CN105446051A - Laser acousto-optical scanning method and device thereof - Google Patents
Laser acousto-optical scanning method and device thereof Download PDFInfo
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- CN105446051A CN105446051A CN201511008780.5A CN201511008780A CN105446051A CN 105446051 A CN105446051 A CN 105446051A CN 201511008780 A CN201511008780 A CN 201511008780A CN 105446051 A CN105446051 A CN 105446051A
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- laser
- acousto
- controller
- sound light
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/31—Digital deflection, i.e. optical switching
Abstract
The invention relates to the field of laser scanning and detecting application, in particular to a laser acousto-optical scanning method and a device thereof. According to the method, a mechanical laser deflection mode for traditional laser scanning is abandoned, the audio-optical deflection technology is adopted for enabling laser beams to precisely locate and scan (200-1000)*(200-1000) points within the 5o*5oX-Y plane range, then reflecting signals of all the points are received, and the physical quantity detecting results such as the needed distance and the dynamic graphics change are obtained through processing of a software system. The detecting speed is high, application is wide, and any mechanical motion is avoided in the detecting process.
Description
Technical field
The present invention relates to laser scanning and detect application, specifically a kind of laser acousto-optic scanning method and device thereof.
Background technology
Laser scanning is very general as optical transport in laser application: as shown in Figure 1, and laser labelling adopts the motion of galvanometer by Laser Transmission to (identical with most of laser processing procedure) on the workpiece be labeled; Signal to be launched by the eyeglass rotated or is received by laser communication; Traditional laser scanning is all undertaken by the catoptron of motion, in other words all will be realized by mechanical motion.
Because machinery itself is ponderable, mechanical motion just has inertia problem.The process of a deceleration-stopping-acceleration-deceleration-stopping just being needed when mechanical motion changes direction.Mechanical type beam deflection transmission changes direction fast to realize, and is only improved acceleration; Limited and machinery will bear great impulsive force, this greatly can shorten the serviceable life of machinery.
Summary of the invention
The object of the invention is to overcome above-mentioned deficiency, provide a kind of laser acousto-optic scanning method and device thereof, speed is fast, and purposes is wide, and testing process is without any mechanical motion.
For realizing above-mentioned technical purpose, scheme provided by the invention is: a kind of laser acousto-optic scanning method, comprises the steps.
Step one, selects M
2the pulsed laser of < 1.2 produces laser, wherein M
2it is beam quality factor.
Step 2, carries out two-stage beam deflection by laser beam by acoustooptic deflector.
Step 3, laser beam both sides ± 2.5o scope on vertical beam of light direction of illumination M plane X axle, change the deflection angle of acousto-optic medium to laser by given 200 ~ 1000 the ultrasonic frequency values of the first controller to first sound light deflector, obtain 200 ~ 1000 corresponding illuminated laser spot.
Step 4, closely locating to calibrate the spacing on M plane X axle between 200 ~ 1000 illuminated laser spot, makes apart from equal.
Step 5, in vertical beam of light direction of illumination M plane Y-axis laser beam up and down ± 2.5o scope, change acousto-optic medium to the deflection angle of laser by given 200 ~ 1000 the ultrasonic frequency values of second controller to second sound light deflector according to the mode of step 3, step 4 to calibrate, namely obtain (200 ~ 1000) * (200 ~ 1000) individual laser beam accurate location scanning point in 5o*5oX-Y planar range.
And, receive the reflected signal of the accurate location scanning point of (200 ~ 1000) * (200 ~ 1000) individual laser beam in 5o*5oX-Y planar range, by measuring the time of each analyzing spot feedback and calculating the distance obtaining each analyzing spot and Laser emission place in sweep limit in conjunction with the steady state value of the light velocity, finally by software modeling formation physics measurements.
And, in the scanning of Measuring Time section continuous positioning, receive reflected signal, by the time of measuring unit's timing node each analyzing spot feedback and the steady state value in conjunction with the light velocity calculates the distance obtaining each analyzing spot and Laser emission place in sweep limit, the physical quantity result of unit interval node is formed by software modeling, after the physical quantity result of unit time node being gathered, obtain the physical quantity testing results such as the motion graphics change in Measuring Time section.
The present invention also provides the device of a kind of laser acousto-optic scanning of application of aforementioned method, comprise laser instrument, acoustooptic deflector, controller, analyzing spot correcting unit, laser firing signals monitoring and reflected signal receiving and analyzing processing unit, display and main control computer, wherein laser instrument, controller, analyzing spot correcting unit, laser firing signals monitoring all connect with main control computer signal with reflected signal receiving and analyzing processing unit, the result after the computing of display display main control computer; Described acoustooptic deflector and controller respectively have two, be respectively the first sound light deflector controlled by the first controller, the second sound light deflector controlled by second controller, first sound light deflector and second sound light deflector are all perpendicular to the laser beam that laser instrument sends, and mutual quadrature arrangement.
And the first controller controls and first sound light deflector, second controller control and second sound light deflector all make laser beam in the different angle of 5o scope intrinsic deflection 200 ~ 1000; Analyzing spot correcting unit to make between laser beam 200 ~ 1000 point of irradiation consecutive point level or vertical range equal.
And the feature of laser firing signals monitoring and reflected signal analysis and processing unit monitoring record laser firing signals, receive reflected signal, analyzing and processing draws corresponding physical quantity.
The present invention has abandoned the mechanical type laser deflection mode of conventional laser scanning, acoustooptic deflection technology is adopted to make laser beam accurate location scanning 200 ~ 1000*200 ~ 1000 point in 5o*5oX-Y planar range, speed is fast, and purposes is wide, and testing process is without any mechanical motion.
Accompanying drawing explanation
Fig. 1 is conventional laser mark machining sketch chart.
Fig. 2 is laser acousto-optic scanning Method And Principle figure of the present invention.
Fig. 3 is the fundamental diagram of acoustooptic deflector.
Fig. 4 is the fundamental diagram of laser acousto-optic scanning device of the present invention.
Fig. 5 is the working timing figure of laser acousto-optic scanning device of the present invention.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
Acoustooptic modulation technology is generally applied in continuous wave laser, and to improve the instantaneous power of middle-size and small-size continuous wave laser, this technology is called acousto-optic Q modulation; Acoustooptic deflection is then utilize acousto-optic interaction to control the laser beam direction of propagation; The principle of the two is all acoustooptic diffraction effect.
The present embodiment provides a kind of laser acousto-optic scanning method, as shown in Figure 2, comprises the steps.
Step one, selects M
2the pulsed laser of < 1.2 produces laser, wherein M
2it is beam quality factor.
Step 2, carries out two-stage beam deflection by laser beam by acoustooptic deflector.
Step 3, laser beam both sides ± 2.5o scope on vertical beam of light direction of illumination M plane X axle, change the deflection angle of acousto-optic medium to laser by given 200 ~ 1000 the ultrasonic frequency values of the first controller to first sound light deflector, obtain 200 ~ 1000 corresponding illuminated laser spot.
Step 4, closely locating to calibrate the spacing on M plane X axle between 200 ~ 1000 illuminated laser spot, makes apart from equal.
Step 5, in vertical beam of light direction of illumination M plane Y-axis laser beam up and down ± 2.5o scope, change acousto-optic medium to the deflection angle of laser by given 200 ~ 1000 the ultrasonic frequency values of second controller to second sound light deflector according to the mode of step 3, step 4 to calibrate, namely obtain (200 ~ 1000) * (200 ~ 1000) individual laser beam accurate location scanning point in 5o*5oX-Y planar range.
Further, receive the reflected signal of the accurate location scanning point of (200 ~ 1000) * (200 ~ 1000) individual laser beam in 5o*5oX-Y planar range, by measuring the time of each analyzing spot feedback and calculating the distance obtaining each analyzing spot and Laser emission place in sweep limit in conjunction with the steady state value of the light velocity, finally by software modeling formation physics measurements.
Further, in the scanning of Measuring Time section continuous positioning, receive reflected signal, by the time of measuring unit's timing node each analyzing spot feedback and the steady state value in conjunction with the light velocity calculates the distance obtaining each analyzing spot and Laser emission place in sweep limit, the physical quantity result of unit interval node is formed by software modeling, after the physical quantity result of unit time node being gathered, obtain the physical quantity testing results such as the motion graphics change in Measuring Time section.
The present embodiment also provides the device of a kind of laser acousto-optic scanning of application of aforementioned method, comprise laser instrument, acoustooptic deflector, controller, analyzing spot correcting unit, laser firing signals monitoring and reflected signal receiving and analyzing processing unit, display and main control computer, wherein laser instrument, controller, analyzing spot correcting unit, laser firing signals monitoring all connect with main control computer signal with reflected signal receiving and analyzing processing unit, the result after the computing of display display main control computer; Described acoustooptic deflector and controller respectively have two, be respectively the first sound light deflector controlled by the first controller, the second sound light deflector controlled by second controller, first sound light deflector and second sound light deflector are all perpendicular to the laser beam that laser instrument sends, and mutual quadrature arrangement.
Further, the first controller controls and first sound light deflector, second controller control and second sound light deflector all make laser beam in the different angle of 5o scope intrinsic deflection 200 ~ 1000; Analyzing spot correcting unit to make between laser beam 200 ~ 1000 point of irradiation consecutive point level or vertical range equal.
Further, the feature of laser firing signals monitoring and reflected signal analysis and processing unit monitoring record laser firing signals, receive reflected signal, analyzing and processing draws corresponding physical quantity.
The principle of work of acoustooptic deflector as shown in Figure 3, after electroacoustic transducer powers up, by ultrasound wave feed-in acousto-optic medium, sound wave is dilatational wave, the refractive index generating period change of acousto-optic medium, the light wave propagate at an angle, is equivalent to a phase grating to relative sound wave direction.Light wave generation diffraction in ultrasonic field, changes the direction of propagation, (Here it is acoustooptic diffraction effect).Widely used is Bragg diffraction, incident light I
ia part be offset to the direction of Bragg angle Ib.Bias angle theta B is determined by bragg's formula: 2 λ sSin θ
b=λ
0/ n=λ.Diffraction efficiency I
b(L)/I
i(0)=Sin
2(η L)=sin
2(
),
In formula, P is ultrasonic power, and M is acousto-optic medium quality factor, M=n6p2/ ρ VS3.n, and p, ρ represent the refractive index of material respectively, photoelastic coefficient and density.L/h is electroacoustic transducer length breadth ratio, λ
0for vacuum wavelength.
Acoustooptic deflector changes the direction of diffraction light by changing frequency of sound wave, thus controls deflection angle.
Bragg's formula: 2 λ sSin θ
b=λ
0/ n
Sinθ
B=λ
0/2nλs
θ
bbragg angle is general very little, can be written as
θ
B≈λ
0/2nλs≈λ
0fs/2nVs
The angle (deflection angle) of diffraction light and incident light equals Bragg angle θ
b2 times
θ=λ
0fs/nVs
As can be seen from the above equation: change hyperacoustic frequency f s, just can change its deflection angle theta, thus reach the object controlling direction of beam propagation.
As shown in Figure 4, work schedule as shown in Figure 5 for workflow.Concrete steps are as follows:
1 starts to measure;
2 lattice scanning units are to 1-1 point;
3 laser instruments launch a light pulse;
4 range findings, record;
5 lattice scanning units are to 1-2 point;
6 laser instruments launch a light pulse;
7 range findings, record;
8 lattice scanning units are to 1-3 point;
…
* * 1 lattice scanning unit is to 200 ~ 1000*200 ~ 1000 point;
* * 2 laser instruments launch a light pulse;
* * 3 find range, record;
* * 4 height of formation figure.
Phase sequence range finding is the range finding determining a little lattice scanning unit one.FPGA records this some distance, after all scan, generates point apart from an array when 200 ~ 1000 × 200 ~ 1000, can height of formation figure through process, acquisition measurement data.After determining the distance range measured during for finding range, the frequency of setting laser pulse.If allow to average as repetitive measurement, improve precision.
System clock, frequency is higher, and relative accuracy is higher.Reduce the error brought of laser instrument instability with two avalanche photodetectors.This detector uses pipe.Guaranteed performance is consistent.
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvement or distortion, these improve or distortion also should be considered as protection scope of the present invention.
Claims (6)
1. a laser acousto-optic scanning method, comprises the steps:
Step one, selects M
2the pulsed laser of < 1.2 produces laser, wherein M
2it is beam quality factor;
Step 2, carries out two-stage beam deflection by laser beam by acoustooptic deflector;
Step 3, laser beam both sides ± 2.5o scope on vertical beam of light direction of illumination M plane X axle, change the deflection angle of acousto-optic medium to laser by given 200 ~ 1000 the ultrasonic frequency values of the first controller to first sound light deflector, obtain 200 ~ 1000 corresponding illuminated laser spot;
Step 4, closely locating to calibrate the spacing on M plane X axle between 200 ~ 1000 illuminated laser spot, makes apart from equal;
Step 5, in vertical beam of light direction of illumination M plane Y-axis laser beam up and down ± 2.5o scope, change acousto-optic medium to the deflection angle of laser by given 200 ~ 1000 the ultrasonic frequency values of second controller to second sound light deflector according to the mode of step 3, step 4 to calibrate, namely obtain (200 ~ 1000) * (200 ~ 1000) individual laser beam accurate location scanning point in 5o*5oX-Y planar range.
2. a kind of laser acousto-optic scanning method according to claim 1, it is characterized in that: the reflected signal receiving the accurate location scanning point of (200 ~ 1000) * (200 ~ 1000) individual laser beam in 5o*5oX-Y planar range, by measuring the time of each analyzing spot feedback and calculating the distance obtaining each analyzing spot and Laser emission place in sweep limit in conjunction with the steady state value of the light velocity, finally by software modeling formation physics measurements.
3. a kind of laser acousto-optic scanning method according to claim 2, it is characterized in that: in the scanning of Measuring Time section continuous positioning, receive reflected signal, by the time of measuring unit's timing node each analyzing spot feedback and the steady state value in conjunction with the light velocity calculates the distance obtaining each analyzing spot and Laser emission place in sweep limit, the physical quantity result of unit interval node is formed by software modeling, after the physical quantity result of unit time node being gathered, obtain the physical quantity testing results such as the motion graphics change in Measuring Time section.
4. a laser acousto-optic scanning device, it is characterized in that: comprise laser instrument, acoustooptic deflector, controller, analyzing spot correcting unit, laser firing signals monitoring and reflected signal receiving and analyzing processing unit, display and main control computer, wherein laser instrument, controller, analyzing spot correcting unit, laser firing signals monitoring all connect with main control computer signal with reflected signal receiving and analyzing processing unit, the result after the computing of display display main control computer; Described acoustooptic deflector and controller respectively have two, be respectively the first sound light deflector controlled by the first controller, the second sound light deflector controlled by second controller, first sound light deflector and second sound light deflector are all perpendicular to the laser beam that laser instrument sends, and mutual quadrature arrangement.
5. a kind of laser acousto-optic scanning device according to claim 4, is characterized in that: the first controller controls and first sound light deflector, second controller control and second sound light deflector all make laser beam in the different angle of 5o scope intrinsic deflection 200 ~ 1000; Analyzing spot correcting unit to make between laser beam 200 ~ 1000 point of irradiation consecutive point level or vertical range equal.
6. a kind of laser acousto-optic scanning device according to claim 4, is characterized in that: the feature of laser firing signals monitoring and reflected signal analysis and processing unit monitoring record laser firing signals, receive reflected signal, analyzing and processing draws corresponding physical quantity.
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Cited By (7)
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---|---|---|---|---|
CN106839991A (en) * | 2017-04-11 | 2017-06-13 | 中国工程物理研究院激光聚变研究中心 | It is applied to the laser scanning device and Laser Scanning of three-dimensional scenic measurement |
CN108716894A (en) * | 2018-04-04 | 2018-10-30 | 杭州电子科技大学 | A kind of non-mechanical laser three-dimensional scanning system based on acousto-optic deflection device |
CN109298409A (en) * | 2018-11-30 | 2019-02-01 | 南京理工大学 | The laser three-dimensional imaging radar and its imaging method of acousto-optic and mechanical compound scan |
CN109948802A (en) * | 2019-03-22 | 2019-06-28 | 清华大学 | A kind of addressing control system |
CN110133940A (en) * | 2019-05-20 | 2019-08-16 | 中国电子科技集团公司第二十六研究所 | A kind of acousto-optic deflection device device improving laser scanning angle |
CN112840202A (en) * | 2018-10-17 | 2021-05-25 | 科磊股份有限公司 | High efficiency illumination profiling for scatterometry overlay |
US11513418B2 (en) | 2019-03-22 | 2022-11-29 | Tsinghua University | Addressing system, addressing apparatus and computing apparatus |
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106839991A (en) * | 2017-04-11 | 2017-06-13 | 中国工程物理研究院激光聚变研究中心 | It is applied to the laser scanning device and Laser Scanning of three-dimensional scenic measurement |
CN106839991B (en) * | 2017-04-11 | 2023-08-04 | 中国工程物理研究院激光聚变研究中心 | Laser scanning device and laser scanning method applied to three-dimensional scene measurement |
CN108716894A (en) * | 2018-04-04 | 2018-10-30 | 杭州电子科技大学 | A kind of non-mechanical laser three-dimensional scanning system based on acousto-optic deflection device |
CN108716894B (en) * | 2018-04-04 | 2020-04-28 | 杭州电子科技大学 | Non-mechanical laser three-dimensional scanning system based on acousto-optic deflector |
CN112840202A (en) * | 2018-10-17 | 2021-05-25 | 科磊股份有限公司 | High efficiency illumination profiling for scatterometry overlay |
CN109298409A (en) * | 2018-11-30 | 2019-02-01 | 南京理工大学 | The laser three-dimensional imaging radar and its imaging method of acousto-optic and mechanical compound scan |
CN109948802A (en) * | 2019-03-22 | 2019-06-28 | 清华大学 | A kind of addressing control system |
CN109948802B (en) * | 2019-03-22 | 2020-12-22 | 清华大学 | Addressing control system |
US11513418B2 (en) | 2019-03-22 | 2022-11-29 | Tsinghua University | Addressing system, addressing apparatus and computing apparatus |
CN110133940A (en) * | 2019-05-20 | 2019-08-16 | 中国电子科技集团公司第二十六研究所 | A kind of acousto-optic deflection device device improving laser scanning angle |
CN110133940B (en) * | 2019-05-20 | 2022-08-05 | 中国电子科技集团公司第二十六研究所 | Acousto-optic deflector device for improving laser scanning angle |
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