CN102896425A - Method for rapidly preparing large area nano texture on metal surface by ultrafast laser - Google Patents
Method for rapidly preparing large area nano texture on metal surface by ultrafast laser Download PDFInfo
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- CN102896425A CN102896425A CN2012103653231A CN201210365323A CN102896425A CN 102896425 A CN102896425 A CN 102896425A CN 2012103653231 A CN2012103653231 A CN 2012103653231A CN 201210365323 A CN201210365323 A CN 201210365323A CN 102896425 A CN102896425 A CN 102896425A
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Abstract
The invention relates to a method for rapidly preparing a large area nano texture on a metal surface by ultrafast laser. The method specifically includes that a metal target material of any metal material is selected, the metal target material is subjected to surface polishing processing and fixed on a sample table, then the ultrafast laser sequentially passes through a filter, a half wave plate and a polarized beam splitter prism to be led in an optical light guide table and focused on the surface of the metal target material through a focusing mirror on the optical light guide table, then the relative movement is performed between the sample table and the optical light guide table, and a regular periodical nano texture stripe is directly formed on the surface of the metal target material in a lap joint back and forth scanning mode between the ultrafast laser and the surface of the metal target material. The method is characterized in that the interaction of the ultrafast laser and the metal material is utilized, a computer is used for controlling the relative movement between the ultrafast laser and the metal target material, an optical scanning is formed on the surface of the metal target material, and thereby the large area nano texture is rapidly prepared.
Description
Technical field
The present invention relates to a kind of method that adopts ultrafast laser to prepare fast large-area nano texture in the metal surface, the nanometer texture of utilizing this method to produce has systematicness, periodically, and the cycle is much smaller than optical maser wavelength.The related surface nano-structure technology of preparing of this method belongs to the laser micro/nano manufacture field.
Background technology
The distinctive mesoscopic effect of well-regulated micro nano structure special on the Nature biological surface makes it possess extraordinary surface property.As, the micron order projection on lotus leaves surface and cured of the nanoscale that distributes on it are so that lotus leaf has the splendid self-cleaning property that super-hydrophobicity is not dyed with going out mud; Have millions of upright microvillus on the toe of gecko, each microvillus tip has nanometer branch, when millions of such microvillus contact with body surface, can produce powerful Van der Waals force between them, be hung on ceiling or wall surface so that gecko can hang by the feet easily, can also arbitrarily leave body surface; The coarse V-arrangement gauffer of shark skin surface can greatly reduce the frictional force of current, current around the health are flow through more efficiently and then realizes moving about fast.These surface dimension micro-nano structures are containing abundant physical principle and using value, are attracting the showing great attention to of technology of preparing of researcher's effects on surface micro nano structure.
The textured realization of tradition nanometer mainly is the method realization by photoetching, and step is complicated, and seriously polluted.In recent years, along with the fast development of laser technology, the especially development of ultrafast laser technique was for many scientific research fields had increased new technological means.Ultrashort pulse has caused the extreme non-linear phenomena of many novelties to the ultrafast effect of material surface, presents many extraordinary performances.[Opt.Express 17 at metal for the method for researcher by laser irradiation, 20757 (2009)], semiconductor [Appl.Phys.Lett.89,033506 (2006)] is developed into various nanostructureds on the different materials such as polymer [APL 100,041106 (2012)].What people more paid attention to is performance and the purposes of the nanostructured that obtains, and namely really realizes its extraordinary surface property by obtaining large-area nano surface texture yet in actual applications.Metal material and national defence and national product are closely bound up, has the effect that can not be substituted, implement large-area nano surface texturing preparation at metal material surface, realize extraordinary surface property, the raising of development in science and technology and scientific and technological productive forces is had important value and significance.
Summary of the invention
The present invention aims to provide a kind of employing ultrafast laser and directly prepares the periodic nanometer texture of large tracts of land in the metal surface.The method technique is simple, workable, pollution-free, is applicable to any metal material, has widely application potential in military and national defense and national product.
Content of the present invention comprises following concrete steps:
1) select the metal targets of any metal material, be fixed on the sample stage after surface finish is processed, described sample stage is the two dimensional motion platform of computer programming control;
2) ultrafast laser is introduced optics leaded light platform successively after filtration behind wave plate, half-wave plate, the polarization splitting prism, and the focus lamp on optics leaded light platform focuses to the metal targets surface, and described optics leaded light platform is the two dimensional motion platform of computer programming control;
3) select that optics leaded light platform is fixed, the sample stage motion, perhaps optics leaded light platform motion, the fixing alternative working method of sample stage, so that produce relative motion between sample stage and the optics leaded light platform, between ultrafast laser and metal targets surface by bridging type back and forth scan mode directly at the periodicity nanometer texture striped of metal targets surface scan formation rule; Described bridging type back and forth scan mode be optics leaded light platform or sample stage at first horizontal direction move, then vertical direction moves, next continue horizontal direction and move, the nanometer texture striped that double horizontal direction moves formation is in that vertically to carry out part overlapping; So go round and begin again, prepare large-area nanometer texture.
Described ultrafast laser light source is femtosecond laser or subpicosecond laser, and the ultrafast laser wavelength is adjustable.
Control the time that large-area nano texture forms by the speed of related movement of regulating between sample stage and the optics leaded light platform, and time and the speed of related movement relation of being inversely proportional to of preparation nanometer texture.
The ultrafast laser light source that adopts among the present invention is femtosecond laser or subpicosecond laser, and adopts the ultrafast laser of different wave length that the cycle of the nanometer texture of preparation is regulated and control, and the cycle that obtains nanometer texture is inferior optical maser wavelength.
Core key point among the present invention is: " large tracts of land ", " fast ".Wherein the realization key of " large tracts of land " is that described bridging type comes flyback retrace, namely adopt movement velocity and the sports platform distance covered of computer program control two dimensional motion platform on both direction to realize the overlap joint of scanning nano texture, thereby form large-area texturing preparation." fast " means and abandoned traditional nanometer texture manufacture method, such as, the manufacture that the operation such as photoetching, impression is many and complicated, only directly can obtain large-area nanometer texture in the mode of metal targets surface scan by ultrafast laser, control the speed that forms large-area nano texture by the speed of related movement of regulating between sample stage and the leaded light platform simultaneously.
The important performance indexes of the nanometer texture that obtains among the present invention: " depth-to-width ratio " is to form by laser pulse flux, sweep speed and scanning times are controlled.
Beneficial effect
1) realized preparing in the metal surface technology of large-area nano texture, processing technology is simple, workable, pollution-free, cost is low, has important application potential in military and national defense and national product.
2) directly scanning obtains nanometer texture to the inventive method in the metal surface, and its cycle is less than optical maser wavelength; The depth-to-width ratio of nanometer texture can realize by the optimization of laser parameter and sweep parameter.
Description of drawings
Fig. 1: ultrafast laser prepares the Technology Roadmap of metal surface large-area nano texture fast,
Fig. 2: utilize the femtosecond laser of 400nm at the large-area nano texture scanning electron microscope (SEM) photograph of tungsten surface acquisition,
Fig. 3: the inventive method flow chart.
(1) ultrafast laser, (2) filter plate, (3) half-wave plate, (4) polarization splitting prism, (5) focus lamp, (6) sample stage, (7) optics leaded light platform
The specific embodiment
Below in conjunction with accompanying drawing the specific embodiment of the present invention is described in further details.
The ultrafast laser light source that the present invention adopts in implementation process is femtosecond laser or subpicosecond laser.As shown in Figure 1, laser beam at first after filtration wave plate filter veiling glare; Then pass through half-wave plate and polarization splitting prism, half-wave plate and polarization splitting prism act as the pulse flux of adjusting laser according to the polarization state of laser; Laser beam focuses on the metal targets surface after finally by the overbunching mirror.Finally go out nanometer texture by computer programming control two dimensional motion platform at the metal targets surface scan.
The 400nm femtosecond laser of being carried in the accompanying drawing 2 in the tungsten metal surface formed large tracts of land texture as example illustrates specific embodiments of the present invention, but should not limit protection scope of the present invention with this.
The horizontal linear polarization femtosecond laser of wavelength 800nm, repetition rate 1KHz, pulsewidth 35fs becomes the femtosecond laser of 400nm after frequency multiplication.The femtosecond laser of 400nm is successively after filtration behind wave plate, half-wave plate, the polarization splitting prism, is that the focus lamp of 300mm focuses on tungsten metal targets surface through focal length, and the laser spot diameter after the focusing is 80 μ m, and the single pulse energy metric density is 0.19mJ/cm
2
Be of a size of the tungsten metal of 50mm*20mm*5mm, be positioned on the two-dimentional sample stage and the process surface treatment.The two dimension sample stage is walked S type overlap joint route under computer control, optics leaded light platform is fixed, and realizes the scanning to sample.The control program of sample stage is set as: at first the lateral displacement platform is with the speed operation of 0.94mm/s, and the operation distance is 10mm, and the nanometer texture width that one direction scans is 80 μ m; Then the vertical displacement platform is with the descending 60 μ m of 7.1mm/s, and the lateral displacement platform continues scanning with the speed of 0.94mm/s again, and the nanometer texture that twice sweep obtains has the edge of 20 μ m to realize overlap joint.So circulation is gone down, and forming the wide required time of large-area nano texture of 10mm*1mm at whole sample target material surface is 266s only, and the nanometer cycle that obtains is 210nm, and size is little and greatly saved time and cost.
Claims (3)
1. ultrafast laser prepares the method for metal surface large-area nano texture fast, it is characterized in that: the method adopts the mode of the direct scanning of ultrafast laser at the large-area nanometer texture of metal material surface rapid processing striped, and concrete steps are:
1) select the metal targets of any metal material, be fixed on the sample stage after surface finish is processed, described sample stage is the two dimensional motion platform of computer programming control;
2) ultrafast laser is introduced optics leaded light platform successively after filtration behind wave plate, half-wave plate, the polarization splitting prism, and the focus lamp on optics leaded light platform focuses to the metal targets surface, and described optics leaded light platform is the two dimensional motion platform of computer programming control;
3) select that optics leaded light platform is fixed, the sample stage motion, perhaps optics leaded light platform motion, the fixing alternative working method of sample stage, so that produce relative motion between sample stage and the optics leaded light platform, between ultrafast laser and metal targets surface by bridging type back and forth scan mode directly at the periodicity nanometer texture striped of metal targets surface scan formation rule; Described bridging type back and forth scan mode be optics leaded light platform or sample stage at first horizontal direction move, then vertical direction moves, next continue horizontal direction and move, the nanometer texture striped that double horizontal direction moves formation is in that vertically to carry out part overlapping; So go round and begin again, prepare large-area nanometer texture.
2. ultrafast laser according to claim 1 prepares the method for metal surface large-area nano texture fast, it is characterized in that: described ultrafast laser light source is femtosecond laser or subpicosecond laser, and the ultrafast laser wavelength is adjustable.
3. ultrafast laser according to claim 1 prepares the method for metal surface large-area nano texture fast, it is characterized in that: control the time that large-area nano texture forms by the speed of related movement of regulating between sample stage and the optics leaded light platform, and time and the speed of related movement relation of being inversely proportional to of preparation nanometer texture.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103231172A (en) * | 2013-05-07 | 2013-08-07 | 北京工业大学 | Method and device for improving heat release efficiency of heating wire by utilizing laser texturing processing |
| CN105583524A (en) * | 2015-12-18 | 2016-05-18 | 江苏大学 | Precise laser polishing device and method thereof |
| CN107498183A (en) * | 2017-07-17 | 2017-12-22 | 西安交通大学 | It is a kind of that the method for preparing large area periodic structure is induced with linear light spot |
| CN107695528A (en) * | 2017-11-13 | 2018-02-16 | 西安交通大学 | It is a kind of to regulate and control the method for preparing large area difference micro nano structure using femtosecond laser |
| CN107931866A (en) * | 2017-11-10 | 2018-04-20 | 吉林大学 | The device and method of pattern processing is carried out in ceramic ball surface using femtosecond laser |
| CN108838544A (en) * | 2018-07-09 | 2018-11-20 | 大连理工大学 | A kind of big depth-to-width ratio vertical trench laser processing of diamond |
| CN109534286A (en) * | 2018-11-05 | 2019-03-29 | 广州大学 | A kind of material surface nesting nanostructure and preparation method thereof |
| CN110238529A (en) * | 2018-03-07 | 2019-09-17 | 丰田自动车株式会社 | Insulating film stripping means |
| CN116551194A (en) * | 2023-07-06 | 2023-08-08 | 国营川西机器厂 | Anti-icing treatment method for aeroengine air inlet part |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103231172A (en) * | 2013-05-07 | 2013-08-07 | 北京工业大学 | Method and device for improving heat release efficiency of heating wire by utilizing laser texturing processing |
| CN105583524A (en) * | 2015-12-18 | 2016-05-18 | 江苏大学 | Precise laser polishing device and method thereof |
| CN107498183A (en) * | 2017-07-17 | 2017-12-22 | 西安交通大学 | It is a kind of that the method for preparing large area periodic structure is induced with linear light spot |
| CN107498183B (en) * | 2017-07-17 | 2019-11-08 | 西安交通大学 | A method of preparation large area periodic structure is induced with linear light spot |
| CN107931866A (en) * | 2017-11-10 | 2018-04-20 | 吉林大学 | The device and method of pattern processing is carried out in ceramic ball surface using femtosecond laser |
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| CN107695528B (en) * | 2017-11-13 | 2019-03-12 | 西安交通大学 | A method of regulating and controlling preparation large area difference micro nano structure using femtosecond laser |
| CN110238529A (en) * | 2018-03-07 | 2019-09-17 | 丰田自动车株式会社 | Insulating film stripping means |
| CN108838544A (en) * | 2018-07-09 | 2018-11-20 | 大连理工大学 | A kind of big depth-to-width ratio vertical trench laser processing of diamond |
| CN109534286A (en) * | 2018-11-05 | 2019-03-29 | 广州大学 | A kind of material surface nesting nanostructure and preparation method thereof |
| CN116551194A (en) * | 2023-07-06 | 2023-08-08 | 国营川西机器厂 | Anti-icing treatment method for aeroengine air inlet part |
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Application publication date: 20130130 |