CN202860427U - Chemical liquid storage device - Google Patents
Chemical liquid storage device Download PDFInfo
- Publication number
- CN202860427U CN202860427U CN 201220511203 CN201220511203U CN202860427U CN 202860427 U CN202860427 U CN 202860427U CN 201220511203 CN201220511203 CN 201220511203 CN 201220511203 U CN201220511203 U CN 201220511203U CN 202860427 U CN202860427 U CN 202860427U
- Authority
- CN
- China
- Prior art keywords
- chemical liquids
- storage device
- chemical liquid
- chemical
- storage container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Images
Landscapes
- Loading And Unloading Of Fuel Tanks Or Ships (AREA)
Abstract
The utility model discloses a chemical liquid storage device. The device comprises a chemical liquid recycling pipeline and a chemical liquid circulating pipeline, wherein the recycling pipeline is helical and extends into a chemical liquid storage container, holes are uniformly distributed in the pipe wall of the recycling pipeline, and the tail end of the recycling pipeline is plugged; and the circulating pipeline penetrates through the helical recycling pipeline and extends into the chemical liquid storage container, holes are uniformly distributed in the pipe wall of the circulating pipeline, and the tail end of the circulating pipeline is plugged. According to the chemical liquid storage device disclosed by the utility model, self-circulating chemical liquid is fully mixed with recycled chemical liquid by virtue of the special layout of the chemical liquid recycling pipeline; and the chemical liquid storage device is easy to realize, simple in structure and convenient to maintain and clean.
Description
Technical field
The utility model relates to the Semiconductor Cleaning Technology field, particularly a kind of chemical liquids storage device.
Background technology
In the semi-conductor silicon chip wet clean process, can use various chemical liquids, these chemical liquids or be acid, alkalescence or have strong corrosivity, or viscosity is higher.In some situation, chemical liquids can recycle, its working life can reach every 30L chemical liquids continuous wash 3 days or can clean 3000 silicon chips, therefore, chemical liquids need to be stored in the chemical vessel, such as groove or tank the inside, the non-process time can be realized the self-loopa of chemical liquids between pipeline and container, and technique can make chemical liquids get back to by the road in the container that stores chemical liquids later.
But, if there is not special drainage system, the old chemical liquids that technique reclaims later because of viscosity higher can't with chemical vessel in the self-loopa relative fresh chemical liquids of returning mix, will be so that employed chemical liquids or mostly be greatly the chemical liquids that self-loopa is returned during next technique, also may mostly be greatly the old liquid of recovery, will affect technological effect like this.At present, for even mixing the between the chemical liquids of self-loopa and recovery, still there is not ripe measure, what normally chemical liquids self-loopa pipeline and chemical liquids reclaim line were simple, separate is distributed in the chemical vessel, cause chemical liquids mixing inequality in the container, affect technological effect.
The utility model content
The technical problem that (one) will solve
The technical problems to be solved in the utility model is, for the deficiencies in the prior art, a kind of chemical liquids storage device is provided, and the chemical liquids that the particular topology by the chemical liquids reclaim line finally reaches self-loopa is fully mixed with the chemical liquids of recovery, implements comparatively simple.
(2) technical scheme
The utility model provides a kind of chemical liquids storage device, comprising: chemical liquids reclaim line, described reclaim line are in the shape of a spiral and stretch in the chemical liquids storage container its even tube wall distribution aperture and tail end plugs; Chemical liquids circulation line, described circulation line are in spiral described reclaim line and stretch in the chemical liquids storage container its even tube wall distribution aperture and tail end plugs.
Better, described chemical liquids reclaim line and described chemical liquids circulation line are terminal with stopping up shutoff.
Better, described chemical liquids reclaim line and described chemical liquids circulation line are terminal with the welding shutoff.
Better, described chemical liquids storage device also comprises, is positioned at the liquid level sensor that chemical liquids storage container side is used for the sensing chemical liquids.
Better, the quantity of described liquid level sensor is at least one.
Better, described chemical liquids storage device also comprises, lays respectively at three by-pass valve controls on the new chemical liquids ascending pipe of control, cyclic chemical liquid ascending pipe and the recovery chemical liquids ascending pipe.
Better, described chemical liquids storage device also comprises, is used for the chemical liquids of described chemical liquids storage container is transported to the configuration pump of corresponding technique unit.
(3) beneficial effect
The chemical liquids that chemical liquids storage device of the present utility model, the particular topology by the chemical liquids reclaim line finally reach self-loopa is fully mixed with the chemical liquids of recovery, implement comparatively simple, and its maintenance and cleaning that helps device simple in structure.
Description of drawings
Fig. 1 is the utility model chemical liquids storage device internal structure schematic diagram;
Fig. 2 is the right view of Fig. 1;
Fig. 3 is the utility model chemical liquids storage device overall structure schematic diagram;
Fig. 4 is the utility model chemical liquids storage device fundamental diagram.
The specific embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present utility model is described in further detail.Following examples are used for explanation the utility model, but are not used for limiting scope of the present utility model.
Such as Fig. 1 and with reference to shown in Figure 2, chemical liquids storage device of the present utility model comprises: chemical liquids reclaim line 11, described reclaim line are in the shape of a spiral and stretch in the chemical liquids storage container its even tube wall distribution aperture and tail end plugs; Chemical liquids circulation line 12, described circulation line are in spiral described reclaim line and stretch in the chemical liquids storage container its even tube wall distribution aperture and tail end plugs.Described chemical liquids reclaim line and described chemical liquids circulation line are terminal with the obstruction shutoff or with welding shutoff.
As shown in Figure 3, described chemical liquids storage device also comprises, is positioned at the sensor 9 that chemical liquids storage container side is used for the sensing chemical liquids, and the quantity of described sensor 9 is at least one.
Described chemical liquids storage device also comprises, is positioned at by-pass valve control (3,6), the by-pass valve control (4,7) on the cyclic chemical liquid ascending pipe on the new chemical liquids ascending pipe of control and reclaims by-pass valve control (5,8) on the chemical liquids ascending pipe; Be used for the chemical liquids of described chemical liquids storage container is transported to the configuration pump (1,2) of corresponding technique unit.
As shown in Figure 5, at first open by-pass valve control (3,6) during technique, in chemical liquids storage container a and chemical liquids storage container b, inject chemical liquids, until middle liquid level sensor 9 senses chemical liquids, closing control valve (3,6) then.Running configuration this moment pump 1 is transported to corresponding technique unit with chemical liquids, and opens by-pass valve control (5,8) and reclaim old chemical liquids.Chemical liquids in the utility model can be recycled, therefore in technical process, can old chemical liquids be got back among the chemical liquids storage container a by chemical liquids reclaim line 11, but not during technique, chemical liquids can directly be got back in the chemical liquids storage container by the by-pass valve control (4,7) of often opening.Because chemical liquids viscosity is higher, chemical liquids after the technique and the chemical liquids of self-loopa can not well be mixed in the chemical liquids storage container, affect the effect of technique, chemical liquids reclaim line 11 of the present utility model adopts special processing to do curl, and around pipe, evenly stamp some apertures, simultaneously the outlet of pipeline is adopted special plug or stifled tight by the mode of welding, and chemical liquids circulation line 12 adopts the form of interting in spiral described reclaim line 11, evenly perforate around simultaneously also being, terminal same stifled tight, chemical liquids in the chemical liquids reclaim line 11 flows into from aperture among the chemical liquids storage container a like this, evenly be discharged into the upper of chemical liquids storage container a, in, lower floor, and the chemical liquids circulation line is applied between the chemical liquids reclaim line 11, chemical liquids in the chemical liquids circulation line 12 can see through the chemical liquids that appears in aperture and the chemical liquids reclaim line 11 and intersect and mix, like this, can so that out chemical liquids of two pipes mix uniformly.
In addition, in technical process, can be by the liquid level of liquid level label real-time monitored in the chemical liquids storage container, if chemical liquids is lower than required liquid level, liquid level sensor 9 can be the additional chemical liquids of chemical liquids storage container by control system in real time automatically; If the chemical liquids among the chemical liquids storage container a reaches its service life, then running configuration pump 2 uses chemical liquids storage container b to carry out technique.
Above embodiment only is used for explanation the utility model; and be not limitation of the utility model; the those of ordinary skill in relevant technologies field; in the situation that do not break away from spirit and scope of the present utility model; can also make a variety of changes and modification; therefore all technical schemes that are equal to also belong to category of the present utility model, and scope of patent protection of the present utility model should be defined by the claims.
Claims (7)
1. a chemical liquids storage device is characterized in that, comprising:
Chemical liquids reclaim line, described reclaim line are in the shape of a spiral and stretch in the chemical liquids storage container its even tube wall distribution aperture and tail end plugs;
Chemical liquids circulation line, described circulation line are in spiral described reclaim line and stretch in the chemical liquids storage container its even tube wall distribution aperture and tail end plugs.
2. chemical liquids storage device as claimed in claim 1 is characterized in that, described chemical liquids reclaim line and described chemical liquids circulation line are terminal with stopping up shutoff.
3. chemical liquids storage device as claimed in claim 1 is characterized in that, described chemical liquids reclaim line and described chemical liquids circulation line are terminal with the welding shutoff.
4. chemical liquids storage device as claimed in claim 1 is characterized in that, described chemical liquids storage device also comprises, is positioned at the liquid level sensor that chemical liquids storage container side is used for the sensing chemical liquids.
5. chemical liquids storage device as claimed in claim 4 is characterized in that, the quantity of described liquid level sensor is at least one.
6. chemical liquids storage device as claimed in claim 1 is characterized in that, described chemical liquids storage device also comprises, lays respectively at three by-pass valve controls on the new chemical liquids ascending pipe of control, cyclic chemical liquid ascending pipe and the recovery chemical liquids ascending pipe.
7. chemical liquids storage device as claimed in claim 1 is characterized in that, described chemical liquids storage device also comprises, is used for the chemical liquids of described chemical liquids storage container is transported to the configuration pump of corresponding technique unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220511203 CN202860427U (en) | 2012-09-29 | 2012-09-29 | Chemical liquid storage device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220511203 CN202860427U (en) | 2012-09-29 | 2012-09-29 | Chemical liquid storage device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202860427U true CN202860427U (en) | 2013-04-10 |
Family
ID=48027187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220511203 Withdrawn - After Issue CN202860427U (en) | 2012-09-29 | 2012-09-29 | Chemical liquid storage device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202860427U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102895892A (en) * | 2012-09-29 | 2013-01-30 | 北京七星华创电子股份有限公司 | Chemical liquid storage device |
-
2012
- 2012-09-29 CN CN 201220511203 patent/CN202860427U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102895892A (en) * | 2012-09-29 | 2013-01-30 | 北京七星华创电子股份有限公司 | Chemical liquid storage device |
| CN102895892B (en) * | 2012-09-29 | 2014-10-08 | 北京七星华创电子股份有限公司 | Chemical liquid storage device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205579159U (en) | Drag reducer for crude oil filling pipe system | |
| CN202860427U (en) | Chemical liquid storage device | |
| CN203235705U (en) | Automatic cleaning device of solar photovoltaic module | |
| CN102895892B (en) | Chemical liquid storage device | |
| CN103316580A (en) | Viscose fiber desulfuration and recovery device and method | |
| CN204953421U (en) | Grind cleaning equipment sewage online processing retrieval and utilization device | |
| CN201596639U (en) | Groove type cleaning device and cleaning machine | |
| CN105413438A (en) | Acid-system tail gas spraying clear-water-recycling and alkaline-water-draining washing tower and automatic control washing technology thereof | |
| CN205694729U (en) | A kind of automatic water-saving irrigation device | |
| CN213599076U (en) | Petroleum pipeline drag reducer injection system | |
| CN206951145U (en) | Static chemicals dosing plant | |
| CN205463457U (en) | Useless oil pipe says from belt cleaning device | |
| CN103613081A (en) | Nitric acid recycling system | |
| CN206563177U (en) | There is the storage tank siphon port automatic dehydration return-flow system of refluxing opening | |
| CN204380329U (en) | Caustic wash tower defoamer filling apparatus in a kind of MTO device | |
| CN203329611U (en) | Viscose fiber desulphurization recovery unit | |
| CN202460457U (en) | Viscose desulfurized hydrogen adsorption device | |
| CN207270769U (en) | A kind of transparent type separator with vertical tube condenser | |
| CN206563179U (en) | Storage tank siphon port automatic dehydration return-flow system without refluxing opening | |
| CN205570293U (en) | Annotate material device | |
| CN104478062B (en) | A kind of spent acid treatment system and cleaning system thereof | |
| CN205530445U (en) | Bathroom waste water cyclic utilization system | |
| CN205420805U (en) | A waste water cyclic utilization system for dyeing system | |
| CN205613594U (en) | Cyclone and polyolefin production system | |
| CN205518744U (en) | Reclaimed plastic belt cleaning device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130410 Effective date of abandoning: 20141008 |
|
| RGAV | Abandon patent right to avoid regrant |