CN218646999U - Based on MEMS directional acceleration sensor - Google Patents
Based on MEMS directional acceleration sensor Download PDFInfo
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- CN218646999U CN218646999U CN202223381567.7U CN202223381567U CN218646999U CN 218646999 U CN218646999 U CN 218646999U CN 202223381567 U CN202223381567 U CN 202223381567U CN 218646999 U CN218646999 U CN 218646999U
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Abstract
The utility model belongs to the technical field of acceleration sensor, concretely relates to based on directional acceleration sensor of MEMS, including sensor housing, inclined to one side ware, MEMS one, MEMS two, sensor base, air cavity one, air cavity two, be provided with sensor housing on the sensor base, be provided with MEMS one on the sensor base, be provided with MEMS two on the sensor base, air cavity one has been seted up on the sensor base, air cavity two has been seted up on the sensor base. The utility model discloses an adopt gas pressure MEMS chip, it is with low costs, and adopt two MEMS structures, measurement accuracy is high, and the response is fast, and through adopting compressed nitrogen gas, the product range is big, and can not appear the overrange damage, and adopt the nitrogen to fill up the gas cavity, and product stability is high, and it is higher to have solved traditional piezoresistive acceleration sensor price, and gas pressure sensor's price is generally lower, and detects the slow problem of response.
Description
Technical Field
The utility model relates to an acceleration sensor technical field specifically is a based on MEMS directional acceleration sensor.
Background
An acceleration sensor is a sensor capable of measuring acceleration. The damper is generally composed of a mass, a damper, an elastic element, a sensitive element, an adaptive circuit and the like. In the acceleration process, the sensor obtains an acceleration value by measuring the inertial force borne by the mass block and utilizing Newton's second law. Common acceleration sensors include capacitive, inductive, strain, piezoresistive, piezoelectric, etc. depending on the sensor sensing element. Due to factors such as process and technology, the traditional piezoresistive acceleration sensor is high in price, the gas pressure sensor is generally low in price, but the detection response is slow, and therefore the MEMS-based directional acceleration sensor is provided.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a based on MEMS directional acceleration sensor, it is higher to have solved traditional piezoresistive acceleration sensor price, and gas pressure sensor's price is generally lower, nevertheless detects the slow problem of response.
In order to achieve the above object, the utility model provides a following technical scheme: the sensor base is provided with the sensor shell, the sensor base is provided with the MEMS I, the sensor base is provided with the MEMS II, the sensor base is provided with the air cavity I, and the sensor base is provided with the air cavity II.
Preferably, the shape of the sensor shell is a cuboid, and the sensor inner components can be protected through the design of the sensor shell.
Preferably, the first MEMS and the second MEMS are symmetrically distributed on the sensor base, and the air pressure change in the first air cavity and the air pressure change in the second air cavity can be acquired respectively through the design of the first MEMS and the second MEMS.
Preferably, the first air cavity is communicated with the second air cavity, so that the biasing device can change the change of the internal air pressure.
Preferably, deflectors are arranged in the first air cavity and the second air cavity, and the design of the deflectors can be matched with the air pressure in the first air cavity and the second air cavity of the MEMS pair for detection.
Preferably, the shape of the biasing device is cylindrical, and the biasing device is matched with the first air cavity and the second air cavity in shape, so that the biasing device is more suitable for the first air cavity and the second air cavity.
The utility model has the advantages as follows:
the utility model discloses an adopt gas pressure MEMS chip, it is with low costs, and adopt two MEMS structures, measurement accuracy is high, and the response is fast, and through adopting compressed nitrogen gas, the product range is big, and can not appear the overrange damage, and adopt the nitrogen to fill up the gas cavity, and product stability is high, and it is higher to have solved traditional piezoresistive acceleration sensor price, and gas pressure sensor's price is generally lower, nevertheless detects the slow problem of response.
Drawings
FIG. 1 is a perspective view of the present invention;
fig. 2 is a perspective view of the deflector of fig. 1 according to the present invention;
fig. 3 is a perspective view of the sensor housing of fig. 1 according to the present invention;
fig. 4 is a perspective view of the sensor base in fig. 1 according to the present invention.
In the figure: 1. a sensor housing; 2. a biasing device; 3. a first MEMS; 4. a second MEMS; 5. a sensor base; 6. a first air cavity; 7. and a second air cavity.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.
Referring to fig. 1-4, a directional acceleration sensor based on MEMS includes a sensor housing 1, a biasing device 2, a first MEMS 3, a second MEMS 4, a sensor base 5, a first air cavity 6, and a second air cavity 7, wherein the sensor base 5 is provided with the sensor housing 1, and the sensor housing 1 is rectangular, so that the sensor housing 1 can protect the internal components of the sensor.
Referring to fig. 1-4, a first MEMS 3 is disposed on a sensor base 5, a second MEMS 4 is disposed on the sensor base 5, the first MEMS 3 and the second MEMS 4 are symmetrically disposed on the sensor base 5, and the first MEMS 3 and the second MEMS 4 are designed to collect pressure changes in a first air cavity 6 and a second air cavity 7 respectively, the sensor base 5 is provided with the first air cavity 6, the sensor base 5 is provided with the second air cavity 7, and the first air cavity 6 is communicated with the second air cavity 7, so that the bias device 2 can change the pressure changes therein.
Referring to fig. 1-4, a first air cavity 6 and a second air cavity 7 are provided with a biasing device 2, the design of the biasing device 2 can be matched with a first MEMS 3 and a second MEMS 4 to detect the air pressure in the first air cavity 6 and the second air cavity 7, the shape of the biasing device 2 is cylindrical, and the shape of the biasing device 2 is matched with the shape of the first air cavity 6 and the shape of the second air cavity 7, so that the biasing device 2 is more suitable for the first air cavity 6 and the second air cavity 7.
The utility model discloses specific implementation process as follows: during the use, at the container internal fixation sensor base 5 of pressurization sealing nitrogen gas, installation biasing ware 2 fills the nitrogen gas of fixed pressure, installation sensor housing 1, and when this sensor is in motion initial condition, biasing ware 2 can produce the bias because inertia, causes the pressure variation of air cavity one 6 and air cavity two 7, gathers the atmospheric pressure change of air cavity one 6 and air cavity two 7 through MEMS one 3 and MEMS two 4, can calculate the acceleration.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a based on directional acceleration sensor of MEMS, includes sensor housing (1), biasing ware (2), MEMS one (3), MEMS two (4), sensor base (5), air cavity one (6), air cavity two (7), its characterized in that: the sensor comprises a sensor base (5) and is characterized in that a sensor shell (1) is arranged on the sensor base (5), a first MEMS (3) is arranged on the sensor base (5), a second MEMS (4) is arranged on the sensor base (5), a first air cavity (6) is formed in the sensor base (5), and a second air cavity (7) is formed in the sensor base (5).
2. A MEMS-based directional acceleration sensor according to claim 1, characterized in that: the sensor shell (1) is in a cuboid shape.
3. A MEMS-based directional acceleration sensor according to claim 1, characterized in that: the MEMS I (3) and the MEMS II (4) are symmetrically distributed on the sensor base (5).
4. A MEMS-based directional acceleration sensor according to claim 1, characterized in that: the air cavity I (6) is communicated with the air cavity II (7).
5. A MEMS-based directional acceleration sensor according to claim 1, characterized in that: and the first air cavity (6) and the second air cavity (7) are internally provided with a deflector (2).
6. A MEMS-based directional acceleration sensor according to claim 1, characterized in that: the shape of the deflector (2) is cylindrical, and the deflector (2) is matched with the first air cavity (6) and the second air cavity (7) in shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223381567.7U CN218646999U (en) | 2022-12-16 | 2022-12-16 | Based on MEMS directional acceleration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223381567.7U CN218646999U (en) | 2022-12-16 | 2022-12-16 | Based on MEMS directional acceleration sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218646999U true CN218646999U (en) | 2023-03-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223381567.7U Active CN218646999U (en) | 2022-12-16 | 2022-12-16 | Based on MEMS directional acceleration sensor |
Country Status (1)
| Country | Link |
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| CN (1) | CN218646999U (en) |
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2022
- 2022-12-16 CN CN202223381567.7U patent/CN218646999U/en active Active
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