CN102895892A - Chemical liquid storage device - Google Patents
Chemical liquid storage device Download PDFInfo
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- CN102895892A CN102895892A CN2012103752379A CN201210375237A CN102895892A CN 102895892 A CN102895892 A CN 102895892A CN 2012103752379 A CN2012103752379 A CN 2012103752379A CN 201210375237 A CN201210375237 A CN 201210375237A CN 102895892 A CN102895892 A CN 102895892A
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- chemical liquids
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- chemical liquid
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Abstract
The invention discloses a chemical liquid storage device. The chemical liquid storage device comprises a chemical liquid recovery pipeline and a chemical liquid circulation pipeline, wherein the chemical liquid recovery pipeline is spiral and extends into a chemical liquid storage container, and small holes are uniformly distributed in the wall of the chemical liquid recovery pipeline and the tail end of the chemical liquid recovery pipeline is plugged; and the chemical liquid circulation pipeline penetrates in the spiral chemical liquid recovery pipeline and extends into the chemical liquid storage container, small holes are uniformly distributed in the wall of the chemical liquid circulation pipeline, and the tail end of the chemical liquid circulation pipeline is plugged. According to the chemical liquid storage device, due to the adoption of the special layout of the chemical liquid recovery pipeline, the purpose of sufficiently mixing the self-circulating chemical liquid and recovered chemical liquid is achieved; the chemical liquid storage device is easy to realize; and the structure is simple, so that the maintaining and the washing of the device are further facilitated.
Description
Technical field
The present invention relates to the Semiconductor Cleaning Technology field, particularly a kind of chemical liquids storage device.
Background technology
In the semi-conductor silicon chip wet clean process, can use various chemical liquids, these chemical liquids or be acid, alkalescence or have strong corrosivity, or viscosity is higher.In some situation, chemical liquids can recycle, its working life can reach every 30L chemical liquids continuous wash 3 days or can clean 3000 silicon chips, therefore, chemical liquids need to be stored in the chemical vessel, such as groove or tank the inside, the non-process time can be realized the self-loopa of chemical liquids between pipeline and container, and technique can make chemical liquids get back to by the road in the container that stores chemical liquids later.
But, if there is not special drainage system, the old chemical liquids that technique reclaims later because of viscosity higher can't with chemical vessel in the self-loopa relative fresh chemical liquids of returning mix, will be so that employed chemical liquids or mostly be greatly the chemical liquids that self-loopa is returned during next technique, also may mostly be greatly the old liquid of recovery, will affect technological effect like this.At present, for even mixing the between the chemical liquids of self-loopa and recovery, still there is not ripe measure, what normally chemical liquids self-loopa pipeline and chemical liquids reclaim line were simple, separate is distributed in the chemical vessel, cause chemical liquids mixing inequality in the container, affect technological effect.
Summary of the invention
The technical problem that (one) will solve
The technical problem to be solved in the present invention is, for the deficiencies in the prior art, a kind of chemical liquids storage device is provided, and the chemical liquids that the particular topology by the chemical liquids reclaim line finally reaches self-loopa is fully mixed with the chemical liquids of recovery, implements comparatively simple.
(2) technical scheme
The invention provides a kind of chemical liquids storage device, comprising: chemical liquids reclaim line, described reclaim line are in the shape of a spiral and stretch in the chemical liquids storage container its even tube wall distribution aperture and tail end plugs; Chemical liquids circulation line, described circulation line are in spiral described reclaim line and stretch in the chemical liquids storage container its even tube wall distribution aperture and tail end plugs.
Better, described chemical liquids reclaim line and described chemical liquids circulation line are terminal with stopping up shutoff.
Better, described chemical liquids reclaim line and described chemical liquids circulation line are terminal with the welding shutoff.
Better, described chemical liquids storage device also comprises, is positioned at the liquid level sensor that chemical liquids storage container side is used for the sensing chemical liquids.
Better, the quantity of described liquid level sensor is at least one.
Better, described chemical liquids storage device also comprises, lays respectively at three by-pass valve controls on the new chemical liquids ascending pipe of control, cyclic chemical liquid ascending pipe and the recovery chemical liquids ascending pipe.
Better, described chemical liquids storage device also comprises, is used for the chemical liquids of described chemical liquids storage container is transported to the configuration pump of corresponding technique unit.
(3) beneficial effect
The chemical liquids that chemical liquids storage device of the present invention, the particular topology by the chemical liquids reclaim line finally reach self-loopa is fully mixed with the chemical liquids of recovery, implement comparatively simple, and its maintenance and cleaning that helps device simple in structure.
Description of drawings
Fig. 1 is chemical liquids storage device internal structure schematic diagram of the present invention;
Fig. 2 is the right view of Fig. 1;
Fig. 3 is chemical liquids storage device overall structure schematic diagram of the present invention;
Fig. 4 is chemical liquids storage device fundamental diagram of the present invention.
The specific embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples are used for explanation the present invention, but are not used for limiting the scope of the invention.
Such as Fig. 1 and with reference to shown in Figure 2, chemical liquids storage device of the present invention comprises: chemical liquids reclaim line 11, described reclaim line are in the shape of a spiral and stretch in the chemical liquids storage container its even tube wall distribution aperture and tail end plugs; Chemical liquids circulation line 12, described circulation line are in spiral described reclaim line and stretch in the chemical liquids storage container its even tube wall distribution aperture and tail end plugs.Described chemical liquids reclaim line and described chemical liquids circulation line are terminal with the obstruction shutoff or with welding shutoff.
As shown in Figure 3, described chemical liquids storage device also comprises, is positioned at the sensor 9 that chemical liquids storage container side is used for the sensing chemical liquids, and the quantity of described sensor 9 is at least one.
Described chemical liquids storage device also comprises, is positioned at by-pass valve control (3,6), the by-pass valve control (4,7) on the cyclic chemical liquid ascending pipe on the new chemical liquids ascending pipe of control and reclaims by-pass valve control (5,8) on the chemical liquids ascending pipe; Be used for the chemical liquids of described chemical liquids storage container is transported to the configuration pump (1,2) of corresponding technique unit.
As shown in Figure 4, at first open by-pass valve control (3,6) during technique, in chemical liquids storage container a and chemical liquids storage container b, inject chemical liquids, until middle liquid level sensor 9 senses chemical liquids, closing control valve (3,6) then.Running configuration this moment pump 1 is transported to corresponding technique unit with chemical liquids, and opens by-pass valve control (5,8) and reclaim old chemical liquids.Chemical liquids among the present invention can be recycled, therefore in technical process, can old chemical liquids be got back among the chemical liquids storage container a by chemical liquids reclaim line 11, but not during technique, chemical liquids can directly be got back in the chemical liquids storage container by the by-pass valve control (4,7) of often opening.Because chemical liquids viscosity is higher, chemical liquids after the technique and the chemical liquids of self-loopa can not well be mixed in the chemical liquids storage container, affect the effect of technique, chemical liquids reclaim line 11 of the present invention adopts special processing to do curl, and around pipe, evenly stamp some apertures, simultaneously the outlet of pipeline is adopted special plug or stifled tight by the mode of welding, and chemical liquids circulation line 12 adopts the form of interting in spiral described reclaim line 11, evenly perforate around simultaneously also being, terminal same stifled tight, chemical liquids in the chemical liquids reclaim line 11 flows into from aperture among the chemical liquids storage container a like this, evenly be discharged into the upper of chemical liquids storage container a, in, lower floor, and the chemical liquids circulation line is applied between the chemical liquids reclaim line 11, chemical liquids in the chemical liquids circulation line 12 can see through the chemical liquids that appears in aperture and the chemical liquids reclaim line 11 and intersect and mix, like this, can so that out chemical liquids of two pipes mix uniformly.
In addition, in technical process, can be by the liquid level of liquid level label real-time monitored in the chemical liquids storage container, if chemical liquids is lower than required liquid level, liquid level sensor 9 can be the additional chemical liquids of chemical liquids storage container by control system in real time automatically; If the chemical liquids among the chemical liquids storage container a reaches its service life, then running configuration pump 2 uses chemical liquids storage container b to carry out technique.
Above embodiment only is used for explanation the present invention; and be not limitation of the present invention; the those of ordinary skill in relevant technologies field; in the situation that do not break away from the spirit and scope of the present invention; can also make a variety of changes and modification; therefore all technical schemes that are equal to also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.
Claims (7)
1. a chemical liquids storage device is characterized in that, comprising:
Chemical liquids reclaim line, described reclaim line are in the shape of a spiral and stretch in the chemical liquids storage container its even tube wall distribution aperture and tail end plugs;
Chemical liquids circulation line, described circulation line are in spiral described reclaim line and stretch in the chemical liquids storage container its even tube wall distribution aperture and tail end plugs.
2. chemical liquids storage device as claimed in claim 1 is characterized in that, described chemical liquids reclaim line and described chemical liquids circulation line are terminal with stopping up shutoff.
3. chemical liquids storage device as claimed in claim 1 is characterized in that, described chemical liquids reclaim line and described chemical liquids circulation line are terminal with the welding shutoff.
4. chemical liquids storage device as claimed in claim 1 is characterized in that, described chemical liquids storage device also comprises, is positioned at the liquid level sensor that chemical liquids storage container side is used for the sensing chemical liquids.
5. chemical liquids storage device as claimed in claim 4 is characterized in that, the quantity of described liquid level sensor is at least one.
6. chemical liquids storage device as claimed in claim 1 is characterized in that, described chemical liquids storage device also comprises, lays respectively at three by-pass valve controls on the new chemical liquids ascending pipe of control, cyclic chemical liquid ascending pipe and the recovery chemical liquids ascending pipe.
7. chemical liquids storage device as claimed in claim 1 is characterized in that, described chemical liquids storage device also comprises, is used for the chemical liquids of described chemical liquids storage container is transported to the configuration pump of corresponding technique unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210375237.9A CN102895892B (en) | 2012-09-29 | 2012-09-29 | Chemical liquid storage device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210375237.9A CN102895892B (en) | 2012-09-29 | 2012-09-29 | Chemical liquid storage device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102895892A true CN102895892A (en) | 2013-01-30 |
| CN102895892B CN102895892B (en) | 2014-10-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210375237.9A Active CN102895892B (en) | 2012-09-29 | 2012-09-29 | Chemical liquid storage device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105620879A (en) * | 2014-11-07 | 2016-06-01 | 中国科学院微电子研究所 | Circular liquid feeding barrel |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19517444C1 (en) * | 1995-05-12 | 1996-01-18 | Strate Maschf | Device for aeration of waste water in activated sludge tank |
| JPH1190198A (en) * | 1997-09-26 | 1999-04-06 | Hitachi Ltd | Mixing tank |
| US6217207B1 (en) * | 1996-05-03 | 2001-04-17 | Lindenport S.A. | Current creating device and method for liquefaction of thickened crude oil sediments |
| CN1423307A (en) * | 2001-12-05 | 2003-06-11 | 富士通Vlsi株式会社 | Chemical solution conveying device and method for preparing suspension liquid |
| CN202860427U (en) * | 2012-09-29 | 2013-04-10 | 北京七星华创电子股份有限公司 | Chemical liquid storage device |
-
2012
- 2012-09-29 CN CN201210375237.9A patent/CN102895892B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19517444C1 (en) * | 1995-05-12 | 1996-01-18 | Strate Maschf | Device for aeration of waste water in activated sludge tank |
| US6217207B1 (en) * | 1996-05-03 | 2001-04-17 | Lindenport S.A. | Current creating device and method for liquefaction of thickened crude oil sediments |
| JPH1190198A (en) * | 1997-09-26 | 1999-04-06 | Hitachi Ltd | Mixing tank |
| CN1423307A (en) * | 2001-12-05 | 2003-06-11 | 富士通Vlsi株式会社 | Chemical solution conveying device and method for preparing suspension liquid |
| CN202860427U (en) * | 2012-09-29 | 2013-04-10 | 北京七星华创电子股份有限公司 | Chemical liquid storage device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105620879A (en) * | 2014-11-07 | 2016-06-01 | 中国科学院微电子研究所 | Circular liquid feeding barrel |
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| CN102895892B (en) | 2014-10-08 |
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