CN108007633B - Micro-air-bag type flexible three-dimensional force sensor - Google Patents
Micro-air-bag type flexible three-dimensional force sensor Download PDFInfo
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- CN108007633B CN108007633B CN201711116017.3A CN201711116017A CN108007633B CN 108007633 B CN108007633 B CN 108007633B CN 201711116017 A CN201711116017 A CN 201711116017A CN 108007633 B CN108007633 B CN 108007633B
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- 230000005540 biological transmission Effects 0.000 claims abstract description 36
- 229920002379 silicone rubber Polymers 0.000 claims description 9
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
- 238000012545 processing Methods 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000011326 mechanical measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
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- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
本发明涉及一种微气囊式柔性三维力传感器，包括柔性传力柱和设置在柔性传力柱下方的柔性基座；所述柔性传力柱的底部设有若干均匀分布的上微型气囊；所述柔性基座上开设有下微型气囊；所述上微型气囊和下微型气囊中均设有微型压力传感器。由以上技术方案可知，本发明通过在柔性传力柱和柔性基座中以一定的排列方式包埋上微型气囊和下微型气囊，并通过设置在各微型气囊中的微型压力传感器来测量各微型气囊中的气压变化，从而测算出受到的加载力，实现三维力的测量。本发明降低了柔性三维力传感器的加工难度，提高了易用性。
The invention relates to a micro-airbag type flexible three-dimensional force sensor, comprising a flexible force transmission column and a flexible base arranged under the flexible force transmission column; the bottom of the flexible force transmission column is provided with a plurality of uniformly distributed upper micro airbags; A lower micro airbag is opened on the flexible base; and a micro pressure sensor is arranged in the upper micro airbag and the lower micro airbag. It can be known from the above technical solutions that the present invention embeds the upper micro airbag and the lower micro airbag in a certain arrangement in the flexible force transmission column and the flexible base, and measures each micro airbag through the micro pressure sensor arranged in each micro airbag. The air pressure in the air bag changes, so as to measure the loading force and realize the measurement of three-dimensional force. The invention reduces the processing difficulty of the flexible three-dimensional force sensor and improves the usability.
Description
Technical Field
The invention relates to the technical field of physical measuring instruments, in particular to a micro-airbag type flexible three-dimensional force sensor.
Background
The mechanical sensor is a sensing device for converting various mechanical measurement quantities into electric signals, and is widely applied to various aspects in production and life. With the rapid development of electromechanical devices such as portable electronic devices, wearable devices, and intelligent robots, micro sensors having the advantages of small size, light weight, low power consumption, and high reliability are being widely used. According to the property of the manufacturing material, the mechanical sensor can be divided into an all-solid state, a semi-solid state and a flexible structure, wherein the flexible structure can be applied to the environments such as a touch sensor, robot skin and the like which need proper elasticity or match with complex shapes, so that the mechanical sensor has wider applicability.
Most of the currently used force sensors are all-solid-state or semi-solid-state structures, and the design based on a flexible structure is less. Moreover, most force sensors directly convert mechanical information into electrical signals based on a capacitance principle or a piezoresistive principle, which requires a complex signal processing circuit integrated inside a flexible structure, and is not favorable for manufacturing of an array sensor.
Disclosure of Invention
The invention aims to provide a micro-air bag type flexible three-dimensional force sensor which can realize the measurement of three-dimensional force, reduce the processing difficulty of the flexible three-dimensional force sensor and improve the usability.
In order to achieve the purpose, the invention adopts the following technical scheme:
a micro-air bag type flexible three-dimensional force sensor comprises a flexible force transmission column and a flexible base arranged below the flexible force transmission column; the bottom of the flexible force transmission column is provided with a plurality of upper micro air bags which are uniformly distributed; the flexible base is provided with a lower micro air bag; and the upper micro air bag and the lower micro air bag are respectively provided with a micro pressure sensor. The central axis of the flexible elastic column is used as a central line, and the plurality of upper micro air bags are uniformly and symmetrically distributed along the outer circumference of the bottom of the flexible force transmission column.
Furthermore, the bottom surface of the flexible force transmission column is connected with the top surface of the flexible base in an adhesive mode, and the central axis of the flexible force transmission column, the central axis of the flexible base and the central axis of the lower micro air bag coincide with each other.
Furthermore, the upper micro air bag is a groove formed in the bottom of the flexible force transmission column, and an opening at the lower end of the groove is sealed by the top surface of the flexible base. The plurality of upper micro air bags are uniformly distributed on the periphery of the lower micro air bag, and the upper micro air bags are not contacted with or communicated with the lower micro air bags.
Furthermore, the lower micro air bag is a through hole arranged in the middle of the flexible base, the opening at the top of the through hole is sealed by the bottom surface of the flexible force transmission column, and the opening at the bottom of the through hole is sealed by silicon rubber.
Furthermore, the lower micro air bag is a semi-buried hole with an upward opening formed in the middle of the flexible base, and the opening at the top of the semi-buried hole is sealed by the bottom surface of the flexible force transmission column.
Furthermore, the upper micro air bag and the lower micro air bag are distributed in a staggered mode. The upper micro air bag senses tangential force, and the lower micro air bag senses normal pressure.
Furthermore, the flexible force transmission column is a cylinder made of flexible silicon rubber.
Furthermore, the flexible base is an elastic gasket which is made of flexible silicon rubber and has a regular shape.
According to the technical scheme, the upper micro air bags and the lower micro air bags are embedded in the flexible force transmission column and the flexible base in a certain arrangement mode, and the air pressure change in each micro air bag is measured through the micro pressure sensors arranged in each micro air bag, so that the applied loading force is measured, and the three-dimensional force measurement is realized. The invention reduces the processing difficulty of the flexible three-dimensional force sensor and improves the usability.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic cross-sectional structure of the present invention.
Wherein:
1. the flexible force transmission column comprises 21-24 parts of an upper micro air bag 3 parts of a flexible base 4 parts of a lower micro air bag.
Detailed Description
The invention is further described below with reference to the accompanying drawings:
the micro-air bag type flexible three-dimensional force sensor as shown in fig. 1-2 comprises a flexible force transmission column 1 and a flexible base 3 arranged below the flexible force transmission column 1. The bottom of the flexible force transmission column 1 is provided with 4 upper micro air bags 21-24 which are uniformly distributed. The central axis of the flexible elastic column is used as a central line, and 4 upper micro air bags are uniformly and symmetrically distributed along the outer circumference of the bottom of the flexible force transmission column. The flexible base 3 is provided with a lower micro air bag 4. Miniature pressure sensors are arranged in the upper miniature air bags 21-24 and the lower miniature air bag 4; the micro pressure sensor is used for detecting the air pressure change in the upper micro air bag or the lower micro air bag. The lower surface of the flexible base 3 is bonded with a signal acquisition circuit or other supporting structures to realize the fixation of the whole sensor.
Furthermore, flexible dowel pin 1 is the elastic cylinder who adopts flexible silicon rubber material to make, and the cylinder appearance ensures that flexible dowel pin 1 can not receive the extra resistance that irregular appearance arouses when arbitrary direction bending deformation in the xy plane. The flexible force transmission column 1 can change the size and the height according to actual requirements, so that different sensor measuring ranges and sensitivities are realized.
Furthermore, the bottom surface of the flexible force transmission column 1 is bonded with the top surface of the flexible base 3, and the central axis of the flexible force transmission column 1, the central axis of the flexible base 3 and the central axis of the lower micro air bag 4 are overlapped.
Further, the upper micro air bags 21 to 24 are grooves with downward openings formed at the bottom of the flexible force transmission column 1, and the openings at the lower ends of the grooves are sealed by the top surface of the flexible base 3. The 4 upper micro air bags 21-24 are evenly distributed on the periphery of the lower micro air bag 4, and the upper micro air bags 21-24 are not contacted with or communicated with the lower micro air bag 4. Two groups of upper micro air bags 21, 24 and 22, 23 which are symmetrical in pairs respectively sense acting forces in the x and y directions or the y and x directions. The upper micro air bags 21-24 can change the size and the shape according to actual requirements, and adjust the air pressure in the upper micro air bags, so that different sensor measuring ranges and sensitivities are realized.
Further, the lower micro air bag 4 is a through hole formed in the center of the flexible base 3, the opening at the top of the through hole is sealed by the bottom surface of the flexible force transmission column 1, and the opening at the bottom of the through hole is sealed by silicon rubber. Or, the lower micro-airbag 4 is a half buried hole with an upward opening formed in the center of the flexible base 3, and the opening at the top of the half buried hole is sealed by the bottom surface of the flexible force transmission column 1. And the lower micro air bag 4 is used for sensing acting force in the z direction. The size and the shape of the lower micro air bag 4 can be changed according to actual requirements, and the air pressure in the lower micro air bag is adjusted, so that different sensor measuring ranges and sensitivity are realized.
Further, the upper micro-balloons 21 to 24 and the lower micro-balloons 4 are distributed in a staggered manner. The upper micro-balloons 21-24 are arranged above the top of the flexible base 3 and are easy to induce tangential force, and the lower micro-balloon 4 is arranged in the flexible base 3 and induces normal pressure which is insensitive to the tangential force. When the upper micro-balloons 21 to 24 are deformed by a tangential force, the deformation of the lower micro-balloon 4 is not caused or greatly reduced.
Further, the flexible base 3 is an elastic gasket which is made of flexible silicon rubber and has a regular shape. Preferably, the regular shape is rectangular or circular.
The working principle of the invention is as follows:
in use, when the sensor is stressed, the applied force is decomposed into three directions of x, y and z by the flexible force transmission column 1. The upper micro air bag and the lower micro air bag in the three directions deform after being stressed, and the air pressure change of each micro air bag is measured through each micro pressure sensor, so that the stress condition in each direction is sensed. The calculation method of the stress in each direction is as follows:
Fx＝α(P24-P21)
Fy＝β(P22-P23)
Fz＝γP4
the force sensors are respectively connected with the micro pressure sensors, wherein the Fx, the Fy and the Fz are respectively applied to the force sensors in the x, y and z directions; p21、P22、P23、P24And P4The pressures of the upper micro-balloons 21, 22, 23, 24 and the lower micro-balloon 4, respectively, and α, β and gamma are conversion coefficients.
The above-mentioned embodiments are merely illustrative of the preferred embodiments of the present invention, and do not limit the scope of the present invention, and various modifications and improvements of the technical solution of the present invention by those skilled in the art should fall within the protection scope defined by the claims of the present invention without departing from the spirit of the present invention.
Claims (4)
1. A micro-air bag type flexible three-dimensional force sensor is characterized in that: comprises a flexible force transmission column and a flexible base arranged below the flexible force transmission column; the bottom of the flexible force transmission column is provided with a plurality of upper micro air bags which are uniformly distributed; the flexible base is provided with a lower micro air bag; miniature pressure sensors are arranged in the upper miniature air bag and the lower miniature air bag;
the upper micro air bag and the lower micro air bag are distributed in a staggered manner;
the upper micro air bag is a groove formed in the bottom of the flexible force transmission column, and an opening at the lower end of the groove is sealed by the top surface of the flexible base;
the lower micro air bag is a through hole formed in the middle of the flexible base, the opening at the top of the through hole is sealed by the bottom surface of the flexible force transmission column, and the opening at the bottom of the through hole is sealed by silicon rubber; or the lower micro air bag is a semi-buried hole with an upward opening formed in the middle of the flexible base, and the opening at the top of the semi-buried hole is sealed by the bottom surface of the flexible force transmission column.
2. The micro-balloon flexible three-dimensional force sensor of claim 1, wherein: the bottom surface of the flexible force transmission column is connected with the top surface of the flexible base in an adhesive mode, and the central axis of the flexible force transmission column, the central axis of the flexible base and the central axis of the lower micro air bag are overlapped.
3. The micro-balloon flexible three-dimensional force sensor of claim 1, wherein: the flexible force transmission column is a cylinder made of flexible silicon rubber.
4. The micro-balloon flexible three-dimensional force sensor of claim 1, wherein: the flexible base is an elastic gasket which is made of flexible silicon rubber and has a regular shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711116017.3A CN108007633B (en) | 2017-11-13 | 2017-11-13 | Micro-air-bag type flexible three-dimensional force sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711116017.3A CN108007633B (en) | 2017-11-13 | 2017-11-13 | Micro-air-bag type flexible three-dimensional force sensor |
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| CN108007633A CN108007633A (en) | 2018-05-08 |
| CN108007633B true CN108007633B (en) | 2020-05-05 |
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| CN110440974B (en) * | 2019-07-15 | 2020-11-13 | 中国科学院合肥物质科学研究院 | A micro-airbag multi-dimensional force sensor with overload protection function |
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| JPH10170545A (en) * | 1996-12-13 | 1998-06-26 | Miyota Co Ltd | Self-diagnostic function for acceleration sensor and acceleration sensor with self-diagnostic function |
| CN100450733C (en) * | 2006-12-28 | 2009-01-14 | 中国科学院合肥物质科学研究院 | Bionic Finger Surface Flexible Contact Sensor Array of Robot Gripper |
| CN102706489B (en) * | 2012-06-13 | 2014-01-29 | 哈尔滨工业大学 | A flexible three-dimensional force tactile sensor for a multi-fingered hand of a humanoid robot and its three-dimensional force detection system |
| CN104359597A (en) * | 2014-11-13 | 2015-02-18 | 中国科学院重庆绿色智能技术研究院 | Electronic skin based on three-dimensional flexible substrate graphene and preparing method thereof |
| CN106840476B (en) * | 2017-01-25 | 2019-12-03 | 东南大学 | Three-dimensional carbon nanomaterial field-effect flexible force-sensitive sensing element and preparation method |
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