CN102738312B - Field strength diffusion method of solar cell - Google Patents
Field strength diffusion method of solar cell Download PDFInfo
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- CN102738312B CN102738312B CN201210254322.XA CN201210254322A CN102738312B CN 102738312 B CN102738312 B CN 102738312B CN 201210254322 A CN201210254322 A CN 201210254322A CN 102738312 B CN102738312 B CN 102738312B
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- high temperature
- discharge
- graphite boat
- solar battery
- battery sheet
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention provides a field strength diffusion method of a solar cell and is characterized by comprising the following steps: placing the solar cell loaded on a dischargeable graphite boat in a high temperature diffusion furnace, wherein electrodes for high-frequency discharge are arranged in the high temperature diffusion furnace and the graphite boat is connected with the electrodes; increasing the temperature in the high temperature diffusion furnace to 850 DEG C; introducing phosphorane, oxygen and nitrogen in the high temperature diffusion furnace, wherein the flux of phosphorane is 0.5-1 L/min, the flux of oxygen is 0.5-1 L/min, the flux of nitrogen is 5-10 L/min, and the pressure in the high temperature diffusion furnace is automatically controlled to be 170 Pa; applying high frequency power source on the graphite boat through the electrodes so that the graphite boat discharge to the solar cell, wherein the discharge power of the high frequency power source is 3000W to 5000W, the discharge time is 120s, and the diffusion is finished when discharge is ended.
Description
Technical field
The present invention relates to the method for diffusion of solar battery sheet, particularly relate to the field strength diffusion method of shorter solar battery sheet a kind of diffusion time.
Background technology
The principle of solar cell power generation utilizes the photovoltaic effect of PN junction that transform light energy is become electric energy.Due to the core texture that PN junction is solar battery sheet, the structure of PN junction directly affects the performance of solar battery sheet, and the performance of diffusing step to solar battery sheet in the manufacture craft of therefore solar battery sheet plays a part key.The making of the PN junction of solar battery sheet has come mainly through diffusion technology.And no matter be at present semicon industry, LED industry or the diffusion technology of photovoltaic industry all adopts High temperature diffusion, reach several hours the diffusion time of every batch products, energy consumption is large, and the output of unit interval is little.Therefore, usually improve output by the production line configuring multiple making solar battery sheet in photovoltaic industry, invest huge.
In prior art, the cardinal principle of the high temperature diffusion process of solar battery sheet is: utilize phosphorus atoms in high temperature dispersing furnace, absorb heat energy and produce kinetic energy, in diffusion furnace, do rambling warm-up movement, thus in carrier (solar battery sheet), do filled type diffusion.The high temperature dispersing furnace boiler tube adopted due to prior art is usually comparatively large, and in stove, the temperature difference is large, and diffusion effect is inconsistent, causes the opto-electronic conversion performance of solar battery sheet inconsistent.In addition on the one hand, because the inhomogeneities of temperature effect causes PN junction depth on solar battery sheet cell piece inconsistent, after printing, the difficulty of high temperature sintering is very large.
Summary of the invention
The object of the invention is the defect overcoming prior art, the field strength diffusion method of shorter, the better solar battery sheet of diffusion effect a kind of diffusion time is provided.
For achieving the above object, the invention provides a kind of method of diffusion of solar battery sheet, it is characterized in that, comprise the following steps: the solar battery sheet be loaded on the graphite boat that can discharge is put into high temperature dispersing furnace, be provided with the electrode for high-frequency discharge in described high temperature dispersing furnace, described graphite boat is connected with described electrode; By temperature to 850 DEG C in described high temperature dispersing furnace; Phosphine, oxygen and nitrogen is passed in high temperature dispersing furnace, wherein the flow that passes into of phosphine is 0.5 ~ 1L/min, the flow that passes into of oxygen is 0.5 ~ 1L/min, and the flow that passes into of nitrogen is 5 ~ 10L/min, and automatically controls described High temperature diffusion furnace pressure at 170Pa; Apply high frequency electric source by graphite boat described in described electrode pair, described graphite boat is discharged to solar battery sheet, and the discharge power of described high frequency electric source is 3000W ~ 5000W, and discharge time, 120s, spread at the end of electric discharge.
Preferably, described high temperature dispersing furnace adopts the PEVCD through resistance to elevated temperatures repacking, namely HPECVD(High temperature ion body strengthens chemical vapour deposition (CVD)) equipment, being diffused in the reative cell of HPEVCD equipment of solar battery sheet is carried out, and described graphite boat is connected with the electrode of described HPEVCD.
Field strength diffusion method of the present invention is adopted to spread solar battery sheet, have the following advantages: owing to adopting field intensity diffusion, under identical circumstances, atom obtains huge external force under the effect of electric field, molecule does directed accelerated motion, substantially increase diffusion effect, diffusion time significantly shortens, the unit interval output of diffusion significantly improves, owing to spreading under electric field action, the junction depth consistency of solar battery sheet is very good, sintering difficulty reduces, because diffusion time is short, impurity molecule reduces, diffusing qualities is high, the leakage current of solar battery sheet reduces, conversion efficiency improves.
Accompanying drawing explanation
Fig. 1 is the process schematic representation of the field strength diffusion method of solar battery sheet of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail.
Refer to Fig. 1, the invention provides a kind of method of diffusion of solar battery sheet, it is characterized in that, comprise the following steps: put into HPEVCD(plasma enhanced chemical vapor deposition through resistance to elevated temperatures repacking by being loaded into the solar battery sheet that can discharge on graphite boat 11) reative cell 10 of equipment, the slide glass number of every boat is 252, and solar battery sheet is of a size of 156mm*156mm; Described graphite boat 11 is connected with the electrode of described HPEVCD equipment; By temperature to 850 DEG C in described reative cell 10; In reative cell 10, pass into phosphine, oxygen and nitrogen, wherein the flow that passes into of phosphine is 0.5 ~ 1L/min, and the flow that passes into of oxygen is 0.5 ~ 1L/min, and the flow that passes into of nitrogen is 5 ~ 10L/min, and by the pressure automatic control in reative cell 10 at 170Pa; Apply high frequency electric source by graphite boat 11 described in described electrode pair, make the 11 pairs of solar battery sheet electric discharges of described graphite boat, the discharge power of described high frequency electric source is 3000W ~ 5000W, and discharge time, 120s, spread at the end of electric discharge.
In above step, gas flow, chamber pressure, heating-up temperature and high frequency electric source power are all accurately controlled by computer automatic control system.After having spread, the square resistance of solar battery sheet is 60 Ω ~ 100 Ω, by discharge power size and discharge time length adjustment control cell piece PN junction depth and square resistance.
Compared to prior art, adopt method of diffusion of the present invention to make solar battery sheet, owing to adopting field intensity diffusion, reach following beneficial effect: the photoelectric conversion efficiency of (1) solar battery sheet improves 0.5% ~ 1%; (2) significantly shorten diffusion time, the output of unit interval can improve 3-5 doubly; (3) PN junction depth easily controls, and uniformity is good; (4) solar battery sheet leakage current is little, and parallel resistance increases, and series resistance reduces, and fill factor, curve factor increases.
Above-described embodiment is only for illustrating technical conceive of the present invention and feature; its object is to person skilled in the art can be understood content of the present invention and implement according to this; can not limit the scope of the invention with this; all equivalences done according to Spirit Essence of the present invention change or modify, and all should be encompassed within protection scope of the present invention.
Claims (1)
1. the method for diffusion of a solar battery sheet, it is characterized in that, comprise the following steps: the solar battery sheet be loaded on the graphite boat that can discharge is put into high temperature dispersing furnace, and be provided with the electrode for high-frequency discharge in described high temperature dispersing furnace, described graphite boat is connected with described electrode; By temperature to 850 DEG C in described high temperature dispersing furnace; Phosphine, oxygen and nitrogen is passed in high temperature dispersing furnace, wherein the flow that passes into of phosphine is 0.5 ~ 1L/min, the flow that passes into of oxygen is 0.5 ~ 1L/min, and the flow that passes into of nitrogen is 5 ~ 10L/min, and automatically controls described High temperature diffusion furnace pressure at 170Pa; Apply high frequency electric source by graphite boat described in described electrode pair, described graphite boat is discharged between the two poles of the earth, and the discharge power of described high frequency electric source is 3000W ~ 5000W, and discharge time, 120s, spread at the end of electric discharge; Described high temperature dispersing furnace is HPEVCD equipment, and solar battery sheet spreads in the reative cell of described HPEVCD equipment, and described graphite boat is connected with the electrode of described HPEVCD.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210254322.XA CN102738312B (en) | 2012-07-23 | 2012-07-23 | Field strength diffusion method of solar cell |
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| CN201210254322.XA CN102738312B (en) | 2012-07-23 | 2012-07-23 | Field strength diffusion method of solar cell |
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| CN102738312A CN102738312A (en) | 2012-10-17 |
| CN102738312B true CN102738312B (en) | 2015-07-15 |
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| CN201210254322.XA Expired - Fee Related CN102738312B (en) | 2012-07-23 | 2012-07-23 | Field strength diffusion method of solar cell |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105908260A (en) * | 2016-05-18 | 2016-08-31 | 广东爱康太阳能科技有限公司 | Diffusion furnace for crystalline silicon solar cells |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6207537B1 (en) * | 1998-01-20 | 2001-03-27 | Semiconductor Process Laboratory Co., Ltd. | Method for formation of impurity region in semiconductor layer and apparatus for introducing impurity to semiconductor layer |
| CN101419997A (en) * | 2008-11-28 | 2009-04-29 | 宁波尤利卡太阳能科技发展有限公司 | Producing method for crystalline silicon solar cell PN junction |
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2012
- 2012-07-23 CN CN201210254322.XA patent/CN102738312B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6207537B1 (en) * | 1998-01-20 | 2001-03-27 | Semiconductor Process Laboratory Co., Ltd. | Method for formation of impurity region in semiconductor layer and apparatus for introducing impurity to semiconductor layer |
| CN101419997A (en) * | 2008-11-28 | 2009-04-29 | 宁波尤利卡太阳能科技发展有限公司 | Producing method for crystalline silicon solar cell PN junction |
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Address after: 215234 Jiangsu, Suzhou, Wujiang District, the town of seven, No. 1 Hongqiao Road Applicant after: Suzhou Hengsheng New Energy Co., Ltd. Address before: 215234, No. 1, Hongqiao Road, seven Town, Wujiang, Jiangsu, Suzhou Applicant before: Hengsheng new energy photovoltaic (Suzhou) Technology Co., Ltd. |
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