CN106181741A - Based on becoming the Jet Polishing face shape error control method removing function - Google Patents

Based on becoming the Jet Polishing face shape error control method removing function Download PDF

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Publication number
CN106181741A
CN106181741A CN201610547669.1A CN201610547669A CN106181741A CN 106181741 A CN106181741 A CN 106181741A CN 201610547669 A CN201610547669 A CN 201610547669A CN 106181741 A CN106181741 A CN 106181741A
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face shape
point
shape error
polishing
technological parameter
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CN201610547669.1A
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CN106181741B (en
Inventor
樊炜
张连新
柯瑞
吴祉群
高浪
蓝河
张云飞
丁颖
孙鹏飞
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Institute of Mechanical Manufacturing Technology of CAEP
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
    • B24B31/116—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using plastically deformable grinding compound, moved relatively to the workpiece under the influence of pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C3/00—Abrasive blasting machines or devices; Plants
    • B24C3/32—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/4097—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by using design data to control NC machines, e.g. CAD/CAM
    • G05B19/4099—Surface or curve machining, making 3D objects, e.g. desktop manufacturing

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)

Abstract

The invention provides a kind of based on becoming the Jet Polishing face shape error control method removing function, described method includes step successively: obtain the removal function of glossing；Detection face shape error distribution；Set up the course of processing model of glossing；Solve technological parameter to realize becoming removal function correction of the flank shape；Surface figure accuracy is controlled by digital control processing.The impact that when method using the present invention can avoid using conventional residence time derivation algorithm, the frequent acceleration and deceleration of lathe cause, thus reduce the glossing dependency to Machine Tool Dynamics performance, promote face shape convergence efficiency and precision.

Description

Based on becoming the Jet Polishing face shape error control method removing function
Technical field
The present invention relates to, based on becoming the Jet Polishing face shape error control method removing function, belong to Optical manufacture technology neck Territory.The present invention regulates removal function in real time according to be processed shape, the technological parameter removing function by controlling Jet Polishing, from And realize face shape error control.
Background technology
Jet Polishing technology is a kind of New Super-precision polishing technology.Jet Polishing technology in last century Mo by Holland Oliver W. F hnle and HedserVan Brug of Delft university et al. propose, its cardinal principle be utilization be mixed with micro-/ The polishing fluid of nanoscale abrasive particle provides initial pressure through voltage supply system, flows through nozzle and forms jet beam, with certain Speed arrives material surface, utilizes abrasive particle that the shear force of material reaches removal effect.With conventional polishing techniques And other Ultraprecision Machining compares, the main feature of Jet Polishing and advantage are embodied in for high steepness curve surface work pieces, Utilize jet beam can go deep into inside workpiece, thus avoid mechanical interference, carry out the processing of inner surface and obtain higher processing Precision, has become an emerging finishing method the most by extensive concern.
Face shape error control method is the core of Jet Polishing technology, is convergence effect and the polishing efficiency of decision face shape Crucial.Current Jet Polishing technique is by solving the Jet Polishing speckle residence time at each tracing point, it is achieved face shape restrains. This technical face shape error control method is the most ripe, is extensively applied, but there is also in multiple deterministic theory mode Following problem:
1) the vibration effect machining accuracy that lathe acceleration and deceleration frequently cause.The frequent acceleration and deceleration of each kinematic axis of lathe cause relatively Big vibration, impact is removed stability and the path accuracy of function, thus is affected polishing precision；
The residence time solved is limited to dynamic performance (peak acceleration, the acceleration such as each kinematic axis of lathe itself Degree), it is low that residence time realizes precision.When the residence time calculated does not mates with the acceleration and deceleration ability of lathe, workpiece is caused " to owe Throw " or " cross and throw " so that face shape error deteriorates.
Summary of the invention
For solving the problem that fluidic current polishing process method causes, the present invention proposes a kind of based on becoming penetrating of removal function Stream burnishing surface shape error control method so that polishing is not only restricted to the dynamic performance of lathe, reduces complicated track polishing and brings Impact, promote face shape convergence efficiency.
The Jet Polishing face shape error control method removing function based on change of the present invention, in turn includes the following steps:
(1) the removal function of glossing is obtained: give and adopt the speckle time, inclination angle will be formed with axisθNozzle with angular velocityTurn round around axis, obtain the polishing speckle under the technological parameter that many groups are different, set up by matching and remove function process parameterηWith Remove the mapping relations between functional form.
Wherein,It is about QUOTEMultinomial,For constant,To throw spot center as initial point Face shaped position coordinate under coordinate system；
(2) detection face shape error distribution: use the face shape error distribution of interferometer measurement optical mirror plane to be processed, will detect To face shape error distribution be designated as。
(3) course of processing model of glossing is set up: equidistant on described optical mirror planeChooseIndividual machining locus Point, theIndividual machining locus pointCoordinate be designated asIf, theThe residence time of individual machining locus point is, in order Formation residence time vector；Choose simultaneouslyIndividual machining control point, theThe coordinate of individual machining control point is designated as, respectively The expectation removal amount of machining control point is, form desired removal amount vector in order；Machining control pointMaterial removal amount be, all ofForm material in order Vector removed by material, processing model is, whereinIt isInfluence matrix, it is years oldRowRow Element is；If the technological parameter of Jet PolishingThe upper limit be, lower limit is, calculate ?Under influence matrix；
(4) solve technological parameter realize become remove function correction of the flank shape: set lathe maximal rate as, by interior point method, solve as Under quadratic programming problem obtain technological parameterUnder residence time:
,subjected to ；
Calculate at the uniform velocityTime between each tracing point during polishing, calculate residence time release ratio；NoteIt isTechnological parameter at individual tracing point, solving equationIn intervalReal root, if Equation root is less than, takeIf equation root is more than, take；
(5) surface figure accuracy is controlled by digital control processing: generate and comprise cutter path point, feed speed, each tracing point corresponding Technological parameterNumerical control program, numerical control program is loaded in the digital control system of band process parameter control and performs processing, utilize Face shape after interferometer measurement processing, if precision meets requirement, then completes polishing；Otherwise it is back to step (2).
Present invention advantage compared with existing Jet Polishing technique is:
(1) lathe is always maintained at the uniform velocity feeding in the middle of the course of processing, and this is conducive to the vibration keeping alleviating lathe, keeps jet Stablizing of function is removed in polishing, promotes polishing precision.
(2) polishing be not limited to the dynamic performance of lathe, can more precisely realize the removal requirement of opposite shape, carry Rise and remove convergence efficiency, reduce the face shape error that " owing to throw " and " cross and throw " produces.
(3) establish removal function regulatory mechanism based on Jet Polishing technological parameter, function can be removed by regulation Realize the convergence of surface figure accuracy, can adjust, according to surface figure accuracy demand, the form removing function, it is simple to promote face shape simultaneously Convergence efficiency.
Accompanying drawing explanation
Fig. 1 is the face shape error scattergram of the workpiece to be processed measurement of the present invention；
Fig. 2 is the jet nozzle pressure of present invention scattergram in machined surface shape；
Fig. 3 be the present invention processing after measure face shape error scattergram.
Detailed description of the invention
For making purpose of the present invention technical scheme and advantage clearer, below in conjunction with specific embodiment, and reference Formula and accompanying drawing, the present invention is described in more detail.The present invention is realized by regulation and control this glossing parameter of nozzle pressure Remove the control of function.
Polissoir is the Jet Polishing technology machine that a Daepori is logical, and basic machined parameters is: lathe maximum feeding speed Degree=4000mm/min, nozzle angleθ=20 °, shower nozzle rotating speed1000r/min, lathe polishing process remain a constant speed into Give=50mm/min, rubbing head program location distance surface of the work distance is 50mm, and nozzle diameter is 1mm, the nozzle pressure upper limit For=1MPa, lower limit is=0.286MPa.Processing test specimen be bore be the K9 workpiece of 50mm × 50mm, aimed at precision is PV=0.14, RMS=0.09。
By following method described K9 workpiece carried out Jet Polishing technique:
1. obtain the removal function of glossing: set and adopt the speckle time as 10 minutes, by nozzle inclination 20 ° and with angular velocity 1000r/min turns round around axis, obtains nozzle pressure respectively=0.3MPa,0.4MPa,0.5MPa,0.6MPa,0.7MPa, Polishing speckle under 0.8MPa, 0.9MPa, 1MPa；Set up nozzle pressureηAnd the mapping relations removed between functional form: order, the form removing function is
Many group fitting experimental data are obtained coefficient:a=10-12,b=-2.86×10-7,=0.20500047；
2. detection face shape error distribution: use the face shape error distribution of Zygo interferometer measurement optical mirror plane to be processed, will detection The face shape error distribution obtained is designated as, as shown in Figure 1；
3. set up the course of processing model of glossing: set the machining locus step pitch of optical mirror plane as=0.5mm, from the limit of workpiece Boundary starts to choose 10201 machining locus points altogether along step pitches such as raster paths, theIndividual machining locus pointCoordinate be designated asIf, theThe residence time of individual machining locus point is(1≤QUOTE ≤ 10201), in order formed residence time to Amount；8 machining control points, altogether 81600 machining control points is chosen between each two adjacent track point, theIndividual add industry control The coordinate of system point is designated as, the expectation removal amount of each machining control point is,1≤ ≤ 81600, Form expectation removal amount vector in order；Machining control pointMaterial removal amount be, all ofComposition material removes vector in order, add Work model is, whereinBeing the influence matrix of 81600 × 10201, it is years oldRowColumn element is；CalculateInfluence matrix under=0.643MPa；
4. solve nozzle pressure and realize becoming removal function correction of the flank shape: by interior point method, solve following quadratic programming problem and obtain spray Mouth pressureUnder residence time:
,subjected to 7.5ms,=1…10201；
Calculate lathe at the uniform velocity feedingTime between each tracing point during=50mm/min0.6s, calculates residence time release ratio；TheNozzle pressure at individual machining locus pointComputing formula be:
The result calculated is as shown in Figure 2；
5. control surface figure accuracy by digital control processing: generate and comprise cutter path point, feed speed, each tracing point corresponding Nozzle pressureFollowing numerical control program,
X0.000 Y0.000 Z0.000 F50 P537455
X0.000 Y0.500 Z0.000 F50 P513616
X0.000 Y1.000 Z0.000 F50 P652319
X0.000 Y1.500 Z0.000 F50 P604405
X0.000 Y2.000 Z0.000 F50 P647327
…
Numerical control program is loaded in the digital control system that band nozzle pressure controls, performs processing.This process time is 102 points Clock, utilizes the face shape after laser interferometer measurement processing, as shown in Figure 3.PV after processing is 0.135, RMS is 0.084, Meet accuracy requirement, complete processing.
The above, the only detailed description of the invention in the present invention, but protection scope of the present invention is not limited thereto, and appoints What is familiar with the people of this technology in the technical scope that disclosed herein, it will be appreciated that the conversion expected or replacement, all should contain Within the scope of the comprising of the present invention, therefore protection scope of the present invention should be as the criterion with the protection domain of claims.

Claims (2)

1., based on becoming the Jet Polishing face shape error control method removing function, in turn include the following steps:
(1) obtain the removal function of glossing: give and adopt the speckle time, nozzle is tilted with axisθAngle with angular velocity Turn round nozzle around axis, obtain the polishing speckle under the technological parameter that many groups are different, set up by matching and remove function process parameterη And the mapping relations removed between functional form:
Wherein,Be aboutMultinomial,For constant,It is to throw the face under the spot center coordinate system as initial point Shaped position coordinate；
(2) detection face shape error distribution: use the face shape error distribution of interferometer measurement optical mirror plane to be processed, detection is obtained Face shape error distribution be designated as；
(3) course of processing model of glossing is set up: equidistant on described optical mirror planeChooseIndividual machining locus point, the Individual machining locus pointCoordinate be designated asIf, theThe residence time of individual machining locus point is, formed resident in order Time arrow；Choose simultaneouslyIndividual machining control point, theThe coordinate of individual machining control point is designated as, each machining control The expectation removal amount of point is, form expectation removal amount vector in order；Machining control point's Material removal amount is, all ofIn order composition material remove to Amount, processing model is, whereinIt isInfluence matrix, it is years oldRowColumn element is；If the technological parameter of Jet PolishingThe upper limit be, lower limit is, calculateUnder influence matrix；
(4) solve technological parameter realize become remove function correction of the flank shape: set lathe maximal rate as, by interior point method, solve as follows Quadratic programming problem obtainUnder residence time:
,subjected to ；
Calculate at the uniform velocityTime between each tracing point during polishing, calculate residence time release ratio；NoteFor TheTechnological parameter at individual tracing point, solving equationIn intervalReal root, if side The root of journey is less than, takeIf equation root is more than, take；
(5) surface figure accuracy is controlled by digital control processing: generate and comprise cutter path point, feed speed, each tracing point corresponding Technological parameterNumerical control program, numerical control program is loaded in the digital control system of band process parameter control and performs processing, utilize Face shape after interferometer measurement processing, if precision meets requirement, then completes polishing；Otherwise it is back to step (2).
It is the most according to claim 1 based on becoming the Jet Polishing face shape error control method removing function, it is characterised in that: Described controls to remove the technological parameter of functionFor nozzle pressure.
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CN108356712A (en) * 2018-03-07 2018-08-03 中国工程物理研究院机械制造工艺研究所 A kind of Jet Polishing processing method forming Gaussian removal function
CN108446423A (en) * 2018-01-30 2018-08-24 中国人民解放军国防科技大学 Process and parameter selection for optical element surface shape processing and application method thereof
CN109986472A (en) * 2019-04-12 2019-07-09 中国工程物理研究院机械制造工艺研究所 A kind of Jet Polishing removal function extracting method based on interferometer duplex measurement
CN110842652A (en) * 2019-10-21 2020-02-28 中国工程物理研究院机械制造工艺研究所 Deterministic optical polishing technology residence time solving method
CN110883608A (en) * 2019-10-22 2020-03-17 中国工程物理研究院机械制造工艺研究所 Magnetorheological polishing edge removal function modeling and edge effect inhibiting method
CN111002111A (en) * 2019-12-10 2020-04-14 中国空气动力研究与发展中心设备设计及测试技术研究所 Sub-nanometer precision ion beam polishing-oriented surface shape error optimization removal method
CN111347294A (en) * 2020-03-30 2020-06-30 中科院南京天文仪器有限公司 High-gradient optical mirror surface error polishing correction processing method
CN111843754A (en) * 2020-07-31 2020-10-30 中国人民解放军国防科技大学 Method for determinacy shaping excircle roundness of shaft part
CN112171386A (en) * 2020-09-24 2021-01-05 恒迈光学精密机械(杭州)有限公司 Polishing force adjusting and shape modifying method based on robot polishing system
CN112329167A (en) * 2020-11-02 2021-02-05 中国工程物理研究院机械制造工艺研究所 Magnetorheological polishing removal function deduction method based on curvature and immersion depth
CN113182944A (en) * 2021-05-24 2021-07-30 中国人民解放军国防科技大学 Dynamic controllable ultra-wide high-frequency response ion source regulation and control method
CN113597078A (en) * 2021-08-24 2021-11-02 上海交通大学 Multi-channel capacitive coupling type plasma jet device and working method
CN114434256A (en) * 2022-01-25 2022-05-06 中国科学院上海光学精密机械研究所 Machining method for removing intermediate frequency error by using sparse double-step path based on jet polishing
CN115971985A (en) * 2023-03-21 2023-04-18 中国科学院长春光学精密机械与物理研究所 Method and device for inhibiting influence of systematic track error on surface shape residual error
CN116679622A (en) * 2023-08-03 2023-09-01 中国科学院长春光学精密机械与物理研究所 Surface shape tool mark error prediction method based on continuous tool function
CN117473802A (en) * 2023-12-28 2024-01-30 中国科学院长春光学精密机械与物理研究所 Method for rapidly solving polishing residence time of large-caliber optical element

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CN108446423A (en) * 2018-01-30 2018-08-24 中国人民解放军国防科技大学 Process and parameter selection for optical element surface shape processing and application method thereof
CN108446423B (en) * 2018-01-30 2021-11-26 中国人民解放军国防科技大学 Process and parameter selection for optical element surface shape processing and application method thereof
CN108356712A (en) * 2018-03-07 2018-08-03 中国工程物理研究院机械制造工艺研究所 A kind of Jet Polishing processing method forming Gaussian removal function
CN108356712B (en) * 2018-03-07 2020-01-07 中国工程物理研究院机械制造工艺研究所 Jet polishing processing method for forming Gaussian removal function
CN109986472A (en) * 2019-04-12 2019-07-09 中国工程物理研究院机械制造工艺研究所 A kind of Jet Polishing removal function extracting method based on interferometer duplex measurement
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CN110842652B (en) * 2019-10-21 2020-12-29 中国工程物理研究院机械制造工艺研究所 Deterministic optical polishing technology residence time solving method
CN110883608A (en) * 2019-10-22 2020-03-17 中国工程物理研究院机械制造工艺研究所 Magnetorheological polishing edge removal function modeling and edge effect inhibiting method
CN111002111A (en) * 2019-12-10 2020-04-14 中国空气动力研究与发展中心设备设计及测试技术研究所 Sub-nanometer precision ion beam polishing-oriented surface shape error optimization removal method
CN111347294A (en) * 2020-03-30 2020-06-30 中科院南京天文仪器有限公司 High-gradient optical mirror surface error polishing correction processing method
CN111347294B (en) * 2020-03-30 2021-08-10 中科院南京天文仪器有限公司 High-gradient optical mirror surface error polishing correction processing method
CN111843754A (en) * 2020-07-31 2020-10-30 中国人民解放军国防科技大学 Method for determinacy shaping excircle roundness of shaft part
CN111843754B (en) * 2020-07-31 2021-10-26 中国人民解放军国防科技大学 Method for determinacy shaping excircle roundness of shaft part
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CN112171386B (en) * 2020-09-24 2022-04-05 恒迈光学精密机械(杭州)有限公司 Polishing force adjusting and shape modifying method based on robot polishing system
CN112329167A (en) * 2020-11-02 2021-02-05 中国工程物理研究院机械制造工艺研究所 Magnetorheological polishing removal function deduction method based on curvature and immersion depth
CN112329167B (en) * 2020-11-02 2022-06-17 中国工程物理研究院机械制造工艺研究所 Magnetorheological polishing removal function deduction method based on curvature and immersion depth
CN113182944A (en) * 2021-05-24 2021-07-30 中国人民解放军国防科技大学 Dynamic controllable ultra-wide high-frequency response ion source regulation and control method
CN113597078A (en) * 2021-08-24 2021-11-02 上海交通大学 Multi-channel capacitive coupling type plasma jet device and working method
CN113597078B (en) * 2021-08-24 2022-06-28 上海交通大学 Multi-channel capacitive coupling type plasma jet device and working method
CN114434256A (en) * 2022-01-25 2022-05-06 中国科学院上海光学精密机械研究所 Machining method for removing intermediate frequency error by using sparse double-step path based on jet polishing
CN114434256B (en) * 2022-01-25 2023-11-03 中国科学院上海光学精密机械研究所 Machining method for removing intermediate frequency error by using sparse double-step path based on jet polishing
CN115971985A (en) * 2023-03-21 2023-04-18 中国科学院长春光学精密机械与物理研究所 Method and device for inhibiting influence of systematic track error on surface shape residual error
CN116679622A (en) * 2023-08-03 2023-09-01 中国科学院长春光学精密机械与物理研究所 Surface shape tool mark error prediction method based on continuous tool function
CN116679622B (en) * 2023-08-03 2023-10-03 中国科学院长春光学精密机械与物理研究所 Surface shape tool mark error prediction method based on continuous tool function
CN117473802A (en) * 2023-12-28 2024-01-30 中国科学院长春光学精密机械与物理研究所 Method for rapidly solving polishing residence time of large-caliber optical element
CN117473802B (en) * 2023-12-28 2024-03-19 中国科学院长春光学精密机械与物理研究所 Method for rapidly solving polishing residence time of large-caliber optical element

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