CN206066091U - The control device of optical element grinding face shape error and parallelism error - Google Patents
The control device of optical element grinding face shape error and parallelism error Download PDFInfo
- Publication number
- CN206066091U CN206066091U CN201621129442.7U CN201621129442U CN206066091U CN 206066091 U CN206066091 U CN 206066091U CN 201621129442 U CN201621129442 U CN 201621129442U CN 206066091 U CN206066091 U CN 206066091U
- Authority
- CN
- China
- Prior art keywords
- error
- optical element
- face shape
- vacuum cup
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
This utility model provides a kind of heavy caliber thin plate optical element grinding face shape error and depth of parallelism error control device.The control device of optical element grinding face shape error and parallelism error, including vacuum cup, the vacuum cup upper surface is provided with uniform vertical adsorption hole straight down, and the vacuum cup is provided with uniform cross through hole and longitudinal hole horizontal and vertical, the longitudinal hole is connected with vertical adsorption hole and cross through hole and forms vacuum air-channel.Vacuum cup of the present utility model improves the support stiffness of lamella elements surface every bit, knife is allowed to deform in reducing the course of processing, and with reference to face shape error on-position measure technology and compensation grinding technique, the definitiveness for realizing lamella elements face shape error and parallelism error is restrained with stability, realizes the efficient stable control of face shape error and parallelism error.
Description
Technical field
This utility model belongs to optical element cold working field, more particularly to a kind of heavy caliber thin plate optical element ultraprecise
The device of element face shape error and the control of parallelism error high-efficiency and precision in Grinding Process.
Background technology
Heavy caliber thin plate optical element is mainly used in piece in device of high power laser and puts the units such as window, continuous phase board
Part, device of high power laser propose higher requirement to its surface figure accuracy, the depth of parallelism, transmission wavefront distortion, roughness etc..Mill
It is the cold worked prime forming process of the class component optics to cut processing, the efficiency of the follow-up polishing of its processing precision direct influence
With quality, when its depth of parallelism is poor, after throwing is bright, detect that the parasitic striped during transmission wavefront also can be to most using interferometer
Termination fruit introduces larger measurement error.
For heavy caliber thin plate class component, after being fixed on grinding machine magnetic platform using traditional mechanical installation way, due to magnetic
There is certain flatness error in platform surface, element surface, cause to exist between element undersurface and Ci Tai surfaces certain
The air gap；Due to thin plate class component bending rigidity it is weaker, during grinding element, element receive normal grinding force and produce compared with
The big knife that allows deforms, and by Theoretical Calculation, this allows knife deformation to be up to some tens of pm, much larger than laser aid to such
The required precision of element.Further, since the air gap distribution between element undersurface and Ci Tai surfaces is with randomness, therefore
Control to face shape error and parallelism error in Grinding Process has uncertainty, needs acted as reference mutual is employed many times
Installation way be iterated processing, its final control accuracy and precision convergence efficiency are relatively low.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of heavy caliber thin plate optical element grinding face shape
Error and depth of parallelism error control device.
This utility model solves the technical scheme that adopted of technical problem：Optical element grinding face shape error peace
The control device of row degree error, including vacuum cup, the vacuum cup upper surface are provided with uniform straight down vertical
Adsorption hole, and the vacuum cup is provided with uniform cross through hole and longitudinal hole, the longitudinal hole horizontal and vertical
Connect with vertical adsorption hole and cross through hole and form vacuum air-channel.
Further, the cross through hole two ends arrange plug sealing, and described longitudinal hole one end arranges plug sealing, separately
One end is provided with pipe screw thread and is connected with fast joint.
Further, the vacuum cup side is additionally provided with block.
Further, the vacuum cup both sides are also extended installation locating surface.
Further, the deflection quantity lower than precision needed for optical element that the vacuum cup vac sorb is produced
Level.
The beneficial effects of the utility model are：Vacuum cup of the present utility model improves propping up for lamella elements surface every bit
Rigidity is held, in reducing the course of processing, allows knife to deform, and combine face shape error on-position measure technology and compensation grinding technique, realized
The definitiveness of lamella elements face shape error and parallelism error is restrained with stability, realizes face shape error and parallelism error
Efficient stable control.
Description of the drawings
Fig. 1 is the structural representation of vacuum cup of the present utility model.
Fig. 2 is the structural representation that vacuum cup of the present utility model adsorbs clamping.
Specific embodiment
Heavy caliber thin plate optical element itself bending stiffness is weak, is produced by the effect of grinding force in Grinding Process
The larger knife that allows deforms so that the control of face shape error and parallelism error has larger uncertainty, and causes error
Convergence efficiency is relatively low.For above feature, the utility model proposes the clamping method based on vac sorb.
As shown in Figure 1-2,3 upper surface of vacuum cup is provided with uniform erecting to the structure of vacuum cup of the present utility model 3
Straight downward vertical adsorption hole 2, and vacuum cup 3 is additionally provided with uniform cross through hole 4 and longitudinal hole horizontal and vertical
5, longitudinal hole 5 connects and is formed vacuum air-channel with vertical adsorption hole 2 and cross through hole 4, and it is close that 4 two ends of cross through hole arrange plug
Envelope, 5 one end of longitudinal hole arrange plug sealing, and the other end is provided with pipe screw thread and is connected with fast joint 7, fast joint 7 finally again with
Vacuum pump is connected.3 side of vacuum cup is additionally provided with block 8, carries out safety protection to optical element 1.3 both sides of vacuum cup
Also being extended has installation locating surface 6, for contacting to grinding machine Ci Tai surfaces and installing positioning.
3 material of vacuum cup need to have good grinding performance, can obtain after grinding preferable flatness and
Surface roughness.Preferably with high-quality 45# steel, internal free from admixture sand holes.Vacuum cup 3 carries out annealing treatment after machining
Reason so as to there is preferable stability in grinding posterior sucker surface planarity.Have inside vacuum cup 3 higher firm
Degree, the deflection that vac sorb is produced is than precision order of magnitude lower needed for heavy caliber thin plate optical element 1.
Above-mentioned vertical adsorption hole 2 straight down is preferably evenly distributed with 15 rows 15 and arranges, and bore dia is Φ 5mm, and depth is
25mm.Above-mentioned cross through hole 4 is preferably disposed on the position away from 3 case depth of vacuum cup for 20mm, and preferably 15 a diameter of
The through hole of Φ 8mm, cross through hole 4 are connected with above-mentioned vertical adsorption hole 2 respectively, form vacuum air-channel.Above-mentioned longitudinal hole 5 is best
Be arranged on the position for 20mm away from 3 case depth of vacuum cup, the through hole of preferably 1 a diameter of Φ 8mm, longitudinal hole 5 with
Above-mentioned 15 cross through hole 4 are connected, and form vacuum air-channel.
Only cross through hole 4 and longitudinal hole 5 inside vacuum cup of the present utility model 3, the hollow structure without large span,
Ensure that deflection of the vacuum cup 3 in the case of vac sorb is small.After vacuum cup 3 is installed on grinding machine, its installation
Locating surface 6 is contacted with grinding machine Ci Tai surfaces, and the installation locating surface 6 is needed through Precision Machining, it is ensured that its flatness.Vacuum cup
After the completion of 3 machinings, fine annealing process is carried out, discharge internal forming residual stress, during the follow-up use of reduction at any time
Between shape drift.
Using vacuum cup of the present utility model 3 to heavy caliber thin plate optical element grinding face shape error and the depth of parallelism
The control method of error is comprised the following steps：
1) it is ground vacuum cup 3
The vacuum cup 3 suitable with heavy caliber thin plate 1 bore of optical element is mounted on grinding machine magnetic platform, using sand
Wheel is according to flat surface grinding track 3 surface of grinding vacuum cup, and controls its flatness, using displacement transducer on-position measure vacuum
The face shape error F0 of sucker 3；
2) grinding element
1 surface of 3 surface of clean vacuum sucker and heavy caliber thin plate optical element, heavy caliber thin plate optical element 1 is placed
In 3 surface adsorption bore region of vacuum cup, as shown in Fig. 2 opening vacuum system and ensureing 1 following table of heavy caliber thin plate optical element
Preferably fit with 3 surface of vacuum cup in face (A faces, as follows).Heavy caliber thin plate is ground according to flat surface grinding track using emery wheel
1 upper surface of optical element (B faces, as follows).After 1 surface of heavy caliber thin plate optical element mill complete (all regions are ground to),
Stop grinding, then using the face of 1 upper surface of heavy caliber thin plate optical element under displacement transducer on-position measure vacuum adsorption state
Shape error F1.Vacuum system is closed, heavy caliber thin plate optical element 1 is stood into more than 1 hour, it is ensured that heavy caliber thin plate optics unit
Part 1 is tried one's best after perfect elasticity recovery, then the face shape error F2 of 1 upper surface of on-position measure heavy caliber thin plate optical element；
3) face shape error control
Face shape error F1 is deducted with the face shape error F2 that above-mentioned measurement is obtained, 1 following table of heavy caliber thin plate optical element is obtained
The error distribution F of air gap layer between 3 surface of face and vacuum cup.Again vac sorb heavy caliber thin plate optical element 1 is simultaneously
Ensure that the lower surface of heavy caliber thin plate optical element 1 is preferably fitted with Ci Tai surfaces, grinding is compensated with error distribution F and is added
Work, compensation way (error are distributed after F is carried out reversely motion rail of the emery wheel in vertical direction when grinding for negative compensation
Mark).After heavy caliber thin plate optical element 1 grinds entirely, close vacuum system and simultaneously stand more than 1 hour, on-position measure upper surface
Face shape, finished surface shape error control；
4) parallelism error control
Again 3 surface of clean vacuum sucker and heavy caliber thin plate optical element 1, with 1 upper table of heavy caliber thin plate optical element
The vac sorb that faces down is clamped in 3 surface of vacuum cup, it is ensured that 1 upper surface of heavy caliber thin plate optical element and 3 table of vacuum cup
Fit in face.1 lower surface of processing heavy caliber thin plate optical element, compensation way are compensated with the face shape error F0 of vacuum cup 3
Adopt and just compensate (using error F0 as emery wheel during grinding vertical direction movement locus).Treat heavy caliber thin plate optics unit
After part 1 grinds entirely, close vacuum cup 3 and simultaneously stand more than 1 hour, 1 lower surface face shape of on-position measure heavy caliber thin plate optical element；
Heavy caliber thin plate optical element 1 is removed, using the thickness of 1 difference position of miking heavy caliber thin plate optical element, is obtained
To the parallelism error on 1 upper and lower surface of heavy caliber thin plate optical element.
Embodiment：
Processing one piece of 430mm × 430mm × 10mm fused quartz planar sheet optical element, its grinding face shape error and
Parallelism error control method is comprised the following steps：
1) 3 clamping of vacuum cup is fixed on into grinding machine Ci Tai surfaces, using emery wheel according to flat surface grinding processing mode, is processed
The absorption surface (side of vertical adsorption hole 2 is distributed with) of vacuum cup 3, and use face shape on-position measure systematic survey sucker
Surface planarity error F0, it is ensured that its flatness is better than 3 μm；
2) surface of the surface of vacuum cup 3 and optical element is thoroughly cleaned, it is free from dust, impurity, greasy dirt, water stain
Deng after, optical element is clamped in into 3 surface of vacuum cup according to the mode vac sorb in Fig. 1, it is ensured that all vertical adsorption holes 2
It is covered by an optical element, while optical element adsorbed state is good, i.e.,：Optical element lower surface and 3 surface of vacuum cup it
Between without any foreign body jack-up, vacuum is better than -0.08MPa, and optical element side arranges block 2 and carries out safety guarantor to element
Shield；
3) in the case of vac sorb, using skive, according to flat surface grinding processing mode, machining optical element
Upper surface.After element surface mill is complete, in the state of vac sorb, using the face shape of face shape in-place detection system measuring cell
Error F1；
4) vacuum system is closed, optical element is stood into more than 1 hour, element internal Stress Release is made, recoverable force is steady
After fixed, using face shape in-place detection system measurement face shape error F2 now.And face shape error F1 is deducted with face shape error F2, obtain
To error information F, after as vacuum system closes optical element flexible recoverable force, optical element lower surface and vacuum cup table
Air film layer thickness profile between face；
5) reopen vacuum system, it is ensured that optical element lower surface is fitted intact with vacuum cup surface.With error point
Cloth data F, carry out negative compensation grinding, i.e., for region higher in error distributed data F, grinding depth accordingly increases,
Relatively low region in error distributed data F, grinding depth accordingly reduce；
6) after member top surface mill is complete, vacuum system is closed, stands more than 1 hour, make element internal Stress Release, deformed
After recovering stable, using face shape in-place detection system measurement upper surface face shape.If face shape is qualified, completes Surface contral and enter
Next step, otherwise repeat step 3 is to step 6；
7) element is removed, again thorough clean vacuum chuck surface and element surface, to have completed Surface contral
Upper table faces down, and vac sorb is clamped in chuck surface, it is ensured that adsorbed state is intact.Element side is using the block 2 in accompanying drawing 2
Safety protection is carried out to element；
8) under adsorbed state, grinding is just being compensated with the sucker flatness error data for measuring, i.e., for by mistake
Higher region in difference cloth, grinding depth are accordingly reduced, and for region relatively low in error distribution, grinding depth accordingly increases
Plus.After mill is complete, vacuum system is closed, stand more than 1 hour, after making element internal Stress Release, recoverable force stable, using face
Shape in-place detection system measurement lower surface face shape.Element is removed into cleaning, using the thickness of miking element difference, most
The parallelism error between upper and lower two surface is calculated eventually.
Adopt processing method of the present utility model can by heavy caliber thin plate optical component surface shape error control 5 μm with
Interior, parallelism error is controlled 3 " within.
Claims (5)
1. the control device of optical element grinding face shape error and parallelism error, it is characterised in that including vacuum cup
(3), vacuum cup (3) upper surface is provided with uniform vertical adsorption hole (2) straight down, and the vacuum cup
(3) uniform cross through hole (4) and longitudinal hole (5), the longitudinal hole (5) and vertical absorption are provided with horizontal and vertical
Hole (2) is connected and forms vacuum air-channel with cross through hole (4).
2. the control device of optical element grinding face shape error as claimed in claim 1 and parallelism error, its feature
It is that cross through hole (4) two ends arrange plug sealing, described longitudinal hole (5) one end arranges plug sealing, and the other end sets
It is equipped with pipe screw thread to be connected with fast joint (7).
3. the control device of optical element grinding face shape error as claimed in claim 1 and parallelism error, its feature
It is that vacuum cup (3) side is additionally provided with block (8).
4. the control device of optical element grinding face shape error as claimed in claim 1 and parallelism error, its feature
It is that vacuum cup (3) both sides are also extended installation locating surface (6).
5. the control device of optical element grinding face shape error as claimed in claim 1 and parallelism error, its feature
It is that the deflection that vacuum cup (3) vac sorb is produced is than precision order of magnitude lower needed for optical element (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621129442.7U CN206066091U (en) | 2016-10-17 | 2016-10-17 | The control device of optical element grinding face shape error and parallelism error |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621129442.7U CN206066091U (en) | 2016-10-17 | 2016-10-17 | The control device of optical element grinding face shape error and parallelism error |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206066091U true CN206066091U (en) | 2017-04-05 |
Family
ID=58442693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621129442.7U Expired - Fee Related CN206066091U (en) | 2016-10-17 | 2016-10-17 | The control device of optical element grinding face shape error and parallelism error |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206066091U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106425701A (en) * | 2016-10-17 | 2017-02-22 | 成都精密光学工程研究中心 | Control method of optical element grinding surface shape errors and parallelism errors and device thereof |
| CN110702379A (en) * | 2019-09-09 | 2020-01-17 | 中国航空工业集团公司洛阳电光设备研究所 | Infrared window transmission wavefront detection system and method for eliminating parasitic stripes |
-
2016
- 2016-10-17 CN CN201621129442.7U patent/CN206066091U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106425701A (en) * | 2016-10-17 | 2017-02-22 | 成都精密光学工程研究中心 | Control method of optical element grinding surface shape errors and parallelism errors and device thereof |
| CN106425701B (en) * | 2016-10-17 | 2019-04-23 | 成都精密光学工程研究中心 | The control method of optical element grinding face shape error and parallelism error |
| CN110702379A (en) * | 2019-09-09 | 2020-01-17 | 中国航空工业集团公司洛阳电光设备研究所 | Infrared window transmission wavefront detection system and method for eliminating parasitic stripes |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104290002B (en) | A kind of processing method of cylindrical mirror | |
| CN105965325B (en) | A kind of roof prism gluing part production technology and its frock | |
| CN103310808A (en) | Systems and methods for correcting slider parallelism error using compensation lapping | |
| CN206066091U (en) | The control device of optical element grinding face shape error and parallelism error | |
| JP2011026195A5 (en) | ||
| CN104759964B (en) | Deformation processing method for optical aspheric element | |
| CN105690252A (en) | Polishing device for machining hardware parts | |
| CN105290965A (en) | Metallographic specimen grinding and polishing clamping device and kit thereof | |
| CN107283260A (en) | A kind of wheeled burnishing device | |
| CN102744424B (en) | Single-point diamond compensation cutting processing method for thin plate optical parts | |
| CN104400607A (en) | Polishing method for precision mold | |
| CN106425701B (en) | The control method of optical element grinding face shape error and parallelism error | |
| CN201049431Y (en) | Chain type dummy bar pin shaft surface grinding clamp | |
| Walker et al. | A quantitative comparison of three grolishing techniques for the Precessions process | |
| CN107452607A (en) | A kind of wafer laser grinding system and method | |
| CN104875080B (en) | A kind of ion beam polishing modification processing of oblique incidence | |
| CN101648342A (en) | Method for installing machine tool guideway | |
| CN105290701B (en) | High pointing accuracy plane finishing method based on measurement process integration | |
| CN108161645A (en) | The workpiece rotary process grinding attachment and method of a kind of Low rigidity high precision plane mirror | |
| TW201700431A (en) | Manufacturing method for optical glass | |
| CN100450702C (en) | Method for manufacturing static pressure guide rail | |
| CN108723819B (en) | Clamping tool and method for F-shaped steel rail piece machining | |
| CN105127880B (en) | A kind of Ultraprecise polished method of active control workpiece material cutting mechanisms transformation | |
| CN102778767B (en) | Repairing method of liquid crystal panel | |
| CN204913569U (en) | Work piece polishing dish contact State adjustable burnishing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170405 Termination date: 20201017 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |