CN102735324B - Device for measuring micro-vibration amplitude of object through laser single slit-single grating - Google Patents
Device for measuring micro-vibration amplitude of object through laser single slit-single grating Download PDFInfo
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- CN102735324B CN102735324B CN201210156622.4A CN201210156622A CN102735324B CN 102735324 B CN102735324 B CN 102735324B CN 201210156622 A CN201210156622 A CN 201210156622A CN 102735324 B CN102735324 B CN 102735324B
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Abstract
The invention designs a device for measuring the micro-vibration amplitude of an object through laser single slit-single grating. The device comprises a semiconductor laser (1), a single slit (2) and a single grating (3) which are sequentially and coaxially arranged, wherein the slit width of the single slit (2) is 0.5-1.5 mm; the single slit (2) is parallel to the single grating (3); the distance between the single slit (2) and the single grating (3) is 1-5 mm; the single grating (3) is fixed together with a vibrating object (4), so that the vibration direction of the vibrating object (4) is perpendicular to the grating line of the single grating (3) and is parallel to the plane on which the grating line is positioned; and a photoelectric probe (5) is used for receiving diffracted light passing through the single grating (3) and is connected with an oscillograph (6). When the vibrating object vibrates, photoelectric signals are received by the photoelectric probe and shown on the oscillograph, and the amplitude of the vibrating object can be determined according to the shown waveform. The device has the advantages of convenient and quick measurement process, large measurement range and ideal waveform. Thus, the device is a favorable one for measuring the period, frequency and amplitude of micro vibration.
Description
Technical field
The present invention relates to measure the device of the micro-vibration amplitude of object, specifically belong to the device of the micro-vibration amplitude of a kind of laser list seam-mono-grating measuring object.
Background technology
It is that the principle that forms photo-beat by double grating according to Doppler effect is carried out the small amplitude of Accurate Measurement that laser double grating method is measured the micro-Oscillation Amplitude of object, and this experiment need to be done strict adjustment to the depth of parallelism of double grating, two grating spaces need to be done to suitable adjustment.The frequency in the power and signal source to laser also needs to adjust in addition, otherwise, be difficult to recall desirable signal waveform.Sometimes, signal waveform there will be " burr " phenomenon.Can be with and serve error accurate measurement like this.
Summary of the invention
The object of the present invention is to provide the device of a kind of adjustment simple in structure, easy, the highly sensitive micro-vibration amplitude of laser list seam-mono-grating measuring object.
The device of the micro-vibration amplitude of a kind of laser list seam-mono-grating measuring object provided by the invention, comprises semiconductor laser, single seam and monochromatic light grid, and they are coaxial setting successively; Single seam stitching is wide is the preferred 0.8-1.2mm of 0.5-1.5mm(), single seam and monochromatic light grid are parallel and distance between them is the preferred 3mm of 1-5mm(), monochromatic light grid and vibrating object are fixed together, make the direction of vibration of vibrating object vertical with the grid line of monochromatic light grid, and and the plane parallel at grid line place; Photoelectric probe is for receiving the diffraction light (preferably 0 grade ,+1 grade or-1 order diffraction light) by monochromatic light grid, and photoelectric probe is connected with oscillograph.
When measurement: the parallel beam that laser instrument sends is radiated on monochromatic light grid after by single slit diffraction, again there is diffraction in the light by monochromatic light grid, this diffraction light is the stack of single seam and monochromatic light grid diffraction light, diffraction light (preferably 0 grade ,+1 grade or-1 order diffraction light) after stack is radiated in photoelectric probe, and the photo-signal that photoelectric probe receives is presented on oscillograph; When testee vibration, on oscillograph, just can demonstrate waveform, just can determine the amplitude of object vibration according to this waveform.
Diffraction fringe formation beat frequency between the corresponding stage that the different stripeds of vibrating grating and static single seam produce time, by the analysis to beat signal waveform character, we just can record the Oscillation Amplitude of vibrating grating.
If two-beam is respectively:
Photocurrent after stack is:
Wherein ξ is photoelectric conversion factors.ω
0for the original frequency of lasing light emitter, ω
a=ω
0+ ω
dfor light generation Doppler shift.
with
for initial phase.Electrically driven tuning fork is done microvibration with cosine form:
We know that photoelectric detector can not detect optical frequency signal, therefore only have the 4th can be converted into electric signal output in above formula.Electric current is like this:
Just can obtain the amplitude of micro-vibration by the wave number in beat frequency in calculating half period:
Wherein A is vibrating object amplitude, and T is the cycle,
for photo-beat frequency,
represent the number of ripple in T/2; The grating constant n of grating 3
0can be 1/50mm, 1/100mm, 1/300mm, or 1/600mm etc.
The device of the micro-vibration amplitude of laser list seam-mono-grating measuring object of the present invention, has overcome existing laser double grating method and has measured the problems of micro-vibration adjustment aspect, more simple and efficient, measurement range is large, waveform is desirable.It is the good a kind of device of cycle, frequency and amplitude of measuring micro-vibration, has wide practical use in fields such as physical vibration experiment, military projects.
Brief description of the drawings:
The micro-vibration amplitude device of a kind of laser list seam-mono-grating measuring object of Fig. 1 the present invention schematic diagram, in figure: 1-semiconductor laser, the mono-seam of 2-, 3-monochromatic light grid, 4 vibrating objects, 5-photoelectric probe, 6-oscillograph.
The beat pattern of the tuning fork that frequency that what Fig. 2 and Fig. 3 showed is is 102Hz under different dynamics.
Embodiment
The device of the micro-vibration amplitude of a kind of laser list seam-mono-grating measuring object as shown in Figure 1, comprise that power is the semiconductor laser 1 of 3mw, single seam 2 and monochromatic light grid 3, they are coaxial setting successively, singly the seam of seam 2 is wide is 1mm, the grating constant of monochromatic light grid 3: d=1/100mm, distance between single seam 2 and monochromatic light grid 3 is 3mm, single seam 2 is parallel with the grid line of monochromatic light grid 3, the tuning fork 4 of resonance frequency 102Hz is fixed on monochromatic light grid 3, make the direction of vibration of tuning fork 4 vertical with the grid line of monochromatic light grid 3, and and the plane parallel at grid line place; Receive and pass through 0 order diffraction light of monochromatic light grid 3 with laser photoelectricity probe 5, laser photoelectricity probe 5 is connected with oscillograph 6.
When measurement: the parallel beam that laser instrument 1 sends is radiated on monochromatic light grid 3 after stitching 2 diffraction by list, again there is diffraction in the light by monochromatic light grid 3, this diffraction light is the stack of single seam 2 and monochromatic light grid 3 both diffraction lights, diffraction light (0 grade) after stack is radiated in photoelectric probe 5, and the photo-signal that photoelectric probe 5 receives is presented on oscillograph 5; When testee vibration, on oscillograph 5, demonstrate waveform (as Fig. 2), just can determine the amplitude of object vibration according to this waveform.In T/2, the number of ripple is as shown in Figure 2
according to formula:
Can calculate the amplitude A of tuning fork.
The preferred embodiment for the present invention: the diffraction light (selecting+1 grade or-1 grade) after stack is radiated in photoelectric probe 5, and other is with the embodiment shown in Fig. 1.
The beat pattern of the tuning fork that frequency that what Fig. 2 and Fig. 3 showed is is 102Hz under different dynamics.
Claims (4)
1. a device for the micro-vibration amplitude of laser list seam-mono-grating measuring object, is characterized in that, comprises semiconductor laser (1), single seam (2) and monochromatic light grid (3), and they are coaxial setting successively; Singly the seam of seam (2) is wide is 0.5-1.5mm, single seam (2) and monochromatic light grid (3) distance parallel and between them are 1-5mm, monochromatic light grid (3) are fixed together with vibrating object (4), make the direction of vibration of vibrating object (4) vertical with the grid line of monochromatic light grid (3), and and the plane parallel at grid line place; Photoelectric probe (5) is for receiving by the diffraction light of monochromatic light grid (3), and photoelectric probe (5) is connected with oscillograph (6).
2. the device of the micro-vibration amplitude of a kind of laser list seam-mono-grating measuring object as claimed in claim 1, is characterized in that, the described seam that singly stitches (2) is wide is 0.8-1.2mm.
3. the device of the micro-vibration amplitude of a kind of laser list seam-mono-grating measuring object as claimed in claim 1, is characterized in that, described single seam (2) and monochromatic light grid (3) distance parallel and between them are 3mm.
4. the device of the micro-vibration amplitude of a kind of laser list seam-mono-grating measuring object as claimed in claim 1, is characterized in that, described photoelectric probe (5) is for receiving by monochromatic light grid (3) 0 grade, 1 grade of ﹢ or ﹣ 1 order diffraction light.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210156622.4A CN102735324B (en) | 2012-05-21 | 2012-05-21 | Device for measuring micro-vibration amplitude of object through laser single slit-single grating |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210156622.4A CN102735324B (en) | 2012-05-21 | 2012-05-21 | Device for measuring micro-vibration amplitude of object through laser single slit-single grating |
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| Publication Number | Publication Date |
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| CN102735324A CN102735324A (en) | 2012-10-17 |
| CN102735324B true CN102735324B (en) | 2014-07-30 |
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| CN106644038B (en) * | 2017-01-18 | 2023-08-18 | 山东大学 | MOEMS wireless vibration sensor based on comb-shaped grids and working method thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1138082A (en) * | 1966-04-28 | 1968-12-27 | Rolls Royce | Apparatus, e.g. for determining the position of a movable member, and method of using same |
| GB1284641A (en) * | 1970-01-08 | 1972-08-09 | Ferranti Ltd | Improvements relating to measuring apparatus |
| GB1370307A (en) * | 1970-10-23 | 1974-10-16 | Bendix Corp | Apparatus for and method of determinging displacements using moire fringes |
| SU1379613A1 (en) * | 1986-09-24 | 1988-03-07 | Предприятие П/Я Ю-9995 | Fibre-optic strain gauge |
| CN1712904A (en) * | 2005-05-25 | 2005-12-28 | 山西大学 | Displacement sensor with single grating |
| CN101000252A (en) * | 2006-12-01 | 2007-07-18 | 华中科技大学 | Double-raster displacement sensor |
-
2012
- 2012-05-21 CN CN201210156622.4A patent/CN102735324B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1138082A (en) * | 1966-04-28 | 1968-12-27 | Rolls Royce | Apparatus, e.g. for determining the position of a movable member, and method of using same |
| GB1284641A (en) * | 1970-01-08 | 1972-08-09 | Ferranti Ltd | Improvements relating to measuring apparatus |
| GB1370307A (en) * | 1970-10-23 | 1974-10-16 | Bendix Corp | Apparatus for and method of determinging displacements using moire fringes |
| SU1379613A1 (en) * | 1986-09-24 | 1988-03-07 | Предприятие П/Я Ю-9995 | Fibre-optic strain gauge |
| CN1712904A (en) * | 2005-05-25 | 2005-12-28 | 山西大学 | Displacement sensor with single grating |
| CN101000252A (en) * | 2006-12-01 | 2007-07-18 | 华中科技大学 | Double-raster displacement sensor |
Non-Patent Citations (2)
| Title |
|---|
| 陈长鹏，等.测量动光栅瞬时速度的有效方法.《物理实验》.2010,第30卷(第7期), * |
| 黄壮雄,等.激光双光栅法测微小位移中光拍信号波形改进.《大学物理》.2004,第23卷(第4期), * |
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