CN102900861B - 用于基本上气密截断流动路径的阀门 - Google Patents
用于基本上气密截断流动路径的阀门 Download PDFInfo
- Publication number
- CN102900861B CN102900861B CN201210265346.5A CN201210265346A CN102900861B CN 102900861 B CN102900861 B CN 102900861B CN 201210265346 A CN201210265346 A CN 201210265346A CN 102900861 B CN102900861 B CN 102900861B
- Authority
- CN
- China
- Prior art keywords
- disk portion
- inner disk
- valve
- opening
- closed position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000000903 blocking effect Effects 0.000 title claims abstract description 7
- 230000033001 locomotion Effects 0.000 claims abstract description 63
- 230000007246 mechanism Effects 0.000 claims description 84
- 238000007789 sealing Methods 0.000 claims description 49
- 230000000694 effects Effects 0.000 claims description 16
- 230000002093 peripheral effect Effects 0.000 claims description 12
- 230000009467 reduction Effects 0.000 claims description 10
- 230000009471 action Effects 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 14
- 230000008569 process Effects 0.000 description 12
- 230000001276 controlling effect Effects 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 8
- 230000006872 improvement Effects 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 239000008187 granular material Substances 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
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- 230000006870 function Effects 0.000 description 3
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- 238000003825 pressing Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000002775 capsule Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000005056 compaction Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
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- 230000001105 regulatory effect Effects 0.000 description 2
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- 230000008859 change Effects 0.000 description 1
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- 210000002858 crystal cell Anatomy 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
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- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
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- 230000001502 supplementing effect Effects 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
- F16K3/10—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/598—With repair, tapping, assembly, or disassembly means
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
- Lift Valve (AREA)
- Multiple-Way Valves (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP20110175698 EP2551564A1 (de) | 2011-07-28 | 2011-07-28 | Ventil zum im Wesentlichen gasdichten Unterbrechen eines Fliesswegs |
| EP11175698.7 | 2011-07-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102900861A CN102900861A (zh) | 2013-01-30 |
| CN102900861B true CN102900861B (zh) | 2016-07-06 |
Family
ID=44735806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210265346.5A Active CN102900861B (zh) | 2011-07-28 | 2012-07-27 | 用于基本上气密截断流动路径的阀门 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8550430B2 (enExample) |
| EP (1) | EP2551564A1 (enExample) |
| JP (1) | JP6099898B2 (enExample) |
| KR (1) | KR101949898B1 (enExample) |
| CN (1) | CN102900861B (enExample) |
| SG (1) | SG187363A1 (enExample) |
| TW (1) | TWI570343B (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101528458B1 (ko) * | 2013-01-18 | 2015-06-18 | (주) 유앤아이솔루션 | 슬라이딩 역압 차단 밸브 |
| CN103603956B (zh) * | 2013-10-29 | 2015-12-23 | 北京天地禾源生物科技开发有限公司 | 汽爆罐加料口用阀门 |
| JP6507516B2 (ja) * | 2014-08-06 | 2019-05-08 | 株式会社島津製作所 | 真空バルブ |
| US9835043B2 (en) * | 2014-10-01 | 2017-12-05 | United Technologies Corporation | Guided binding-resistant actuation apparatus and method |
| US10352248B2 (en) | 2014-10-01 | 2019-07-16 | United Technologies Corporation | Synchronized air modulating system |
| EP3211281A1 (de) * | 2016-02-24 | 2017-08-30 | VAT Holding AG | Vakuumventil zum schliessen eines fliesswegs mit zweiteiligem ventilteller |
| EP3258149A1 (de) * | 2016-06-14 | 2017-12-20 | VAT Holding AG | Vakuumventil zur regelung eines flusses und zur unterbrechung eines fliessweges |
| KR102025053B1 (ko) | 2016-10-04 | 2019-09-24 | 가부시키가이샤 아루박 | 게이트 밸브 |
| JP7107543B2 (ja) * | 2017-01-30 | 2022-07-27 | 株式会社水道技術開発機構 | 流体管路構造の弁撤去方法と流体管路構造及び弁装置 |
| EP3372881A1 (de) * | 2017-03-07 | 2018-09-12 | VAT Holding AG | Optimierte druckregelung für und mit einem vakuumventil |
| JP6562334B1 (ja) | 2018-03-12 | 2019-08-21 | 株式会社アルバック | 仕切弁 |
| KR102389986B1 (ko) | 2018-04-02 | 2022-04-25 | 가부시키가이샤 아루박 | 게이트 밸브 |
| JP6861756B2 (ja) * | 2019-04-26 | 2021-04-21 | 株式会社アルバック | 油圧駆動システム、仕切りバルブ |
| DE102021102702A1 (de) | 2021-02-05 | 2022-08-11 | Vat Holding Ag | Ventil, insbesondere Vakuumventil |
| CN115370770B (zh) * | 2022-08-11 | 2025-03-25 | 二重(德阳)重型装备有限公司 | 一种真空隔离舱门 |
| CN118128922A (zh) * | 2024-03-08 | 2024-06-04 | 深圳市英维克智能连接技术有限公司 | 一种连接端、流体连接器、液冷装置及密封件 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1264191B (de) * | 1963-01-15 | 1968-03-21 | Hochvakuum Appbau Emil Kammere | Absperrschieber |
| CN1987171A (zh) * | 2005-12-20 | 2007-06-27 | Vat控股公司 | 摆阀和滑门真空阀 |
| EP2287501A1 (de) * | 2009-08-19 | 2011-02-23 | VAT Holding AG | Ventil zum im Wesentlichen gasdichten Unterbrechen eines Fliesswegs |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1723264A (en) * | 1926-01-06 | 1929-08-06 | Wilson Wylie Gemmel | Gate valve |
| US3145969A (en) | 1961-07-03 | 1964-08-25 | High Voltage Engineering Corp | Gate valve having fluid pressure seal and limit stop means |
| US3241807A (en) * | 1963-01-11 | 1966-03-22 | Oscar C Holderer | Fluid pressure actuated flow control gate valve |
| DE7731993U1 (de) | 1977-10-15 | 1978-01-26 | Emil Kammerer Kg, 5060 Bergisch Gladbach | Absperrschieber |
| DE3209217C2 (de) * | 1982-03-13 | 1985-10-03 | Siegfried Haag Schertler | Schiebeventil |
| JPS60136671A (ja) | 1983-12-26 | 1985-07-20 | Fuji Seikou Kk | ゲ−トバルブのシ−ル構造 |
| US5577707A (en) | 1995-12-18 | 1996-11-26 | Vat Holding Ag | Slide valve |
| DE19746241C2 (de) | 1997-10-20 | 2000-05-31 | Vat Holding Ag Haag | Einrichtung zum Verschließen einer Öffnung |
| US6089537A (en) | 1999-06-23 | 2000-07-18 | Mks Instruments, Inc. | Pendulum valve assembly |
| JP3425937B2 (ja) | 2000-12-04 | 2003-07-14 | 入江工研株式会社 | ゲート弁 |
| JP3425938B2 (ja) | 2000-12-14 | 2003-07-14 | 入江工研株式会社 | ゲート弁 |
| US6629682B2 (en) | 2001-01-11 | 2003-10-07 | Vat Holding Ag | Vacuum valve |
| US6416037B1 (en) | 2001-01-11 | 2002-07-09 | Vat Holding Ag | Vacuum pipe |
| US7086638B2 (en) * | 2003-05-13 | 2006-08-08 | Applied Materials, Inc. | Methods and apparatus for sealing an opening of a processing chamber |
| US7032882B2 (en) | 2003-09-29 | 2006-04-25 | Mks Instruments, Inc. | Valve assembly having novel flow characteristics |
| CN101208551B (zh) * | 2005-07-29 | 2011-04-13 | 株式会社开滋Sct | 滑阀 |
| US7802772B2 (en) * | 2005-12-20 | 2010-09-28 | Vat Holding Ag | Pendulum and slide gate vacuum valve |
| KR101323311B1 (ko) * | 2005-12-20 | 2013-10-30 | 배트 홀딩 아게 | 유로를 가스 기밀하게 폐쇄하는 밸브 |
| TW201124655A (en) * | 2009-09-03 | 2011-07-16 | Ulvac Inc | Gate valve |
-
2011
- 2011-07-28 EP EP20110175698 patent/EP2551564A1/de not_active Withdrawn
-
2012
- 2012-07-25 KR KR1020120081225A patent/KR101949898B1/ko not_active Expired - Fee Related
- 2012-07-25 SG SG2012055331A patent/SG187363A1/en unknown
- 2012-07-27 TW TW101127106A patent/TWI570343B/zh active
- 2012-07-27 JP JP2012166908A patent/JP6099898B2/ja active Active
- 2012-07-27 US US13/560,560 patent/US8550430B2/en active Active
- 2012-07-27 CN CN201210265346.5A patent/CN102900861B/zh active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1264191B (de) * | 1963-01-15 | 1968-03-21 | Hochvakuum Appbau Emil Kammere | Absperrschieber |
| CN1987171A (zh) * | 2005-12-20 | 2007-06-27 | Vat控股公司 | 摆阀和滑门真空阀 |
| CN1987170A (zh) * | 2005-12-20 | 2007-06-27 | Vat控股公司 | 用于基本气密地关闭流道的阀 |
| EP2287501A1 (de) * | 2009-08-19 | 2011-02-23 | VAT Holding AG | Ventil zum im Wesentlichen gasdichten Unterbrechen eines Fliesswegs |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2551564A1 (de) | 2013-01-30 |
| TW201329373A (zh) | 2013-07-16 |
| CN102900861A (zh) | 2013-01-30 |
| JP2013032840A (ja) | 2013-02-14 |
| JP6099898B2 (ja) | 2017-03-22 |
| KR101949898B1 (ko) | 2019-04-25 |
| SG187363A1 (en) | 2013-02-28 |
| TWI570343B (zh) | 2017-02-11 |
| US20130025704A1 (en) | 2013-01-31 |
| US8550430B2 (en) | 2013-10-08 |
| KR20130014378A (ko) | 2013-02-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |