CN102759533A - 晶圆检测方法以及晶圆检测装置 - Google Patents
晶圆检测方法以及晶圆检测装置 Download PDFInfo
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- CN102759533A CN102759533A CN2011101069890A CN201110106989A CN102759533A CN 102759533 A CN102759533 A CN 102759533A CN 2011101069890 A CN2011101069890 A CN 2011101069890A CN 201110106989 A CN201110106989 A CN 201110106989A CN 102759533 A CN102759533 A CN 102759533A
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- 238000000034 method Methods 0.000 title abstract description 12
- 239000002245 particle Substances 0.000 claims abstract description 125
- 238000012545 processing Methods 0.000 claims abstract description 33
- 238000001514 detection method Methods 0.000 claims description 69
- 239000000463 material Substances 0.000 claims description 12
- 230000002045 lasting effect Effects 0.000 claims description 7
- 239000011236 particulate material Substances 0.000 claims description 3
- 238000012360 testing method Methods 0.000 claims description 3
- 230000011514 reflex Effects 0.000 claims 1
- 238000013461 design Methods 0.000 abstract description 9
- 235000012431 wafers Nutrition 0.000 description 110
- 230000003287 optical effect Effects 0.000 description 19
- 239000013078 crystal Substances 0.000 description 17
- 238000010586 diagram Methods 0.000 description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 230000033001 locomotion Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- -1 organism Chemical compound 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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CN201110106989.0A CN102759533B (zh) | 2011-04-27 | 2011-04-27 | 晶圆检测方法以及晶圆检测装置 |
PCT/CN2011/076624 WO2012145966A1 (zh) | 2011-04-27 | 2011-06-30 | 晶圆检测方法以及晶圆检测装置 |
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CN201110106989.0A CN102759533B (zh) | 2011-04-27 | 2011-04-27 | 晶圆检测方法以及晶圆检测装置 |
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Publication Number | Publication Date |
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CN102759533A true CN102759533A (zh) | 2012-10-31 |
CN102759533B CN102759533B (zh) | 2015-03-04 |
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CN201110106989.0A Active CN102759533B (zh) | 2011-04-27 | 2011-04-27 | 晶圆检测方法以及晶圆检测装置 |
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CN (1) | CN102759533B (zh) |
WO (1) | WO2012145966A1 (zh) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106226324A (zh) * | 2016-08-30 | 2016-12-14 | 中国科学院嘉兴微电子仪器与设备工程中心 | 一种基于fpga的晶圆检测信号提取装置及系统 |
CN106248688A (zh) * | 2016-08-30 | 2016-12-21 | 中国科学院嘉兴微电子仪器与设备工程中心 | 一种基于fpga的晶圆检测信号提取方法 |
CN106323916A (zh) * | 2016-08-18 | 2017-01-11 | 中国科学院嘉兴微电子仪器与设备工程中心 | 一种晶圆扫描检测定位方法 |
CN106403851A (zh) * | 2016-08-31 | 2017-02-15 | 上海华力微电子有限公司 | 一种检测光刻工艺曝光前晶圆背面水平度的方法及装置 |
CN107923739A (zh) * | 2015-08-25 | 2018-04-17 | 布鲁德曼技术有限公司 | 用于无接触地评价晶圆的表面特性的方法和装置 |
CN108345104A (zh) * | 2017-01-23 | 2018-07-31 | 应用材料以色列公司 | 非对称放大检查系统和照射模块 |
CN109473370A (zh) * | 2018-11-16 | 2019-03-15 | 上海华力微电子有限公司 | 一种晶圆表面颗粒的脱机检测方法 |
WO2020007370A1 (zh) * | 2018-07-06 | 2020-01-09 | 深圳中科飞测科技有限公司 | 一种检测设备及方法 |
CN110849900A (zh) * | 2018-08-21 | 2020-02-28 | 深圳中科飞测科技有限公司 | 晶圆缺陷检测系统及方法 |
CN111276411A (zh) * | 2018-12-04 | 2020-06-12 | 台湾积体电路制造股份有限公司 | 辨识晶圆颗粒的方法、电子装置及计算机可读取记录媒体 |
TWI713575B (zh) * | 2015-08-31 | 2020-12-21 | 美商克萊譚克公司 | 使用影像之以模型為基礎之度量 |
CN112540082A (zh) * | 2019-09-20 | 2021-03-23 | 深圳中科飞测科技股份有限公司 | 检测系统及检测方法 |
CN113048921A (zh) * | 2021-03-24 | 2021-06-29 | 长江存储科技有限责任公司 | 一种晶圆表面粗糙度的测量方法和测量系统 |
CN113109349A (zh) * | 2021-03-23 | 2021-07-13 | 深圳中科飞测科技股份有限公司 | 检测方法、系统、设备及计算机可读存储介质 |
CN115372375A (zh) * | 2022-10-24 | 2022-11-22 | 苏州天准科技股份有限公司 | 晶圆检测装置及检测方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110990754B (zh) * | 2019-11-25 | 2024-03-22 | 武汉科技大学 | 一种基于光散射的晶圆表面颗粒缺陷的散射场计算方法 |
Citations (5)
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---|---|---|---|---|
US6122047A (en) * | 1999-01-14 | 2000-09-19 | Ade Optical Systems Corporation | Methods and apparatus for identifying the material of a particle occurring on the surface of a substrate |
US20030025905A1 (en) * | 2001-03-26 | 2003-02-06 | Meeks Steven W. | Method of detecting and classifying scratches, particles and pits on thin film disks or wafers |
US20080015810A1 (en) * | 2006-07-12 | 2008-01-17 | Hitachi High-Technologies Corporation | Surface inspection method and surface inspection apparatus |
US20080013084A1 (en) * | 2006-07-13 | 2008-01-17 | Hitachi High-Technologies Corporation | Surface Inspection Method and Surface Inspection Apparatus |
CN101655463A (zh) * | 2008-08-20 | 2010-02-24 | Asml控股股份有限公司 | 物体表面上的颗粒检测 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7271921B2 (en) * | 2003-07-23 | 2007-09-18 | Kla-Tencor Technologies Corporation | Method and apparatus for determining surface layer thickness using continuous multi-wavelength surface scanning |
JP4908925B2 (ja) * | 2006-02-08 | 2012-04-04 | 株式会社日立ハイテクノロジーズ | ウェハ表面欠陥検査装置およびその方法 |
US7463349B1 (en) * | 2006-06-02 | 2008-12-09 | Kla-Tencor Technologies Corp. | Systems and methods for determining a characteristic of a specimen |
JP4931502B2 (ja) * | 2006-07-13 | 2012-05-16 | 株式会社日立ハイテクノロジーズ | 表面検査方法及び検査装置 |
-
2011
- 2011-04-27 CN CN201110106989.0A patent/CN102759533B/zh active Active
- 2011-06-30 WO PCT/CN2011/076624 patent/WO2012145966A1/zh active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6122047A (en) * | 1999-01-14 | 2000-09-19 | Ade Optical Systems Corporation | Methods and apparatus for identifying the material of a particle occurring on the surface of a substrate |
US20030025905A1 (en) * | 2001-03-26 | 2003-02-06 | Meeks Steven W. | Method of detecting and classifying scratches, particles and pits on thin film disks or wafers |
US20080015810A1 (en) * | 2006-07-12 | 2008-01-17 | Hitachi High-Technologies Corporation | Surface inspection method and surface inspection apparatus |
US20080013084A1 (en) * | 2006-07-13 | 2008-01-17 | Hitachi High-Technologies Corporation | Surface Inspection Method and Surface Inspection Apparatus |
CN101655463A (zh) * | 2008-08-20 | 2010-02-24 | Asml控股股份有限公司 | 物体表面上的颗粒检测 |
Cited By (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107923739A (zh) * | 2015-08-25 | 2018-04-17 | 布鲁德曼技术有限公司 | 用于无接触地评价晶圆的表面特性的方法和装置 |
CN107923739B (zh) * | 2015-08-25 | 2021-02-23 | 布鲁德曼技术有限公司 | 用于无接触地评价晶圆的表面特性的方法和装置 |
TWI713575B (zh) * | 2015-08-31 | 2020-12-21 | 美商克萊譚克公司 | 使用影像之以模型為基礎之度量 |
US11200658B2 (en) | 2015-08-31 | 2021-12-14 | Kla-Tencor Corporation | Model-based metrology using images |
CN106323916A (zh) * | 2016-08-18 | 2017-01-11 | 中国科学院嘉兴微电子仪器与设备工程中心 | 一种晶圆扫描检测定位方法 |
CN106248688A (zh) * | 2016-08-30 | 2016-12-21 | 中国科学院嘉兴微电子仪器与设备工程中心 | 一种基于fpga的晶圆检测信号提取方法 |
CN106248688B (zh) * | 2016-08-30 | 2019-04-16 | 中国科学院嘉兴微电子仪器与设备工程中心 | 一种基于fpga的晶圆检测信号提取方法 |
CN106226324B (zh) * | 2016-08-30 | 2019-04-16 | 中国科学院嘉兴微电子仪器与设备工程中心 | 一种基于fpga的晶圆检测信号提取装置及系统 |
CN106226324A (zh) * | 2016-08-30 | 2016-12-14 | 中国科学院嘉兴微电子仪器与设备工程中心 | 一种基于fpga的晶圆检测信号提取装置及系统 |
CN106403851A (zh) * | 2016-08-31 | 2017-02-15 | 上海华力微电子有限公司 | 一种检测光刻工艺曝光前晶圆背面水平度的方法及装置 |
CN108345104A (zh) * | 2017-01-23 | 2018-07-31 | 应用材料以色列公司 | 非对称放大检查系统和照射模块 |
CN108345104B (zh) * | 2017-01-23 | 2022-08-05 | 应用材料以色列公司 | 非对称放大检查系统和照射模块 |
US11940377B2 (en) | 2018-07-06 | 2024-03-26 | Skyverse Technology Co., Ltd. | Device and method for detecting a surface defect using interference between polarized lights |
WO2020007370A1 (zh) * | 2018-07-06 | 2020-01-09 | 深圳中科飞测科技有限公司 | 一种检测设备及方法 |
CN110849900A (zh) * | 2018-08-21 | 2020-02-28 | 深圳中科飞测科技有限公司 | 晶圆缺陷检测系统及方法 |
CN109473370A (zh) * | 2018-11-16 | 2019-03-15 | 上海华力微电子有限公司 | 一种晶圆表面颗粒的脱机检测方法 |
CN111276411A (zh) * | 2018-12-04 | 2020-06-12 | 台湾积体电路制造股份有限公司 | 辨识晶圆颗粒的方法、电子装置及计算机可读取记录媒体 |
CN111276411B (zh) * | 2018-12-04 | 2024-01-26 | 台湾积体电路制造股份有限公司 | 辨识晶圆颗粒的方法、电子装置及计算机可读取记录媒体 |
CN112540082A (zh) * | 2019-09-20 | 2021-03-23 | 深圳中科飞测科技股份有限公司 | 检测系统及检测方法 |
CN113109349A (zh) * | 2021-03-23 | 2021-07-13 | 深圳中科飞测科技股份有限公司 | 检测方法、系统、设备及计算机可读存储介质 |
CN113109349B (zh) * | 2021-03-23 | 2023-12-26 | 深圳中科飞测科技股份有限公司 | 检测方法、系统、设备及计算机可读存储介质 |
CN113048921A (zh) * | 2021-03-24 | 2021-06-29 | 长江存储科技有限责任公司 | 一种晶圆表面粗糙度的测量方法和测量系统 |
CN115372375A (zh) * | 2022-10-24 | 2022-11-22 | 苏州天准科技股份有限公司 | 晶圆检测装置及检测方法 |
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Publication number | Publication date |
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CN102759533B (zh) | 2015-03-04 |
WO2012145966A1 (zh) | 2012-11-01 |
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Owner name: SHENZHEN ZHONGKE FEICE TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: INST OF MICROELECTRONICS, C. A. S Effective date: 20150326 |
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Effective date of registration: 20150326 Address after: 518040, No. 3, 8 floor, south of the Five Ridges building, 3085 Shannon Road, Xiangmi Lake street, Shenzhen, Guangdong, Futian District Patentee after: SKYVERSE Ltd. Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee before: Institute of Microelectronics of the Chinese Academy of Sciences |
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Address after: 518000 Guangdong city of Shenzhen province Longhua District, Dalang Street Wave Industrial Park Road No. 1 A District Office kohodo Plaza, room 1618 Patentee after: SKYVERSE Ltd. Address before: 518040, No. 3, 8 floor, south of the Five Ridges building, 3085 Shannon Road, Xiangmi Lake street, Shenzhen, Guangdong, Futian District Patentee before: SKYVERSE Ltd. |
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Address after: 518109 101, 201, 301, No.2, Shanghenglang fourth industrial zone, Tongsheng community, Dalang street, Longhua District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Zhongke feice Technology Co.,Ltd. Address before: Room 1618, area a, kaihaoda Plaza office, No.1, Dalang Industrial Park Road, Dalang street, Longhua District, Shenzhen, Guangdong 518000 Patentee before: SKYVERSE Ltd. |
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