CN102895892B - Chemical liquid storage device - Google Patents
Chemical liquid storage device Download PDFInfo
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- CN102895892B CN102895892B CN201210375237.9A CN201210375237A CN102895892B CN 102895892 B CN102895892 B CN 102895892B CN 201210375237 A CN201210375237 A CN 201210375237A CN 102895892 B CN102895892 B CN 102895892B
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- chemical liquids
- chemical liquid
- storage device
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- storage container
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Abstract
The invention discloses a chemical liquid storage device. The chemical liquid storage device comprises a chemical liquid recovery pipeline and a chemical liquid circulation pipeline, wherein the chemical liquid recovery pipeline is spiral and extends into a chemical liquid storage container, and small holes are uniformly distributed in the wall of the chemical liquid recovery pipeline and the tail end of the chemical liquid recovery pipeline is plugged; and the chemical liquid circulation pipeline penetrates in the spiral chemical liquid recovery pipeline and extends into the chemical liquid storage container, small holes are uniformly distributed in the wall of the chemical liquid circulation pipeline, and the tail end of the chemical liquid circulation pipeline is plugged. According to the chemical liquid storage device, due to the adoption of the special layout of the chemical liquid recovery pipeline, the purpose of sufficiently mixing the self-circulating chemical liquid and recovered chemical liquid is achieved; the chemical liquid storage device is easy to realize; and the structure is simple, so that the maintaining and the washing of the device are further facilitated.
Description
Technical field
The present invention relates to Semiconductor Cleaning Technology field, particularly a kind of chemical liquids storage device.
Background technology
In semi-conductor silicon chip wet clean process, can use various chemical liquids, these chemical liquids or be acid, alkalescence or there is strong corrosivity, or viscosity is higher.In some situation, chemical liquids can recycle, its working life can reach every 30L chemical liquids continuous wash 3 days or can clean 3000 silicon chips, therefore, chemical liquids need to be stored in chemical vessel, as groove or tank the inside, the non-process time can be realized the self-loopa of chemical liquids between pipeline and container, and technique can make chemical liquids get back to by the road in the container that stores chemical liquids later.
But, if there is no special drainage system, the old chemical liquids that technique reclaims later mixes because of the higher relative fresh chemical liquids that cannot return with the self-loopa in chemical vessel of viscosity, the chemical liquids using will make next technique time or be mostly the chemical liquids that self-loopa is returned, also the old liquid of recovery may be mostly, technological effect will be affected like this.At present, for even mixing the between the chemical liquids of self-loopa and recovery, still there is no ripe measure, what normally chemical liquids self-loopa pipeline and chemical liquids reclaim line were simple, separate is distributed in chemical vessel, cause chemical liquids in container to mix inequality, affect technological effect.
Summary of the invention
(1) technical problem that will solve
The technical problem to be solved in the present invention is, for the deficiencies in the prior art, a kind of chemical liquids storage device is provided, finally reaches fully mixing of the chemical liquids of self-loopa and the chemical liquids of recovery by the particular topology of chemical liquids reclaim line, implement comparatively simple.
(2) technical scheme
The invention provides a kind of chemical liquids storage device, comprising: chemical liquids reclaim line, described reclaim line is in the shape of a spiral and stretch in chemical liquids storage container its even tube wall distribution aperture and tail end plugs; Chemical liquids circulation line, described circulation line is in spiral described reclaim line and stretch in chemical liquids storage container its even tube wall distribution aperture and tail end plugs.
Better, described chemical liquids reclaim line and described chemical liquids circulation line end are with stopping up shutoff.
Better, welding shutoff for described chemical liquids reclaim line and described chemical liquids circulation line end.
Better, described chemical liquids storage device also comprises, is positioned at the liquid level sensor of chemical liquids storage container side for sensing chemical liquids.
Better, the quantity of described liquid level sensor is at least one.
Better, described chemical liquids storage device also comprises, lays respectively at and controls new chemical liquids ascending pipe, cyclic chemical liquid ascending pipe and reclaim three by-pass valve controls on chemical liquids ascending pipe.
Better, described chemical liquids storage device also comprises, for the chemical liquids of described chemical liquids storage container being transported to the configuration pump of corresponding technique unit.
(3) beneficial effect
Chemical liquids storage device of the present invention, finally reaches fully mixing of the chemical liquids of self-loopa and the chemical liquids of recovery by the particular topology of chemical liquids reclaim line, implement comparatively simple, and its maintenance and cleaning that contributes to device simple in structure.
Brief description of the drawings
Fig. 1 is chemical liquids storage device internal structure schematic diagram of the present invention;
Fig. 2 is the right view of Fig. 1;
Fig. 3 is chemical liquids storage device overall structure schematic diagram of the present invention;
Fig. 4 is chemical liquids storage device fundamental diagram of the present invention.
Detailed description of the invention
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples are used for illustrating the present invention, but are not used for limiting the scope of the invention.
As Fig. 1 and with reference to as shown in figure 2, chemical liquids storage device of the present invention, comprising: chemical liquids reclaim line 11, and described reclaim line is in the shape of a spiral and stretch in chemical liquids storage container its even tube wall distribution aperture and tail end plugs; Chemical liquids circulation line 12, described circulation line is in spiral described reclaim line and stretch in chemical liquids storage container its even tube wall distribution aperture and tail end plugs.Described chemical liquids reclaim line and described chemical liquids circulation line end are with obstruction shutoff or with welding shutoff.
As shown in Figure 3, described chemical liquids storage device also comprises, is positioned at the sensor 9 of chemical liquids storage container side for sensing chemical liquids, and the quantity of described sensor 9 is at least one.
Described chemical liquids storage device also comprises, is positioned at the by-pass valve control (3,6) on the new chemical liquids ascending pipe of control, the by-pass valve control (4,7) on cyclic chemical liquid ascending pipe and reclaims by-pass valve control (5,8) on chemical liquids ascending pipe; For the chemical liquids of described chemical liquids storage container being transported to the configuration pump (1,2) of corresponding technique unit.
As shown in Figure 4, when technique, first open by-pass valve control (3,6), in chemical liquids storage container a and chemical liquids storage container b, inject chemical liquids, until middle liquid level sensor 9 senses chemical liquids, then closing control valve (3,6).Chemical liquids is transported to corresponding technique unit by now running configuration pump 1, and open by-pass valve control (5,8) and reclaim old chemical liquids.Chemical liquids in the present invention can be recycled, therefore in technical process, can old chemical liquids be got back in chemical liquids storage container a by chemical liquids reclaim line 11, but not when technique, chemical liquids can directly be got back in chemical liquids storage container by the by-pass valve control (4,7) of often opening.Because chemical liquids viscosity is higher, chemical liquids after technique and the chemical liquids of self-loopa can not well be mixed in chemical liquids storage container, affect the effect of technique, chemical liquids reclaim line 11 of the present invention adopts special processing to do curl, and evenly stamp some apertures in the surrounding of pipe, the outlet of pipeline is adopted to special plug or stifled tight by the mode of welding simultaneously, and chemical liquids circulation line 12 adopts interspersed form in spiral described reclaim line 11, also be the even perforate of surrounding simultaneously, end is stifled equally tight, chemical liquids in chemical liquids reclaim line 11 flows in chemical liquids storage container a from aperture like this, evenly be discharged into the upper of chemical liquids storage container a, in, lower floor, and chemical liquids circulation line is applied between chemical liquids reclaim line 11, chemical liquids in chemical liquids circulation line 12 can see through aperture and intersect and mix with the chemical liquids appearing in chemical liquids reclaim line 11, like this, can make two pipes chemical liquids out mix uniformly.
In addition, in technical process, can be by liquid level label real-time monitored to the liquid level in chemical liquids storage container, if chemical liquids lower than required liquid level, liquid level sensor 9 can be the supplementary chemical liquids of chemical liquids storage container by control system in real time automatically; If the chemical liquids in chemical liquids storage container a reaches its service life, running configuration pump 2, uses chemical liquids storage container b to carry out technique.
Above embodiment is only for illustrating the present invention; and be not limitation of the present invention; the those of ordinary skill in relevant technologies field; without departing from the spirit and scope of the present invention; can also make a variety of changes and modification; therefore all technical schemes that are equal to also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.
Claims (5)
1. a chemical liquids storage device, is characterized in that, comprising:
Chemical liquids reclaim line, described reclaim line is in the shape of a spiral and stretch in chemical liquids storage container its even tube wall distribution aperture and tail end plugs;
Chemical liquids circulation line, described circulation line is in spiral described reclaim line and stretch in chemical liquids storage container its even tube wall distribution aperture and tail end plugs;
Wherein, described chemical liquids reclaim line and described chemical liquids circulation line end are with obstruction shutoff or with welding shutoff.
2. chemical liquids storage device as claimed in claim 1, is characterized in that, described chemical liquids storage device also comprises, is positioned at the liquid level sensor of chemical liquids storage container side for sensing chemical liquids.
3. chemical liquids storage device as claimed in claim 2, is characterized in that, the quantity of described liquid level sensor is at least one.
4. chemical liquids storage device as claimed in claim 1, is characterized in that, described chemical liquids storage device also comprises, lays respectively at and controls new chemical liquids ascending pipe, cyclic chemical liquid ascending pipe and reclaim three by-pass valve controls on chemical liquids ascending pipe.
5. chemical liquids storage device as claimed in claim 1, is characterized in that, described chemical liquids storage device also comprises, for the chemical liquids of described chemical liquids storage container being transported to the configuration pump of corresponding technique unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210375237.9A CN102895892B (en) | 2012-09-29 | 2012-09-29 | Chemical liquid storage device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210375237.9A CN102895892B (en) | 2012-09-29 | 2012-09-29 | Chemical liquid storage device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102895892A CN102895892A (en) | 2013-01-30 |
| CN102895892B true CN102895892B (en) | 2014-10-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210375237.9A Active CN102895892B (en) | 2012-09-29 | 2012-09-29 | Chemical liquid storage device |
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| Country | Link |
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| CN (1) | CN102895892B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105620879A (en) * | 2014-11-07 | 2016-06-01 | 中国科学院微电子研究所 | Circular liquid feeding barrel |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19517444C1 (en) * | 1995-05-12 | 1996-01-18 | Strate Maschf | Device for aeration of waste water in activated sludge tank |
| JPH1190198A (en) * | 1997-09-26 | 1999-04-06 | Hitachi Ltd | Mixing tank |
| US6217207B1 (en) * | 1996-05-03 | 2001-04-17 | Lindenport S.A. | Current creating device and method for liquefaction of thickened crude oil sediments |
| CN1423307A (en) * | 2001-12-05 | 2003-06-11 | 富士通Vlsi株式会社 | Chemical solution conveying device and method for preparing suspension liquid |
| CN202860427U (en) * | 2012-09-29 | 2013-04-10 | 北京七星华创电子股份有限公司 | Chemical liquid storage device |
-
2012
- 2012-09-29 CN CN201210375237.9A patent/CN102895892B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19517444C1 (en) * | 1995-05-12 | 1996-01-18 | Strate Maschf | Device for aeration of waste water in activated sludge tank |
| US6217207B1 (en) * | 1996-05-03 | 2001-04-17 | Lindenport S.A. | Current creating device and method for liquefaction of thickened crude oil sediments |
| JPH1190198A (en) * | 1997-09-26 | 1999-04-06 | Hitachi Ltd | Mixing tank |
| CN1423307A (en) * | 2001-12-05 | 2003-06-11 | 富士通Vlsi株式会社 | Chemical solution conveying device and method for preparing suspension liquid |
| CN202860427U (en) * | 2012-09-29 | 2013-04-10 | 北京七星华创电子股份有限公司 | Chemical liquid storage device |
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| Publication number | Publication date |
|---|---|
| CN102895892A (en) | 2013-01-30 |
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