CN101261511A - Ion beam polishing process surface shape convergence accuracy control method - Google Patents
Ion beam polishing process surface shape convergence accuracy control method Download PDFInfo
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- CN101261511A CN101261511A CNA2008100309575A CN200810030957A CN101261511A CN 101261511 A CN101261511 A CN 101261511A CN A2008100309575 A CNA2008100309575 A CN A2008100309575A CN 200810030957 A CN200810030957 A CN 200810030957A CN 101261511 A CN101261511 A CN 101261511A
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Abstract
The invention discloses a surface figure convergence precision control method in an ion beam polishing process, the method firstly obtains a removal function b(x, y) of the polishing process, then detects a surface figure error distribution z(x, y) of an optical mirror surface to be processed and establishes a linear model of the determined polishing process according to the b(x, y) and z(x, y), the dwell time vector is calculated according to the established linear model and the processing precision, and the dwell time which is obtained by calculation is carried out the necessary amendments for carrying out the polishing processing of the processing dwell time. The control of the surface figure convergence precision in the ion beam polishing process can be realized by carrying out the control of the dwell time in the polishing process, when the requirement of the processing precision is lower, the processing can be completed by higher efficiency, thus saving the processing time; when the requirement of the processing precision is higher, the precision requirement can be met and the accuracy of the process can be improved.
Description
Technical field
The invention belongs to the optics manufacture field, relate in particular to the process of carrying out precision control in a kind of ion beam polishing process process.
Background technology
Existing ion beam polishing CONTROL PROCESS is based on for the control of face shape convergence precision that experience carries out, and opposite shape convergence precision lacks the ability of prediction and control.For example, according to known error surface shape and removal function, prior art can only solve one group of residence time, like this, under the high situation of accuracy requirement, the residence time that solves often can't meet the demands, and under the low situation of accuracy requirement, the residence time that solves is usually bigger than normal again, and process time is long partially.
Summary of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, and the control method of face shape convergence precision in a kind of simple to operate, controllability is strong, efficient is higher ion beam polishing process is provided.
For solving the problems of the technologies described above, the technical scheme that we provide is the control method of face shape convergence precision in a kind of ion beam polishing process, this method is at first set up the linear model of determinacy polishing process, again according to the relation of blocking parameter and residual error in the truncated singular value method of finding the solution residence time, calculate the residence time that satisfies requirement on machining accuracy, process with this processing residence time again, thereby realization specifically may further comprise the steps the control of machining precision:
(1) obtains the removal function of glossing: remove the function test with determinacy glossing process and obtain and remove function or directly select the removal function that has obtained and remained for use, removal function that obtain through test or that directly select for use be designated as b (x, y);
(2) detection faces shape error profile: the face shape error that adopts surface shape detection apparatus to detect optical mirror plane to be processed distributes, the face shape error that detection is obtained distribute be designated as z (x, y);
(3) set up the process model of glossing: suitably choose m processing capacity distributed points on described optical mirror plane, (coordinate of 1≤i≤m) is designated as (x to the i point
i, y
i), then the expectation processing capacity at this i point place is z
i=z (x
i, y
i), all z
iForm an expectation processing capacity vector z in order
eSimultaneously, suitably choose n and process resident distributed points on described optical mirror plane and outside the minute surface edge, (coordinate of 1≤j≤n) is designated as (u to the j point
j, v
j), the original processing residence time of establishing j point place is t
j, all t
jForm an original residence time vector t in order; When ion beam at resident processing distributed points j point (u
j, v
j) residence time t
jThe time, to processing capacity distributed points i point (x
i, y
i) material removal amount be r
Ij=a
Ijt
j, then all resident processing stands are to a certain processing capacity distributed points i point (x
i, y
i) the material removal amount summation be
The material removal amount ri of all processing capacity distributed points is formed a material removal amount vector r in order, and then the process model can be expressed as r=At, and wherein A is the processing matrix of the capable n row of m, and the element of the capable j row of i is a
Ij, a
Ij=b (x
i-u
j, y
i-v
j);
(4) find the solution original residence time vector according to machining precision: the purpose of processing is to make actual material removal amount vector r equal to expect processing capacity vector z
eSo, to determine system of linear equations z in the process
e=At separates, but does not generally have the just in time compatible t that separates
*, make At
*=z
e, this makes finding the solution of problem become complicated, but we can solve original residence time vector t according to the precision (being the rms value of residual error) of processing request, and solution formula is
σ wherein
iBe i the singular value of processing matrix A, the order of singular value satisfies σ
1〉=σ
2〉=σ
3〉=... 〉=σ
M * n〉=0, μ
iAnd τ
iBe respectively singular value σ
iCorresponding left singular vector and right singular vector block parameter k for satisfying inequality
Minimum value, wherein rms is the precision that processing request reaches;
(5) control of opposite shape convergence precision in the digital control processing: as the original processing residence time t of each resident processing distributed points of calculating gained
jIn when negative value not occurring, according to above-mentioned each element t that finds the solution among the original residence time vector t that obtains
jWith its coordinate (u
j, v
j) generate numerical control machining code, realize the control of opposite shape convergence precision in the ion beam polishing process by digital control processing;
Original processing residence time t when each resident processing distributed points of calculating gained
jIn when negative value occurring because the residence time in the processing can not be negative value, so generally need revise finding the solution the original residence time vector t that obtains, the correction formula of each point residence time is t
a=t
j-min (t
j), t wherein
a(1≤a≤n), the purpose of correction is the minimum value min (t that makes in the original processing residence time of each resident processing distributed points for the correction of each resident processing distributed points processing residence time
j)=0, all t
aForm to revise residence time vector t ', again according to the element t of t '
aWith its coordinate (u
j, v
j) generate numerical control machining code, realize the control of opposite shape convergence precision again by digital control processing.
Compared with prior art, the invention has the advantages that: method of the present invention can calculate different processing residence times according to the requirement of different machining precisioies, usually, when requirement on machining accuracy was low, process time was few, otherwise, when requirement on machining accuracy is high, long processing time.Therefore, by calculating above-mentioned residence time, and the residence time in the polishing processing is controlled according to result of calculation, can realize the control of opposite shape convergence precision in the ion beam polishing process, make when requirement on machining accuracy is low, can finish processing with higher efficient, save process time, and when requirement on machining accuracy is higher, can satisfy accuracy requirement again, improve the accuracy of technology.
Description of drawings
Fig. 1 is the removal function distribution plan that test obtains among the embodiment 1;
Fig. 2 is the face shape error distribution plan of the polished optical mirror plane that records among the embodiment 1;
Fig. 3 is the original residence time distribution plan that calculates gained among the embodiment 1;
Fig. 4 is a revised processing residence time distribution plan among the embodiment 1;
Fig. 5 is the face shape residual plot after the true processing of optical mirror plane among the embodiment 1;
Fig. 6 is the face shape error distribution plan of the polished optical mirror plane that records among the embodiment 2;
Fig. 7 is the original residence time distribution plan that calculates gained among the embodiment 2;
Fig. 8 is a revised processing residence time distribution plan among the embodiment 2;
Fig. 9 is the face shape residual plot after the true processing of optical mirror plane among the embodiment 2;
In Fig. 2, Fig. 5, Fig. 6 and Fig. 9, the PV value is the maximum peak valley of surface topography error, and the RMS value is a surface topography mean square of error root.
Embodiment
Embodiment 1:
The ion beam polishing process of rms=0.01 λ
The ion beam polishing process lathe is the logical ion beam polishing equipment of a Daepori, and basic technological parameter is: working gas is argon gas, working vacuum 1.6 * 10
-2Pa, ion energy 1000eV, beam current 30mA, test piece is the common devitrified glass of diameter 100mm.
By following method step described common devitrified glass is carried out ion beam polishing process:
1, obtain the removal function of glossing: use above-mentioned determinacy glossing and remove function test, with the removal function that obtains be designated as b (x, y), the result as shown in Figure 1;
2, detection faces shape error profile: the face shape error that adopts laser interferometer to detect optical mirror plane to be processed distributes, the face shape error that detection is obtained distribute be designated as z (x, y), the result as shown in Figure 2;
3, set up the process model of glossing: the spacing according to 2mm is chosen the processing capacity distributed points on whole optical mirror plane, get 1869 points altogether, and the coordinate of i point (1≤i≤1869) is designated as (x
i, y
i), and will be at the expectation processing capacity z at these some places
i(z
i=z (x
i, y
i)) form an expectation processing capacity vector z in order
eSimultaneously, also choose resident processing distributed points by the spacing of 2mm in optical mirror plane plane inside radius is the circle of 65mm, get 3281 resident processing distributed points altogether, the coordinate of j point (1≤j≤3281) is designated as (u
j, v
j), the original processing residence time of establishing j point place is t
j, all t
jForm an original residence time vector t in order; If add the man-hour ion beam at resident processing distributed points (u
j, v
j) residence time t
j, then all resident processing distributed points are to a certain processing capacity distributed points i point (x
i, y
i) the material removal amount summation be
The material removal amount r of all processing capacity distributed points
iForm a material removal amount vector r in order, then the process model can be expressed as r=At, and wherein A is the processing matrix of 1869 row, 3281 row, and the element of the capable j row of i is a
Ij, a
Ij=b (x
i-u
j, y
i-v
j);
4, find the solution original residence time vector according to machining precision: the purpose of processing is to make actual material removal amount vector r equal to expect processing capacity vector z
eSo, to determine system of linear equations z in the process
e=At separates, and we can solve original residence time vector t according to the precision (being the rms value of residual error) of processing request, and solution formula is
σ wherein
iBe i the singular value of processing matrix A, the order of singular value satisfies σ
1〉=σ
2〉=σ
3〉=... 〉=σ
1869 * 3281〉=0, μ
iAnd τ
iBe respectively singular value σ
iCorresponding left singular vector and right singular vector, wherein block parameter k for satisfying inequality
Minimum value, the rms=0.01 λ of Yao Qiuing in the present embodiment, wherein λ is the optical maser wavelength of laser interferometer, λ=0.6328 μ m calculates and blocks parameter k=138, and the distribution of original residence time vector t on two dimensional surface that obtains is as shown in Figure 3;
5, revise residence time: owing to calculate the original processing residence time of the each point t of gained in the present embodiment
jIn negative value appears, therefore need revise original residence time vector t, the correction formula of the original processing residence time of each point is t
a=t
j-min (t
j) (1≤a≤3281), the original residence time vector t that above-mentioned steps 4 calculates after revising, the correction residence time vector t ' that obtains as shown in Figure 4, total residence time (process time) is 34.14min;
6, process according to revising residence time vector generation numerical control machining code: the requirement on machining accuracy of present embodiment is 0.01 λ, and be 34.14min total process time, according to the element t of last correction residence time vector t '
aWith its coordinate (u
j, v
j), adopt prior art to generate numerical control machining code, realize the control of opposite shape convergence precision again by digital control processing.
After I.B.M. was finished, the face shape error that adopts laser interferometer to detect the optical mirror plane after the processing distributed, testing result as shown in Figure 5, the precision of actual processing is 0.012 λ, 0.01 λ is identical substantially with computational accuracy.
Embodiment 2:
The ion beam polishing process of rms=0.03 λ
The ion beam polishing process lathe is an ion beam polishing equipment, and basic technological parameter is: working gas is argon gas, working vacuum 1.6 * 10
-2Pa, ion energy 1000eV, beam current 30mA, test piece is the common devitrified glass of diameter 100mm.
By following method step described common devitrified glass is carried out ion beam polishing process:
1, obtain the removal function of glossing: because polishing technological conditions and embodiment 1 are identical, remove the function test so need not to do again, the removal function that directly adopts embodiment 1 to obtain, as shown in Figure 1;
2, detection faces shape error profile: the face shape error that adopts laser interferometer to detect optical mirror plane to be processed distributes, the face shape error that detection is obtained distribute be designated as z (x, y), the result as shown in Figure 6;
3, set up the process model of glossing: the spacing according to 2mm is chosen the processing capacity distributed points on whole optical mirror plane, get 1829 points altogether, and the coordinate of i point (1≤i≤1829) is designated as (x
i, y
i), and will be at the expectation processing capacity z at these some places
i(z
i=z (x
i, y
i)) form an expectation processing capacity vector z in order
eSimultaneously, also choose resident processing distributed points by the spacing of 2mm in optical mirror plane plane inside radius is the circle of 65mm, get 3281 resident processing distributed points altogether, the coordinate of j point (1≤j≤3281) is designated as (u
j, v
j), the original processing residence time of establishing j point place is t
j, all t
jForm an original residence time vector t in order; If add the man-hour ion beam at resident processing distributed points (u
j, v
j) residence time t
j, then all resident processing distributed points are to a certain processing capacity distributed points i point (x
i, y
i) the material removal amount summation be
The material removal amount r of all processing capacity distributed points
iForm a material removal amount vector r in order, then the process model can be expressed as r=At, and wherein A is the processing matrix of 1829 row, 3281 row, and the element of the capable j row of i is a
Ij, a
Ij=b (x
i-u
j, y
i-v
j);
4, find the solution original residence time vector according to machining precision: find the solution the value of blocking parameter k according to the computing method identical with embodiment 1, but because the rms=0.03 λ that requires in the present embodiment, so what calculate blocks parameter k=47, the distribution of original residence time vector t on two dimensional surface that obtains as shown in Figure 7;
5, revise residence time: owing to calculate the original processing residence time of the each point t of gained in the present embodiment
jIn negative value appears, therefore can revise original residence time vector t according to the method identical with embodiment 1, the original residence time vector t that calculates in the above-mentioned steps 4 is after revising, the correction residence time that obtains vector t ' as shown in Figure 8, total residence time (process time) is 25.08min;
6, process according to revising residence time vector generation numerical control machining code: the requirement on machining accuracy of present embodiment is 0.03 λ, and be 25.08min total process time, according to the element t of last correction residence time vector t '
aWith its coordinate (u
j, v
j), adopt prior art to generate numerical control machining code, realize the control of opposite shape convergence precision again by digital control processing.
After I.B.M. was finished, the face shape error that adopts laser interferometer to detect the optical mirror plane after the processing distributed, testing result as shown in Figure 9, the precision of actual processing is 0.032 λ, 0.03 λ is identical substantially with computational accuracy.
By embodiment 1 and embodiment 2 more as can be seen, though the primary face shape of minute surface among the embodiment 2 (0.144 λ rms) is poorer than the minute surface primary face shape among the embodiment 1, but, adopt face shape convergence control method proposed by the invention to calculate process time (25.08min) of embodiment 2 of gained than weak point process time (34.14min) of embodiment 1 because the surface figure accuracy (0.03 λ rms) that requires among the embodiment 2 is lower than the surface figure accuracy (0.01 λ rms) that requires among the embodiment 1.
Claims (1)
1, the control method of face shape convergence precision in a kind of ion beam polishing process may further comprise the steps:
(1) obtain the removal function of glossing: remove the function test with determinacy glossing process and obtain the removal function, the removal function that obtains through test be designated as b (x, y);
(2) detection faces shape error profile: the face shape error that adopts surface shape detection apparatus to detect optical mirror plane to be processed distributes, the face shape error that detection is obtained distribute be designated as z (x, y);
(3) set up the process model of glossing: choose m processing capacity distributed points on described optical mirror plane, the coordinate that i is ordered is designated as (x
i, y
i), 1≤i≤m, then the expectation processing capacity at i point place is z
i=z (x
i, y
i), all z
iForm an expectation processing capacity vector z in order
eSimultaneously, choose n resident processing distributed points on described optical mirror plane and outside the minute surface edge, the coordinate that j is ordered is designated as (u
j, v
j), 1≤j≤n, the original processing residence time of establishing j point place is t
j, all t
jForm an original residence time vector t in order, the material removal amount summation that then all resident processing distributed points are ordered to a certain processing capacity distributed points i is
The material removal amount r of all processing capacity distributed points
iForm a material removal amount vector r in order, then the process model representation is r=At, and wherein A is the processing matrix of the capable n row of m, and the element of the capable j row of i is a
Ij, a
Ij=b (x
i-u
j, y
i-v
j);
(4) find the solution original residence time vector according to machining precision: find the solution system of linear equations z according to the precision of processing request
eOriginal residence time vector t among the=At, solution formula is
σ wherein
iBe i the singular value of processing matrix A, the order of singular value satisfies σ
1〉=σ
2〉=σ
3〉=... 〉=σ
M * n〉=0, μ
iAnd τ
iBe respectively singular value σ
iCorresponding left singular vector and right singular vector block parameter k for satisfying inequality
Minimum value, wherein rms is the precision that processing request reaches;
(5) control of opposite shape convergence precision in the digital control processing: as the original processing residence time t of each resident processing distributed points of calculating gained
jIn when negative value not occurring, according to above-mentioned each element t that finds the solution among the original residence time vector t that obtains
jWith its coordinate (u
j, v
j) generate numerical control machining code, realize the control of opposite shape convergence precision in the ion beam polishing process by digital control processing;
Original processing residence time t when each resident processing distributed points of calculating gained
jIn when negative value occurring, utilize formula t
a=t
j-min (t
j) the original processing residence time of each resident processing distributed points is revised t wherein
aBe the correction processing residence time of each resident processing distributed points, min (t
j) be the minimum value in the original processing residence time of each resident processing distributed points, all t
aForm and revise residence time vector t ', according to the element t of revised residence time vector t '
aWith its coordinate (u
j, v
j) generate numerical control machining code, realize the control of opposite shape convergence precision again by digital control processing.
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|---|---|---|---|
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|---|---|---|---|---|
| CN102873628A (en) * | 2012-09-26 | 2013-01-16 | 清华大学 | Helix machining path for numerical-control small tool polishing |
| CN103197500A (en) * | 2012-01-05 | 2013-07-10 | 上海微电子装备有限公司 | Method for measuring mirror surface shape compensation effect |
| CN103786074A (en) * | 2014-01-22 | 2014-05-14 | 中国人民解放军国防科学技术大学 | Ion beam machining method allowing rotating angle to be reduced |
| CN104526470A (en) * | 2015-01-04 | 2015-04-22 | 中国科学院光电技术研究所 | Ion beam smoothing method for curved optical element |
| CN105891548A (en) * | 2016-04-12 | 2016-08-24 | 中国人民解放军国防科学技术大学 | Nanoscale optical subsurface damage detection method based on ion sputtering technology |
| CN106181741A (en) * | 2016-07-13 | 2016-12-07 | 中国工程物理研究院机械制造工艺研究所 | Based on becoming the Jet Polishing face shape error control method removing function |
| CN108188864A (en) * | 2018-02-14 | 2018-06-22 | 浙江大学 | A kind of aspherical optical element automation polishing system and method |
| CN110187415A (en) * | 2019-06-20 | 2019-08-30 | 中国科学院光电技术研究所 | A kind of optical component surface shape modification method being thinned based on reactive ion etching |
| CN111002111A (en) * | 2019-12-10 | 2020-04-14 | 中国空气动力研究与发展中心设备设计及测试技术研究所 | Sub-nanometer precision ion beam polishing-oriented surface shape error optimization removal method |
| CN112428026A (en) * | 2020-11-13 | 2021-03-02 | 中国人民解放军国防科技大学 | Pulse control beam diameter adjustable ion beam processing method based on surface shape error frequency band |
| CN113684461A (en) * | 2021-08-16 | 2021-11-23 | 上海济物光电技术有限公司 | SIC reflector surface modification process method with surface shape correction capability |
| CN115480598A (en) * | 2022-08-15 | 2022-12-16 | 北京空间机电研究所 | Optical mirror surface temperature control method and measurement and control system in ion beam machining process |
| CN115477476A (en) * | 2022-08-11 | 2022-12-16 | 上海延目光电技术有限公司 | Continuous phase plate preparation method based on ion beam modification |
| CN118364248A (en) * | 2024-06-20 | 2024-07-19 | 中国科学院长春光学精密机械与物理研究所 | Method for calculating polishing residence time of large-caliber optical element based on neural network |
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2008
- 2008-03-31 CN CN200810030957A patent/CN100589054C/en not_active Expired - Fee Related
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| CN103197500A (en) * | 2012-01-05 | 2013-07-10 | 上海微电子装备有限公司 | Method for measuring mirror surface shape compensation effect |
| CN103197500B (en) * | 2012-01-05 | 2015-09-30 | 上海微电子装备有限公司 | A kind of method measuring mirror surface shape compensation effect |
| CN102873628A (en) * | 2012-09-26 | 2013-01-16 | 清华大学 | Helix machining path for numerical-control small tool polishing |
| CN103786074A (en) * | 2014-01-22 | 2014-05-14 | 中国人民解放军国防科学技术大学 | Ion beam machining method allowing rotating angle to be reduced |
| CN104526470A (en) * | 2015-01-04 | 2015-04-22 | 中国科学院光电技术研究所 | Ion beam smoothing method for curved optical element |
| CN104526470B (en) * | 2015-01-04 | 2017-06-13 | 中国科学院光电技术研究所 | Ion beam smoothing method for curved optical element |
| CN105891548A (en) * | 2016-04-12 | 2016-08-24 | 中国人民解放军国防科学技术大学 | Nanoscale optical subsurface damage detection method based on ion sputtering technology |
| CN106181741A (en) * | 2016-07-13 | 2016-12-07 | 中国工程物理研究院机械制造工艺研究所 | Based on becoming the Jet Polishing face shape error control method removing function |
| CN106181741B (en) * | 2016-07-13 | 2018-02-06 | 中国工程物理研究院机械制造工艺研究所 | Based on the Jet Polishing face shape error control method for becoming removal function |
| CN108188864B (en) * | 2018-02-14 | 2019-08-16 | 浙江大学 | A kind of aspherical optical element automation polishing system and method |
| CN108188864A (en) * | 2018-02-14 | 2018-06-22 | 浙江大学 | A kind of aspherical optical element automation polishing system and method |
| CN110187415A (en) * | 2019-06-20 | 2019-08-30 | 中国科学院光电技术研究所 | A kind of optical component surface shape modification method being thinned based on reactive ion etching |
| CN111002111A (en) * | 2019-12-10 | 2020-04-14 | 中国空气动力研究与发展中心设备设计及测试技术研究所 | Sub-nanometer precision ion beam polishing-oriented surface shape error optimization removal method |
| CN112428026A (en) * | 2020-11-13 | 2021-03-02 | 中国人民解放军国防科技大学 | Pulse control beam diameter adjustable ion beam processing method based on surface shape error frequency band |
| CN113684461A (en) * | 2021-08-16 | 2021-11-23 | 上海济物光电技术有限公司 | SIC reflector surface modification process method with surface shape correction capability |
| CN115477476A (en) * | 2022-08-11 | 2022-12-16 | 上海延目光电技术有限公司 | Continuous phase plate preparation method based on ion beam modification |
| CN115480598A (en) * | 2022-08-15 | 2022-12-16 | 北京空间机电研究所 | Optical mirror surface temperature control method and measurement and control system in ion beam machining process |
| CN115480598B (en) * | 2022-08-15 | 2023-09-29 | 北京空间机电研究所 | Optical mirror surface temperature control method and measurement and control system in ion beam processing process |
| CN118364248A (en) * | 2024-06-20 | 2024-07-19 | 中国科学院长春光学精密机械与物理研究所 | Method for calculating polishing residence time of large-caliber optical element based on neural network |
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