CN102789126A - 光掩模及其制造方法 - Google Patents
光掩模及其制造方法 Download PDFInfo
- Publication number
- CN102789126A CN102789126A CN2012100538890A CN201210053889A CN102789126A CN 102789126 A CN102789126 A CN 102789126A CN 2012100538890 A CN2012100538890 A CN 2012100538890A CN 201210053889 A CN201210053889 A CN 201210053889A CN 102789126 A CN102789126 A CN 102789126A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- photomask
- certification mark
- describe
- transfer printing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
- G03F1/42—Alignment or registration features, e.g. alignment marks on the mask substrates
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
- G03F1/44—Testing or measuring features, e.g. grid patterns, focus monitors, sawtooth scales or notched scales
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/72—Repair or correction of mask defects
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
- G03F1/84—Inspecting
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
Abstract
Description
Claims (20)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP045150/2011 | 2011-03-02 | ||
JP2011045150A JP5306391B2 (ja) | 2011-03-02 | 2011-03-02 | フォトマスク |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102789126A true CN102789126A (zh) | 2012-11-21 |
CN102789126B CN102789126B (zh) | 2016-04-13 |
Family
ID=46753538
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210053889.0A Active CN102789126B (zh) | 2011-03-02 | 2012-03-02 | 光掩模及其制造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8778570B2 (zh) |
JP (1) | JP5306391B2 (zh) |
KR (1) | KR101376425B1 (zh) |
CN (1) | CN102789126B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110344003A (zh) * | 2014-06-06 | 2019-10-18 | 大日本印刷株式会社 | 蒸镀掩模及其前体、以及有机半导体元件的制造方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20140205702A1 (en) * | 2013-01-24 | 2014-07-24 | Kabushiki Kaisha Toshiba | Template, manufacturing method of the template, and position measuring method in the template |
US20140209567A1 (en) * | 2013-01-29 | 2014-07-31 | Kabushiki Kaisha Toshiba | Template, manufacturing method of the template, and strain measuring method in the template |
JP2016035542A (ja) | 2014-08-04 | 2016-03-17 | 株式会社ニューフレアテクノロジー | 位置測定方法、位置ずれマップの作成方法および検査システム |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW550441B (en) * | 2000-11-16 | 2003-09-01 | Nec Electronics Corp | Method for rescuing Levenson phase shift mask from abnormal difference in transmittance and phase difference between phase shifter and non-phase shifter |
TWI228642B (en) * | 2001-10-09 | 2005-03-01 | Asml Masktools Inc | Method of two dimensional feature model calibration and optimization |
US20090075178A1 (en) * | 2007-09-14 | 2009-03-19 | Qimonda Ag | Mask with Registration Marks and Method of Fabricating Integrated Circuits |
CN101661220A (zh) * | 2008-08-27 | 2010-03-03 | 北京京东方光电科技有限公司 | 液晶显示器面板和掩模板 |
CN101685254A (zh) * | 2008-09-28 | 2010-03-31 | Hoya株式会社 | 光掩模制造方法以及光掩模 |
CN101833236A (zh) * | 2005-03-22 | 2010-09-15 | Hoya株式会社 | 灰色调掩模 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05142745A (ja) | 1991-01-07 | 1993-06-11 | Hitachi Ltd | 位相シフトマスク及びマスクの製造方法 |
JPH06124868A (ja) * | 1992-10-12 | 1994-05-06 | Matsushita Electron Corp | 半導体装置の製造方法 |
JP3409924B2 (ja) * | 1994-07-25 | 2003-05-26 | 株式会社日立製作所 | フォトマスクおよびその製造方法ならびにそれを用いた半導体集積回路装置の製造方法 |
JP2001201844A (ja) * | 2000-01-21 | 2001-07-27 | Hitachi Ltd | 半導体集積回路装置の製造方法およびフォトマスクの製造方法 |
JP2006047564A (ja) | 2004-08-03 | 2006-02-16 | Matsushita Electric Ind Co Ltd | フォトマスク及びその製造方法 |
JP5136745B2 (ja) | 2006-12-13 | 2013-02-06 | 大日本印刷株式会社 | 多重露光技術におけるマスク製造誤差検証方法 |
JP4858146B2 (ja) * | 2006-12-14 | 2012-01-18 | 大日本印刷株式会社 | フォトマスクおよび転写方法 |
JP2009231564A (ja) | 2008-03-24 | 2009-10-08 | Toshiba Corp | スキャン露光装置の補正方法 |
-
2011
- 2011-03-02 JP JP2011045150A patent/JP5306391B2/ja active Active
-
2012
- 2012-03-01 US US13/409,638 patent/US8778570B2/en active Active
- 2012-03-02 CN CN201210053889.0A patent/CN102789126B/zh active Active
- 2012-03-02 KR KR1020120021914A patent/KR101376425B1/ko active IP Right Grant
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW550441B (en) * | 2000-11-16 | 2003-09-01 | Nec Electronics Corp | Method for rescuing Levenson phase shift mask from abnormal difference in transmittance and phase difference between phase shifter and non-phase shifter |
TWI228642B (en) * | 2001-10-09 | 2005-03-01 | Asml Masktools Inc | Method of two dimensional feature model calibration and optimization |
CN101833236A (zh) * | 2005-03-22 | 2010-09-15 | Hoya株式会社 | 灰色调掩模 |
US20090075178A1 (en) * | 2007-09-14 | 2009-03-19 | Qimonda Ag | Mask with Registration Marks and Method of Fabricating Integrated Circuits |
CN101661220A (zh) * | 2008-08-27 | 2010-03-03 | 北京京东方光电科技有限公司 | 液晶显示器面板和掩模板 |
CN101685254A (zh) * | 2008-09-28 | 2010-03-31 | Hoya株式会社 | 光掩模制造方法以及光掩模 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110344003A (zh) * | 2014-06-06 | 2019-10-18 | 大日本印刷株式会社 | 蒸镀掩模及其前体、以及有机半导体元件的制造方法 |
CN110344003B (zh) * | 2014-06-06 | 2022-03-15 | 大日本印刷株式会社 | 蒸镀掩模及其前体、以及有机半导体元件的制造方法 |
Also Published As
Publication number | Publication date |
---|---|
US20120225374A1 (en) | 2012-09-06 |
US8778570B2 (en) | 2014-07-15 |
CN102789126B (zh) | 2016-04-13 |
JP5306391B2 (ja) | 2013-10-02 |
KR101376425B1 (ko) | 2014-03-20 |
KR20120100814A (ko) | 2012-09-12 |
JP2012181426A (ja) | 2012-09-20 |
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C06 | Publication | ||
PB01 | Publication | ||
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170731 Address after: Tokyo, Japan Patentee after: TOSHIBA MEMORY Corp. Address before: Tokyo, Japan Patentee before: Toshiba Corp. |
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CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: Tokyo, Japan Patentee after: TOSHIBA MEMORY Corp. Address before: Tokyo, Japan Patentee before: Japanese businessman Panjaya Co.,Ltd. Address after: Tokyo, Japan Patentee after: Kaixia Co.,Ltd. Address before: Tokyo, Japan Patentee before: TOSHIBA MEMORY Corp. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20211230 Address after: Tokyo, Japan Patentee after: Japanese businessman Panjaya Co.,Ltd. Address before: Tokyo Patentee before: TOSHIBA MEMORY Corp. |