CN102896425A - Method for rapidly preparing large area nano texture on metal surface by ultrafast laser - Google Patents
Method for rapidly preparing large area nano texture on metal surface by ultrafast laser Download PDFInfo
- Publication number
- CN102896425A CN102896425A CN2012103653231A CN201210365323A CN102896425A CN 102896425 A CN102896425 A CN 102896425A CN 2012103653231 A CN2012103653231 A CN 2012103653231A CN 201210365323 A CN201210365323 A CN 201210365323A CN 102896425 A CN102896425 A CN 102896425A
- Authority
- CN
- China
- Prior art keywords
- light guide
- guide table
- optical light
- nano
- sample stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 title claims abstract description 30
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 title claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims abstract description 22
- 239000007769 metal material Substances 0.000 claims abstract description 8
- 230000000737 periodic effect Effects 0.000 claims abstract description 4
- 238000005498 polishing Methods 0.000 claims abstract description 3
- 239000002086 nanomaterial Substances 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 230000003993 interaction Effects 0.000 abstract 1
- 239000013077 target material Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 230000007123 defense Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 210000000110 microvilli Anatomy 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 240000002853 Nelumbo nucifera Species 0.000 description 2
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 2
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241000251730 Chondrichthyes Species 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 230000003075 superhydrophobic effect Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 230000009182 swimming Effects 0.000 description 1
- 210000003371 toe Anatomy 0.000 description 1
Images
Landscapes
- Laser Beam Processing (AREA)
Abstract
本发明涉及一种采用超快激光在金属表面快速制备出大面积纳米织构的方法,具体包括选用任意金属材料的金属靶材,经表面抛光处理后固定于样品台上,然后超快激光依次经过滤波片、半波片、偏振分光棱镜后引入光学导光台,并经光学导光台上的聚焦镜聚焦至金属靶材表面,接下来使样品台与光学导光台之间产生相对运动,在超快激光与金属靶材表面之间通过搭接式来回扫描方式直接在金属靶材表面扫描形成规则的周期性纳米织构条纹,其特点为:利用超快激光与金属材料的相互作用,通过计算机控制超快激光与金属靶材的相对运动,在金属靶材表面形成光学扫描,快速制备出大面积的纳米织构。
The invention relates to a method for quickly preparing a large-area nano-texture on a metal surface by using an ultrafast laser, which specifically includes selecting a metal target material of any metal material, fixing it on a sample stage after surface polishing, and then using the ultrafast laser After filters, half-wave plates, and polarizing beamsplitters, it is introduced into the optical light guide table, and is focused on the surface of the metal target by the focusing lens on the optical light guide table, and then relative motion is generated between the sample stage and the optical light guide table. , between the ultrafast laser and the surface of the metal target, the regular periodic nano-texture stripes are directly scanned on the surface of the metal target by overlapping scanning back and forth, which is characterized by the use of the interaction between the ultrafast laser and the metal material , through computer control of the relative movement between the ultrafast laser and the metal target, an optical scan is formed on the surface of the metal target, and a large-area nano-texture is quickly prepared.
Description
技术领域 technical field
本发明涉及一种采用超快激光在金属表面快速制备出大面积纳米织构的方法,利用本方法所产生的纳米织构具有规则性、周期性,且周期远小于激光波长。本方法所涉及的表面纳米结构制备技术属于激光微纳加工领域。The invention relates to a method for quickly preparing a large-area nano-texture on a metal surface by using an ultrafast laser. The nano-texture produced by the method has regularity and periodicity, and the period is much shorter than the laser wavelength. The surface nanostructure preparation technology involved in the method belongs to the field of laser micro-nano processing.
背景技术 Background technique
大自然生物表面上特殊的有规则的微纳米结构特有的介观效应使其具备超常的表面性能。如,荷花叶表面的微米级凸起和其上分布的纳米级腊丝使得荷叶具有超疏水性和出淤泥而不染的极佳自洁性能;壁虎的脚趾上附有数百万直立的微绒毛,每个微绒毛末梢都有纳米分支,当数百万这样的微绒毛与物体表面接触时,它们之间会产生强大的范德华力,使得壁虎能够轻松自如地倒悬挂于天花板或墙壁表面,还能随意离开物体表面;鲨鱼皮表面粗糙的V形皱褶可以大大减少水流的摩擦力,使身体周围的水流更高效地流过进而实现快速游动。这些表面维纳结构蕴含着丰富的物理原理和应用价值,吸引着研究者对表面微纳米结构的制备技术的高度关注。The unique mesoscopic effect of the special and regular micro-nano structure on the natural biological surface makes it have extraordinary surface properties. For example, the micron-scale protrusions on the surface of the lotus leaf and the nano-scale wax filaments distributed on it make the lotus leaf super-hydrophobic and excellent self-cleaning performance when it comes out of the mud without staining; there are millions of upright toes attached to the gecko. Microvilli, each microvilli has nano-branches at the end, when millions of these microvilli come into contact with the surface of an object, a strong van der Waals force will be generated between them, allowing the gecko to easily hang upside down from the ceiling or wall surface , It can also leave the surface of the object at will; the rough V-shaped folds on the surface of the shark skin can greatly reduce the friction of the water flow, so that the water flow around the body can flow through more efficiently and achieve fast swimming. These surface Wiener structures contain rich physical principles and application values, which attract researchers' high attention to the preparation technology of surface micro-nano structures.
传统纳米织构化的实现主要是通过光刻的方法实现,步骤复杂,且污染严重。近几年,随着激光技术的快速发展,尤其是超快激光技术的发展,为许多科研领域增加了新的技术手段。超短脉冲对材料表面的超快作用导致了许多新奇的极端非线性现象,呈现出许多超常的性能。研究者通过激光辐照的方法在金属[Opt.Express 17,20757(2009)]、半导体[Appl.Phys.Lett.89,033506(2006)]聚合物[APL 100,041106(2012)]等不同材料上研制成各种纳米结构。然而在实际应用中,人们更注重的是所获得纳米结构的性能及用途,即通过获得大面积的表面纳米织构而真正实现其超常表面性能。金属材料与国防及国民生产息息相关,具有无可替代的作用,在金属材料表面实施大面积的表面纳米织构化制备,实现超常的表面性能,对科技发展及科技生产力的提高具有重要的价值和意义。The realization of traditional nanotexturing is mainly realized by photolithography, which has complicated steps and serious pollution. In recent years, with the rapid development of laser technology, especially the development of ultrafast laser technology, new technical means have been added to many scientific research fields. The ultrafast action of ultrashort pulses on the surface of materials leads to many novel extreme nonlinear phenomena and presents many extraordinary properties. The researchers used laser irradiation methods in metals [Opt.Express 17, 20757 (2009)], semiconductors [Appl. Phys. Lett. 89, 033506 (2006)] polymers [APL 100, 041106 (2012)] Materials developed into various nanostructures. However, in practical applications, people pay more attention to the properties and uses of the obtained nanostructures, that is, to truly realize their extraordinary surface properties by obtaining large-area surface nanotextures. Metal materials are closely related to national defense and national production, and play an irreplaceable role. Large-area surface nano-texturization preparation on the surface of metal materials to achieve extraordinary surface properties is of great value and importance to the development of science and technology and the improvement of scientific and technological productivity. significance.
发明内容 Contents of the invention
本发明旨在提供一种采用超快激光在金属表面直接制备出大面积周期性的纳米织构。该方法工艺简单、可操作性强、无污染,适用于任何金属材料,在军事国防及国民生产中具有广泛的应用潜力。The invention aims to provide a large-area periodic nano-texture directly prepared on the metal surface by using an ultrafast laser. The method has simple process, strong operability and no pollution, is applicable to any metal material, and has wide application potential in military defense and national production.
本发明的内容包括以下具体步骤:Content of the present invention comprises following concrete steps:
1)选用任意金属材料的金属靶材,经表面抛光处理后固定于样品台上,所述的样品台为计算机编程控制的二维运动台;1) Choose a metal target of any metal material, and fix it on the sample stage after surface polishing. The sample stage is a two-dimensional motion stage controlled by computer programming;
2)超快激光依次经过滤波片、半波片、偏振分光棱镜后引入光学导光台,并经光学导光台上的聚焦镜聚焦至金属靶材表面,所述的光学导光台为计算机编程控制的二维运动台;2) The ultrafast laser is introduced into the optical light guide table after passing through the filter, half-wave plate, and polarizing beam splitter in sequence, and is focused to the surface of the metal target by the focusing lens on the optical light guide table. The optical light guide table is a computer Two-dimensional motion platform controlled by programming;
3)选择光学导光台固定、样品台运动,或者光学导光台运动、样品台固定的二选一工作方式,使得样品台与光学导光台之间产生相对运动,在超快激光与金属靶材表面之间通过搭接式来回扫描方式直接在金属靶材表面扫描形成规则的周期性纳米织构条纹;所述的搭接式来回扫描方式为光学导光台或者样品台首先水平方向移动,然后竖直方向移动,接下来继续水平方向移动,连续两次水平方向移动形成的纳米织构条纹在纵向进行部分交叠;如此周而复始,制备出大面积的纳米织构。3) Select the working mode of fixed optical light guide table and sample stage movement, or optical light guide table movement and fixed sample stage, so that relative motion occurs between the sample stage and optical light guide table. The surface of the target is scanned directly on the surface of the metal target by overlapping back and forth scanning to form regular periodic nano-texture stripes; the overlapping back and forth scanning method is that the optical light guide table or the sample stage first moves horizontally , and then move in the vertical direction, and then continue to move in the horizontal direction, and the nano-textured stripes formed by two consecutive horizontal moves are partially overlapped in the longitudinal direction; repeating this cycle, a large-area nano-texture is prepared.
所述的超快激光光源为飞秒激光或亚皮秒激光,且超快激光波长可调。The ultrafast laser light source is a femtosecond laser or a subpicosecond laser, and the wavelength of the ultrafast laser is adjustable.
通过调节样品台与光学导光台之间的相对运动速度控制大面积纳米织构形成的时间,且制备纳米织构的时间与相对运动速度成反比关系。The time for forming the large-area nano-texture is controlled by adjusting the relative motion speed between the sample stage and the optical light guide table, and the time for preparing the nano-texture is inversely proportional to the relative motion speed.
本发明中所采用的超快激光光源为飞秒激光或亚皮秒激光,且采用不同波长的超快激光对制备的纳米织构的周期进行调控,获得纳米织构的周期为亚激光波长。The ultrafast laser light source used in the present invention is femtosecond laser or subpicosecond laser, and ultrafast lasers of different wavelengths are used to regulate the period of the prepared nano-texture, and the period of obtaining the nano-texture is sub-laser wavelength.
本发明中的核心关键点为:“大面积”、“快速”。其中“大面积”的实现关键在于所述的搭接式来回扫描,即采用计算机程序控制二维运动台在两个方向上的运动速度及运动台所走距离实现扫描纳米织构的搭接,从而形成大面积的织构化制备。“快速”意为摒弃了传统的纳米织构制造方法,比如,光刻、压印等工序多而复杂的制造方式,仅仅通过超快激光直接在金属靶材表面扫描的方式即可获得大面积的纳米织构,同时通过调节样品台与导光台之间的相对运动速度来控制形成大面积纳米织构的速度。The core key points in the present invention are: "large area" and "fast". Among them, the key to the realization of "large area" lies in the overlap-type back-and-forth scanning, that is, the computer program is used to control the moving speed of the two-dimensional moving table in two directions and the distance traveled by the moving table to realize the overlapping of scanning nano-textures, thereby Form large-area texturing preparations. "Fast" means abandoning the traditional nano-texture manufacturing methods, such as photolithography, embossing and other complex manufacturing methods, and only by scanning the ultrafast laser directly on the surface of the metal target to obtain a large area. At the same time, the speed of forming large-area nano-textures is controlled by adjusting the relative movement speed between the sample stage and the light guide table.
本发明中所获得的纳米织构的重要性能指标:“深宽比”是通过对激光脉冲通量、扫描速度及扫描次数进行控制而形成。The important performance index of the nano-texture obtained in the present invention: "aspect ratio" is formed by controlling the laser pulse flux, scanning speed and scanning times.
有益效果Beneficial effect
1)实现了在金属表面制备大面积纳米织构的技术,加工工艺简单、可操作性强、无污染、成本低,在军事国防及国民生产中具有重要的应用潜力。1) Realized the technology of preparing large-area nano-textures on the metal surface, with simple processing technology, strong operability, no pollution, and low cost, and has important application potential in military defense and national production.
2)本发明方法直接在金属表面扫描获得纳米织构,其周期小于激光波长;纳米织构的深宽比通过激光参数及扫描参数的优化即可实现。2) The method of the present invention directly scans the metal surface to obtain a nano-texture whose period is smaller than the laser wavelength; the aspect ratio of the nano-texture can be realized by optimizing the laser parameters and scanning parameters.
附图说明 Description of drawings
图1:超快激光快速制备金属表面大面积纳米织构的技术路线图,Figure 1: The technical roadmap for rapid preparation of large-area nanotextures on metal surfaces by ultrafast lasers,
图2:利用400nm的飞秒激光在金属钨表面获得的大面积纳米织构扫描电镜图,Figure 2: SEM images of large-area nanotextures obtained on the surface of metal tungsten using a 400nm femtosecond laser,
图3:本发明方法流程图。Fig. 3: Flow chart of the method of the present invention.
(1)超快激光、(2)滤波片、(3)半波片、(4)偏振分光棱镜、(5)聚焦镜、(6)样品台、(7)光学导光台(1) Ultrafast laser, (2) Filter, (3) Half-wave plate, (4) Polarizing beam splitter, (5) Focusing mirror, (6) Sample stage, (7) Optical light guide stage
具体实施方式 Detailed ways
下面结合附图对本发明的具体实施方式做进一步详细说明。The specific implementation manner of the present invention will be described in further detail below in conjunction with the accompanying drawings.
本发明在实施过程中采用的超快激光光源为飞秒激光或者是亚皮秒激光。如附图1所示,激光光束首先经过滤波片滤掉杂散光;然后经过半波片及偏振分光棱镜,半波片与偏振分光棱镜的作用为根据激光的偏振态调整激光的脉冲通量;激光光束最后经过聚集镜后聚焦到金属靶材表面。最终通过计算机编程控制二维运动台在金属靶材表面扫描出纳米织构。The ultrafast laser light source used in the implementation of the present invention is a femtosecond laser or a subpicosecond laser. As shown in Figure 1, the laser beam first passes through a filter to filter out stray light; then passes through a half-wave plate and a polarization beam splitter. The function of the half-wave plate and the polarization beam splitter is to adjust the pulse flux of the laser according to the polarization state of the laser; The laser beam finally passes through the focusing mirror and then focuses on the surface of the metal target. Finally, the two-dimensional motion table is controlled by computer programming to scan the nano-texture on the surface of the metal target.
以附图2中所提的400nm飞秒激光在钨金属表面所形成的大面积织构为例说明本发明的具体实施方案,但不应以此限制本发明的保护范围。The specific embodiment of the present invention is illustrated by taking the large-area texture formed by the 400nm femtosecond laser on the surface of tungsten metal mentioned in Figure 2 as an example, but this should not limit the protection scope of the present invention.
波长800nm、重复频率1KHz、脉宽35fs的水平线偏振飞秒激光经倍频后变为400nm的飞秒激光。400nm的飞秒激光依次经过滤波片、半波片、偏振分光棱镜后,经焦距为300mm的聚焦镜聚焦到钨金属靶材表面,聚焦后的激光光斑直径为80μm,单脉冲能量密度为0.19mJ/cm2。The horizontal linearly polarized femtosecond laser with a wavelength of 800nm, a repetition rate of 1KHz, and a pulse width of 35fs becomes a femtosecond laser of 400nm after frequency doubling. The 400nm femtosecond laser passes through a filter, a half-wave plate, and a polarizing beamsplitter in sequence, and is then focused onto the surface of a tungsten metal target by a focusing lens with a focal length of 300mm. The laser spot diameter after focusing is 80μm, and the energy density of a single pulse is 0.19mJ /cm 2 .
尺寸为50mm*20mm*5mm的钨金属,放置于二维样品台上并经过表面处理。二维样品台在计算机控制下走S型搭接路线,光学导光台固定,实现对样品的扫描。样品台的控制程序设定为:首先横向位移台以0.94mm/s的速度运行,运行路程为10mm,单方向扫描出的纳米织构宽度为80μm;然后竖直位移台以7.1mm/s下行60μm,横向位移台再以0.94mm/s的速度继续扫描,两次扫描获得的纳米织构有20μm的边缘实现搭接。如此循环下去,在整个样品靶材表面形成10mm*1mm宽的大面积纳米织构所需的时间仅仅为266s,所获得的纳米周期为210nm,尺寸小且大大节约了时间及成本。Tungsten metal with a size of 50mm*20mm*5mm is placed on a two-dimensional sample stage and undergoes surface treatment. The two-dimensional sample stage follows the S-shaped overlapping route under the control of the computer, and the optical light guide table is fixed to realize the scanning of the sample. The control program of the sample stage is set as follows: first, the lateral displacement stage runs at a speed of 0.94mm/s, the travel distance is 10mm, and the width of the nano-texture scanned in one direction is 80μm; then the vertical displacement stage moves downward at 7.1mm/s 60 μm, the lateral displacement stage continued to scan at a speed of 0.94 mm/s, and the nano-texture obtained by the two scans had a 20 μm edge to achieve overlap. If this cycle continues, the time required to form a large-area nano-texture with a width of 10mm*1mm on the entire sample target surface is only 266s, and the obtained nano-period is 210nm, which is small in size and greatly saves time and cost.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2012103653231A CN102896425A (en) | 2012-09-26 | 2012-09-26 | Method for rapidly preparing large area nano texture on metal surface by ultrafast laser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2012103653231A CN102896425A (en) | 2012-09-26 | 2012-09-26 | Method for rapidly preparing large area nano texture on metal surface by ultrafast laser |
Publications (1)
Publication Number | Publication Date |
---|---|
CN102896425A true CN102896425A (en) | 2013-01-30 |
Family
ID=47569069
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2012103653231A Pending CN102896425A (en) | 2012-09-26 | 2012-09-26 | Method for rapidly preparing large area nano texture on metal surface by ultrafast laser |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN102896425A (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103231172A (en) * | 2013-05-07 | 2013-08-07 | 北京工业大学 | Method and device for improving heat release efficiency of heating wire by utilizing laser texturing processing |
CN105583524A (en) * | 2015-12-18 | 2016-05-18 | 江苏大学 | Precise laser polishing device and method thereof |
CN107498183A (en) * | 2017-07-17 | 2017-12-22 | 西安交通大学 | It is a kind of that the method for preparing large area periodic structure is induced with linear light spot |
CN107695528A (en) * | 2017-11-13 | 2018-02-16 | 西安交通大学 | It is a kind of to regulate and control the method for preparing large area difference micro nano structure using femtosecond laser |
CN107931866A (en) * | 2017-11-10 | 2018-04-20 | 吉林大学 | The device and method of pattern processing is carried out in ceramic ball surface using femtosecond laser |
CN108838544A (en) * | 2018-07-09 | 2018-11-20 | 大连理工大学 | A kind of big depth-to-width ratio vertical trench laser processing of diamond |
CN109534286A (en) * | 2018-11-05 | 2019-03-29 | 广州大学 | A kind of material surface nesting nanostructure and preparation method thereof |
CN110238529A (en) * | 2018-03-07 | 2019-09-17 | 丰田自动车株式会社 | Insulating film peeling method |
CN116551194A (en) * | 2023-07-06 | 2023-08-08 | 国营川西机器厂 | Anti-icing treatment method for aeroengine air inlet part |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1998049018A1 (en) * | 1997-04-29 | 1998-11-05 | Stellex Microwave Systems, Inc. | Method and apparatus for a substrate having an irregular shape |
CN101020277A (en) * | 2007-03-22 | 2007-08-22 | 苏州德龙激光有限公司 | Distributed laser processing system |
WO2008127807A1 (en) * | 2007-03-09 | 2008-10-23 | University Of Virginia Patent Foundation | Systems and methods of laser texturing of material surfaces and their applications |
CN101311358A (en) * | 2008-03-28 | 2008-11-26 | 西安交通大学 | Process for preparing zinc oxide nanometer wire array by femtosecond laser and device thereof |
CN101531335A (en) * | 2009-04-08 | 2009-09-16 | 西安交通大学 | Method for preparing metal surface superhydrophobic microstructure by femto-second laser |
CN102500923A (en) * | 2011-09-21 | 2012-06-20 | 长春理工大学 | Preparation device for preparing functional micro-nano materials on silicon surfaces based on femtosecond laser and method |
-
2012
- 2012-09-26 CN CN2012103653231A patent/CN102896425A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1998049018A1 (en) * | 1997-04-29 | 1998-11-05 | Stellex Microwave Systems, Inc. | Method and apparatus for a substrate having an irregular shape |
WO2008127807A1 (en) * | 2007-03-09 | 2008-10-23 | University Of Virginia Patent Foundation | Systems and methods of laser texturing of material surfaces and their applications |
CN101020277A (en) * | 2007-03-22 | 2007-08-22 | 苏州德龙激光有限公司 | Distributed laser processing system |
CN101311358A (en) * | 2008-03-28 | 2008-11-26 | 西安交通大学 | Process for preparing zinc oxide nanometer wire array by femtosecond laser and device thereof |
CN101531335A (en) * | 2009-04-08 | 2009-09-16 | 西安交通大学 | Method for preparing metal surface superhydrophobic microstructure by femto-second laser |
CN102500923A (en) * | 2011-09-21 | 2012-06-20 | 长春理工大学 | Preparation device for preparing functional micro-nano materials on silicon surfaces based on femtosecond laser and method |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103231172A (en) * | 2013-05-07 | 2013-08-07 | 北京工业大学 | Method and device for improving heat release efficiency of heating wire by utilizing laser texturing processing |
CN105583524A (en) * | 2015-12-18 | 2016-05-18 | 江苏大学 | Precise laser polishing device and method thereof |
CN107498183A (en) * | 2017-07-17 | 2017-12-22 | 西安交通大学 | It is a kind of that the method for preparing large area periodic structure is induced with linear light spot |
CN107498183B (en) * | 2017-07-17 | 2019-11-08 | 西安交通大学 | A Method for Preparing Large-area Periodic Structures Induced by Line Spots |
CN107931866A (en) * | 2017-11-10 | 2018-04-20 | 吉林大学 | The device and method of pattern processing is carried out in ceramic ball surface using femtosecond laser |
CN107931866B (en) * | 2017-11-10 | 2019-10-29 | 吉林大学 | The device and method of pattern processing is carried out in ceramic ball surface using femtosecond laser |
CN107695528A (en) * | 2017-11-13 | 2018-02-16 | 西安交通大学 | It is a kind of to regulate and control the method for preparing large area difference micro nano structure using femtosecond laser |
CN107695528B (en) * | 2017-11-13 | 2019-03-12 | 西安交通大学 | A method of regulating and controlling preparation large area difference micro nano structure using femtosecond laser |
CN110238529A (en) * | 2018-03-07 | 2019-09-17 | 丰田自动车株式会社 | Insulating film peeling method |
CN108838544A (en) * | 2018-07-09 | 2018-11-20 | 大连理工大学 | A kind of big depth-to-width ratio vertical trench laser processing of diamond |
CN109534286A (en) * | 2018-11-05 | 2019-03-29 | 广州大学 | A kind of material surface nesting nanostructure and preparation method thereof |
CN116551194A (en) * | 2023-07-06 | 2023-08-08 | 国营川西机器厂 | Anti-icing treatment method for aeroengine air inlet part |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102896425A (en) | Method for rapidly preparing large area nano texture on metal surface by ultrafast laser | |
Sohn et al. | Laser assisted fabrication of micro-lens array and characterization of their beam shaping property | |
CN104439699B (en) | System and method for preparing micro-nano array structure by laser | |
Rekstyte et al. | Nanoscale precision of 3D polymerisation via polarisation control | |
CN105108342B (en) | Method for preparing two-dimensional metallic photonic crystal structure in large area through femtosecond laser direct writing | |
CN104591549B (en) | A kind of method that use femto-second laser pulse sequence processes microarray in glass surface | |
CN102285635B (en) | System and method for manufacturing metal micro-nano structure by using laser | |
CN102000912B (en) | Laser micro-nano machining system and method | |
CN108015410B (en) | A method for preparing crystalline nanostructures based on femtosecond laser-induced amorphous GemSbnTek thin films | |
CN107790887A (en) | The femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure | |
CN103658993B (en) | Crystal silicon surface femtosecond laser selective ablation method based on electron dynamic control | |
CN105458529A (en) | Method for efficiently making large-depth-diameter-ratio micropore arrays | |
CN106216833B (en) | Method based on dynamic control laser machine semiconductor twin-stage surface texture | |
CN101311358B (en) | Method and device for preparing zinc oxide nanowire arrays by femtosecond laser | |
CN103862171A (en) | Method for preparing two-dimensional periodic metal particle array structure through dual-wavelength femtosecond lasers | |
CN106735925B (en) | A kind of femtosecond laser direct write preparation method of two dimension sub-micron butterfly metal micro structure | |
CN106744662A (en) | A kind of method that utilization dynamic control prepares silicon nanowire structure | |
CN104625416A (en) | Method for electronic dynamic control of crystal silicon surface periodic micro-nano structures based on square hole assistance | |
Lu et al. | Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejection | |
CN106141438A (en) | A kind of method utilizing laser plasma filament to prepare metal multifunction surface | |
Zhang et al. | Glass micro welding in thermal accumulation regime with using spatially shaped ultrafast laser | |
CN103084737B (en) | Method and device for preparing nanometer grids on surface of target by using ultrafast laser | |
CN103447693A (en) | Method for manufacturing micrometer and nanometer composite periodic structure | |
Yan et al. | Fabrication of multi-focal chalcogenide glass microlens arrays based on femtosecond laser-assisted chemical etching method | |
Ahsan et al. | Formation mechanism of nanostructures in soda–lime glass using femtosecond laser |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C05 | Deemed withdrawal (patent law before 1993) | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130130 |