CN102837367B - Control method of surface waviness of large-size optical element processed through single point diamond milling method - Google Patents
Control method of surface waviness of large-size optical element processed through single point diamond milling method Download PDFInfo
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Abstract
The invention discloses a control method of surface waviness of a large-size optical element processed through a single point diamond milling method and belongs to the field of ultraprecision machining of a large-size brittle optical element. The invention aims to solve the problem that the existing SPDT (single point diamond turning) method cannot guarantee waviness errors and frequency domain evaluation index PSD1 when a large-size optical element is processed. The control method disclosed by the invention comprises the following steps: 1. carrying out rough machining; 2. acquiring a space cycle T of longitudinal strips; 3. judging rigidity of the processing lathe, executing the step 4 if the rigidity is too low and executing the step 5 if the rigidity is too high; 4. increasing average pressure between a beam and a leveling pad body and then executing step 6; 5. reducing average pressure between the beam and the leveling pad body or contact rigidity, and then executing step 6; 6. carrying out secondary ultraprecision machining; 7. detecting the PSD1 value again; 8. judging whether the fact that PSD1 is less than or equal to 15nm<2>.mm is right or false; returning to the step 2 if the fact is false; and if the fact is right, completing the control of the waviness errors and the frequency domain index PSD1 of the large-size optical element U processed through the single point diamond milling method.
Description
Technical field
The present invention relates to the surface waviness control method of single-point diamond turning method machining large-sized optical elements, belong to large scale fragility optical element ultraprecise manufacture field.
Background technology
The progress of human civilization history, the energy is performed meritorious deeds never to be obliterated.From bavin firewood to coal, the application of oil, natural gas etc. " fossil fuel ", advances human social economy's construction, the large step of life civilization.But the dependence of " fossil fuel " of the mankind to deposition formation in 1 years, in impelling social high speed development, has caused energy crisis hard to carry on." fossil fuel " burning, is exactly the arch-criminal that atmosphere pollution, acid rain, greenhouse effects etc. destroy ecology and contaminated environment, and finding new forms of energy has been the task of top priority of survival and development of mankind.Fusion energy resource is clean, pollution-free and almost inexhaustible, and utilizing laser controlling nuclear fusion to obtain the energy is the desirable approach that does not solve energy problem, and current each developed country all pays close attention to it.The laser that laser driver is exported requires to have good beam quality, sufficiently high laser energy and power density, need be used in conjunction with a large amount of electric light, nonlinear optical material element for meeting this requirement, as KDP (potassium dihydrogen phosphate) crystal, neodymium glass, K9 glass, quartz glass etc.Laser constraint nuclear fusion device is high-precision surface shape, super-smooth surface to the common requirement of these elements, large scale and large batch, wherein, not only require high surface figure accuracy face and effects on surface percent ripple and frequency-domain index also to have very harsh requirement for KDP crystal.Surface waviness and the defective meeting of frequency-domain index PSD1 cause the self-focusing of light beam, and the material property of damage KDP crystal, threatens whole system safety.Because KDP crystal is soft crisp material, and be typical nonlinear crystal, generally adopt at present the method for large cutterhead fly cutter single-point diamond turning (SPDT) to process this material both at home and abroad.So face, because main-shaft axis is vertical all the time with workpiece, main shaft reacts on the surface at workpiece and has just formed periodic longitudinal stripe in the cycle movement of vertical direction, if this striped drops on the evaluation interval (2.5mm-33mm) of PSD1, very easily cause the defective of PSD1 evaluation index, cause the damage of KDP crystal, even the collapsibility of whole system destroys, and is the mismachining tolerance that must control.
Summary of the invention
The present invention seeks to be difficult in order to solve existing SPDT method waviness error, frequency domain evaluation index PSD1 when the machining large-sized optical elements problem ensureing, a kind of surface waviness control method of single-point diamond turning method machining large-sized optical elements is provided.
The surface waviness control method of single-point diamond turning method machining large-sized optical elements of the present invention, the method realizes based on machining tool, described machining tool comprises support, crossbeam, attachment bolt, main shaft, two columns and three leveling pads, between left side column and crossbeam, two leveling pads are set, a leveling pad is set between right side column and crossbeam, each leveling pad has three wedge shape spherical support bodies, the upper surface of described three wedge shape spherical support bodies contacts with the lower surface of crossbeam, between leveling pad and crossbeam, fix by attachment bolt, the method comprises the following steps:
Step 1: utilize machining tool to carry out roughing for the first time to large-sized optical elements U;
Step 2: utilize vertical stripe number and the PSD1 value of the large-sized optical elements after interferometer detection processing, obtain the space periodic T of longitudinal stripe according to the vertical stripe number of large-sized optical elements;
Step 3: space periodic T and PSD1 value by longitudinal stripe judge that the rigidity of machining tool is too high or too low, determines to adjust direction,
As T>=33mm, and PSD1 > 15nm
2when mm, show that the rigidity of machining tool is too low, execution step four;
As T < 33mm, and PSD1 > 15nm
2when mm, show that the rigidity of machining tool is too high, execution step five;
As PSD1≤15nm
2when mm, meet frequency-domain index processing request, the rigidity that shows to add lathe is normal, completes the control of waviness error and the frequency-domain index PSD1 of single-point diamond turning method machining large-sized optical elements U;
Step 4: increase the average pressure between crossbeam and three wedge shape spherical support bodies of leveling pad, then perform step six;
Step 5: reduce average pressure or contact stiffness between three wedge shape spherical support bodies of crossbeam and leveling pad, then perform step six;
Step 6: large-sized optical elements U is carried out to the processing of secondary ultraprecise,
Step 7: recycling interferometer detects the PSD1 value of described large-sized optical elements U again,
Step 8: determining step seven detects the PSD1 obtaining and whether meets fusion system requirements PSD1≤15nm
2mm;
If do not met, return to step 2, again adjust processing;
If meet, complete the control of waviness error and the frequency-domain index PSD1 of single-point diamond turning method machining large-sized optical elements U.
Advantage of the present invention: the present invention can realize the accurate Detection & Controling of single-point diamond turning optical element percent ripple; The present invention is by adjusting the contact stiffness between supporter and crossbeam, reach by changing the intrinsic frequency of lathe the object that workpiece percent ripple (longitudinal stripe) is controlled, be used in conjunction with interferometer the waviness error and the frequency-domain index PSD1 that have realized processed large-sized optical elements and be controlled in the scope of fusion system requirements; Method of the present invention has realized the control of waviness error, and this control principle is simple, handling safety, and reliable results, significant to ICF engineering.
Brief description of the drawings
Fig. 1 is the flow chart of the surface waviness control method of single-point diamond turning method machining large-sized optical elements of the present invention;
Fig. 2 is the structural representation of the existing machining tool of the inventive method utilization;
Fig. 3 is the schematic diagram of the large-sized optical elements longitudinal stripe that detects in the present invention.
Detailed description of the invention
Detailed description of the invention one: present embodiment is described below in conjunction with Fig. 1 to Fig. 3, the surface waviness control method of single-point diamond turning method machining large-sized optical elements described in present embodiment, the method realizes based on machining tool, described machining tool comprises support 1, crossbeam 2, attachment bolt 3, main shaft 4, two columns 5 and three leveling pads 6, between left side column 5 and crossbeam 2, two leveling pads are set, a leveling pad 6 is set between right side column 5 and crossbeam 2, each leveling pad 6 has three wedge shape spherical support bodies, the upper surface of described three wedge shape spherical support bodies contacts with the lower surface of crossbeam 2, fixing by attachment bolt 3 between leveling pad 6 and crossbeam 2, the method comprises the following steps:
Step 1: utilize machining tool to carry out roughing for the first time to large-sized optical elements U;
Step 2: utilize vertical stripe number and the PSD1 value of the large-sized optical elements after interferometer detection processing, obtain the space periodic T of longitudinal stripe according to the vertical stripe number of large-sized optical elements;
Step 3: space periodic T and PSD1 value by longitudinal stripe judge that the rigidity of machining tool is too high or too low, determines to adjust direction,
As T>=33mm, and PSD1 > 15nm
2when mm, show that the rigidity of machining tool is too low, execution step four;
As T < 33mm, and PSD1 > 15nm
2when mm, show that the rigidity of machining tool is too high, execution step five;
As PSD1≤15nm
2when mm, meet frequency-domain index processing request, the rigidity that shows to add lathe is normal, completes the control of waviness error and the frequency-domain index PSD1 of single-point diamond turning method machining large-sized optical elements U;
Step 4: increase the average pressure between crossbeam 2 and three wedge shape spherical support bodies of leveling pad 6, then perform step six;
Step 5: reduce average pressure or contact stiffness between three wedge shape spherical support bodies of crossbeam 2 and leveling pad 6, then perform step six;
Step 6: large-sized optical elements U is carried out to the processing of secondary ultraprecise,
Step 7: recycling interferometer detects the PSD1 value of described large-sized optical elements U again,
Step 8: determining step seven detects the PSD1 obtaining and whether meets fusion system requirements PSD1≤15nm
2mm;
If do not met, return to step 2, again adjust processing;
If meet, complete the control of waviness error and the frequency-domain index PSD1 of single-point diamond turning method machining large-sized optical elements U.
In present embodiment, being used for the interferometer of measuring element longitudinal stripe and frequency-domain index PSD1 is the laser digital interferometer that Veeco company of the U.S. produces, it utilizes interference technique detection plane, spherical surface shape real-time, opticator adopts non-rope principle of interference, digital processing part adopts position phase method and two kinds of methods of the Schlieren method to carry out interference pattern interpretation, and repeatable accuracy can reach 1/100 wavelength peak-to-valley value.
In present embodiment, the Veeco interferometer adopting is very responsive to vibrations, need take relevant isolation measure when actual measurement.
The pad just adopting in present embodiment requires flatness good, can adopt to grind to obtain.
Detailed description of the invention two: present embodiment is described further embodiment one, in step 4, increase the average pressure between three wedge shape spherical support bodies of crossbeam 2 and leveling pad 6 by increasing the pretightning force of attachment bolt 3, the pretightning force of each increase is 30 newton～50 newton.
Detailed description of the invention three: present embodiment is described further embodiment one or two, in step 5, reduce the average pressure between three wedge shape spherical support bodies of crossbeam 2 and leveling pad 6 by reducing the pretightning force of attachment bolt 3, the pretightning force at every turn reducing is 30 newton～50 newton.
Detailed description of the invention four: present embodiment is described further embodiment one or two, in step 5, reduce the contact area between the two by placing small-sized pad on the contact-making surface between three wedge shape spherical support bodies of crossbeam 2 and leveling pad 6, and then reduce the contact stiffness between crossbeam 2 and three wedge shape spherical support bodies of leveling pad 6, between each each wedge shape spherical support body and crossbeam 2, increase by 1～2 small-sized pad, the thickness of each small-sized pad is 0.1cm～0.5cm.
Claims (4)
1. the surface waviness control method of single-point diamond turning method machining large-sized optical elements, the method realizes based on machining tool, described machining tool comprises support (1), crossbeam (2), attachment bolt (3), main shaft (4), two columns (5) and three leveling pads (6), between left side column (5) and crossbeam (2), two leveling pads are set, between right side column (5) and crossbeam (2), a leveling pad (6) is set, each leveling pad (6) has three wedge shape spherical support bodies, the upper surface of described three wedge shape spherical support bodies contacts with the lower surface of crossbeam (2), fixing by attachment bolt (3) between leveling pad (6) and crossbeam (2), it is characterized in that, the method comprises the following steps:
Step 1: utilize machining tool to carry out roughing for the first time to large-sized optical elements (U);
Step 2: utilize vertical stripe number and the PSD1 value of the large-sized optical elements after interferometer detection processing, obtain the space periodic T of longitudinal stripe according to the vertical stripe number of large-sized optical elements;
Step 3: space periodic T and PSD1 value by longitudinal stripe judge that the rigidity of machining tool is too high or too low, determines to adjust direction,
As T>=33mm, and PSD1 > 15nm
2when mm, show that the rigidity of machining tool is too low, execution step four;
As T < 33mm, and PSD1 > 15nm
2when mm, show that the rigidity of machining tool is too high, execution step five;
As PSD1≤15nm
2when mm, meet frequency-domain index processing request, the rigidity that shows to add lathe is normal, completes the control of waviness error and the frequency-domain index PSD1 of single-point diamond turning method machining large-sized optical elements (U);
Step 4: increase the average pressure between crossbeam (2) and three wedge shape spherical support bodies of leveling pad (6), then perform step six;
Step 5: reduce average pressure or contact stiffness between three wedge shape spherical support bodies of crossbeam (2) and leveling pad (6), then perform step six;
Step 6: large-sized optical elements (U) is carried out to the processing of secondary ultraprecise,
Step 7: recycling interferometer detects the PSD1 value of described large-sized optical elements (U) again,
Step 8: determining step seven detects the PSD1 obtaining and whether meets fusion system requirements PSD1≤15nm
2mm;
If do not met, return to step 2, again adjust processing;
If meet, complete the control of waviness error and the frequency-domain index PSD1 of single-point diamond turning method machining large-sized optical elements (U).
2. the surface waviness control method of single-point diamond turning method machining large-sized optical elements according to claim 1, it is characterized in that, in step 4, increase the average pressure between three wedge shape spherical support bodies of crossbeam (2) and leveling pad (6) by increasing the pretightning force of attachment bolt (3), the pretightning force of each increase is 30 newton～50 newton.
3. the surface waviness control method of single-point diamond turning method machining large-sized optical elements according to claim 1, it is characterized in that, in step 5, reduce the average pressure between three wedge shape spherical support bodies of crossbeam (2) and leveling pad (6) by reducing the pretightning force of attachment bolt (3), the pretightning force at every turn reducing is 30 newton～50 newton.
4. the surface waviness control method of single-point diamond turning method machining large-sized optical elements according to claim 1, it is characterized in that, in step 5, reduce the contact area between the two by placing small-sized pad on the contact-making surface between three wedge shape spherical support bodies of crossbeam (2) and leveling pad (6), and then reduce crossbeam (2) and three wedge shape spherical support bodies of leveling pad (6) between contact stiffness, between each each wedge shape spherical support body and crossbeam (2), increase by 1～2 small-sized pad, the thickness of each small-sized pad is 0.1cm～0.5cm.
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| CN109014352A (en) * | 2018-05-25 | 2018-12-18 | 常州星宇车灯股份有限公司 | A kind of processing method of the micro- striped of lens and lens with micro- striped |
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| CN101870002A (en) * | 2010-07-08 | 2010-10-27 | 哈尔滨工业大学 | Flatness error control method for single-point diamond turning method machining large-sized optical elements |
| CN101876393A (en) * | 2010-06-09 | 2010-11-03 | 哈尔滨工业大学 | Ultraprecise platform leveling device |
| CN101887171A (en) * | 2010-07-09 | 2010-11-17 | 哈尔滨工业大学 | Evaluation method of influence of optical element surface waviness on laser damage threshold and method for obtaining element optimal processing parameters therefrom |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101876393A (en) * | 2010-06-09 | 2010-11-03 | 哈尔滨工业大学 | Ultraprecise platform leveling device |
| CN101870002A (en) * | 2010-07-08 | 2010-10-27 | 哈尔滨工业大学 | Flatness error control method for single-point diamond turning method machining large-sized optical elements |
| CN101887171A (en) * | 2010-07-09 | 2010-11-17 | 哈尔滨工业大学 | Evaluation method of influence of optical element surface waviness on laser damage threshold and method for obtaining element optimal processing parameters therefrom |
Non-Patent Citations (4)
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| KDP晶体微纳表面小尺度波纹对其激光损伤阈值的影响;姜伟;《信息科技辑》;20111231(第14期);第64-135页 * |
| KDP晶体超精密加工机床静压主轴轴向变形分析;赵自强等;《航空精密制造技术》;20100415;第46卷(第2期);第6-20页 * |
| 姜伟.KDP晶体微纳表面小尺度波纹对其激光损伤阈值的影响.《信息科技辑》.2011,(第14期),第38-49页. |
| 赵自强等.KDP晶体超精密加工机床静压主轴轴向变形分析.《航空精密制造技术》.2010,第46卷(第2期),第6-20页. |
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