CN102864952B - 洁净室及其净化单元 - Google Patents
洁净室及其净化单元 Download PDFInfo
- Publication number
- CN102864952B CN102864952B CN201210364869.5A CN201210364869A CN102864952B CN 102864952 B CN102864952 B CN 102864952B CN 201210364869 A CN201210364869 A CN 201210364869A CN 102864952 B CN102864952 B CN 102864952B
- Authority
- CN
- China
- Prior art keywords
- toilet
- filter
- guide rail
- clean unit
- base plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004140 cleaning Methods 0.000 title abstract description 13
- 239000011521 glass Substances 0.000 claims abstract description 17
- 239000002245 particle Substances 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 238000003860 storage Methods 0.000 claims description 16
- 150000002500 ions Chemical class 0.000 claims description 15
- 150000001450 anions Chemical class 0.000 claims description 13
- 238000000151 deposition Methods 0.000 claims description 9
- 238000011045 prefiltration Methods 0.000 claims description 7
- 230000000694 effects Effects 0.000 claims description 6
- 238000001914 filtration Methods 0.000 claims description 6
- 238000007664 blowing Methods 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 3
- 230000003068 static effect Effects 0.000 abstract description 4
- 230000005611 electricity Effects 0.000 abstract 2
- 239000000428 dust Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 238000010276 construction Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000008030 elimination Effects 0.000 description 2
- 238000003379 elimination reaction Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 230000003695 hair diameter Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- -1 smog Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
- F24F8/30—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by ionisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
- Electrostatic Separation (AREA)
Abstract
Description
Claims (9)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210364869.5A CN102864952B (zh) | 2012-09-26 | 2012-09-26 | 洁净室及其净化单元 |
US13/642,542 US20140087649A1 (en) | 2012-09-26 | 2012-10-08 | Cleanroom and Cleaning Apparatus |
PCT/CN2012/082549 WO2014047957A1 (zh) | 2012-09-26 | 2012-10-08 | 洁净室及其净化单元 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210364869.5A CN102864952B (zh) | 2012-09-26 | 2012-09-26 | 洁净室及其净化单元 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102864952A CN102864952A (zh) | 2013-01-09 |
CN102864952B true CN102864952B (zh) | 2014-12-31 |
Family
ID=47444059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210364869.5A Expired - Fee Related CN102864952B (zh) | 2012-09-26 | 2012-09-26 | 洁净室及其净化单元 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN102864952B (zh) |
WO (1) | WO2014047957A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105863315A (zh) * | 2015-01-23 | 2016-08-17 | 重庆建工住宅建设有限公司 | 一种高洁度厂房施工工艺 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105775534B (zh) * | 2016-05-26 | 2017-12-26 | 新昌县沃克工具有限公司 | 自洁无尘仓储室 |
CN106121291B (zh) * | 2016-06-27 | 2018-11-02 | 江苏帕珐尼洁净科技有限公司 | 一种具有内部循环风扇的超净间 |
CN106121292B (zh) * | 2016-06-28 | 2018-11-27 | 江苏中瀚通讯技术有限公司 | 一种风扇排布整齐的超净间 |
CN106088673B (zh) * | 2016-06-28 | 2018-11-20 | 江苏中瀚通讯技术有限公司 | 一种安装有回流风扇的超净间 |
CN108180568A (zh) * | 2017-12-22 | 2018-06-19 | 科越工程(苏州)有限公司 | 一种无尘室排风系统及其安装工艺 |
CN109898899B (zh) * | 2019-02-25 | 2024-03-01 | 信阳市一零二四商贸有限公司 | 一种集装箱无尘清洗房 |
CN110307609A (zh) * | 2019-07-12 | 2019-10-08 | 世源科技工程有限公司 | 一种洁净室用仓储 |
CN112406254A (zh) * | 2020-11-10 | 2021-02-26 | 中航华东光电有限公司 | 低成本偏振片覆合系统及偏振片覆合方法 |
CN113061877A (zh) * | 2021-04-02 | 2021-07-02 | 杭州中欣晶圆半导体股份有限公司 | 高洁净度apcvd成膜设备及其成膜方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11130210A (ja) * | 1997-10-27 | 1999-05-18 | Dainippon Screen Mfg Co Ltd | クリーンルーム内の基板保管装置 |
CN101143644A (zh) * | 2006-09-13 | 2008-03-19 | 株式会社大福 | 基板收纳设备及基板处理设备及基板收纳设备的动作方法 |
CN201179450Y (zh) * | 2008-03-20 | 2009-01-14 | 天津市滨海净化设施有限公司 | 新型除静电吸尘超净工作台 |
CN202179283U (zh) * | 2011-07-29 | 2012-04-04 | 安徽皖投力天世纪空气净化系统工程有限公司 | 等离子体消毒净化的洁净工作台 |
CN202427466U (zh) * | 2012-02-11 | 2012-09-12 | 刘正洁 | 一种水平净化工作台 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3788296B2 (ja) * | 2001-09-10 | 2006-06-21 | 株式会社ダイフク | クリーンルーム用の物品保管設備 |
US6873515B2 (en) * | 2002-04-17 | 2005-03-29 | United Microelectronics Corp. | Method for preventing electrostatic discharge in a clean room |
KR100561531B1 (ko) * | 2005-09-23 | 2006-03-17 | (주)이온피아 | 이오나이징 팬 필터 유닛 |
JP4941415B2 (ja) * | 2007-09-04 | 2012-05-30 | 三菱マテリアル株式会社 | クリーンベンチ |
JP4706938B2 (ja) * | 2008-11-21 | 2011-06-22 | 村田機械株式会社 | クリーンルーム用の自動倉庫と自動倉庫での物品の保管方法 |
US20120152114A1 (en) * | 2009-03-02 | 2012-06-21 | George Griffiths | System for enhancing air filter efficiency with external electrical dust charging device |
CN102284078A (zh) * | 2010-06-18 | 2011-12-21 | 上海科林环保工程技术有限公司 | 前置式等离子洁净装置 |
-
2012
- 2012-09-26 CN CN201210364869.5A patent/CN102864952B/zh not_active Expired - Fee Related
- 2012-10-08 WO PCT/CN2012/082549 patent/WO2014047957A1/zh active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11130210A (ja) * | 1997-10-27 | 1999-05-18 | Dainippon Screen Mfg Co Ltd | クリーンルーム内の基板保管装置 |
CN101143644A (zh) * | 2006-09-13 | 2008-03-19 | 株式会社大福 | 基板收纳设备及基板处理设备及基板收纳设备的动作方法 |
CN201179450Y (zh) * | 2008-03-20 | 2009-01-14 | 天津市滨海净化设施有限公司 | 新型除静电吸尘超净工作台 |
CN202179283U (zh) * | 2011-07-29 | 2012-04-04 | 安徽皖投力天世纪空气净化系统工程有限公司 | 等离子体消毒净化的洁净工作台 |
CN202427466U (zh) * | 2012-02-11 | 2012-09-12 | 刘正洁 | 一种水平净化工作台 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105863315A (zh) * | 2015-01-23 | 2016-08-17 | 重庆建工住宅建设有限公司 | 一种高洁度厂房施工工艺 |
Also Published As
Publication number | Publication date |
---|---|
WO2014047957A1 (zh) | 2014-04-03 |
CN102864952A (zh) | 2013-01-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Clean room and cleaning units thereof Effective date of registration: 20190426 Granted publication date: 20141231 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2019440020032 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20201016 Granted publication date: 20141231 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: Shenzhen China Star Optoelectronics Technology Co.,Ltd. Registration number: 2019440020032 |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141231 |