CN203133113U

CN203133113U - Triaxial capacitance type acceleration sensor

Info

Publication number: CN203133113U
Application number: CN 201320193347
Authority: CN
Inventors: 崔贺伟; 陈强中
Original assignee: XIAMEN NIELL ELECTRONIC CO Ltd
Current assignee: XIAMEN NIELL ELECTRONIC CO Ltd
Priority date: 2013-04-12
Filing date: 2013-04-12
Publication date: 2013-08-14
Anticipated expiration: 2023-04-12

Abstract

The utility model discloses a triaxial capacitance type acceleration sensor. The triaxial capacitance type acceleration sensor comprises an upper cover, a base, three sensing chips and a serial port socket, wherein the base consists of three surfaces; a frame is arrange in the base; the three sensing chips are respectively arranged on the frame in the base and are perpendicular to one another; the serial port socket is fixed on the side surface of the base and is connected with the sensing chips; and the upper cover consists of three surfaces perpendicular to one another and is fixed on the base. By adopting the scheme, an acceleration vector can be detected, the off-axis sensitivity is effectively suppressed, and the consistency of different axial sensitivities is controlled; the triaxial capacitance type acceleration sensor is manufactured by adopting single-axis sensor chips, and without a complicated process, an adhesion effect can be overcome, and the product reliability is improved; and each axial sensor chip can be flexibly used, and once a failure occurs, only corresponding chips need to be replaced.

Description

A kind of three capacitance acceleration transducers

Technical field

The utility model relates to a kind of acceleration transducer, refers in particular to a kind of capacitance acceleration transducer.

Background technology

Acceleration transducer is the testing tool that pressure that physical phenomenons such as degree of will speed up, vibrations, impact produce is transformed into the electric signal of being convenient to measure.Capacitance acceleration transducer is measured acceleration change to be converted to a class sensor of capacitance change, because have the measuring accuracy height, and advantage such as output is stable, and temperature drift is little and being used widely.

Usually, most capacitive accelerometer can only detect one or two axial acceleration, and needs the sense acceleration vector in a lot of the application.Have employing to make three capacitance acceleration transducers at same substrate at present, if chip internal adopts an inertial mass, have usually higher off-axis sensitivity and along disalignment to the sensitivity difference bigger; If chip internal adopts three inertial masses, for overcome chip internal structure make and practicality in the adhesion effect that produces and the technology that adopts also make the making complexity comparatively of device.In addition, three capacitance acceleration transducers on the same substrate detect inefficacy in case sensor needs only in a certain axial appearance, and whole sensor just can't be used.

The utility model content

The utility model has solved above-mentioned technical matters, and a kind of three capacitance acceleration transducers are provided.

In order to solve the problems of the technologies described above, the technical solution of the utility model is: a kind of three capacitance acceleration transducers, it is characterized in that: comprise loam cake, base, sensing chip, described base is made up of three faces, the inside of base is provided with shelf, described sensing chip has three, is installed in respectively on the shelf in the base, and is vertical mutually between described three sensing chips.

Further, described a kind of three capacitance acceleration transducers also comprise a serial ports socket, and described serial ports socket is fixed on the side of base, and is connected with sensing chip.

Further, described loam cake is made up of three faces, is fixed on the base.

Adopt the beneficial effect of scheme of the present utility model:

1, three single shaft capacitance acceleration transducer chips is installed on three orthogonal of same base; But the sense acceleration vector effectively suppresses off-axis sensitivity, controls the consistance of different axial sensitivities; The single-axis sensors chip manufacturing need not too complicated technology, can overcome adhesion effect, improves product reliability; Each axial sensor chip can use flexibly, in case go wrong, only needs to change respective chip;

2, adopt the serial ports socket, replace the connector of customization, improve interface generality.

Description of drawings

Below in conjunction with accompanying drawing embodiment of the present utility model is described in further detail.

Fig. 1 is perspective view of the present utility model;

Fig. 2 is serial ports socket synoptic diagram of the present utility model;

Fig. 3 is understructure synoptic diagram of the present utility model.

Embodiment

Below in conjunction with the drawings and specific embodiments, the utility model is described further.

Fig. 1, Fig. 2, a kind of three capacitance acceleration transducers shown in Figure 3, comprise loam cake 1, base 3, sensing chip 4 and serial ports socket 2, base 3 is made up of three faces, the inside of base 3 is provided with shelf, sensing chip 4 has three, be installed in respectively on the shelf of base 3, vertical mutually between three sensing chips 4, serial ports socket 2 is fixed on the side of base 3, and be connected with sensing chip 4, loam cake 1 is made up of three faces, is fixed on the base 3, and sensor is installed on the object under test, object under test produces acceleration, each axial sensing chip senses acceleration, and acceleration is changed into corresponding electric signal, adopts the serial ports socket outwards to export.

Although specifically show and introduced the utility model in conjunction with preferred embodiment; but the those skilled in the art should be understood that; in not breaking away from the spirit and scope of the present utility model that appended claims limits; in the form and details the utility model is made a variety of changes, be protection domain of the present utility model.

Claims

1. three capacitance acceleration transducers, it is characterized in that: comprise loam cake, base, sensing chip, described base is made up of three faces, the inside of base is provided with shelf, described sensing chip has three, be installed in respectively on the shelf in the base, vertical mutually between described three sensing chips.

2. a kind of three capacitance acceleration transducers according to claim 1, it is characterized in that: described a kind of three capacitance acceleration transducers also comprise a serial ports socket, described serial ports socket is fixed on the side of base, and is connected with sensing chip.

3. a kind of three capacitance acceleration transducers according to claim 1, it is characterized in that: described loam cake is made up of three faces.