?R
2)；
P
1It is the force value that first pressure gauge measures;
P
2It is the force value that second pressure gauge measures;
D is a specific gravity;
α is an angular acceleration; And
R is the annular housing radius.
22. an inertial sensor is characterized in that, comprising:
Circuit; Pressure apparatus, housing, and fluid;
Described pressure apparatus comprises pedestal, first pressure gauge and second pressure gauge; Described first pressure gauge places on the described pedestal, and described first pressure gauge is electrically connected described circuit;
Described second pressure gauge places on the described pedestal, and described second pressure gauge is electrically connected described circuit;
Described housing, described pressure apparatus is positioned at described enclosure interior;
Described fluid, filling is in described housing.
23. inertial sensor as claimed in claim 22 is characterized in that, has passage in the described pedestal, described passage has passage first end and passage second end; Described passage first end connects the described first pressure gauge chamber, and described passage second end connects the described second pressure gauge chamber.
24. inertial sensor as claimed in claim 22 is characterized in that, described housing comprises substrate, and described substrate is positioned at described housing bottom.
25. inertial sensor as claimed in claim 22 is characterized in that, described housing comprises loam cake and substrate.
26. inertial sensor as claimed in claim 23 is characterized in that, described passage also comprises passage the 3rd end, and the end points of the end points of described passage the 3rd end and the end points of described passage first end, described passage second end conllinear not.
27. inertial sensor as claimed in claim 26 is characterized in that, described pressure apparatus also comprises the 3rd pressure gauge, and described the 3rd pressure gauge connects described passage the 3rd end, and described the 3rd pressure gauge is electrically connected described circuit.
28. inertial sensor as claimed in claim 24 is characterized in that, described substrate is silicon, integrated circuit, printed circuit board (PCB), glass substrate, plastic base or ceramic substrate.
29. inertial sensor as claimed in claim 25 is characterized in that, described substrate is silicon, integrated circuit, printed circuit board (PCB), glass substrate, plastic base or ceramic substrate.
30. inertial sensor as claimed in claim 23 is characterized in that, described passage is positioned on the described substrate.
31. inertial sensor as claimed in claim 23 is characterized in that, described passage or extend in the described substrate.
32. inertial sensor as claimed in claim 23 is characterized in that, is air in the described passage.
33. inertial sensor as claimed in claim 23 is characterized in that, described passage is a vacuum state.
34. inertial sensor as claimed in claim 22 is characterized in that, described first pressure is taken into account described second pressure and is counted capacitance-type pressure gage, piezoelectric pressure gauge or piezoresistive pressure gage.
35. inertial sensor as claimed in claim 27 is characterized in that, described first pressure gauge, described second pressure are taken into account described the 3rd pressure and are counted capacitance-type pressure gage, piezoelectric pressure gauge or piezoresistive pressure gage.
36. inertial sensor as claimed in claim 22 is characterized in that, described fluid is a liquid.
37. inertial sensor as claimed in claim 36 is characterized in that, described liquid is water, oil, liquid crystal or its potpourri.
38. inertial sensor as claimed in claim 22 is characterized in that, obtains the sensitivity of linear acceleration by described first pressure gauge and the described second manometric pressure differential, described acceleration is obtained by following formula:
a＝(P
2-P
1)/(d×S)；
P
1It is the force value that first pressure gauge measures;
P
2It is the force value that second pressure gauge measures;
D is a specific gravity;
A is an acceleration; And
S is the distance of pressure gauge center, the first pressure gauge center to the second.
39. inertial sensor as claimed in claim 22 is characterized in that, obtains the sensitivity of angular velocity by described first pressure gauge and the described second manometric pressure differential, described pressure differential is obtained by following formula:
P
1It is the force value that first pressure gauge measures;
P
2It is the force value that second pressure gauge measures;
D is a specific gravity;
ω is an angular velocity;
R
1Distance for rotation center to the first pressure gauge center; And
R
2Distance for rotation center to the second pressure gauge center.
40. an inertial sensor manufacture method is characterized in that, comprising:
One housing is provided;
Form a circuit;
Form a pressure apparatus in described enclosure interior; And
Filling one fluid is in described housing.
41. inertial sensor manufacture method as claimed in claim 40 is characterized in that, forms substrate in described housing bottom.
42. inertial sensor manufacture method as claimed in claim 40 is characterized in that described circuit places described enclosure interior.
43. inertial sensor manufacture method as claimed in claim 40 is characterized in that described circuit places described outside.
44. inertial sensor manufacture method as claimed in claim 41 is characterized in that, described circuit and described pressure apparatus are positioned on the described substrate.
45. inertial sensor manufacture method as claimed in claim 41 is characterized in that described substrate can be silicon, integrated circuit, printed circuit board (PCB), glass substrate or ceramic substrate.
46. inertial sensor manufacture method as claimed in claim 40 is characterized in that, described pressure apparatus comprises: pedestal, first pressure gauge, and second pressure gauge;
Have a passage in the described pedestal, described passage has passage first end and passage second end;
Described first pressure gauge connects described passage first end, and described first pressure gauge is electrically connected described circuit;
Described second pressure gauge connects described passage second end, and described second pressure gauge is electrically connected described circuit.
47. inertial sensor manufacture method as claimed in claim 46 is characterized in that, described passage also comprises described passage the 3rd end, and the L-shaped in the plane distribution of described passage.
48. inertial sensor manufacture method as claimed in claim 47 is characterized in that, described pressure apparatus also comprises one the 3rd pressure gauge, and described the 3rd pressure gauge connects described passage the 3rd end, and described the 3rd pressure gauge is electrically connected described circuit.
49. inertial sensor manufacture method as claimed in claim 46 is characterized in that described passage is positioned on the described substrate.
50. inertial sensor manufacture method as claimed in claim 46 is characterized in that described passage extends in the described substrate.
51. inertial sensor manufacture method as claimed in claim 46 is characterized in that, is air in the described passage.
52. inertial sensor manufacture method as claimed in claim 46 is characterized in that, is vacuum state in the described passage.
53. inertial sensor manufacture method as claimed in claim 46 is characterized in that, described first pressure is taken into account described second pressure and is counted capacitance-type pressure gage, piezoelectric pressure gauge or piezoresistive pressure gage.
54. inertial sensor manufacture method as claimed in claim 48 is characterized in that, described first pressure gauge, described second pressure are taken into account described the 3rd pressure and are counted capacitance-type pressure gage, piezoelectric pressure gauge or piezoresistive pressure gage.
55. inertial sensor manufacture method as claimed in claim 40 is characterized in that, the described fluid of injection is a liquid.
56. inertial sensor manufacture method as claimed in claim 55 is characterized in that, described liquid is water, oil, liquid crystal or its potpourri.
57. an inertial sensor is characterized in that described inertial sensor comprises: circuit; Pressure apparatus, and fluid;
Described pressure apparatus comprises: pedestal, first pressure gauge, second pressure gauge;
Have passage in the described pedestal, described passage has passage first end and passage second end; Described first pressure gauge connects described passage first end, and described first pressure gauge is electrically connected described circuit; Described second pressure gauge connects described passage second end, and described second pressure gauge is electrically connected described circuit;
Described fluid, filling is in described passage.
58. inertial sensor as claimed in claim 57 is characterized in that, described first pressure is taken into account described second pressure and is counted capacitance-type pressure gage, piezoelectric pressure gauge or piezoresistive pressure gage.
59. inertial sensor as claimed in claim 57 is characterized in that, the bottom of described pressure apparatus comprises substrate.
60. inertial sensor as claimed in claim 57 is characterized in that, described substrate is silicon, integrated circuit, printed circuit board (PCB), glass substrate, plastic base or ceramic substrate.
61. inertial sensor as claimed in claim 57 is characterized in that, the described fluid of injection is a liquid.
62. inertial sensor as claimed in claim 61 is characterized in that, described liquid is water, oil, liquid crystal or its potpourri.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101126844A CN101334422A (en) | 2007-06-27 | 2007-06-27 | Inertial sensor and method of manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101126844A CN101334422A (en) | 2007-06-27 | 2007-06-27 | Inertial sensor and method of manufacture |
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| Publication Number | Publication Date |
|---|---|
| CN101334422A true CN101334422A (en) | 2008-12-31 |
Family
ID=40197151
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101126844A Pending CN101334422A (en) | 2007-06-27 | 2007-06-27 | Inertial sensor and method of manufacture |
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| Country | Link |
|---|---|
| CN (1) | CN101334422A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102384715A (en) * | 2011-02-15 | 2012-03-21 | 谭成忠 | Piezoelectric current sensor |
| CN103424569A (en) * | 2013-06-13 | 2013-12-04 | 中北大学 | High g value acceleration sensor based on liquid mass block |
| CN106324281A (en) * | 2015-07-02 | 2017-01-11 | 北京自动化控制设备研究所 | Molecular electronic angle accelerometer electromagnetism conversion unit |
| CN108016639A (en) * | 2016-11-04 | 2018-05-11 | 北京自动化控制设备研究所 | Molecular electronic type angular accelerometer sensing assembly is pressurized sealed-off closing device and method |
| CN108845159A (en) * | 2018-07-05 | 2018-11-20 | 大连理工大学 | A kind of structure angle acceleration measurement device and method based on dynamic measurement centrifugal force |
| CN110361562A (en) * | 2014-03-03 | 2019-10-22 | 英飞凌科技股份有限公司 | Acceleration transducer |
| CN110823259A (en) * | 2019-10-15 | 2020-02-21 | 上海集成电路研发中心有限公司 | Inertial sensor and preparation method thereof |
| CN112289001A (en) * | 2020-11-17 | 2021-01-29 | 金陵科技学院 | Intelligent safety helmet early warning system capable of monitoring human body falling state |
| CN113490636A (en) * | 2019-03-01 | 2021-10-08 | 罗伯特·博世有限公司 | Micromechanical sensor device and corresponding production method |
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- 2007-06-27 CN CNA2007101126844A patent/CN101334422A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102384715B (en) * | 2011-02-15 | 2015-12-30 | 谭成忠 | A kind of piezoelectric current sensor |
| CN102384715A (en) * | 2011-02-15 | 2012-03-21 | 谭成忠 | Piezoelectric current sensor |
| CN103424569A (en) * | 2013-06-13 | 2013-12-04 | 中北大学 | High g value acceleration sensor based on liquid mass block |
| CN103424569B (en) * | 2013-06-13 | 2015-07-15 | 中北大学 | High g value acceleration sensor based on liquid mass block |
| CN110361562B (en) * | 2014-03-03 | 2022-06-17 | 英飞凌科技股份有限公司 | Acceleration sensor |
| CN110361562A (en) * | 2014-03-03 | 2019-10-22 | 英飞凌科技股份有限公司 | Acceleration transducer |
| CN106324281A (en) * | 2015-07-02 | 2017-01-11 | 北京自动化控制设备研究所 | Molecular electronic angle accelerometer electromagnetism conversion unit |
| CN108016639A (en) * | 2016-11-04 | 2018-05-11 | 北京自动化控制设备研究所 | Molecular electronic type angular accelerometer sensing assembly is pressurized sealed-off closing device and method |
| CN108845159A (en) * | 2018-07-05 | 2018-11-20 | 大连理工大学 | A kind of structure angle acceleration measurement device and method based on dynamic measurement centrifugal force |
| CN108845159B (en) * | 2018-07-05 | 2023-05-12 | 大连理工大学 | Structure angular acceleration measuring device and method based on dynamic measurement centrifugal force |
| CN113490636A (en) * | 2019-03-01 | 2021-10-08 | 罗伯特·博世有限公司 | Micromechanical sensor device and corresponding production method |
| CN110823259B (en) * | 2019-10-15 | 2021-08-27 | 上海集成电路研发中心有限公司 | Inertial sensor and preparation method thereof |
| CN110823259A (en) * | 2019-10-15 | 2020-02-21 | 上海集成电路研发中心有限公司 | Inertial sensor and preparation method thereof |
| CN112289001A (en) * | 2020-11-17 | 2021-01-29 | 金陵科技学院 | Intelligent safety helmet early warning system capable of monitoring human body falling state |
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