CN210771455U - Ammonia water pipeline - Google Patents
Ammonia water pipeline Download PDFInfo
- Publication number
- CN210771455U CN210771455U CN201921478998.0U CN201921478998U CN210771455U CN 210771455 U CN210771455 U CN 210771455U CN 201921478998 U CN201921478998 U CN 201921478998U CN 210771455 U CN210771455 U CN 210771455U
- Authority
- CN
- China
- Prior art keywords
- pipeline
- pipe
- section
- ammonia
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model provides an ammonia pipeline, include: the device comprises a buffer tank, a pump, a flow measuring device, a mixing line control valve, a mixing tank and an exhaust line; a liquid outlet is arranged below the buffer tank; the inlet end of the pump is connected with the liquid outlet of the buffer tank through a first pipeline; the flow measuring device is connected with the outlet end of the pump through a second pipeline; the mixing path control valve is connected with the flow measuring device through a third pipeline; the mixing tank is connected with the mixing way control valve through a fourth pipeline; the exhaust pipeline branch is communicated with the second pipeline; the exhaust pipeline comprises a first section of exhaust pipe, an exhaust control valve and a second section of exhaust pipe; the first section of exhaust pipe is communicated with the second pipeline branch, the exhaust control valve is respectively connected with the first section of exhaust pipe and the second section of exhaust pipe, and the second section of exhaust pipe is connected with the upper part of the buffer tank. In view of the above, the aqueous ammonia is in during the aqueous ammonia pipeline mesocycle, the bubble that produces in the discharge line in time has reduced the empty pipe phenomenon of pump, and then improves the flow stability in the aqueous ammonia circulation pipeline.
Description
Technical Field
The utility model relates to a liquid conveying field of semiconductor manufacturing equipment, in particular to ammonia pipeline.
Background
Standard cleaning liquid I (SC 1) is used in the manufacturing process of semiconductor devices, and SC1 is made of ammonia (NH)4OH), hydrogen peroxide (H)2O2) Water (H)2O) is mixed in a certain proportion, usually NH, before mixing4OH and H2O2Respectively circulating in respective buffer tanks, waiting for NH4OH and H2O2After the internal circulation flow is stabilized, the mixture is mixed in a mixing tank.
In the prior art, in the actual circulation process, the large flow rate H2O2No bubble is generated and the flow rate is stable. Ammonia (NH)4OH) is unstable chemically and easily decomposed into ammonia (NH)3) And water, especially during pumping, when the flow rate of ammonia increases, many bubbles are generated, so that the flow rate monitoring is abnormal and the set flow rate value cannot be reached. And, when the aqueous ammonia got into the pump from the buffer tank, during the gravity that relies on the aqueous ammonia directly got into the pump, among the prior art actual operation, large-traffic aqueous ammonia was through the pump, because thoughtlessly there are a large amount of bubbles in the aqueous ammonia, lead to the pressure of pump to be greater than the gravity that the aqueous ammonia leaked down to the pump can take place idle running phenomenon, thereby the outlet end of the pump that makes produces the empty pipe phenomenon, further aggravated the instability of flow, lead to the unable normal work of aqueous ammonia circulation pipe-line system. Referring to fig. 1, the flow rate of the aqueous ammonia in the aqueous ammonia circulation line of the prior art fluctuates greatly.
Therefore, the ammonia water circulation pipeline in the prior art has the following technical problems: a large amount of bubbles exist in the pipeline, the stability of the flow in the ammonia water circulating pipeline is influenced, and the technical problem is more prominent when the flow of the ammonia water is increased.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides an ammonia water pipeline, its aim at can get rid of the gas in the aqueous ammonia circulation pipeline, and then improve the flow stability in the aqueous ammonia circulation pipeline.
In order to achieve the above object, the present invention provides an ammonia pipeline, comprising:
a buffer tank, wherein a liquid outlet is arranged below the buffer tank;
the pump comprises an inlet end and an outlet end, and the inlet end of the pump is connected with the liquid outlet of the buffer tank through a first pipeline;
the flow measuring device is connected with the outlet end of the pump through a second pipeline;
the mixing path control valve is connected with the flow measuring device through a third pipeline;
the mixing tank is connected with the mixing way control valve through a fourth pipeline;
the exhaust pipeline branch is communicated with the second pipeline;
the exhaust pipeline comprises a first section of exhaust pipe, an exhaust control valve and a second section of exhaust pipe;
the first section of exhaust pipe is communicated with the second pipeline branch, the exhaust control valve is respectively connected with the first section of exhaust pipe and the second section of exhaust pipe, and the second section of exhaust pipe is connected with the upper part of the buffer tank.
Preferably, the pipe diameter of second pipeline is first pipe diameter, the pipe diameter of exhaust pipe is the second pipe diameter, first pipe diameter is more than or equal to the second pipe diameter.
Preferably, the first tube diameter is 3/4 inches and the second tube diameter is 3/8 inches.
Preferably, the first pipeline is communicated with a liquid discharge branch, and the liquid discharge branch is provided with a pressure control valve.
Preferably, the ammonia water pipeline is connected to an ammonia water supply main pipeline, the ammonia water supply main pipeline further comprises a main drain pipe, and the drain branch is connected to the main drain pipe.
Preferably, a liquid return branch is communicated with and arranged on the third pipeline, the liquid return branch comprises a first section of liquid return pipe, a liquid return control valve and a second section of liquid return pipe, the first section of liquid return pipe is communicated and arranged on the third pipeline, the liquid return control valve is connected with the first section of liquid return pipe and the second section of liquid return pipe, and the second section of liquid return pipe is connected with the upper part of the buffer tank.
Preferably, the second section of liquid return pipe and the second section of exhaust pipe share one upper return pipe, and the upper return pipe is connected with the upper part of the buffer tank.
Preferably, the liquid return control valve is a needle valve, and the opening time of the liquid return control valve is shortened.
Preferably, the upper part of the buffer tank is provided with an air outlet.
Preferably, the ammonia water pipeline is connected to an ammonia water supply main pipeline, and the ammonia water supply main pipeline comprises a main supply pipe;
the ammonia water pipeline also comprises a buffer tank liquid inlet pipeline, and the buffer tank liquid inlet pipeline comprises a control pipe section and a tank inlet pipe section;
the control pipe section comprises a supply valve, a pressure regulating valve and a pneumatic valve, wherein the supply valve is connected to the main supply pipe, the supply valve is connected with the pressure regulating valve through a pipeline, and the pneumatic valve is connected with the pressure regulating valve through a pipeline;
the tank inlet pipe section comprises a liquid tank inlet, and the liquid tank inlet is positioned at the lower part of the buffer tank.
Preferably, the supply valve is a hand valve or a solenoid valve.
Preferably, the pump is turned on when the supply valve is open.
Preferably, the mixing tank further includes an outlet, the ammonia water pipeline further includes a finished product tank, a fifth pipeline and a mixed liquid drainage branch, the outlet of the mixing tank is connected to the finished product tank through the fifth pipeline, and the mixed liquid drainage branch is communicated to the fifth pipeline.
Preferably, said mixed liquor drain branch comprises a pressure control valve.
Preferably, the mixing path control valve is a needle valve, and the exhaust control valve is a needle valve.
Preferably, the outlet flow rate of the pump is greater than or equal to 500 ml/min.
Compared with the prior art, the utility model provides an ammonia pipeline, include: a buffer tank, wherein a liquid outlet is arranged below the buffer tank; the pump comprises an inlet end and an outlet end, and the inlet end of the pump is connected with the liquid outlet of the buffer tank through a first pipeline; the flow measuring device is connected with the outlet end of the pump through a second pipeline; the mixing path control valve is connected with the flow measuring device through a third pipeline; the mixing tank is connected with the mixing way control valve through a fourth pipeline; the exhaust pipeline branch is communicated with the second pipeline; the exhaust pipeline comprises a first section of exhaust pipe, an exhaust control valve and a second section of exhaust pipe; the first section of exhaust pipe is communicated with the second pipeline branch, the exhaust control valve is respectively connected with the first section of exhaust pipe and the second section of exhaust pipe, and the second section of exhaust pipe is connected with the upper part of the buffer tank. In view of the above, the aqueous ammonia is in during the aqueous ammonia pipeline mesocycle, the bubble that produces in the discharge line in time has reduced the empty pipe phenomenon of pump, and then improves the flow stability in the aqueous ammonia circulation pipeline.
Drawings
FIG. 1 is a schematic diagram showing the variation of the ammonia water flow rate of the ammonia water pipeline with time in the prior art.
FIG. 2 is a schematic view showing the connection of the components of a first embodiment of the ammonia water line of the present invention.
FIG. 3 is a schematic diagram showing the connection of components of a second embodiment of the ammonia water pipeline according to the present invention.
FIG. 4 is a schematic view showing the connection of parts of a third embodiment of an ammonia line according to the present invention.
FIG. 5 is a schematic view showing the connection of parts of a fourth embodiment of the ammonia water line of the present invention.
FIG. 6 is a schematic view showing the connection of parts of a fifth embodiment of an ammonia water line according to the present invention.
FIG. 7 is a schematic view showing the connection of parts of a sixth embodiment of an ammonia line according to the present invention.
Fig. 8 is a schematic view showing the change of the flow rate of ammonia water in the ammonia water line with time according to the present invention.
Reference numerals indicate the same.
Inlet end 21 of pump
Outlet end 22 of pump
Flow rate measuring device 3
Mixing path control valve 4
Mixed liquor drainage branch 55
First stage exhaust pipe 61
Second-stage exhaust pipe 63
Liquid return branch 8
First stage return pipe 81
Return control valve 82
Second-stage liquid return pipe 83
Buffer tank liquid inlet pipeline 9
Ammonia water supply main pipe line A
Total leakage A1
Main supply pipe A2
First pipe diameter D1
A second tube diameter D2.
Detailed Description
The following detailed description of the embodiments of the present invention will be made with reference to the accompanying drawings.
Referring to fig. 2, a first embodiment of an ammonia pipeline is provided. The utility model provides an ammonia pipeline, include: a buffer tank 1, a liquid outlet 11 is arranged below the buffer tank 1. A pump 2, said pump 2 comprising an inlet end 21 and an outlet end 22, said inlet end 21 of said pump being connected to said buffer tank outlet 11 via a first conduit 23. Accordingly, the ammonia is discharged from the lower outlet 11 of the buffer tank to the inlet 21 of the pump by gravity. A flow measuring device 3, which flow measuring device 3 is connected to the outlet end 22 of the pump via a second line 31. A mixing-path control valve 4, the mixing-path control valve 4 being connected to the flow measuring device 3 via a third line 41. And the mixing tank 5 is connected with the mixing way control valve 4 through a fourth pipeline 51.
And the exhaust pipeline 6 is communicated with the second pipeline 31 in a branch way. The branch connection, which may also be called bypass, may be a three-way pipe, two of the ports of which are connected to the disconnected second pipe 31 and the other port of which is connected to the exhaust pipe 6. The exhaust line 6 includes a first-stage exhaust pipe 61, an exhaust control valve 62, and a second-stage exhaust pipe 63. The first-stage exhaust pipe 61 is in branch communication with the second pipeline 31, the exhaust control valve 62 is connected to the first-stage exhaust pipe 61 and the second-stage exhaust pipe 63, respectively, and the second-stage exhaust pipe 63 is connected to the upper portion 12 of the surge tank 1.
Accordingly, the exhaust line 6 can remove a large amount of bubbles generated in the line after the outlet end 22 of the pump 2 due to the increase in the flow rate of the ammonia water from the line before the flow rate monitoring device 3. The exhaust pipeline 6 discharges ammonia water with bubbles into the buffer tank 1.
Referring to fig. 2, the pipe diameter of the second pipe 31 is a first pipe diameter D1, the pipe diameter of the exhaust pipe 6 is a second pipe diameter D2, and the first pipe diameter D1 is greater than or equal to the second pipe diameter D2.
The first tube diameter D1 is 3/4 inches and the second tube diameter D2 is 3/8 inches.
Accordingly, the second pipeline 31 is a main circulating pipeline, the pipe diameter of the exhaust pipeline 6 is small, the exhaust pipeline 6 is arranged upwards, and ammonia water with bubbles can pass through the exhaust pipeline.
Referring to fig. 3, a second embodiment of the ammonia water pipeline is provided.
Compared with the first embodiment, the second embodiment is mainly added with a liquid discharge branch 7. Specifically, a liquid discharge branch 7 is communicated with the first pipeline 23, and a pressure control valve 71 is arranged on the liquid discharge branch 7.
The ammonia water pipeline is connected to an ammonia water supply main pipeline A, the ammonia water supply main pipeline A further comprises a main drain pipe A1, and the drain branch 7 is connected to the main drain pipe A1.
Accordingly, the ammonia water containing bubbles generated in the first pipe 23 between the buffer tank 1 and the pump 2 can be discharged from the first pipe 23 through the drain branch 7.
Referring to fig. 4, a third embodiment of the ammonia water pipeline provided by the present invention is shown.
Compared with the first embodiment, the third embodiment is mainly added with a liquid return branch 8. Specifically, the third pipeline 41 is provided with a liquid return branch 8 in a communicating manner, the liquid return branch 8 includes a first section of liquid return pipe 81, a liquid return control valve 82 and a second section of liquid return pipe 83, the first section of liquid return pipe is provided in the third pipeline 41 in a communicating manner, the liquid return control valve 82 is connected to the first section of liquid return pipe 81 and the second section of liquid return pipe 83, and the second section of liquid return pipe 83 is connected to the upper portion 12 of the buffer tank.
The second-stage return pipe 83 and the second-stage exhaust pipe 63 share an upper return pipe 83a, and the upper return pipe 83a is connected to the upper portion 12 of the surge tank.
The fluid return control valve 82 is a needle valve, which shortens the opening time of the fluid return control valve 82.
Accordingly, when the mixing path control valve 4 is closed and the liquid return control valve 82 is opened, the self-circulation of the ammonia water is performed. The time of the self-circulation of the ammonia water can be reduced by shortening the opening time of the liquid return control valve 82, and experiments show that the disturbance to the ammonia water can be reduced by shortening the self-circulation time of the ammonia water, and the generation of bubbles can be reduced. When the ammonia water is normally fed, the mixing path control valve 4 is opened and the liquid return control valve 82 is closed, and when the gas is excessively generated in the third line 41 after a certain period of operation, the liquid return control valve 82 may be opened to return the ammonia water containing bubbles to the buffer tank 1.
Referring to fig. 5, a fourth embodiment of the ammonia water pipeline according to the present invention is shown.
The fourth embodiment is mainly to add one air outlet passage compared to the first embodiment. Specifically, the upper part 12 of the buffer tank is provided with an air outlet 13.
Accordingly, the gas outlet 13 is used to discharge ammonia gas generated by decomposition and unabsorbed by ammonia water out of the buffer tank 1.
Referring to fig. 6, a fifth embodiment of the ammonia water pipeline according to the present invention is shown.
Compared with the first embodiment, the fifth embodiment is mainly provided with a buffer tank liquid inlet pipeline. Specifically, the ammonia water pipeline is connected to an ammonia water supply main pipeline A, and the ammonia water supply main pipeline A comprises a main supply pipe A2; the ammonia water pipeline also comprises a buffer tank liquid inlet pipeline 9, and the buffer tank liquid inlet pipeline 9 comprises a control pipe section 91 and a tank inlet pipe section 92; the control pipe section 91 comprises a supply valve 93, a pressure regulating valve 94 and a pneumatic valve 95, the supply valve 93 is connected to the main supply pipe A2, the supply valve 93 is connected to the pressure regulating valve 94 by a pipeline, and the pneumatic valve 95 is connected to the pressure regulating valve 94 by a pipeline; the tank inlet pipe section 92 includes a liquid inlet port 96, and the liquid inlet port 96 is located in the lower portion 14 of the surge tank. Generally, the supply valve 93 may employ a hand valve or a solenoid valve. The lower portion 14 of the buffer tank is defined as a space below the height of the tank 1/2, including the lower side wall, bottom, and tank contents of the buffer tank, and the upper portion 12 of the buffer tank is defined as a space above the height of the tank 1/2, including the upper side wall, top, and tank contents of the buffer tank. In the gas-liquid mixing process, gas can rise and escape from the upper outlet, and the liquid inlet is extended to the position below the liquid level in normal working, so that the gas-liquid separation and the liquid can be fully mixed. The bottom liquid outlet can make full use of the gravity of the liquid to automatically flow so as to discharge all the liquid completely.
The pump 2 is turned on when the supply valve 93 is opened. Accordingly, the self-circulation time of the ammonia water is shortened as much as possible, and the self-circulation is started at the time of supply.
Referring to fig. 7, a sixth embodiment of the ammonia water pipeline according to the present invention is shown.
Compared with the first embodiment, the sixth embodiment is mainly characterized in that a pipeline of a subsequent finished product tank of the mixing tank is added. After the mixed liquid SC1 in the mixing tank is stabilized, the mixed liquid is conveyed to a finished product tank, the finished product tank is the last storage tank body before the liquid meeting the requirement of SC1 enters the cleaning process equipment, and a direct pipeline is connected with a switch valve between the finished product tank and a spray head of the equipment. Specifically, the mixing tank 5 further includes an outlet 52, the ammonia water pipeline further includes a finished product tank 53, a fifth pipeline 54 and a mixed liquid leakage branch 55, the outlet 52 of the mixing tank is connected to the finished product tank 53 through the fifth pipeline 54, and the mixed liquid leakage branch 55 is communicated with the fifth pipeline 54.
The mixed liquor drain branch 55 includes a pressure control valve 56.
Accordingly, the mixed liquid containing small bubbles generated in the fifth pipe 54 between the mixing tank 5 and the product tank 53 can be discharged from the fifth pipe 54 through the mixed liquid drain branch 55.
The mixing path control valve 4 is a needle valve, and the exhaust control valve 62 is a needle valve.
The outlet flow of the pump 2 is greater than or equal to 500 ml/min. Accordingly, the flow rate of the ammonia water can be stabilized even at a large flow rate.
The above specific embodiment is based on the first embodiment, and branches are added to different pipelines, and the branches added in the second to sixth embodiments can be mutually overlapped, so that technical effects are overlapped.
The above is that the utility model provides a main technical scheme of embodiment shows the connection relation and the position relation between part and part to and main technical parameter characteristic. The most important of the method comprises the following steps: the exhaust pipeline 6 is in branch communication with the second pipeline 31. The exhaust line 6 includes a first-stage exhaust pipe 61, an exhaust control valve 62, and a second-stage exhaust pipe 63. The first-stage exhaust pipe 61 is in branch communication with the second pipeline 31, the exhaust control valve 62 is connected to the first-stage exhaust pipe 61 and the second-stage exhaust pipe 63, respectively, and the second-stage exhaust pipe 63 is connected to the upper portion 12 of the surge tank 1. Referring to fig. 8, a time state diagram of the flow of ammonia water in the ammonia water pipeline provided by the present invention is shown. Compared with the figure 1, the flow of the ammonia water of the utility model is more stable. The utility model discloses the technological effect that can reach lies in: in view of the above, through setting up main exhaust pipe 6 (the aqueous ammonia decomposes great behind the pump) to and all set up the aqueous ammonia or SC1 that row has mixed the ammonia at each pipeline, thereby, the aqueous ammonia is in when the aqueous ammonia pipeline mesocycle, the bubble that produces in the discharge tube way in time has reduced the empty pipe phenomenon of pump, and then improves the flow stability in the aqueous ammonia circulation pipeline, moreover, also can have above-mentioned profitable technological effect when large-traffic, and can reach the flow requirement of settlement as early as possible.
The above-mentioned embodiments and the accompanying drawings are only illustrative for explaining the technical solution and the technical effects of the present invention, and are not intended to limit the present invention. It is to be understood that modifications and variations may be made in the above-described embodiments by those skilled in the art without departing from the spirit and scope of the present invention as defined by the appended claims.
Claims (16)
1. An ammonia pipeline, comprising:
a buffer tank, wherein a liquid outlet is arranged below the buffer tank;
the pump comprises an inlet end and an outlet end, and the inlet end of the pump is connected with the liquid outlet of the buffer tank through a first pipeline;
the flow measuring device is connected with the outlet end of the pump through a second pipeline;
the mixing path control valve is connected with the flow measuring device through a third pipeline;
the mixing tank is connected with the mixing way control valve through a fourth pipeline;
the exhaust pipeline branch is communicated with the second pipeline;
the exhaust pipeline comprises a first section of exhaust pipe, an exhaust control valve and a second section of exhaust pipe;
the first section of exhaust pipe is communicated with the second pipeline branch, the exhaust control valve is respectively connected with the first section of exhaust pipe and the second section of exhaust pipe, and the second section of exhaust pipe is connected with the upper part of the buffer tank.
2. The ammonia water pipeline of claim 1, wherein the pipe diameter of the second pipeline is a first pipe diameter, the pipe diameter of the exhaust pipeline is a second pipe diameter, and the first pipe diameter is greater than or equal to the second pipe diameter.
3. The ammonia conduit of claim 2, wherein the first pipe diameter is 3/4 inches and the second pipe diameter is 3/8 inches.
4. The ammonia water pipeline according to claim 1, wherein a liquid discharge branch is connected to the first pipeline, and a pressure control valve is arranged on the liquid discharge branch.
5. The ammonia circuit of claim 4, wherein the ammonia circuit is connected to an ammonia supply main, the ammonia supply main further comprising a main drain, the drain branch being connected to the main drain.
6. The ammonia water pipeline according to claim 1, wherein a liquid return branch is connected to the third pipeline, the liquid return branch comprises a first section of liquid return pipe, a liquid return control valve and a second section of liquid return pipe, the first section of liquid return pipe is connected to the third pipeline, the liquid return control valve connects the first section of liquid return pipe and the second section of liquid return pipe, and the second section of liquid return pipe is connected to the upper portion of the buffer tank.
7. The ammonia water pipeline of claim 6, wherein the second section liquid return pipe and the second section exhaust pipe share an upper return pipe, and the upper return pipe is connected with the upper part of the buffer tank.
8. The ammonia water line of claim 6, wherein said return control valve is a needle valve, shortening the opening time of said return control valve.
9. The ammonia water pipeline according to claim 1, wherein the buffer tank is provided at an upper portion thereof with an air outlet.
10. The ammonia water pipeline according to claim 1,
the ammonia water pipeline is connected to an ammonia water supply main pipeline, and the ammonia water supply main pipeline comprises a main supply pipe;
the ammonia water pipeline also comprises a buffer tank liquid inlet pipeline, and the buffer tank liquid inlet pipeline comprises a control pipe section and a tank inlet pipe section;
the control pipe section comprises a supply valve, a pressure regulating valve and a pneumatic valve, wherein the supply valve is connected to the main supply pipe, the supply valve is connected with the pressure regulating valve through a pipeline, and the pneumatic valve is connected with the pressure regulating valve through a pipeline;
the tank inlet pipe section comprises a liquid tank inlet, and the liquid tank inlet is positioned at the lower part of the buffer tank.
11. The ammonia water pipeline of claim 10, wherein the supply valve is a hand valve or a solenoid valve.
12. The ammonia pipeline of claim 10 wherein the pump is turned on when the supply valve is opened.
13. The ammonia circuit of claim 1, wherein the mixing tank further comprises an outlet, the ammonia circuit further comprises a product tank, a fifth circuit, and a mixed liquor drain branch, the outlet of the mixing tank is connected to the product tank via the fifth circuit, and the mixed liquor drain branch is connected to the fifth circuit.
14. The ammonia pipeline of claim 13 wherein the mixed liquor drain branch comprises a pressure control valve.
15. The ammonia water line of claim 1, wherein the mixing path control valve is a needle valve and the exhaust control valve is a needle valve.
16. Ammonia pipeline according to any one of claims 1 to 14, characterized in that the outlet flow of the pump is greater than or equal to 500 ml/min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921478998.0U CN210771455U (en) | 2019-09-06 | 2019-09-06 | Ammonia water pipeline |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921478998.0U CN210771455U (en) | 2019-09-06 | 2019-09-06 | Ammonia water pipeline |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210771455U true CN210771455U (en) | 2020-06-16 |
Family
ID=71037649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921478998.0U Active CN210771455U (en) | 2019-09-06 | 2019-09-06 | Ammonia water pipeline |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210771455U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111777029A (en) * | 2020-06-17 | 2020-10-16 | 新乡航空工业(集团)有限公司 | Automatic vacuum pumping and liquid injecting device of pod environment control system |
-
2019
- 2019-09-06 CN CN201921478998.0U patent/CN210771455U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111777029A (en) * | 2020-06-17 | 2020-10-16 | 新乡航空工业(集团)有限公司 | Automatic vacuum pumping and liquid injecting device of pod environment control system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN210771455U (en) | Ammonia water pipeline | |
| CN211411652U (en) | Alkali dissolving and online adding system thereof | |
| CN111760481A (en) | Liquid medicine mixing arrangement and liquid medicine mix moisturizing system | |
| US11987922B2 (en) | Automatic feeding device, control method thereof and multi drum washing machine | |
| CN203549395U (en) | Chemical liquid supply device | |
| CN212786639U (en) | Fertilizer applying device | |
| CN206886767U (en) | A kind of silicon chip processes EDI water circulation systems | |
| CN206661760U (en) | A kind of denitrating catalyst cleans water circle device | |
| CN211467426U (en) | Automatic water temperature adjusting device of vacuum box | |
| CN209451779U (en) | A kind of liquid medicine device for formulating | |
| CN106391148A (en) | Acid/base system unit of refining-treatment regeneration system and acid/base dilution method | |
| CN203196523U (en) | Waste gas treatment system in polycarboxylate superplasticizer production equipment | |
| CN207162127U (en) | A kind of denitrating flue gas dilution metering distribution integrated apparatus | |
| CN208695875U (en) | A kind of constant pressure water supply equipment for bottle washing machine | |
| CN217267803U (en) | Closed system and liquid supply device | |
| CN206815272U (en) | A kind of runoff washes away stable water supply device | |
| CN220424978U (en) | Hydrochloric acid tail gas treatment device | |
| CN205500880U (en) | Alkali decrement waste water acid out system | |
| CN110935339B (en) | Pneumatic double-groove circulating system | |
| CN212017313U (en) | Waste gas treatment device | |
| CN205412699U (en) | Big proportioning device of salt solution in batches | |
| CN210448779U (en) | A diluting device for concrete additive production | |
| CN213060335U (en) | Spiral backward flow formula ozone water machine | |
| CN214287454U (en) | Tail gas emptying and leaching system | |
| CN206980495U (en) | Industrial Boiler liquid mixing system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |