CN102865640B - 洁净室 - Google Patents
洁净室 Download PDFInfo
- Publication number
- CN102865640B CN102865640B CN201210363872.5A CN201210363872A CN102865640B CN 102865640 B CN102865640 B CN 102865640B CN 201210363872 A CN201210363872 A CN 201210363872A CN 102865640 B CN102865640 B CN 102865640B
- Authority
- CN
- China
- Prior art keywords
- blower fan
- fan filter
- filter module
- toilet
- guide rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011521 glass Substances 0.000 claims abstract description 12
- 238000003860 storage Methods 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 11
- 238000000151 deposition Methods 0.000 claims description 9
- 238000011045 prefiltration Methods 0.000 claims description 7
- 238000001914 filtration Methods 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 5
- 239000000428 dust Substances 0.000 abstract description 12
- 239000002245 particle Substances 0.000 abstract description 11
- 238000010276 construction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 230000003695 hair diameter Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- -1 smog Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Abstract
Description
Claims (1)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210363872.5A CN102865640B (zh) | 2012-09-26 | 2012-09-26 | 洁净室 |
US13/642,545 US9347681B2 (en) | 2012-09-26 | 2012-10-09 | Cleanroom |
PCT/CN2012/082617 WO2014047960A1 (zh) | 2012-09-26 | 2012-10-09 | 洁净室 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210363872.5A CN102865640B (zh) | 2012-09-26 | 2012-09-26 | 洁净室 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102865640A CN102865640A (zh) | 2013-01-09 |
CN102865640B true CN102865640B (zh) | 2015-01-07 |
Family
ID=47444671
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210363872.5A Expired - Fee Related CN102865640B (zh) | 2012-09-26 | 2012-09-26 | 洁净室 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN102865640B (zh) |
WO (1) | WO2014047960A1 (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104806043A (zh) * | 2015-02-12 | 2015-07-29 | 芜湖锐进医疗设备有限公司 | 医疗器具生产工作间 |
KR102127716B1 (ko) * | 2018-05-25 | 2020-06-29 | 에스케이실트론 주식회사 | 웨이퍼 카세트 스토커 및 그를 이용한 웨이퍼 카세트의 건조 방법 |
CN115739795A (zh) * | 2022-10-31 | 2023-03-07 | 浙江丽水中欣晶圆半导体科技有限公司 | 改善陶瓷盘洗净能力的工艺方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2911964B2 (ja) * | 1990-06-12 | 1999-06-28 | 富士通株式会社 | 保管庫 |
CN101143644A (zh) * | 2006-09-13 | 2008-03-19 | 株式会社大福 | 基板收纳设备及基板处理设备及基板收纳设备的动作方法 |
CN102514939A (zh) * | 2011-11-14 | 2012-06-27 | 深圳市华星光电技术有限公司 | 空间立体式在线搬送系统 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06340304A (ja) * | 1993-06-01 | 1994-12-13 | Tokyo Electron Ltd | 筐体の収納棚及び筐体の搬送方法並びに洗浄装置 |
JP3635517B2 (ja) * | 1997-10-27 | 2005-04-06 | 大日本スクリーン製造株式会社 | クリーンルーム内の基板保管装置 |
-
2012
- 2012-09-26 CN CN201210363872.5A patent/CN102865640B/zh not_active Expired - Fee Related
- 2012-10-09 WO PCT/CN2012/082617 patent/WO2014047960A1/zh active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2911964B2 (ja) * | 1990-06-12 | 1999-06-28 | 富士通株式会社 | 保管庫 |
CN101143644A (zh) * | 2006-09-13 | 2008-03-19 | 株式会社大福 | 基板收纳设备及基板处理设备及基板收纳设备的动作方法 |
CN102514939A (zh) * | 2011-11-14 | 2012-06-27 | 深圳市华星光电技术有限公司 | 空间立体式在线搬送系统 |
Non-Patent Citations (2)
Title |
---|
JP特开平11-130210A 1999.05.18 * |
JP特开平6-340304A 1994.12.13 * |
Also Published As
Publication number | Publication date |
---|---|
WO2014047960A1 (zh) | 2014-04-03 |
CN102865640A (zh) | 2013-01-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Dynamic detection system and method for cleaning room garment system protection validity Effective date of registration: 20190426 Granted publication date: 20150107 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2019440020032 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20201016 Granted publication date: 20150107 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: Shenzhen China Star Optoelectronics Technology Co.,Ltd. Registration number: 2019440020032 |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150107 |