CN102837367A - Control method of surface waviness of large-size optical element processed through single point diamond milling method - Google Patents
Control method of surface waviness of large-size optical element processed through single point diamond milling method Download PDFInfo
- Publication number
- CN102837367A CN102837367A CN2012103614167A CN201210361416A CN102837367A CN 102837367 A CN102837367 A CN 102837367A CN 2012103614167 A CN2012103614167 A CN 2012103614167A CN 201210361416 A CN201210361416 A CN 201210361416A CN 102837367 A CN102837367 A CN 102837367A
- Authority
- CN
- China
- Prior art keywords
- psd1
- crossbeam
- optical elements
- sized optical
- wedge shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 44
- 230000003287 optical effect Effects 0.000 title claims abstract description 42
- 229910003460 diamond Inorganic materials 0.000 title abstract 3
- 239000010432 diamond Substances 0.000 title abstract 3
- 238000003801 milling Methods 0.000 title abstract 3
- 101001080825 Homo sapiens PH and SEC7 domain-containing protein 1 Proteins 0.000 claims abstract description 40
- 102100027472 PH and SEC7 domain-containing protein 1 Human genes 0.000 claims abstract description 40
- 238000003754 machining Methods 0.000 claims abstract description 39
- 238000007516 diamond turning Methods 0.000 claims abstract description 19
- 238000012545 processing Methods 0.000 claims abstract description 11
- 230000004927 fusion Effects 0.000 claims description 7
- 230000000737 periodic effect Effects 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 5
- 238000011156 evaluation Methods 0.000 abstract description 4
- 239000013078 crystal Substances 0.000 description 6
- 235000019796 monopotassium phosphate Nutrition 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 230000006378 damage Effects 0.000 description 3
- 239000002803 fossil fuel Substances 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000003916 acid precipitation Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910000402 monopotassium phosphate Inorganic materials 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- PJNZPQUBCPKICU-UHFFFAOYSA-N phosphoric acid;potassium Chemical compound [K].OP(O)(O)=O PJNZPQUBCPKICU-UHFFFAOYSA-N 0.000 description 1
- 230000004083 survival effect Effects 0.000 description 1
Images
Landscapes
- Machine Tool Sensing Apparatuses (AREA)
Abstract
The invention discloses a control method of surface waviness of a large-size optical element processed through a single point diamond milling method and belongs to the field of ultraprecision machining of a large-size brittle optical element. The invention aims to solve the problem that the existing SPDT (single point diamond turning) method cannot guarantee waviness errors and frequency domain evaluation index PSD1 when a large-size optical element is processed. The control method disclosed by the invention comprises the following steps: 1. carrying out rough machining; 2. acquiring a space cycle T of longitudinal strips; 3. judging rigidity of the processing lathe, executing the step 4 if the rigidity is too low and executing the step 5 if the rigidity is too high; 4. increasing average pressure between a beam and a leveling pad body and then executing step 6; 5. reducing average pressure between the beam and the leveling pad body or contact rigidity, and then executing step 6; 6. carrying out secondary ultraprecision machining; 7. detecting the PSD1 value again; 8. judging whether the fact that PSD1 is less than or equal to 15nm<2>.mm is right or false; returning to the step 2 if the fact is false; and if the fact is right, completing the control of the waviness errors and the frequency domain index PSD1 of the large-size optical element U processed through the single point diamond milling method.
Description
Technical field
The present invention relates to the surface waviness control method of single-point diamond turning method machining large-sized optical elements, belong to large scale fragility optical element ultraprecise manufacture field.
Background technology
The progress that human civilization is historical, the energy is performed meritorious deeds never to be obliterated.To coal, the application of " fossil fuels " such as oil, natural gases is advanced human social economy's construction, big step of life civilization from the bavin firewood.But, human to depositing the dependence of " fossil fuel " that form in 1 years, when impelling social high speed development, caused energy crisis hard to carry on." fossil fuel " burning is exactly the arch-criminal that atmosphere pollution, acid rain, greenhouse effects etc. destroy ecology and contaminated environment, and seeking new forms of energy has been the task of top priority of survival and development of mankind.Fusion energy resource cleaning, pollution-free and almost inexhaustible, utilizing the laser controlling nuclear fusion to obtain the energy is the desirable approach that does not solve energy problem, each developed country all pays close attention to it at present.The laser that laser driver is exported requires to have good beam quality, sufficiently high laser energy and power density; Need be used a large amount of electric light, nonlinear optical material element for satisfying this requirement, like KDP (potassium dihydrogen phosphate) crystal, neodymium glass, K9 glass, quartz glass etc.Laser constraint nuclear fusion device is high accuracy face shape, super-smooth surface to the common requirement of these elements; Large scale and big batch; Wherein, to the not only demanding surface figure accuracy face of KDP crystal and to surface waviness and frequency-domain index very harsh requirement is arranged also.Surface waviness and the defective meeting of frequency-domain index PSD1 cause the self-focusing of light beam, and the material property of damage KDP crystal threatens whole system safety.Because the KDP crystal is soft crisp material, and is the typical nonlinear crystal, generally adopts the method for big cutterhead fly cutter single-point diamond turning (SPDT) that this material is processed at present both at home and abroad.Right face; Because main-shaft axis is vertical all the time with workpiece, main shaft is reflected in the cycle movement of vertical direction on the surface of workpiece and has just formed periodic longitudinal stripe, if this striped drops on the evaluation interval (2.5mm-33mm) of PSD1; Very easily cause the defective of PSD1 evaluation index; Cause the damage of KDP crystal, even the collapsibility of whole system destruction, be the mismachining tolerance that must control.
Summary of the invention
The present invention seeks to provides a kind of surface waviness control method of single-point diamond turning method machining large-sized optical elements in order to solve the existing SPDT method problem that waviness error, frequency domain evaluation index PSD1 are difficult to guarantee when the machining large-sized optical elements.
The surface waviness control method of single-point diamond turning method machining large-sized optical elements according to the invention; This method is based on the machining tool realization; Said machining tool comprises support, crossbeam, attachment bolt, main shaft, two columns and three leveling pads, and two leveling pads are set between left side column and the crossbeam, and a leveling pad is set between right side column and the crossbeam; Each leveling pad has three wedge shape spherical support bodies; The upper surface of said three wedge shape spherical support bodies contacts with the lower surface of crossbeam, fixes through attachment bolt between leveling pad and the crossbeam, and this method may further comprise the steps:
Step 1: utilize machining tool that large-sized optical elements U is carried out the roughing first time;
Step 2: utilize the vertical stripe number and the PSD1 value of the large-sized optical elements after the interferometer detection is processed, obtain the space periodic T of longitudinal stripe according to the vertical stripe number of large-sized optical elements;
Step 3: space periodic T and PSD1 value through longitudinal stripe judge that the rigidity of machining tool is too high or low excessively, decision adjustment direction,
As T>=33mm, and PSD1＞15nm
2During mm, show that the rigidity of machining tool is low excessively, execution in step four;
As T＜33mm, and PSD1＞15nm
2During mm, show that the rigidity of machining tool is too high, execution in step five;
As PSD1≤15nm
2During mm, satisfy the frequency-domain index processing request, show that the rigidity that adds lathe is normal, accomplish the waviness error of single-point diamond turning method machining large-sized optical elements U and the control of frequency-domain index PSD1;
Step 4: the average pressure between three wedge shape spherical support bodies of increase crossbeam and leveling pad, execution in step six then;
Step 5: reduce average pressure or contact stiffness between three wedge shape spherical support bodies of crossbeam and leveling pad, execution in step six then;
Step 6: large-sized optical elements U is carried out the processing of secondary ultraprecise,
Step 7: utilize interferometer to detect the PSD1 value of said large-sized optical elements U again again,
Step 8: determining step seven detects the PSD1 that obtains and whether satisfies fusion system requirements PSD1≤15nm
2Mm;
If do not satisfy, return step 2, adjust processing once more;
If satisfy, accomplish the waviness error of single-point diamond turning method machining large-sized optical elements U and the control of frequency-domain index PSD1.
Advantage of the present invention: the present invention can realize the accurate Detection & Controling of single-point diamond turning optical element percent ripple; The present invention is through the contact stiffness between adjustment supporter and the crossbeam; Reach purpose through the intrinsic frequency that changes lathe, be used the waviness error and the frequency-domain index PSD1 that have realized processed large-sized optical elements with interferometer and be controlled in the scope of fusion system requirements workpiece percent ripple (longitudinal stripe) control; Method of the present invention has realized the control of waviness error, and this control principle is simple, handling safety, and reliable results, significant to the ICF engineering.
Description of drawings
Fig. 1 is the flow chart of the surface waviness control method of single-point diamond turning method machining large-sized optical elements according to the invention;
Fig. 2 is the structural representation of the existing machining tool of the inventive method utilization;
Fig. 3 is the sketch map of detected large-sized optical elements longitudinal stripe among the present invention.
The specific embodiment
The specific embodiment one: this embodiment is described below in conjunction with Fig. 1 to Fig. 3; The surface waviness control method of the said single-point diamond turning method machining large-sized optical elements of this embodiment; This method is based on the machining tool realization; Said machining tool comprises support 1, crossbeam 2, attachment bolt 3, main shaft 4, two columns 5 and three leveling pads 6, and two leveling pads are set between left side column 5 and the crossbeam 2, and a leveling pad 6 is set between right side column 5 and the crossbeam 2; Each leveling pad 6 has three wedge shape spherical support bodies; The upper surface of said three wedge shape spherical support bodies contacts with the lower surface of crossbeam 2, and fixing through attachment bolt 3 between leveling pad 6 and the crossbeam 2, this method may further comprise the steps:
Step 1: utilize machining tool that large-sized optical elements U is carried out the roughing first time;
Step 2: utilize the vertical stripe number and the PSD1 value of the large-sized optical elements after the interferometer detection is processed, obtain the space periodic T of longitudinal stripe according to the vertical stripe number of large-sized optical elements;
Step 3: space periodic T and PSD1 value through longitudinal stripe judge that the rigidity of machining tool is too high or low excessively, decision adjustment direction,
As T>=33mm, and PSD1＞15nm
2During mm, show that the rigidity of machining tool is low excessively, execution in step four;
As T＜33mm, and PSD1＞15nm
2During mm, show that the rigidity of machining tool is too high, execution in step five;
As PSD1≤15nm
2During mm, satisfy the frequency-domain index processing request, show that the rigidity that adds lathe is normal, accomplish the waviness error of single-point diamond turning method machining large-sized optical elements U and the control of frequency-domain index PSD1;
Step 4: the average pressure between three wedge shape spherical support bodies of increase crossbeam 2 and leveling pad 6, execution in step six then;
Step 5: reduce average pressure or contact stiffness between three wedge shape spherical support bodies of crossbeam 2 and leveling pad 6, execution in step six then;
Step 6: large-sized optical elements U is carried out the processing of secondary ultraprecise,
Step 7: utilize interferometer to detect the PSD1 value of said large-sized optical elements U again again,
Step 8: determining step seven detects the PSD1 that obtains and whether satisfies fusion system requirements PSD1≤15nm
2Mm;
If do not satisfy, return step 2, adjust processing once more;
If satisfy, accomplish the waviness error of single-point diamond turning method machining large-sized optical elements U and the control of frequency-domain index PSD1.
In this embodiment; Being used for the interferometer of measuring element longitudinal stripe and frequency-domain index PSD1 is the laser digital interferometer that U.S. Veeco company produces; It utilizes interference technique detection plane, sphere face shape real-time; Opticator adopts non-rope principle of interference, and digital processing partly adopts a phase method and two kinds of methods of the Schlieren method to carry out the interference pattern interpretation, and repeatable accuracy can reach 1/100 wavelength peak-to-valley value.
In this embodiment, the Veeco interferometer that is adopted is very responsive to vibrations, need take relevant isolation measure during actual measurement.
In this embodiment the pad that just adopts require flatness good, can adopt to grind to obtain.
The specific embodiment two: this embodiment is described further embodiment one; Increase the average pressure between three wedge shape spherical support bodies of crossbeam 2 and leveling pad 6 through the pretightning force that increases attachment bolt 3 in the step 4, the pretightning force of each increase is 30 newton～50 newton.
The specific embodiment three: this embodiment is described further embodiment one or two; Reduce the average pressure between three wedge shape spherical support bodies of crossbeam 2 and leveling pad 6 through the pretightning force that reduces attachment bolt 3 in the step 5, the pretightning force that at every turn reduces is 30 newton～50 newton.
The specific embodiment four: this embodiment is described further embodiment one or two; Reduce the contact area between the two through on the contact-making surface between three wedge shape spherical support bodies of crossbeam 2 and leveling pad 6, placing small-sized pad in the step 5; And then the contact stiffness between three wedge shape spherical support bodies of minimizing crossbeam 2 and leveling pad 6; Increase by 1～2 small-sized pad between each each wedge shape spherical support body and the crossbeam 2, the thickness of each small-sized pad is 0.1cm～0.5cm.
Claims (4)
1. the surface waviness control method of single-point diamond turning method machining large-sized optical elements; This method is based on the machining tool realization; Said machining tool comprises support (1), crossbeam (2), attachment bolt (3), main shaft (4), two columns (5) and three leveling pads (6); Between left side column (5) and the crossbeam (2) two leveling pads are set, between right side column (5) and the crossbeam (2) a leveling pad (6) are set, each leveling pad (6) has three wedge shape spherical support bodies; The upper surface of said three wedge shape spherical support bodies contacts with the lower surface of crossbeam (2); Fixing between leveling pad (6) and the crossbeam (2) through attachment bolt (3), it is characterized in that this method may further comprise the steps:
Step 1: utilize machining tool that large-sized optical elements (U) is carried out the roughing first time;
Step 2: utilize the vertical stripe number and the PSD1 value of the large-sized optical elements after the interferometer detection is processed, obtain the space periodic T of longitudinal stripe according to the vertical stripe number of large-sized optical elements;
Step 3: space periodic T and PSD1 value through longitudinal stripe judge that the rigidity of machining tool is too high or low excessively, decision adjustment direction,
As T>=33mm, and PSD1＞15nm
2During mm, show that the rigidity of machining tool is low excessively, execution in step four;
As T＜33mm, and PSD1＞15nm
2During mm, show that the rigidity of machining tool is too high, execution in step five;
As PSD1≤15nm
2During mm, satisfy the frequency-domain index processing request, show that the rigidity that adds lathe is normal, accomplish the waviness error of single-point diamond turning method machining large-sized optical elements (U) and the control of frequency-domain index PSD1;
Step 4: the average pressure between three wedge shape spherical support bodies of increase crossbeam (2) and leveling pad (6), execution in step six then;
Step 5: reduce average pressure or contact stiffness between three wedge shape spherical support bodies of crossbeam (2) and leveling pad (6), execution in step six then;
Step 6: large-sized optical elements (U) is carried out the processing of secondary ultraprecise,
Step 7: utilize interferometer to detect the PSD1 value of said large-sized optical elements (U) again again,
Step 8: determining step seven detects the PSD1 that obtains and whether satisfies fusion system requirements PSD1≤15nm
2Mm;
If do not satisfy, return step 2, adjust processing once more;
If satisfy, accomplish the waviness error of single-point diamond turning method machining large-sized optical elements (U) and the control of frequency-domain index PSD1.
2. according to the surface waviness control method of the said single-point diamond turning method machining large-sized optical elements of claim 1; It is characterized in that; Increase the average pressure between three wedge shape spherical support bodies of crossbeam (2) and leveling pad (6) through the pretightning force that increases attachment bolt (3) in the step 4, the pretightning force of each increase is 30 newton～50 newton.
3. according to the surface waviness control method of the said single-point diamond turning method machining large-sized optical elements of claim 1; It is characterized in that; Reduce the average pressure between three wedge shape spherical support bodies of crossbeam (2) and leveling pad (6) through the pretightning force that reduces attachment bolt (3) in the step 5, the pretightning force that at every turn reduces is 30 newton～50 newton.
4. according to the surface waviness control method of the said single-point diamond turning method machining large-sized optical elements of claim 1; It is characterized in that; Reduce the contact area between the two through on the contact-making surface between three wedge shape spherical support bodies of crossbeam (2) and leveling pad (6), placing small-sized pad in the step 5; And then the contact stiffness between three wedge shape spherical support bodies of minimizing crossbeam (2) and leveling pad (6); Increase by 1～2 small-sized pad between each each wedge shape spherical support body and the crossbeam (2), the thickness of each small-sized pad is 0.1cm～0.5cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210361416.7A CN102837367B (en) | 2012-09-25 | 2012-09-25 | Control method of surface waviness of large-size optical element processed through single point diamond milling method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210361416.7A CN102837367B (en) | 2012-09-25 | 2012-09-25 | Control method of surface waviness of large-size optical element processed through single point diamond milling method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102837367A true CN102837367A (en) | 2012-12-26 |
| CN102837367B CN102837367B (en) | 2014-10-29 |
Family
ID=47365219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210361416.7A Active CN102837367B (en) | 2012-09-25 | 2012-09-25 | Control method of surface waviness of large-size optical element processed through single point diamond milling method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102837367B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106312490A (en) * | 2016-09-28 | 2017-01-11 | 中国工程物理研究院材料研究所 | Novel method for representing ultra-precision cutting surface grain-boundary relief |
| CN109014352A (en) * | 2018-05-25 | 2018-12-18 | 常州星宇车灯股份有限公司 | A kind of processing method of the micro- striped of lens and lens with micro- striped |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101870002A (en) * | 2010-07-08 | 2010-10-27 | 哈尔滨工业大学 | Flatness error control method for single-point diamond turning method machining large-sized optical elements |
| CN101876393A (en) * | 2010-06-09 | 2010-11-03 | 哈尔滨工业大学 | Ultraprecise platform leveling device |
| CN101887171A (en) * | 2010-07-09 | 2010-11-17 | 哈尔滨工业大学 | Evaluation method of influence of optical element surface waviness on laser damage threshold and method for obtaining element optimal processing parameters therefrom |
-
2012
- 2012-09-25 CN CN201210361416.7A patent/CN102837367B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101876393A (en) * | 2010-06-09 | 2010-11-03 | 哈尔滨工业大学 | Ultraprecise platform leveling device |
| CN101870002A (en) * | 2010-07-08 | 2010-10-27 | 哈尔滨工业大学 | Flatness error control method for single-point diamond turning method machining large-sized optical elements |
| CN101887171A (en) * | 2010-07-09 | 2010-11-17 | 哈尔滨工业大学 | Evaluation method of influence of optical element surface waviness on laser damage threshold and method for obtaining element optimal processing parameters therefrom |
Non-Patent Citations (2)
| Title |
|---|
| 姜伟: "KDP晶体微纳表面小尺度波纹对其激光损伤阈值的影响", 《信息科技辑》 * |
| 赵自强等: "KDP晶体超精密加工机床静压主轴轴向变形分析", 《航空精密制造技术》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106312490A (en) * | 2016-09-28 | 2017-01-11 | 中国工程物理研究院材料研究所 | Novel method for representing ultra-precision cutting surface grain-boundary relief |
| CN106312490B (en) * | 2016-09-28 | 2019-03-19 | 中国工程物理研究院材料研究所 | A kind of new method characterizing ultra precision cutting surface crystal boundary relief |
| CN109014352A (en) * | 2018-05-25 | 2018-12-18 | 常州星宇车灯股份有限公司 | A kind of processing method of the micro- striped of lens and lens with micro- striped |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102837367B (en) | 2014-10-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101870002B (en) | Flatness error control method for single-point diamond turning method machining large-sized optical elements | |
| CN102773503B (en) | Single point diamond lathe and method for machining special-shape workpiece | |
| CN101817209B (en) | Real-time deviation correcting method for precise cutting process of diamond wire saw | |
| CN101452972B (en) | Amorphous silicon thin-film solar cell laser etching system and etching method | |
| CN102554705B (en) | Compensation machining method for optical free-form surfaces | |
| CN203490199U (en) | Ultrasonic testing device | |
| CN203277409U (en) | Triangular solar cell | |
| TW201129442A (en) | In-line metrology methods and systems for solar cell fabrication | |
| CN102837367B (en) | Control method of surface waviness of large-size optical element processed through single point diamond milling method | |
| CN108038333B (en) | Prediction method for flexible machining surface error of large disc milling cutter plane milling | |
| CN202461808U (en) | Multi-light-path light-splitting device in laser scribing system of amorphous silicon thin-film solar cell | |
| Chen et al. | Multi-scale surface simulation of the KDP crystal fly cutting machining | |
| CN102744424A (en) | Single-point diamond compensation cutting processing method for thin plate optical parts | |
| Chen et al. | A novel machine tool design approach based on surface generation simulation and its implementation on a fly cutting machine tool | |
| CN102128714B (en) | Device and method for detecting focusing efficiency of optical lens | |
| CN205049270U (en) | Glass stress measuring device is with tool of breathing in | |
| CN202963469U (en) | SPDT (simple point diamond turning) | |
| CN206066091U (en) | The control device of optical element grinding face shape error and parallelism error | |
| Gong et al. | Analysis of the impact resistance of photovoltaic panels based on the effective thickness method | |
| Allsop et al. | Optimising efficiency in diamond turned Fresnel mould masters | |
| CN105571435A (en) | On-line detection method of position degrees of pin holes of planet carrier | |
| CN203896289U (en) | Concentrating solar power generation light-guide gathering funnel | |
| CN203621727U (en) | High-power semiconductor laser unit focus indicator for laser machining | |
| CN203163688U (en) | Irregular component geometric data detecting device based on one laser scanner | |
| CN202045575U (en) | Control device for precision of V-shaped mountain guide rail of NC (numerical control) heavy type roll grinder |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240802 Address after: Room 1107, 11 / F, National University Science Park, Harbin Institute of technology, No. 434, youyou street, Nangang District, Harbin City, Heilongjiang Province Patentee after: Harbin Institute of Technology Asset Management Co.,Ltd. Country or region after: China Patentee after: Liu Haitao Address before: 150001 No. 92 West straight street, Nangang District, Heilongjiang, Harbin Patentee before: HARBIN INSTITUTE OF TECHNOLOGY Country or region before: China |